• Title/Summary/Keyword: Argon plasma

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Study of Sheath Dynamics in Plasma Source Ion Implantation (플라즈마 이온주입에서 쉬스 동역학에 관한 연구)

  • Kim, G.H.;Cho, C.H.;Choi, Y.W.;Lee, H.S.;Rim, G.H.;Nikiforov, S.
    • Proceedings of the KIEE Conference
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    • 1998.07e
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    • pp.1797-1799
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    • 1998
  • Plasma source ion implantation(PSII) is a non-line-of-sight technique for surface modification of materials which is effective for non-planar targets. A apparatus of 30kV PSII is established and plasma characteristics are diagnosed by using a Langmuir probe. A spherical target is immersed in argon plasma and biased negatively by a series of high voltage pulses. Sheath evolution is measured by using a Langmuir probe and compared with the result of computer simulations.

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Measurement of plasma temperature in hollow cathode discharge

  • Lee, Jun-Hoi;Yoon, Man-Young;Kim, Song-Kang;Park, Jae-Jun;Jeon, Byung-Hoon;Woo, Young-Dug
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.11a
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    • pp.488-491
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    • 2002
  • We report the observation of line shapes in the optogalvanic spectrum, which are different from those of absorption, for transitions origination from the $3P_2$ ($1s_5$ in Paschen notation) metastable level of argon. The OG line shapes resemble those of absorption and be used to diagnose the characteristics of the discharge plasma. The measured plasma temperatures of Ar hollow cathode discharge for several metal cathodes are about 620~780K at discharge current of 7~10mA.

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Fundamental Study on the Weld Defects and Its Real-time Monitoring Method (레이저 용접시 용접결함의 실시간 모니터링법 개발에 관한 연구)

  • 김종도
    • Journal of Welding and Joining
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    • v.20 no.1
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    • pp.26-33
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    • 2002
  • This study was undertaken to obtain the fundamental knowledges on the weld deflects and it's realtime monitoring method. The paper describes the results of high speed photography, acoustic emission (AE) detection and plasma light emission (LE) measurements during $CO_2$ laser welding of STS 304 stainless steel and A5083 aluminum alloy in different welding condition. The characteristic frequencies of plasma and keyhole fluctuations at different welding speed and shield gases were measured and compared with the results of Fourier analyses of temporal AE and LE spectra, and they had considerably good agreement with keyhole and plasma fluctuation. Namely, the low frequency peaks of AE and LE shifted to higher frequency range with the welding speed increase, and leer the argon shield gas it was higher than that in helium and nitrogen gases. The low frequencies dominating in fluctuation spectra of LE probably reflect keyhole opening instability. It is possible to monitor the weld bead deflects by analyzing the acoustic and/or plasma light emission signals.

Effect of HF and Plasma Treated Glass Surface on Vapor Phase-Polymerized Poly(3,4-ethylenedioxythiophene) Thin Film : Part I

  • Lee, Joonwoo;Kim, Sungsoo
    • Journal of Integrative Natural Science
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    • v.6 no.4
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    • pp.211-214
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    • 2013
  • In this study, in order to investigate how consecutive treatments of glass surface with HF acid and water vapor/Ar plasma affect the quality of 3-aminopropyltriethoxysilane self-assembled monolayer (APS-SAM), poly(3,4-ethylenedioxythiophene) (PEDOT) thin films were vapor phase-polymerized immediately after spin coating of FeCl3 and poly-urethane diol-mixed oxidant solution on the monolayer surfaces prepared at various treatment conditions. For the film characterization, various poweful tools were used, e.g., FE-SEM, an optical microscope, four point probe, and a contact angle analyzer. The characterization revealed that HF treatment is not desirable for the synthesis of a high quality PEDOT thin film via vapor phase polymerization method. Rather, sole treatment with plasma noticeably improved the quality of APS-SAM on glass surface. As a result, a highly dense and smooth PEDOT thin film was grown on uniform oxidant film-coated APS monolayer surface.

A Study on the Carbonization and Strengthening of PAN Fiber by Microwave Plasma (마이크로웨이브 플라즈마를 이용한 탄화공정 및 PAN fiber의 강도 향상에 관한 연구)

  • Choi, Ji-Sung;Joo, Jung-Hoon;Lee, Hun-Su
    • Journal of the Korean institute of surface engineering
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    • v.45 no.2
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    • pp.89-94
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    • 2012
  • A study to replace a high temperature thermal carbonization process with microwave plasma process is carried for PAN fiber as a starting material. Near atmospheric pressure microwave plasma (1 Torr~45 Torr) was used to control to get the fiber temperature up to $1,000^{\circ}C$. Even argon is an inert gas, its plasma state include high internal energy particles; ion (15.76 eV) and metastable (11.52 eV). They are very effective to lower the necessary thermal temperature for carbonization of PAN fiber and the resultant thermal budget. The carbonization process was confirmed by both EDS (energy dispersive spectroscopy) of plasma treated fibers and OES (optical emission spectroscopy) during processing step as a real time monitoring tool. The same trend of decreasing oxygen content was observed in both diagnostic methods.

