Dry etching properties of SBT thin films using $Cl_2/Ar$ inductively coupled plasma
($Cl_2/Ar$ 유도결합 플라즈마를 이용한 SBT 박막의 건식 식각 특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2003.07a
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- pp.404-407
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- 2003