• Title/Summary/Keyword: Allowable Error

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Reliability Evaluation System of Hot Plate for Photoresist Baking (Hot Plate 신뢰성 시험.평가시스템 개발)

  • Song, Jun-Yeop;Song, Chang-Gyu;No, Seung-Guk;Park, Hwa-Yeong
    • Journal of the Korean Society for Precision Engineering
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    • v.19 no.8
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    • pp.180-186
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    • 2002
  • Hot Plate is the major unit that it used to remove damp of wafer surface, to strength adhesion of photoresist (PR) and to bake coated PR in FAB process of semiconductor. The badness of Hot Plate (HP) has directly influence upon the performance of wafer, it is necessary to guarantee the performance of HP. In this study, a reliability evaluation system has been designed and developed, which is to measure and to estimate thermal uniformity and flatness of HP in range of temperature 0~$250^\circC$. This system has included the techniques which measures and analyzes thermal uniformity using infrared thermal vision, and which compensates measuring error of flatness using laser displacement sensor For measuring flatness, a measurement stage of 3 axes are developed which adapts the precision encoder. The allowable error of this system in respect of thermal uniformity is less $than\pm0.1^\circC$ and in respect of flatness is less $than\pm$1mm . It is expected that the developed system can measure from $\Phi200mm\;(wafer 8")\;to\;\Phi300mm$ (wafer 12") and also can be used in performance test of the Cool Plate and industrial heater, etc.

Macromodels for Efficient Analysis of VLSI Interconnects (VLSI 회로연결선의 효율적 해석을 위한 거시 모형)

  • 배종흠;김석윤
    • Journal of the Korean Institute of Telematics and Electronics C
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    • v.36C no.5
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    • pp.13-26
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    • 1999
  • This paper presents a metric that can guide to optimal circuit models for interconnects among various models, given interconnect parameters and operating environment. To get this goal, we categorize interconnects into RC~c1ass and RLC-c1ass model domains based on the quantitative modeling error analysis using total resistance, inductance and capacitance of interconnects as well as operating frequency. RC~c1ass circuit models, which include most on~chip interconnects, can be efficiently analyzed by using the model~order reduction techniques. RLC-c1ass circuit models are constructed using one of three candidates, ILC(Iterative Ladder Circuit) macromodels, MC(Method of Characteristics) macromodels, and state-based convolution method, the selection process of which is based upon the allowable modeling error and electrical parameters of interconnects. We propose the model domain diagram leading to optimal circuit models and the division of model domains has been achieved considering the simulation cost of macromodels under the environmental assumption of the general purpose circuit simulator such as SPICE. The macromodeling method presented in this paper keeps the passivity of the original interconnects and accordingly guarantees the unconditional stability of circuit models.

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Load Frequency Control of Multi-area Power System using Auto-tuning Neuro-Fuzzy Controller (자기조정 뉴로-퍼지제어기를 이용한 다지역 전력시스템의 부하주파수 제어)

  • Jeong, Hyeong-Hwan;Kim, Sang-Hyo;Ju, Seok-Min;Heo, Dong-Ryeol;Lee, Gwon-Sun
    • The Transactions of the Korean Institute of Electrical Engineers A
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    • v.49 no.3
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    • pp.95-106
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    • 2000
  • The load frequency control of power system is one of important subjects in view of system operation and control. That is even though the rapid load disturbances were applied to the given power system, the stable and reliable power should be supplied to the users, converging unconditionally and rapidly the frequency deviations and the tie-line power flow one on each area into allowable boundary limits. Nonetheless of such needs, if the internal parameter perturbation and the sudden load variation were given, the unstable phenomenal of power system can be often brought out because of the large frequency deviation and the unsuppressible power line one. Therefore, it is desirable to design the robust neuro-fuzzy controller which can stabilize effectively the given power system as soon as possible. In this paper the robust neuro-fuzzy controller was proposed and applied to control of load frequency over multi-area power system. The architecture and algorithm of a designed NFC(Neuro-Fuzzy Controller) were consist of fuzzy controller and neural network for auto tuning of fuzzy controller. The adaptively learned antecedent and consequent parameters of membership functions in fuzzy controller were acquired from the steepest gradient method for error-back propagation algorithm. The performances of the resultant NFC, that is, the steady-state deviations of frequency and tie-line power flow and the related dynamics, were investigated and analyzed in detail by being applied to the load frequency control of multi-area power system, when the perturbations of predetermined internal parameters. Through the simulation results tried variously in this paper for disturbances of internal parameters and external stepwise load stepwise load changes, the superiorities of the proposed NFC in robustness and adaptive rapidity to the conventional controllers were proved.

