• 자원리싸이클링
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• 제26권6호
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• pp.3-9
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• 2017

본 연구에서는 anode로 Kroll 공정 처리된 Ti 스폰지를 사용하여 아크 전류, 아크 전압, 플라즈마 가스 종류에 따른 플라즈마 아크 재용해 거동을 조사하였다. 진공펌프의 토출 압력 범위($200{\sim}300kgf/cm^2$)에서는 토출 압력 증가에 따라 주어진 아크 길이에서 아크 전압이 크게 달라지지 않았다. 이것은 작업하는 동안 진공챔버내 압력이 거의 변화하지 않고, 주어진 분위기 압력을 잘 유지함을 의미한다. 여러가지 아크 전류 조건(700~900A)에서, 아크 전류 증가에 따라 아크 전압이 약간 증가하였고, anode 재료변화에 대한 효과도 이전 연구결과와 비교하였다. 분위기 가스가 Ar에서 He으로 변경되는 경우에는 정상상태의 출력이 2배 정도 향상되는 효과가 관찰되었다. 플라즈마 아크 장치의 출력 증가는 Ti 스폰지의 재용해 속도 증가와 함께 잉곳 표면도 양호해졌다. New 스크랩인 타이타늄과 old 스크랩인 지르코늄 합금을 플라즈마 아크 재용해한 결과, 매우 양호한 표면을 갖는 잉곳을 제조할 수 있었다.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2003년도 추계 학술대회논문집
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• pp.212-218
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• 2003

In order to analyze the heat transfer phenomena in the plasma flames, a mathematical model describing heat and fluid flow in an electric arc has been developed and used to predict heat transfer from the arc to the steel bath in a DC Electric Arc Furnace. The arc model takes the separate contributions to the heat transfer from each involved mechanism into account, i.e. radiation, convection and energy transported by electrons. The finite volume method and a SIMPLE algorithm are used for solving the governing MHD equations, i.e., conservation equations of mass, momentum, and energy together with the equations describing a $\kappa-\epsilon$ model for turbulence. The model predicts heat transfer for different currents and arc lengths. Finally these calculation results can be used as a useful insight into plasma phenomena of the industrial-scale electric arc furnace. From these results, it can be concluded that higher arc current and longer arc length give high heat transfer.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2015년도 추계학술대회 논문집
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• pp.183-183
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• 2015

Arc in plasma processing chamber results in high current discharge marks and particles on wafers, but it is hard to identify or observe it during the proc ess. In this paper, we report the observations of plasma arc s during various plasma proc esses through a non-invasive optic al plasma monitoring system (OPMS) devised for the in-situ detec tion of abnormal discharge.

• 한국연소학회지
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• 제11권2호
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• pp.15-21
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• 2006

Characteristics of a plasma reactor for partial oxidation of methane, especially focused on the role and effectiveness of plasma chemistry, are investigated. Partial oxidation of methane is investigated using a rotating arc which is a three dimensional version of a typical gliding arc. Three different modes of operation were found. Each mode shows different reforming performance. The reason for the difference is due to the difference in relative role of thermal and plasma chemistry in overall process. A mode with high temperature results higher methane conversion and hydrogen selectivity in contrast to the mode with lower temperature where poor methane conversion and higher selectivity of $C_2$ species are observed. In this way, we can confirm that by controlling characteristic of process or controlling relative strength of plasma chemistry and thermal chemistry, it is possible to map an optimal condition of reforming process by rotating arc.

