• Title/Summary/Keyword: Amorphous silica

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Study on Recycling of Scraps from Process of Silicon-single-crystal for Semiconductor

  • Lee, Sang-Hoon;Lee, Kwan-Hee;Hiroshi Okamoto
    • Proceedings of the IEEK Conference
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    • 2001.10a
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    • pp.705-710
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    • 2001
  • So for the quartz-glassy crucible wastes which was used for pulling up silicon-single-crystal ingot have simply reused for refractory raw-materials, or exhausted. This study is concerned on the advanced recycling-technology that is obtained by the proper micro-particle preparation process in order to fabricate fine amorphous silica filler for EMC (Epoxy Molding Compound). Therefore, this paper will deal with the physical, chemical and thermal pre-treatment process for efficient impurity removal and with the proper micro-particle process for producing the amorphous silicafiller. In view of the results, if the chemical, physical and thermal pre-treatment process for efficient elimination of impurity was passed, the purity of wasted fused glassy crucible is almost equal to the its of first anhydrous quartz glass. Thus, it was understood that this wasted fused glassy crucible was sufficient value of recycling, though it was damaged. When the ingot was fabricated, Phase transformation of crystallization by heat treatment (heat hysteresis phenomenon) was not changed. So, it was understood that as fused silica in the amorphous state, as It is, recycling possibility was very high

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Initial Reaction of Hexachlorodisilane on Amorphous Silica Surface for Atomic Layer Deposition Using Density Functional Theory

  • Kim, Ki-Young;Yang, Jin-Hoon;Shin, Dong-Gung;Kim, Yeong-Cheol
    • Journal of the Korean Ceramic Society
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    • v.54 no.5
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    • pp.443-447
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    • 2017
  • The initial reaction of hexachlorodisilane ($Si_2Cl_6$, HCDS) on amorphous silica ($SiO_2$) surface for atomic layer deposition was investigated using density functional theory. Two representative reaction sites on the amorphous $SiO_2$ surface for HCDS reaction, a surface hydroxyl and a two-membered ring, were considered. The reaction energy barrier for HCDS on both sites was higher than its adsorption energy, indicating that it would desorb from the surface rather than react with the surface. At high temperature range, some HCDSs can have kinetic energy high enough to overcome the reaction energy barrier. The HCDS reaction on top of the reacted HCDS was investigated to confirm its self-limiting characteristics.

Effect of mechanical damage on the crystallization of amorphous silicon thin film (기계적 손상이 비정질 규소박막의 결정화에 미치는 영향)

  • 문권진;김영관;윤종규
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.8 no.2
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    • pp.299-306
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    • 1998
  • Crystallization of the amorphous silicon needs activation. Thermal energy through laser annealing, furnace annealing and rapid thermal process (RTP) has been convinced to crystallize the amorphous silicon thin film. It is expected that some other type of energy like mechanical energy can help to crystallize the amorphous silicon thin film. In this study, mechanical energy through wet blasting of silica slurry and silicon ion implantation has been applied to the amorphous silicon thin film deposited with LPCVD technique. RTP was employed for the annealing of this mechanically-damaged amorphous silicon thin film. For the characterization of the crystallized silicon thin film, XRD and Raman analysis were conducted. In this study, it is shown that the mechanical damage is effective to enhance the crystallization of amorphous silicon thin film.