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Evaluation on Accuracy of Noise Measurement Applications for iPhone 4 and iPhone 3Gs (아이폰 4 및 아이폰 3Gs의 소음측정 애플리케이션에 대한 정확도 평가)

  • Ma, Hye Ran;Park, Doo Yong
    • Journal of the Korean Society of Safety
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    • v.28 no.1
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    • pp.24-28
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    • 2013
  • This article evaluates the accuracy of noise measurements for 37 noise measurement applications for iPhone 4 and iPhone 3Gs. Noise levels were measured using simultaneously a precision sound level meter and iPhones installed noise measurement applications at the levels of 70 dB, 80 dB and 90 dB at 1,000 Hz. Measurement errors were estimated by subtracting two measurements between iPhone and sound level meter. It was found that measurement errors of 34 applications(89.2%) were greater than ${\pm}2$ dB which is the maximum allowable error range for the Type II sound level meter. It was only 4 applications that measurement errors lie within ${\pm}2$ dB error range. There was no significant differences among measurements with four iPhone 4s. However, there were significant differences between the measurements with iPhone 4 and iPhone 3Gs using the same application. It was due to the different hardware specifications such as microphone. Therefore, noise measurement applications, for example, which has to utilize hardware of the smartphone, should be programmed to identify hardware specifications and to adopt appropriate correction factors upon hardware specifications. In conclusion, it is necessary to check accuracy and validity before using the noise measurement applications for iPhones. Also, it was suggested that it should develop an evaluation guideline or protocol on accuracy testing for the measurement applications using a smartphone.

Model-based Design and Performance Analysis of Main Control Valve of Flap Control System (플랩제어시스템 주제어밸브의 모델기반 설계 및 성능해석)

  • Cho, Hyunjun;Ahn, Manjin;Joo, Choonshik
    • Journal of Aerospace System Engineering
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    • v.13 no.4
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    • pp.50-59
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    • 2019
  • The design of the main control valve, which is the main component of the flap control system, was based on actual manufacturing experience on the basis of trial and error method. In this paper, a model-based part design method is proosed. The flap control system consists of a main control valve, fail-safe valve, solenoid valve, LVDT and force motor. The main control valve consists mainly of a spool and slot. The important design parameters of the main control valve are the slot width, overlap and clearance. AMESim is linked to the model and it analyzes the flow path of the main control valve. Applying the proposed design procedure, it was confirmed that the required performance was satisfied within the allowable machining error range.

Prediction of Dynamic Response of Structures Using CMAC (CMAC을 이용한 구조물의 동적응답 예측)

  • Kim, Dong Hyawn;Kim, Hyon Taek;Lee, In Won
    • Journal of Korean Society of Steel Construction
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    • v.12 no.5 s.48
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    • pp.605-615
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    • 2000
  • Cerebellar model articulation controller (CMAC) is introduced and used for the identification of structural dynamic model. CMAC has fascinating features in learning speed. It can learn structural response within a few seconds. Therefore it is suitable for the real time identification structures. Real time identification is required in the control of structure which may be damaged or undergo severe change in mechanical properties due to shrinkage or relaxation etc. In numerical examples, it is shown that CMAC trained with the dynamic response of three-story building can predict responses under not trained earthquakes with allowable error. Finally, CMAC has great potential in structural and control engineering.

