• Title/Summary/Keyword: Ar plasma treatment

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Surface Modification of TiO2 by Atmospheric Pressure Plasma (대기압 플라즈마를 이용한 TiO2 광촉매의 효율향상을 위한 표면 개질 연구)

  • Cho, S.J.;Jung, C.K.;Kim, S.S.;Boo, J.H.
    • Journal of the Korean Vacuum Society
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    • v.19 no.1
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    • pp.22-27
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    • 2010
  • To improve surface wettability, each sample was treated by atmospheric pressure plasma (APP) using dielectric barrier discharge (DBD) system. Argon and oxygen gases were used for treatment gas to modify the $TiO_2$ surface by APP with RF power range from 50 to 200 W. Water contact angle was decreased from $20^{\circ}$ to $10^{\circ}$ with argon only. However, water contact angle was decreased from $20^{\circ}$ to < $1^{\circ}$ with mixture of argon and oxygen. Water contact angle with $O_2$ plasma was lower than water contact angle with Ar plasma at the same RF power. It seems to be increasing the polar force of $TiO_2$ surface. Also, analysis result of X-ray photoelectron spectra (XPS) shows the increase of intensity of O1s shoulder peak, resulting in increasing of surface wettability by APP. Moreover, each water contact angle increased according to increase past time. However, contact angle increase with plasma treatment was lower than without plasma treatment. Additionally, the efficiency of $TiO_2$ photocatalyst was improved by plasma surface-treatment through the degradation experiment of phenol.

Comparative Studies on Morphology of Low Temperature Ar-Plasma-treated Polymer Surfaces (알곤저온플라즈마처리된 고분자표면의 모폴로지에 대한 비교연구)

  • Seo Eun-Deock
    • Textile Coloration and Finishing
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    • v.16 no.5
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    • pp.35-41
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    • 2004
  • Poly(ethylene terephthalate), polyimide(Kapton), and polypropylene surfaces were modified with argon low temperature plasma by RF glow discharge at 240m Torr, 40W to investigate the surface morphological changes due to the plasma treatment using atomic force microscopy(AFM). Analysis of the AFM images and Ra(average roughness) revealed that the plasma treatment resulted in significant ablation on the surfaces. The morphological changes and surface roughness, however, were different depending on material characteristics such as heat stability, presence of amorphous region, swelling phenomenon, and molecular structure of repeating unit. It was assumed that polypropylene due to its tertiary hydrogen was ablated easily compared to poly(ethylene terephthalate), and that polyimide was more resistant to the ablation than PET due to rigid skeleton of imide and stable phenyl ring structure.

Effect of Plasma Etching and $PdCl_2/SnCl_2$ Catalyzation on the Performance of Electroless Plated Copper Layer (플라즈마 에칭 및 $PdCl_2/SnCl_2$ 촉매조건이 무전해 동도금 피막의 성능에 미치는 영향)

  • 오경화;김동준;김성훈
    • Journal of the Korean Society of Clothing and Textiles
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    • v.27 no.7
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    • pp.843-850
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    • 2003
  • Cu/PET film composites were prepared by electroless copper plating method. In order to improve adhesion between electroless plated Cu layer and polyester (PET) film, the effect of pretreatment conditions such as etching method, mixed catalyst composition were investigated. Chemical etching and plasma treatment increased surface roughness in decreasing order of Ar>HCl>O$_2$>NH$_3$. However, adhesion of Cu layer on PET film increased in the following order: $O_2$<Ar<HCl<NH$_3$. It indicated that appropriate surface roughness and introduction of affinitive functional group with Pd were key factors of improving adhesion of Cu layer. PET film was more finely etched by HCI tolution, resulting in an improvement in adhesion between Cu layer and PET film. Plasma treatment with NH$_3$produced nitrogen atoms on PET film, which enhances chemisorption of Pd$^{2+}$ on PET film, resulting in improved adhesion and shielding effectiveness of Cu layer deposited on the Pd catalyzed surface. Surface morphology of Cu plated PET film revealed that Pd/Sn colloidal particles became more evenly distributed in the smaller size by increasing the molar ratio of PdCl$_2$; SnCl$_2$from 1 : 4 to 1 : 16. With increasing the molar ratio of mixed catalyst, adhesion and shielding effectiveness of Cu plated PET film were increased.d.