• 한국건축시공학회지
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• 제23권5호
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• pp.559-570
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• 2023

건설산업에서 사용되는 구조용 강재의 부식은 산업화로 인해 많은 공격적인 이온이 내포된 대기 환경에서 증가추세에 있다. 따라서 본 연구에서는 아크 및 플라즈마 아크용사로 Al 코팅을 용착하여 Cl^-와 CO₃^2-같은 공격적인 이온을 다량 함유한 Society of Automotive Engineering(SAE) J2334 용액의 모사대기환경에서 그 효과를 비교하였다. 다양한 분석기법으로 코팅 특성과 부식 메커니즘을 고찰하였다. 플라즈마 아크용사로 용착된 Al 코팅은 밀도 있고 균일하면 층층이 적층이 잘 되었고 높은 부착력이 나타났다. 이 공법으로 용착된 Al 코팅을 SAE J2334 용액에 기간별로 침지하여 측정한 개회로전위(OCP)는 아크용사로 용착된 Al 코팅보다 더 양전성(electropositive)한 값을 보여주었다. 플라즈마 아크용사는 총 임피던스가 아크용사보다 높게 나타났다. SAE J2334 용액에 23일 침지하였을 때 플라즈마 아크용사 Al 코팅의 부식속도는 아크용사에 비해 20% 감소하였다.

• Journal of Welding and Joining
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• 제15권6호
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• pp.57-65
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• 1997

A study was undertaken to determine the influence of welding variables such as shielding and plasma gases, torch standoff, travel speed and heat input, etc. on the quality of plasma arc welds in Zircaloy-4 sheet, 2mm thick. Effect of shielding gases and their flow rates on the mechanical properties of Zircaloy-4 welds by plasma arc welding were determined in terms of tensile, bardness and bend tests. The microstructure and fracture surface of Zircaloy-4 welds were investigated by optical and scanning electron microscopies. In addition, the causes of porosity and undercut in plasma arc welds of Zircaloy-4 were also investigated. Zircaloy-4 weld bead width and depth by helium shielding gas showed a wider and deeper than those by argon. It was found that Zircaloy-4 welds with shielding gas of helium did dxhibit a little smoother and uniform weld beads than those with shielding gas of argon. It was also found that the optimum gas flow rates for Zircaloy-4 welding were 0.45l/min for plasma gas with Ar and 4.5 - 6 l/min for shielding gas with He. In addition, there was no big difference in the microstructure and fracture surface of the weld metals made by either Ar shielding gas or He shielding gas.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.96-97
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• 2012

In nitride and oxide film deposition, sputtered metals react with nitrogen or oxygen gas in a vacuum chamber to form metal nitride or oxide films on a substrate. The physical properties of sputtered films (metals, oxides, and nitrides) are strongly influenced by magnetron plasma density during the deposition process. Typical target power densities on the magnetron during the deposition process are ~ (5-30) W/cm2, which gives a relatively low plasma density. The main challenge in reactive sputtering is the ability to generate a stable, arc free discharge at high plasma densities. Arcs occur due to formation of an insulating layer on the target surface caused by the re-deposition effect. One current method of generating an arc free discharge is to use the commercially available Pinnacle Plus+ Pulsed DC plasma generator manufactured by Advanced Energy Inc. This plasma generator uses a positive voltage pulse between negative pulses to attract electrons and discharge the target surface, thus preventing arc formation. However, this method can only generate low density plasma and therefore cannot allow full control of film properties. Also, after long runs ~ (1-3) hours, depends on duty cycle the stability of the reactive process is reduced due to increased probability of arc formation. Between 1995 and 1999, a new way of magnetron sputtering called HIPIMS (highly ionized pulse impulse magnetron sputtering) was developed. The main idea of this approach is to apply short ${\sim}(50-100){\mu}s$ high power pulses with a target power densities during the pulse between ~ (1-3) kW/cm2. These high power pulses generate high-density magnetron plasma that can significantly improve and control film properties. From the beginning, HIPIMS method has been applied to reactive sputtering processes for deposition of conductive and nonconductive films. However, commercially available HIPIMS plasma generators have not been able to create a stable, arc-free discharge in most reactive magnetron sputtering processes. HIPIMS plasma generators have been successfully used in reactive sputtering of nitrides for hard coating applications and for Al2O3 films. But until now there has been no HIPIMS data presented on reactive sputtering in cluster tools for semiconductors and MEMs applications. In this presentation, a new method of generating an arc free discharge for reactive HIPIMS using the new Cyprium plasma generator from Zpulser LLC will be introduced. Data (or evidence) will be presented showing that arc formation in reactive HIPIMS can be controlled without applying a positive voltage pulse between high power pulses. Arc-free reactive HIPIMS processes for sputtering AlN, TiO2, TiN and Si3N4 on the Applied Materials ENDURA 200 mm cluster tool will be presented. A direct comparison of the properties of films sputtered with the Advanced Energy Pinnacle Plus + plasma generator and the Zpulser Cyprium plasma generator will be presented.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2005년도 추계 학술대회논문집
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• pp.311-317
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• 2005