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A Study on the Technology Measuring Partial Discharge for Long Term Aging Experiments of Insulation Materials (장시간 절연체 열화실험을 위한 부분방전측정기술 연구)

  • Seon, Jong-Ho;Kim, Gwang-Hwa;Park, Jeong-Hu;Jo, Jeong-Su
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.49 no.12
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    • pp.665-672
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    • 2000
  • This paper described the measurement technology to analyze the partial discharge characteristics for long term aging of insulations. This system was consisted of high voltage generation and measurement part, PD detection part, digital conversion and signal processing part. We used the VXI system for digital conversion and signal processing part. In the digital conversion part, we studied the error of partial discharge magnitude and memory capacity for reading digital signal with the sampling rate. In the signal processing part, we showed the program algorithm to count pulses and read peak values of partial discharge. The allowable minimum sampling rate of digizer was decided to 250kS/s through analyzing test. We confirmed that this system was very useful in the study of $\phi-q-n$ characteristics of long term PD experiments with specimens being consisted of internal void defects and CIGRE II electrodes.

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Vector Map Data Watermarking Method using Binary Notation

  • Kim, Jung-Yeop;Park, Soo-Hong
    • Spatial Information Research
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    • v.15 no.4
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    • pp.385-395
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    • 2007
  • As the growth of performance of the computer and the development of the Internet are exponential, sharing and using the information illegally have also increased to the same proportion. In this paper, we proposed a novel method on the vector map data among digital contents. Vector map data are used for GIS, navigation and web-based services etc. We embedded watermark into the coordinate of the vector map data using bit operation and extracted the watermark. This method helps to protect the copyright of the vector map data. This watermarking method is a spatial domain method and it embeds the watermark within an allowable error. Our experiment shows that the watermark produced by this method is resistant to simplification and translation.

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Stabilization of Thermo Electromotive Force of Power Type Shunt Resistor for Mass Storage Secondary Battery Management System (대용량 이차전지 관리 시스템용 전력형 션트저항의 열기전력 안정화)

  • Kim, Eun Min;Lee, Sunwoo
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.30 no.6
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    • pp.376-380
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    • 2017
  • In this paper, we prepared a metal alloy resistor with stable thermal electro motive force (thermal EMF) as well as a low temperature coefficient of resistance (TCR) by adjusting the manganese proportion from 3 to 12 wt% in the Cu-Mn-Ni alloy. Composition of the fabricated metal alloy was investigated using energy dispersive X-ray (EDX) analysis. The TCR of each sample was measured as 44.56, 40.54, 35.60, and 31.56 ppm for Cu-3Mn-2Ni, Cu-5Mn-2Ni, Cu-10Mn-2Ni, and Cu-12Mn-2Ni, respectively. All the resistor samples were available for the F grade (${\pm}1%$ of the allowable error of resistance) high-precision resistor. All the samples satisfied the baseline of high thermal EMF (under 3 mV at $60^{\circ}C$); however, Cu-3Mn-2Ni and Cu-5Mn-2Ni satisfied the baseline of low thermal EMF (under 0.3 mV at $25^{\circ}C$). We were thus able to design and fabricate the metal alloy resistor of Cu-3Mn-2Ni and Cu-5Mn-2Ni to have low TCR and stable thermal EMF at the same time.

Optimal dimensioning for the corner combined footings

  • Lopez-Chavarria, Sandra;Luevanos-Rojas, Arnulfo;Medina-Elizondo, Manuel
    • Advances in Computational Design
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    • v.2 no.2
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    • pp.169-183
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    • 2017
  • This paper shows optimal dimensioning for the corner combined footings to obtain the most economical contact surface on the soil (optimal area), due to an axial load, moment around of the axis "X" and moment around of the axis "Y" applied to each column. The proposed model considers soil real pressure, i.e., the pressure varies linearly. The classical model is developed by trial and error, i.e., a dimension is proposed, and after, using the equation of the biaxial bending is obtained the stress acting on each vertex of the corner combined footing, which must meet the conditions following: 1) Minimum stress should be equal or greater than zero, because the soil is not withstand tensile. 2) Maximum stress must be equal or less than the allowable capacity that can be capable of withstand the soil. Numerical examples are presented to illustrate the validity of the optimization techniques to obtain the minimum area of corner combined footings under an axial load and moments in two directions applied to each column.