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Carbon-Silica Membrane for Gas Separation (탄소-실리카막을 이용한 기체분리)

  • Lee, Young-Moo;Park, Ho-Bum
    • Proceedings of the Membrane Society of Korea Conference
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    • 2004.03a
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    • pp.77-102
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    • 2004
  • Carbon materials obtained from organic polymers are usually amorphous structure. The structure of carbon materials is not nearly as well defined as that of zeolite. Carbon are amorphous materials with comparatively wide pore size distribution as compared to the crystalline zeolites with monodisperse ultramicropore and micropore dimensions. (omitted)

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Thermal Behavior of Dickite (딕카이트의 열적 특성 연구)

  • 조현구
    • Journal of the Mineralogical Society of Korea
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    • v.12 no.1
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    • pp.11-22
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    • 1999
  • Thermal behavior of dickite was studied by thermal analysis, X-ray diffraction analysis, electron microprobe analysis, and scanning electron microscopy, Dickite has an endothermic peak at about$ 650^{\circ}C$ and an exothermic one at $960^{\circ}C$ in the differential thermal analysis. The endothermic reaction is assigned to the decomposition of dickite to meta-dickite. Hydroxyl radicals are removed from dickite structure by the reaction, resulting in the weight loss about 10.5~14.5% and appearance of a 14$\AA$ phase different from other kaolin minerals. The reaction slowly proceed in the range of $200^{\circ}C$. As the completion of decomposition, aciclular mullite forms at the expense of meta-dickite plates with random crystallographic relationship. Mullites have diverse silica versus alumina ratio. The exothermic reaction without weight loss seems to be due to the formation of spinel and amorphous silica. The spinel phase shows cryptocrystalline globular morphology accompanying a little amount of silica. From spinel phase shows cryptocrystalling globular morphology accompanying a little amount of silica. From this work, it is suggested that mullite is formed from meta-dickite much lower temperature than the reported one in the previous works.

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Synthesis of Copoly(amide-imide)s Based on Silica Nano Particles-polyacrylamide

  • Min, Jun Ho;Park, Chan Young;Min, Seong Kee
    • Elastomers and Composites
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    • v.51 no.2
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    • pp.138-146
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    • 2016
  • It is an inconvenience for silica nano-particles to dry again when using it in that they cohere each other through moisture in the air. Acrylamide groups were introduced to improve such inconvenience and copolymerized with silica nano-particles and then we copolymerized again with polyamic acid in order to increase thermal characteristic. Amide block copolymers were prepared using silica and (3-mercaptopropyl) trimethoxysilane (MPTMS) with a siloxane group, using 2,6-Lutidine as a catalyst. Amide block polymers and copolymers were synthesized via ATRP after brominating pyromellitic dianhydride (PMDA) and polyamic acid of methylene diphenyl diamine (MDA), using ${\alpha}$-bromo isobutyryl bromide. Characteristic peaks of copolymer with amide and imide groups and patterns of amorphous polymers were researched by FT-IR and XRD analyses and the analysis of surface characteristic groups was conducted via XPS. A change in thermal properties was examined through DSC and TGA and solubility for solvents was also researched.

Preparation of ZnO Thin Films with UV Emission by Spin Coating and Low-temperature Heat-treatment (스핀코팅 및 저온열처리에 의한 자외선 발광특성을 갖는 산화아연 박막의 제조)

  • Kang, Bo-An;Jeong, Ju-Hyun
    • Journal of Korean Ophthalmic Optics Society
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    • v.13 no.3
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    • pp.73-77
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    • 2008
  • Purpose: This research is that prepare amorphous or crystalline ZnO thin films with pure strong UV emission on soda-lime-silica glass (SLSG) substrates by low-temperature annealing. Methods: Growth characteristic and optical properties of the amorphous or nano-crystalline ZnO thin films prepared on soda - lime - silica glass substrates by chemical solution deposition at 100, 150, 200, 250 and $300^{\circ}C$ were investigated using X-ray diffraction analysis, ultraviolet - visible - near infrared spectrophotometer, and photoluminescence. Results: The films exhibited an amorphous pattern even when finally annealed at $100^{\circ}C{\sim}200^{\circ}C$ for 60 min, while crystalline ZnO was obtained by prefiring at 250 and $300^{\circ}C$. The photoluminescence spectrum of amorphous ZnO films shows a strong NBE emission, while the visible emission is nearly quenched. Conclusions: These results indicate it should be possible to cheaply and easily fabricate ZnO-based optoelectronic devices at low temperature, below $200^{\circ}C$, in the future.