A Study on the Electrical Characteristics of Organic Thin Film Transistor, OTFT With Plasma-Treated Gate Insulators (Plasma 처리한 유기 절연층을 갖는 유기 박막 트랜지스터의 전기적 특성 연구)

  • 김연주;박재훈;강성인;최종선
    • Journal of the Korean Vacuum Society
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    • v.13 no.3
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    • pp.99-102
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    • 2004
  • In this work the electrical characteristics of organic thin film transistors with the surface-treated organic gate insulator have been studied. For the surface treatment of gate dielectric, Ar plasma was used. Pentacene and PVP were used as active and dielectric layers respectively. Pentacene was thermally evaporated in vacuum at a pressure of about $10^{-6}$ Torr and at a deposition rate of 0.5 $\AA$/sec. PVP was spin coated and cured at $100^{\circ}C$. before pentacene deposition. organic thin film transistors with surface-treated gate insulators have provided improved operation characteristics.

Interface State Control of Amorphous InGaZnO Thin Film Transistor by Surface Treatment of Gate Insulator (게이트 절연막의 표면처리에 의한 비정질 인듐갈륨징크옥사이드 박막트랜지스터의 계면 상태 조절)

  • Kim, Bo-Sul;Kim, Do-Hyung;Lee, Sang-Yeol
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.24 no.9
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    • pp.693-696
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    • 2011
  • Recently, amorphous oxide semiconductors (AOSs) based thin-film transistors (TFTs) have received considerable attention for application in the next generation displays industry. The research trends of AOSs based TFTs investigation have focused on the high device performance. The electrical properties of the TFTs are influenced by trap density. In particular, the threshold voltage ($V_{th}$) and subthreshold swing (SS) essentially depend on the semiconductor/gate-insulator interface trap. In this article, we investigated the effects of Ar plasma-treated $SiO_2$ insulator on the interfacial property and the device performances of amorphous indium gallium zinc oxide (a-IGZO) TFTs. We report on the improvement in interfacial characteristics between a-IGZO channel layer and gate insulator depending on Ar power in plasma process, since the change of treatment power could result in different plasma damage on the interface.

Effects of Atmospheric Pressure Microwave Plasma on Surface of SUS304 Stainless Steel

  • Shin, H.K.;Kwon, H.C.;Kang, S.K.;Kim, H.Y.;Lee, J.K.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.268-268
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    • 2012
  • Atmospheric pressure microwave induced plasmas are used to excite and ionize chemical species for elemental analysis, for plasma reforming, and for plasma surface treatment. Microwave plasma differs significantly from other plasmas and has several interesting properties. For example, the electron density is higher in microwave plasma than in radio-frequency (RF) or direct current (DC) plasma. Several types of radical species with high density are generated under high electron density, so the reactivity of microwave plasma is expected to be very high [1]. Therefore, useful applications of atmospheric pressure microwave plasmas are expected. The surface characteristics of SUS304 stainless steel are investigated before and after surface modification by microwave plasma under atmospheric pressure conditions. The plasma device was operated by power sources with microwave frequency. We used a device based on a coaxial transmission line resonator (CTLR). The atmospheric pressure plasma jet (APPJ) in the case of microwave frequency (880 MHz) used Ar as plasma gas [2]. Typical microwave Pw was 3-10 W. To determine the optimal processing conditions, the surface treatment experiments were performed using various values of Pw (3-10 W), treatment time (5-120 s), and ratios of mixture gas (hydrogen peroxide). Torch-to-sample distance was fixed at the plasma edge point. Plasma treatment of a stainless steel plate significantly affected the wettability, contact angle (CA), and free energy (mJ/$m^2$) of the SUS304 surface. CA and ${\gamma}$ were analyzed. The optimal surface modification parameters to modify were a power of 10 W, a treatment time of 45 s, and a hydrogen peroxide content of 0.6 wt% [3]. Under these processing conditions, a CA of just $9.8^{\circ}$ was obtained. As CA decreased, wettability increased; i.e. the surface changed from hydrophobic to hydrophilic. From these results, 10 W power and 45 s treatment time are the best values to minimize CA and maximize ${\gamma}$.