Interfacial Adhesion of Silk/PLA Biocomposites by Plasma Surface Treatment (플라즈마 표면처리에 의한 Silk/PLA 바이오복합재료의 계면접착)

  • Chu, Bo Young;Kwon, Mi Yeon;Lee, Seung Goo;Cho, Donghwan;Park, Won Ho;Han, Seong Ok
    • Journal of Adhesion and Interface
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    • v.5 no.4
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    • pp.9-16
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    • 2004
  • Silk fibers were subjected to argon and ethylene plasma treatments in order to improve the interfacial adhesion with polylactic acid (PLA). After the plasma surface treatment, the surface morphology and surface adhesion of silk fibers to the PLA resin were largely changed. Various plasma treatment conditions were used in this work: 10, 25, 50, 100 and 150 W of electric power, 1, 3, 5, 7 and 10 minutes of treatment time, and 10 and 50 sccm of a gas flow rate. The interfacial shear strength of plasma-treated Silk/PLA biocomposites was measured by a single fiber micro-droplet debonding test method. The result provided an optimal plasma treatment condition to obtain the improved interfacial adhesion in the Silk/PLA biocomposites.

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Study on Argon Metastable Density in ICP by Using Laser Induced Fluoresce

  • Seo, Byeong-Hun;Yu, Sin-Jae;Kim, Jeong-Hyeong;Seong, Dae-Jin;Jang, Hong-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.219.2-219.2
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    • 2014
  • Characteristics of Argon metastable density with electron density have been studied by using Laser induced fluorescence (LIF) in ICP. Two different evolutions of measured metastable densities with electron density depending on a measurement position are addressed. The experimental result is explained by using a zero dimensional global model and is due to electron kinetic properties in the positions that can be seen from electron energy probability functions measured by Langmuir probe. The underlying physics on metastable density with electron density and an experimental method of LIF are presented in detail.

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Ti-based Quasicrystal Layers Produced by Plasma Thermal Spraying

  • Takasaki, Akito;Uematsu, Susumu;Kelton, K.F.
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 2006.09a
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    • pp.51-52
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    • 2006
  • [ $Ti_{45}Zr_{38}Ni_{17}$ ] powders were thermally sprayed onto mild steel substrates in air and under a reduced pressure of argon. Several oxides were formed after thermally-spraying the mechanically-alloyed powders in air. After spraying in a reduced pressure of argon, the coating layers obtained from the gently mixed powders consisted of the elemental metals, but an amorphous phase primarily appeared in the thermally-sprayed mechanically-alloyed powders, which transformed into the icosahedral quasicrystal phase and a minor $Ti_2Ni-type$ crystal phase after annealing at 828 K. The Vickers hardness and the contact angle with pure water for the quasicrystal layers were about 7 GPa and $92^{\circ}$ respectively.

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A Two-dimensional Steady State Simulation Study on the Radio Frequency Inductively Coupled Argon Plasma

  • Lee, Ho-Jun;Kim, Dong-Hyun;Park, Chung-Hoo
    • KIEE International Transactions on Electrophysics and Applications
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    • v.2C no.5
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    • pp.246-252
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    • 2002
  • Two-dimensional steady state simulations of planar type radio frequency inductively coupled plasma (RFICP) have been performed. The characteristics of RFICP were investigated in terms of power transfer efficiency, equivalent circuit analysis, spatial distribution of plasma density and electron temperature. Plasma density and electron temperature were determined from the equations of ambipolar diffusion and energy conservation. Joule heating, ionization, excitation and elastic collision loss were included as the source terms of the electron energy equation. The electromagnetic field was calculated from the vector potential formulation of ampere's law. The peak electron temperature decreases from about 4eV to 2eV as pressure increases from 5 mTorr to 100 mTorr. The peak density increases with increasing pressure. Electron temperatures at the center of the chamber are almost independent of input power and electron densities linearly increase with power level. The results agree well with theoretical analysis and experimental results. A single turn, edge feeding antenna configuration shows better density uniformity than a four-turn antenna system at relatively low pressure conditions. The thickness of the dielectric window should be minimized to reduce power loss. The equivalent resistance of the system increases with both power and pressure, which reflects the improvement of power transfer efficiency.

Inactivation of Campylobacter jejuni using Radio-frequency Atmospheric Pressure Plasma on Agar Plates and Chicken Hams

  • Kim, Joo-Sung;Lee, Eun-Jung;Cho, Eun-Ah;Kim, Yun-Ji
    • Food Science of Animal Resources
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    • v.33 no.3
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    • pp.317-324
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    • 2013
  • Radio-frequency driven atmospheric pressure plasma using argon gas was studied in the inactivation of Campylobacter jejuni in order to investigate its applicability. First, the inactivation study was conducted on an agar surface. C. jejuni NCTC11168 was reduced by more than 7 Log CFU after an 88 s treatment. Another strain, ATCC49943, was studied; however, the inactivation was less efficient, with a 5 Log CFU reduction after a 2 min treatment. Then, chicken breast ham was studied at the $10^6$ CFU inoculation level. The inactivation efficiency was much lower for both strains compared to that on the agar plates. C. jejuni NCTC11168 and ATCC49943 were reduced by 3 Log CFU after a 6 min treatment and by 1.5 Log CFU after a 10 min treatment, respectively. The scanning electron microscopy analysis indicated that C. jejuni cells were deformed or transformed into coccoid form under the plasma treatment. During the plasma treatment, the temperature of the samples did not rise above $43^{\circ}C$, suggesting that heat did not contribute to the inactivation. Meanwhile, water activity significantly decreased after a 10 min treatment (p<0.05). This study conveyed that radio-frequency atmospheric pressure plasma can effectively inactivate C. jejuni with strain-specific variation.