It has been the most progressive interruption technique to use the ablation gas from the surface of PTFE nozzle driven by arc plasma during switching process in $SF_6$ gas circuit breakers. This advanced interruption technique can reduce the required mechanical energy to compress and blow the gas for extinguishing the arc plasma between the electrodes due to using the ablation effect instead. In order to consider the phenomena during calculation of switching process, it is required to confirm the principles of ablation from PTFE nozzle as well as of arc plasma during switching process. In this study, we have calculated the switching process considered the ablation of PTFE nozzle driven by arc plasma using multidisciplinary simulation technique and compared the results with the data without the ablation effect. More $50\%$ difference of pressure rise inside expansion chamber has been found from the results and it should be indispensable for this type of computational work to consider and include the ablation effect of PTFE nozzle. Further study on turbulence and radiation will be followed.

• Journal of Welding and Joining
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• 제11권2호
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• pp.74-85
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• 1993

Effect of Si metal powders addition with the plasma transferred arc(PTA) overlaying process on characteristics of the alloyed layer in aluminum alloy(A5083) has been investigated. The overlaying conditions were 175-250A in plasma arc current, 500mm/min in travel speed, the 5-20g/min in powder feeding rate. Main results obtained are summarized as follows. 1)Sufficient size of molten pool on surface of base metal was required for forming an alloyed layer; in a fixed travel, the formation of alloyed layer with clear and beautiful surface depend upon the plasma arc current and powder feeding rate; the greater plasma arc current and the smaller powder feeding rate were, the better bead was formed. Optimum alloyed conditions by which an excellent alloyed bead obtained was 225A in plasma arc current. PTA process made it possible to form an alloyed layer with up to 67wt% Si. 2)Microstructure in the alloyed layer was in accord with prediction from the Al-Si phase diagram 3)The hardness of the alloyed layer increased in proportion to Si content. 4)As volume fraction of primary Si increased, the specific wearness of the alloyed layer was significantly improved. However, no further improvement was found when the volume fraction was greater than about 30%. 5)Utilizing the PTA process, a crack free alloyed layer with maximum hardness of about Hv 310 could be obtained.

• 연구논문집
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• 통권30호
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• pp.147-157
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• 2000

The filtered vacuum arc source (FVAS), which is adopted by magnetic filtering methode to remove the macro-particle in vacuum arc plasma, was composed of a torus structure with bending angle of 60 degree. The radius of torus was 266 mm, the radius of plasma duct was 80 mm and the total length was 600 mm. The magnet parts were consisted of one permanent magnet, one magnetic yoke and five solenoid magnets. The plasma duct was electrically isolated from the ground so that a bias voltage could be applied. The baffles inside plasma duct were installed in order to prevent the recoil effect of macro-particles. Graphite was used as the cathode material to coat the amorphic diamond film and its diameter was 80 mm. The amorphic diamond film attracts much attention due to its excellent mechanical, optical and tribological properties suitable for wide range of applications. The effects of solenoid magnet in plasma extraction were studied by computer simulation and experiment using Taguchi's method. The source and extraction magnet affected the arc stabilization. The extraction beam current was maximized with low value of the source magnet current and high value of the filtering magnet current. Optimum deposition condition was obtained when the currents of arc discharge, source, extraction, bending, deflection and outlet magnet were 30 A, 1 A, 3 A, 5 A, and 5 A, respectively.