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The Effect of Plasma Treatment on the OLED Characteristics (플라즈마 처리가 유기발광다이오드의 특성에 미치는 영향)

  • Shin, Se-Jin;Ahn, Jong-Myung;Kim, Min-Young;Jang, Ji-Geun
    • Journal of the Semiconductor & Display Technology
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    • v.6 no.1 s.18
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    • pp.23-26
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    • 2007
  • The effects of plasma treatment on the ITO/glass substrate before deposition of organic materials were investigated in the fabrication of green light emitting organic devices with $Alq_3-C545T$ fluorescent system. In our experiments, the optimum plasma treatment was obtained at the power and time of 150W and 2 minutes under the $Ar(50%)/O_2$ ambient of 1 mTorr. The green OLED with plasma treatment at 150W for 2 minutes showed the luminance and efficiency of $4700\;cd/m^2$ and 8 lm/W at 10V, respectively. On the contrary, the same structured device without plasma treatment showed much lower performance with the luminance of $2600\;cd/m^2$ and the efficiency of 3.6 lm/W at 10 V.

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Study of the Efficacy and Safety of "adenophorae radix extract" in the Obese Patients or Overweight (비만 및 과체중 환자에 대한 사삼추출물의 유효성 및 안전성 평가)

  • Kim, Gi-Tae;Go, Heung;Shin, Seon-Mi;Kim, Hyung-Jun
    • The Journal of Korean Obstetrics and Gynecology
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    • v.25 no.2
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    • pp.131-141
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    • 2012
  • Objectives: The purpose of this study is to evaluate the efficacy and biosafety of Adenophorae Radix(AR) extract in obesity or overweight patient. Methods: This study is double-blind, randomized, placebo-controlled intervention Study. 30 patients with BMI $25{\leq}$ and 30> were allotted into two groups at random. In 0, $6^{th}$, $12^{th}$ week, we had checked body weight, waist line, hip line, body fat and abdominal CT scan. In 0, $12^{th}$ week, we also had checked lipid metabolism and biosafety with blood test. Results: AR treatment had a significant effect on suppressing body wight gain (p<0.01) and BMI index(p<0.01). AR treatment reduced plasma TG level but we couldn't find statistical significance. AR treatment had produced no adverse reactions. Conclusions: This study shows that Adenophorae Radix(AR) extract can reduce the weight, BMI. Adenophorae Radix(AR) extract can be used in obesity or overweight patient.

Application of cold plasma treatment as a method to improve the physical properties of defatted mustard meal-based edible films (탈지 겨자씨 소재 가식성 필름의 물리적 특성 향상을 위한 콜드 플라즈마의 적용)

  • Jeong, Ha Eun;Oh, Yoon Ah;Min, Sea Cheol
    • Korean Journal of Food Science and Technology
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    • v.53 no.5
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    • pp.634-639
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    • 2021
  • This study investigated the effects of cold plasma (CP) treatment on the properties of biopolymer films prepared with defatted mustard meal (DMM films). CP treatments using N2, O2, He, Ar, and dry air did not affect the tensile properties, water vapor permeability, color, and morphology of DMM films, whereas the treatments using He and Ar improved their printability. The tensile strength (TS) of O2- or air-CP-treated DMM films and the elastic modulus (EM) of O2-, He-, Ar-, or air-CP-treated films were lower than those of the untreated films. An increase in the power of Ar-CP treatment resulted in an increase in EM. The optimum treatment power and time for minimizing yellowness changes by Ar-CP treatment were 420 W and 40 min, respectively. The results demonstrated the potential application of CP treatment to improve the film properties of DMM films and possibly other agricultural by-product-based biopolymer films, making the films more applicable to food packaging.

Effect of Plasma Treatment on Permeability and Selectivity Characteristics of Mixture Gas through Polyimide Membrane (플라즈마 처리된 폴리이미드 막의 기체투과특성)

  • 배성렬;노상호;류대선;박희진
    • Membrane Journal
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    • v.11 no.1
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    • pp.38-49
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    • 2001
  • The surface of polyimide membrane was modified by plasma treatment using Ar and NH~. and the permeability and selectivity for the mixture gas $(CO_2/N_2=20/80 vol%)$ were measured. The per¬meation experiments were performed by a variable volume method at $30^{\circ}$C and total pressure of 5 atm, The effect of the plasma conditions such as treatment time, power input, gas flow rate and pressure in the reactor on the transport Dwperties of modified membranes was investigated. The surface of the plasma treated membrane was analyzed by means of FTlR - ATH, ESCA and AFM. The dependences of the wettability and the etching on plasma treatment time were investigated by use of the contact angle and the weight loss measurement. Measurements of gas pcnneability characteristic were performed using both dry and wet membranes. The effects of experimental conditions such as temperature on the membrane performance were studied.

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