• 한국정밀공학회지
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• 제21권4호
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• pp.186-193
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• 2004

Porous anodic alumina has been used widely for corrosion protection of aluminum surfaces or as dielectric material in micro-electronics applications. It exhibits a homogeneous morphology of parallel pores which can easily be controlled between 10 and 400nm. It has been applied as a template for fabrication of the nanometer-scale composite. In this study, mechanical properties of the AAO structures are measured by the nano indentation method. Nano indentation technique is one of the most effective methods to measure the mechanical properties of nano-structures. Basically, hardness and elastic modulus can be obtained by the nano-indentation. Using the nano-indentation method, we investigated the mechanical properties of the AAO structure with different size of nano-holes. In results, we find the hole effect that changes the mechanical properties as size of nano hole.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 춘계학술대회
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• pp.144-149
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• 2004

Porous anodic alumina has been used widely for corrosion protection of aluminum surfaces or as dielectric material in micro-electronics applications. It exhibits a homogeneous morphology of parallel pores which can easily be controlled between 10 and 400nm. It has been applied as a template for fabrication of the nanometerscale composite. In this study, mechanical properties of the AAO structures are measured by the nano indentation method. Nano indentation technique is one of the most effective method to measure the mechanical properties of nano-structures. Basically, hardness and elastic modulus can be obtained by the nano-indentation. Using the nano-indentation method, we investigated the mechanical properties of the AAO structure with different size of nano-holes. In results, we find the hole effect that changes the mechanical properties as size of nano hole.

• 공업화학
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• 제9권7호
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• pp.1030-1035
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• 1998

본 연구에서는 시판용 99.8% 금속알루미늄을 황산전해액에서 정전류 방식에 막을 제조하는 실험을 하였다. 반응온도 $20^{\circ}C$에서 $150C/cm^2$의 전기량으로 양극산화를 함에 있어 전해질에 의한 막의 용해작용을 저하시킬 목적으로 전해질 속에 알루미늄 이온의 형태로 존재할 수 있는 $Al_2(SO_4)_3$, $AlPO_4$, $Al(NO_3)_3$를 첨가제로 사용하였다. 황산 전해질의 농도를 5, 10, 15, 20 wt%로 전류밀도를 10, 20, 30, 40, $50mA/cm^2$로 조절하여 양극산화를 할 때 각 전해조에 첨가제를 각각 5, 10, 15, 20 g/L를 용해시켜 막제조에 따른 첨가제의 종류 및 양의 영향을 고찰하고자 하였다. 전해질과 공통이온으로 존재하는 $Al_2(SO_4)_3$를 첨가제로 사용하여 양극산화를 하여 막 표면에 손상이 없는 다공성 알루미나 막을 얻을 수 있었으며, 그 외 첨가제에서는 각 실험조건에서 막의 표면이 심하게 손상되어 첨가제로서 효과를 얻을 수 없었다. 한편, 동일한 전해질의 농도, 전류밀도 조건에서 $Al_2(SO_4)_3$의 첨가량에 따른 세공직경의 변화는 거의 없는 것으로 나타났다.

• 한국재료학회지
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• 제14권9호
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• pp.664-669
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• 2004

Anodic aluminum oxide (AAO) with pores of various diameter, density, and thickness values was obtained through control of the anodization parameters including voltage, temperature, pore widening time, anodization time, etc. The pore diameter was controlled by a pore widening in an etchant, and alumina templates having stepped nano-channels were fabricated by repetition of anodization and pore widening processes. Stepped carbon nanotubes (CNTs) were then grown on the stepped AAO templates by pyrolysis of acetylene without using the catalyst. High-resolution transmission electron microscopy images revealed that CNTs have a multi-wall structure made of graphite flakes of several nm sizes. The current-voltage characteristic of the sloped and linear CNTs were also examined.

