• Resources Recycling
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• v.26 no.6
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• pp.3-9
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• 2017

In this study, plasma arc remelting behaviors according to arc current, arc voltage, and types of plasma gas were investigated using Kroll processed Ti sponges as anode. In the discharge pressure range of vacuum pump ($200{\sim}300kgf/cm^2$), the arc voltage did not vary greatly with the increase of discharge pressure at a given arc length. This means that the pressure in the vacuum chamber during operation hardly changes and the atmospheric pressure maintains. Under various conditions of arc currents (700~900A), the arc voltage slightly increased with arc current. The effects of anode materials and operational variables on the arc length-arc voltage relationship were compared with the results in previous studies. When the atmospheric gas changed from argon to helium, double effect of improvement on the output of the steady state was observed. The increase of output in the plasma arc device was accompanied by an increase in the melting rate of the Ti sponge and the quality of the ingot surface was also improved. The plasma arc remelting of the new scrap titanium and the old scrap zirconium alloy could result in the fabrication of an ingot with high surface quality.

• 한국전산유체공학회:학술대회논문집
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• 2003.08a
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• pp.212-218
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• 2003

In order to analyze the heat transfer phenomena in the plasma flames, a mathematical model describing heat and fluid flow in an electric arc has been developed and used to predict heat transfer from the arc to the steel bath in a DC Electric Arc Furnace. The arc model takes the separate contributions to the heat transfer from each involved mechanism into account, i.e. radiation, convection and energy transported by electrons. The finite volume method and a SIMPLE algorithm are used for solving the governing MHD equations, i.e., conservation equations of mass, momentum, and energy together with the equations describing a $\kappa-\epsilon$ model for turbulence. The model predicts heat transfer for different currents and arc lengths. Finally these calculation results can be used as a useful insight into plasma phenomena of the industrial-scale electric arc furnace. From these results, it can be concluded that higher arc current and longer arc length give high heat transfer.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.11a
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• pp.183-183
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• 2015

Arc in plasma processing chamber results in high current discharge marks and particles on wafers, but it is hard to identify or observe it during the proc ess. In this paper, we report the observations of plasma arc s during various plasma proc esses through a non-invasive optic al plasma monitoring system (OPMS) devised for the in-situ detec tion of abnormal discharge.

• Journal of the Korean Society of Combustion
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• v.11 no.2
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• pp.15-21
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• 2006

Characteristics of a plasma reactor for partial oxidation of methane, especially focused on the role and effectiveness of plasma chemistry, are investigated. Partial oxidation of methane is investigated using a rotating arc which is a three dimensional version of a typical gliding arc. Three different modes of operation were found. Each mode shows different reforming performance. The reason for the difference is due to the difference in relative role of thermal and plasma chemistry in overall process. A mode with high temperature results higher methane conversion and hydrogen selectivity in contrast to the mode with lower temperature where poor methane conversion and higher selectivity of $C_2$ species are observed. In this way, we can confirm that by controlling characteristic of process or controlling relative strength of plasma chemistry and thermal chemistry, it is possible to map an optimal condition of reforming process by rotating arc.

• Journal of the Korea Institute of Building Construction
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• v.23 no.5
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• pp.559-570
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• 2023

The corrosion of structural steel used in the construction industry is increasing due to the industrialization where many aggressive ions released in the atmosphere. Therefore, in the present study Al coating was deposited by arc and plasma arc thermal spray process and compared their effectiveness in simulated weathering condition i.e. Society of Automotive Engineers(SAE) J2334 solution which mostly contain Cl^- and CO₃^2- ions. Different analytical techniques have been used to characterize the coating and draw the corrosion mechanism. The Al coating deposited by plasma arc thermal spray process exhibited uniform, dense and layer by layer deposition resulting higher bond adhesion values. The open circuit potential(OCP) of Al coating deposited this process is exhibited more electropositive values than arc thermal spray process in SAE J2334 solution with immersion periods. The total impedance of plasma arc thermal spray process exhibited higher than arc thermal spray process. The corrosion rate of the plasma arc thermal sprayed Al coating is reduced by 20% compared to arc thermal spray process after 23 days of immersion in SAE J2334 solution.

• Journal of Welding and Joining
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• v.15 no.6
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• pp.57-65
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• 1997

A study was undertaken to determine the influence of welding variables such as shielding and plasma gases, torch standoff, travel speed and heat input, etc. on the quality of plasma arc welds in Zircaloy-4 sheet, 2mm thick. Effect of shielding gases and their flow rates on the mechanical properties of Zircaloy-4 welds by plasma arc welding were determined in terms of tensile, bardness and bend tests. The microstructure and fracture surface of Zircaloy-4 welds were investigated by optical and scanning electron microscopies. In addition, the causes of porosity and undercut in plasma arc welds of Zircaloy-4 were also investigated. Zircaloy-4 weld bead width and depth by helium shielding gas showed a wider and deeper than those by argon. It was found that Zircaloy-4 welds with shielding gas of helium did dxhibit a little smoother and uniform weld beads than those with shielding gas of argon. It was also found that the optimum gas flow rates for Zircaloy-4 welding were 0.45l/min for plasma gas with Ar and 4.5 - 6 l/min for shielding gas with He. In addition, there was no big difference in the microstructure and fracture surface of the weld metals made by either Ar shielding gas or He shielding gas.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.96-97
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• 2012

