Browse > Article

Study on the Electron Transport Coefficient in Mixtures of $CF_4$ and Ar  

Kim, Sang-Nam (시립 인천전문대학 전기과)
Publication Information
The Transactions of the Korean Institute of Electrical Engineers P / v.56, no.1, 2007 , pp. 1-5 More about this Journal
Abstract
Study on the electron transport coefficient in mixtures of CF4 and Ar, have been analyzed over a range of the reduced electric field strength between 0.1 and 350[Td] by the two-term approximation of the Boltzmann equation (BEq.) method and the Monte Carlo simulation (MCS). The calculations of electron swarm parameters require the knowledge of several collision cross-sections of electron beam. Thus, published momentum transfer, ionization, vibration, attachment, electronic excitation, and dissociation cross-sections of electrons for $CF_4$ and Ar, were used. The differences of the transport coefficients of electrons in $CF_4$ mixtures of Ar, have been explained by the deduced energy distribution functions for electrons and the complete collision cross-sections for electrons. The results of the Boltzmann equation and the Monte Carlo simulation have been compared with the data presented by several workers. The deduced transport coefficients for electrons agree reasonably well with the experimental and simulation data obtained by Nakamura and Hayashi. The energy distribution function of electrons in $CF_4-Ar$ mixtures shows the Maxwellian distribution for energy. That is, $f({\varepsilon})$ has the symmetrical shape whose axis of symmetry is a most probably energy. The proposed theoretical simulation techniques in this work will be useful to predict the fundamental process of charged particles and the breakdown properties of gas mixtures. A two-term approximation of the Boltzmann equation analysis and Monte Carlo simulation have been used to study electron transport coefficients.
Keywords
MCS(Monte Carlo Simulation); BEq(Boltzmann equation); $CF_4$(Tetrafluoro Methane);
Citations & Related Records
연도 인용수 순위
  • Reference
1 H. Itoh, M. Inomata, T. Matsumura, K. Satoh, Y. Suzuki, Y. Nakao, H. Tagashira, 'Electron Swarm Characteristics in Gas Mixtures Containing CF4' , T. IEE Japan, Vol.116-A, No.4, pp.328-333, 1996
2 菅野卓雄 編著, '半導体 プラズマプロセス技術', 産業圖書, pp.38-50, 1993
3 山本, 生田, 'モンテカルロシミユレ一ツヨンによるCF4カスの電子衝突斷面績' , 電氣學會放電硏究會資料, ED-92-101, pp.71-80, 1992
4 Y. Nakamura and M. Kurachi 'Electron Transport Parameters in Argon and its momentum transfer cross section' J.Phys.21, pp.718-723, 1988
5 Donald Rapp and P. Englander-Golden 'total cross sections for Ionization and Attachment in Gases by Electron Impact I. Positive Ionization', J. phys. Vol.43, No.5, PP. 1464-1479(1965)
6 金相南, '시뮬레이션에 의한 CF4, CH4, Ar混合氣體에서 電子에너지분포함수', 대한전기학회논문집, 52P-1-2, pp. 9 -13, 2003
7 電氣學會技術報告, '氣體放電 シミユレ一ツヨン技法' , 第140号, 1974
8 小沼光晴著 'プラズマと成膜の基礎' , 日刊工業新聞社, pp.13-20, 1993
9 Tonks L and Langmuir I, Phys. Rev. 33, pp. 195-210, 1929   DOI
10 高柳和夫, '電子, 原子, 分子の 衝突, 培風館, pp. 51-69, 1978
11 K. L. Bell, N. S. Scott and M. A. Lennon, 'The Scattering of low-energy electrons by Argon atoms ' . J. Phys. B: At. Mol. Phys. 17, pp. 4757-4765, 1984   DOI   ScienceOn
12 M. Hayashi, 'Swarm Studies and Inelastic ElectronMolecule Collisions' ,L. C. Pitchford, Springer-Verlag, 1986
13 J. H. S. W. Massey & E. H. S. Burhop, 'Electronic and Ionic Impact Phenomena 1' , Clerendon Press, Oxford, pp. 175, 1969
14 Philip. E. Luft, 'Description of a Backward prolongation program for computing transport coefficients' , JILA. information center report, No.19, 1975
15 大森義行, 下妻光夫, 田頭博昭, 'SiH4 ガスの電子衝突斷面績およびスウオ-ムペラメ-タ' , 電氣學會硏究會資料, ED-86-114, HV-86-34, 1988
16 L. G. Christophorou, S. R. Hunter, J. G. Carter and R. A. Mathis, 'Gases for possible use In diffuse-discharge switches', Appl. Phys, Lett. 4, pp.147-149, 1982   DOI