• 한국분말재료학회지
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• 제22권3호
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• pp.216-220
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• 2015

Vertically oriented nickel nanowire arrays with a different diameter and length are synthesized in porous anodic aluminium oxide templates by an electrodeposition method. The pore diameters of the templates are adjusted by controlling the anodization conditions and then they are utilized as templates to grow nickel nanowire arrays. The nickel nanowires have the average diameters of approximately 25 and 260 nm and the crystal structure, morphology and microstructure of the nanowires are systematically investigated using XRD, FE-SEM and TEM analysis. The nickel nanowire arrays show a magnetic anisotropy with the easy axis parallel to the nanowires and the coercivity and remanence enhance with decreasing a wire diameter and increasing a wire length.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.62-63
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• 2008

Photonic crystas were fabricated using an anodic aluminum oxide(AAO) mask on GaN diode. The Photonic crystal structure has been investigated from Atomic Force Microscope(AFM). The hole diameter and lattice constant of photonic crystal are 60nm and 105nm, respectively. Photoluminescence of photonic crystal was enhanced and optical interference was increased by photonic crystal effect.

• 한국표면공학회지
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• 제50권6호
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• pp.427-431
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• 2017

Anodic aluminum oxide (AAO) film has recently attracted much attention as a key material for the fabrication of various nanostructures. A control of anodizing voltage (U) was employed to render different anodic aluminum oxide (AAO) nanostructures with pore diameter ($D_p$) and interpore distance ($D_{int}$) in oxalic acid. In this work, we study the effect of stepwise modulation of anodizing voltages on the shape and dimension of porous structures along the vertical direction and demonstrate the fabrication of hierarchical layers of systematically controlled three-dimensional (3D) pore profile.

• 한국표면공학회지
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• 제50권5호
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• pp.421-426
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• 2017

Herein, we investigated surface morphological characteristics of anodic films on Al6061 alloy prepared by unipolar pulsed Micro-arc oxidation (MAO) in a mixed solution of $Na_2SiO_3$ + KOH. The number and size of pores as well as craters on anodic alumina surface were studied as a function of different voltages, duty cycles and applied anodic current densities. The morphological characteristics of all samples were investigated by scanning electron microscopy, conforming that the most uniform surface morphology of MAO films on Al1050 alloy was obtained at high applied current density with low duty cycle.

• 한국진공학회지
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• 제15권1호
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• pp.97-102
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• 2006

양극 산화된 알루미나 (anodized aluminum oxide : AAO)는 균일하고 일정한 크기의 나노기공 패턴을 지니고 있다. AAO를 이온빔 나노 patterning을 위한 이온조사 시 마스크로서 이용하기 위해 AAO 나노 기공을 통과하는 이온빔의 투과율(AAO에 입사한 이온에 대한 투과이온의 양의 비)을 측정하였다. Al bulk foil을 양극 산화하여 두께가 $4{\mu}m$이고 종횡비(두께와 기공의 지름의 비)가 각각 200:1, 100:1 인 AAO를 Goniometer에 부착하여 500 keV의 $O^{2+}$ 이온빔에 대해 나노기공을 정렬시킨 후, 기울임 각에 따른 투과율을 측정한 결과, 종횡비가 200:1, 100:1 일 때 투과율은 각각 약 $10^{-8},\;10^{-4}$로 거의 이온빔이 투과하지 못하였다. 반면에 $SiO_2$ 위에 증착된 Al 박막으로 양극산화하여 종횡비가 5:1인 AAO의 이온빔 투과율은 0.67로 투과율이 현저히 향상되었다. 높은 종횡비를 갖는 AAO의 경우에는 범과 AAO 기공의 정렬이 쉽지 않은데다 알루미나의 비전도성으로 인한 charge-up 현상으로 인해 이온빔이 극히 투과하기 어렵기 때문이다. 실제로 80 keV의 Co 음이온을 종횡비 5:1인 AAO에 조사시킨 후에는 AAO 나노기공과 동일한 크기의 나노 구조체가 형성됨을 주사전자현미경(scanning electron microscopy: SEM) 관찰을 통하여 확인하였다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2006년도 춘계학술발표회 초록집
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• pp.148-148
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• 2006