• Transactions of the Korean Society of Mechanical Engineers A
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• v.24 no.9 s.180
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• pp.2371-2380
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• 2000

In this paper, we developed the proximity exposure system with the vertical structure of glass and mask stage to minimize the mask's warp caused by the pull of gravity. This system, which canirradiate the ultra violet through 1440 H 850 $\textrm{mm}^2$ and 1330X 1015 $\textrm{mm}^2$ exposure area, has the followingcharacteristics. The glass stage can be inclined by 80 degrees at vertical structure to load substrate withsafety on it. When the glass stage is the vertical state, the gap control, alignment control and exposureof ultra violet are executed. So, it enhances the pattern uniformity by minimizing the mask's warp. Theglass stage can also control the gap between the mask and the substrate by the coarse and fine motioncontrol. The mask stage can adjust the posture of photomask to the position of substrate by imageprecessing method. The galss stage for the gap control and the mask stage for the alignment aredesigned independently for each function.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.6
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• pp.88-95
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• 2003

This paper presents the measurement and correction method of PCB alignment errors for PCB screen printer. Electronic equipment is getting smaller and yet must satisfy high performance standard. Therefore, there is a great demand for PCB with high density. However conventional PCB screen printer doesn't have enough accuracy to accommodate the demand fur high-resolution circuit pattern and high-density mounting capacity of electronic chips. It is because the alignment errors of PCB occur when it is loaded to the screen printer. Therefore, this study focuses on the development of the system which is able to measure and correct alignment errors with high-accuracy. An automatic optical inspection part measures the PCB alignment errors using machine vision, and the high-accuracy 3-axis stage makes correction for these errors. This system used two CCD cameras to get images of two fiducial marks of PCB. The geometrical relationship between PCB, cameras, and xy$\theta$ stage is derived, and analytical equations for alignment errors are also obtained. The unknown parameters including camera declining angles and etc. can be obtained by initialization process. Finally, the proposed algorithm is verified by experiments by using test bench.

• Journal of the Semiconductor & Display Technology
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• v.6 no.1 s.18
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• pp.43-48
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• 2007

For exposure systems, very accurate alignment between the mask and the substrate is indispensable. In this paper, an automatic alignment system using machine vision for exposure systems is described. Machine vision algorithms are described in detail including extraction of an alignment mark's center position and camera calibration. Methods for extracting parameters for alignment are also presented with some compensation techniques to reduce alignment time. Our alignment system was implemented with a vision system and motion control stages. The performance of the alignment system has been extensively tested with satisfactory results. The performance evaluation shows alignment accuracy of lum within total alignment time of about $2{\sim}3$ seconds including stage moving time.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.1
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• pp.8-16
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• 2006

The communication through optical fiber is taking an important role of the expansion of communication network with excellent transmitting rate and quality. As the optical communication is introduced to the backbone network at first and becomes a general communication method of network, the demand of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM(Wavelength Division Multiplexing) element increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the driving mechanism of ultra precision stage is studied with the aim of optimal design of stage. The travel and the resolution of stage are investigated. The hysteresis of the stage is generated because of PZT actuator. The hysteresis and the inverse hysteresis are modeled in X, Y, and Z-axis motion. The input data of desired displacement of the stage according to input voltage is obtained from the inverse hysteresis equation. In the result of experiments with the input data, the errors due to hysteresis are well compensated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1219-1222
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• 2005

As the optical communication is introduced to the backbone network at first and becomes a general communication method of network, the demand of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM(Wavelength Division Multiplexing) element increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the driving mechanism of ultra precision stage is studied with the aim of optimal design of stage. The travel and the resolution of stage are investigated. The hysteresis of the stage is generated because of PZT actuator. The hysteresis and the inverse hysteresis are modeled in X, Y, and Z-axis motion. The input data of desired displacement to the stage according to input voltage is obtained from the inverse hysteresis equation. In the result of experiments with the input data, the errors due to hysteresis are well compensated.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.81-86
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• 2005

As the optical communication is introduced to the backbone network at first and becomes a general communication method of network, the demand of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM(Wavelength Division Multiplexing) element increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the driving mechanism of ultra precision stage is studied with the aim of optimal design of stage. The travel and the resolution of stage are investigated. The hysteresis of the stage is generated because of PZT actuator. The hysteresis and the inverse hysteresis are modeled in X, Y, and Z-axis motion. The input data of desired displacement to the stage according to input voltage is obtained from the inverse hysteresis equation. In the result of experiments with the input data, the errors due to hysteresis are well compensated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1514-1517
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• 2005

In recent years, as the demands of VBNS(Very high speed Backbone Network Service) and VDSL(Very high-data rate Digital Subscriber Line) increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, WDM elements increase. The alignment and the attachment technology are very important to fabricate the optical elements for communication. In this paper, the mechanism of rotational stage are studied. with the three different method and the results of them are applied to the design of the system. The performance test of resolution and travel is performed.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.150-155
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• 2005

In recent years, as the demands of VBNS(Very high speed Backbone Network Service) and VDSL(Very high-data rate Digital Subscriber Line) increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, WDM elements increase. The alignment and the attachment technology are very important to fabricate the optical elements for communication. In this paper, the mechanism of rotational stage are studied. with the three different method and the results of them are applied to the design of the system. The performance test of resolution and travel is performed.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.18 no.1
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• pp.83-89
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• 2009

In most multi-stage forging processes, the die spotting process or alignment of punch and die depends on the manual operation. It results a very tedious and inefficient procedure, thus the proper measurement system is needed to improve productivity and accuracy. This paper proposes a measurement system for alignment of die and punch which has a cylindrical holder, and describes the system concepts using 3 eddy-current displacement transducers and precise measurement jig. In order to apply this measurement system to real situations, the measuring procedures and system calibration method, etc. are proposed. Finally, the accuracy and productivity of this measurement system are investigated in this paper.

• Journal of Advanced Marine Engineering and Technology
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• v.29 no.7
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• pp.785-794
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• 2005

Modern ship hulls of large oil carriers and container carrers have become more flexible with scantling optimization and increase in ship length. On the other hand. as the demand for power has increased with the ship size. shaft diameters have become larger and stiffer. Consequently. the alignment of the propulsion system has become more sensitive to hull girder deflections. resulting in difficulties in analyzing the alignment and conducting the alignment procedure. Accordingly. the frequency of shaft alignment related bearing damages has increased significantly in recent years. The alignment related damages are mostly attributed to inadequate analyses. changes in the design of the vessel. shipyards' practices in conducting the alignment. and a lack of well defined analytical criteria. The hull deflections should be considered at the design stage to minimize the bearing damage caused by hull deflection. Hull deflections can be estimated by analytical approach and reverse calculation using the measured data. The hull girder deflection analysis using the reverse calculation will be introduced in this paper.