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Synthesis and Electrochemical Performance of Li2MnSiO4 for Lithium Ion Battery Prepared by Amorphous Silica Precusor (비정질 실리콘 산화물을 이용한 리튬망간실리콘산화물의 합성 및 전기화학적 특성 평가)

  • Jin, Yun-Ho;Lee, Kun-Jae;Kang, Lee-Seung;Jung, Hang-Chul;Hong, Hyun-Seon
    • Journal of Powder Materials
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    • v.19 no.3
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    • pp.210-214
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    • 2012
  • Mass production-capable $Li_2MnSiO_4$ powder was synthesized for use as cathode material in state-of-the-art lithium-ion batteries. These batteries are main powder sources for high tech-end digital electronic equipments and electric vehicles in the near future and they must possess high specific capacity and durable charge-discharge characteristics. Amorphous silicone was quite superior to crystalline one as starting material to fabricate silicone oxide with high reactivity between precursors of sol-gel type reaction intermediates. The amorphous silicone starting material also has beneficial effect of efficiently controlling secondary phases, most notably $Li_xSiO_x$. Lastly, carbon was coated on $Li_2MnSiO_4$ powders by using sucrose to afford some improved electrical conductivity. The carbon-coated $Li_2MnSiO_4$ cathode material was further characterized using SEM, XRD, and galvanostatic charge/discharge test method for morphological and electrochemical examinations. Coin cell was subject to 1.5-4.8 V at C/20, where 74 mAh/g was observed during primary discharge cycle.

A Study on the Sol-Gel Reaction Kinetics of Sodium Silicate Solution (규산(硅酸)나트륨 수용액(水溶液)의 솔-젤 반응속도론적(反應速度論的) 고찰(考察))

  • Kim, Chul-Joo;Yoon, Ho-Sung;Jang, Hee-Dong
    • Resources Recycling
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    • v.17 no.6
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    • pp.34-42
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    • 2008
  • The properties of sodium silicate solution were surveyed by using the yellow silicomolybdic method, and the formation of silica sol from sodium silicate solution and the growth of silica sol were investigated in this study. The $SiO_2$ content of 2 wt% in sodium silicate solution was proper to oxidize sodium silicate with sulfuric acid. After the removal of sodium ions in sodium silicate solution, the pH of silicate solution had to be controlled above 9 for the stabilization of silicate solution. The condensation between silicic acid species and silica nuclei surfaces has been studied at $20{\sim}80^{\circ}C$ and pH 10 in silicate solutions with silica nuclei. The reaction falls into two kinetics regimes, limited at high silicic acid species concentration by polymerization, but at lower concentration by a process whereby deposited silicic acid species condenses further to silica. The overall condensation is first-order in silicic acid species concentration, proceeded toward to pseudo equilibrium concentration, $C_x$, rather than the solubility of amorphous silica. The heat of solution of amorphous silica was 3.34 kcal/mol and exhibits an Arrhenius temperature dependence with an apparent activation energy of 3.16 kcal/mol in the range of $20{\sim}80^{\circ}C$.

Effect of pH level and slurry particle size on the chemical mechanical planarization of langasite crystal wafer (pH level 및 slurry 입도가 langasite wafer의 chemical mechanical planarization에 미치는 영향)

  • Cho Hyun
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.15 no.1
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    • pp.34-38
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    • 2005
  • Effects of pH level and slurry particle size on material removal rate and planarization of langasite single crystal wafer have been examined. Higher material removal rate was obtained with lower pH level slurries while the planarization was found to be determined by average particle size of colloidal silica slurries. Slurries containing 0.045 ㎛ amorphous silica particles showed the best polishing effect without any scratches on the surface. Effective particle number has a strong effect on the surface planarization and the removal rate, so that the lower effective particle numbers produced low removal rate but the better planarization results.