Study on Argon Metastable Density in ICP by Using Laser Induced Fluoresce

Characteristics of Argon metastable density with electron density have been studied by using Laser induced fluorescence (LIF) in ICP. Two different evolutions of measured metastable densities with electron density depending on a measurement position are addressed. The experimental result is explained by using a zero dimensional global model and is due to electron kinetic properties in the positions that can be seen from electron energy probability functions measured by Langmuir probe. The underlying physics on metastable density with electron density and an experimental method of LIF are presented in detail.