In nitride and oxide film deposition, sputtered metals react with nitrogen or oxygen gas in a vacuum chamber to form metal nitride or oxide films on a substrate. The physical properties of sputtered films (metals, oxides, and nitrides) are strongly influenced by magnetron plasma density during the deposition process. Typical target power densities on the magnetron during the deposition process are ~ (5-30) W/cm2, which gives a relatively low plasma density. The main challenge in reactive sputtering is the ability to generate a stable, arc free discharge at high plasma densities. Arcs occur due to formation of an insulating layer on the target surface caused by the re-deposition effect. One current method of generating an arc free discharge is to use the commercially available Pinnacle Plus+ Pulsed DC plasma generator manufactured by Advanced Energy Inc. This plasma generator uses a positive voltage pulse between negative pulses to attract electrons and discharge the target surface, thus preventing arc formation. However, this method can only generate low density plasma and therefore cannot allow full control of film properties. Also, after long runs ~ (1-3) hours, depends on duty cycle the stability of the reactive process is reduced due to increased probability of arc formation. Between 1995 and 1999, a new way of magnetron sputtering called HIPIMS (highly ionized pulse impulse magnetron sputtering) was developed. The main idea of this approach is to apply short ${\sim}(50-100){\mu}s$ high power pulses with a target power densities during the pulse between ~ (1-3) kW/cm2. These high power pulses generate high-density magnetron plasma that can significantly improve and control film properties. From the beginning, HIPIMS method has been applied to reactive sputtering processes for deposition of conductive and nonconductive films. However, commercially available HIPIMS plasma generators have not been able to create a stable, arc-free discharge in most reactive magnetron sputtering processes. HIPIMS plasma generators have been successfully used in reactive sputtering of nitrides for hard coating applications and for Al2O3 films. But until now there has been no HIPIMS data presented on reactive sputtering in cluster tools for semiconductors and MEMs applications. In this presentation, a new method of generating an arc free discharge for reactive HIPIMS using the new Cyprium plasma generator from Zpulser LLC will be introduced. Data (or evidence) will be presented showing that arc formation in reactive HIPIMS can be controlled without applying a positive voltage pulse between high power pulses. Arc-free reactive HIPIMS processes for sputtering AlN, TiO2, TiN and Si3N4 on the Applied Materials ENDURA 200 mm cluster tool will be presented. A direct comparison of the properties of films sputtered with the Advanced Energy Pinnacle Plus + plasma generator and the Zpulser Cyprium plasma generator will be presented.

• 한국전산유체공학회:학술대회논문집
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• 2005.10a
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• pp.311-317
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• 2005

It has been the most progressive interruption technique to use the ablation gas from the surface of PTFE nozzle driven by arc plasma during switching process in $SF_6$ gas circuit breakers. This advanced interruption technique can reduce the required mechanical energy to compress and blow the gas for extinguishing the arc plasma between the electrodes due to using the ablation effect instead. In order to consider the phenomena during calculation of switching process, it is required to confirm the principles of ablation from PTFE nozzle as well as of arc plasma during switching process. In this study, we have calculated the switching process considered the ablation of PTFE nozzle driven by arc plasma using multidisciplinary simulation technique and compared the results with the data without the ablation effect. More $50\%$ difference of pressure rise inside expansion chamber has been found from the results and it should be indispensable for this type of computational work to consider and include the ablation effect of PTFE nozzle. Further study on turbulence and radiation will be followed.

• Journal of Welding and Joining
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• v.11 no.2
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• pp.74-85
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• 1993

Effect of Si metal powders addition with the plasma transferred arc(PTA) overlaying process on characteristics of the alloyed layer in aluminum alloy(A5083) has been investigated. The overlaying conditions were 175-250A in plasma arc current, 500mm/min in travel speed, the 5-20g/min in powder feeding rate. Main results obtained are summarized as follows. 1)Sufficient size of molten pool on surface of base metal was required for forming an alloyed layer; in a fixed travel, the formation of alloyed layer with clear and beautiful surface depend upon the plasma arc current and powder feeding rate; the greater plasma arc current and the smaller powder feeding rate were, the better bead was formed. Optimum alloyed conditions by which an excellent alloyed bead obtained was 225A in plasma arc current. PTA process made it possible to form an alloyed layer with up to 67wt% Si. 2)Microstructure in the alloyed layer was in accord with prediction from the Al-Si phase diagram 3)The hardness of the alloyed layer increased in proportion to Si content. 4)As volume fraction of primary Si increased, the specific wearness of the alloyed layer was significantly improved. However, no further improvement was found when the volume fraction was greater than about 30%. 5)Utilizing the PTA process, a crack free alloyed layer with maximum hardness of about Hv 310 could be obtained.

• 연구논문집
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• s.30
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• pp.147-157
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• 2000

The filtered vacuum arc source (FVAS), which is adopted by magnetic filtering methode to remove the macro-particle in vacuum arc plasma, was composed of a torus structure with bending angle of 60 degree. The radius of torus was 266 mm, the radius of plasma duct was 80 mm and the total length was 600 mm. The magnet parts were consisted of one permanent magnet, one magnetic yoke and five solenoid magnets. The plasma duct was electrically isolated from the ground so that a bias voltage could be applied. The baffles inside plasma duct were installed in order to prevent the recoil effect of macro-particles. Graphite was used as the cathode material to coat the amorphic diamond film and its diameter was 80 mm. The amorphic diamond film attracts much attention due to its excellent mechanical, optical and tribological properties suitable for wide range of applications. The effects of solenoid magnet in plasma extraction were studied by computer simulation and experiment using Taguchi's method. The source and extraction magnet affected the arc stabilization. The extraction beam current was maximized with low value of the source magnet current and high value of the filtering magnet current. Optimum deposition condition was obtained when the currents of arc discharge, source, extraction, bending, deflection and outlet magnet were 30 A, 1 A, 3 A, 5 A, and 5 A, respectively.