• 제목/요약/키워드: Alignment &deposition

검색결과 124건 처리시간 0.027초

몰리브덴(Mo) 특성방사선 획득을 위한 다층박막 거울의 최적 설계 및 공차 분석 (Optimum Design and Tolerance Analysis of Multilayer Mirror for Obtaining Characteristic X-ray of 17.5 keV)

  • 천권수
    • 한국방사선학회논문지
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    • 제3권4호
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    • pp.23-28
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    • 2009
  • 단색 엑스선은 적은 방사선 피폭으로 대조도가 높은 의료영상을 만들 수 있다. 엑스선 튜브와 다층박막 거울을 결합하면 높은 플루언스의 단색 엑스선을 얻을 수 있다. 몰리브덴(Mo) 타깃을 갖는 엑스선 튜브에서 Mo 특성방사선(17.5keV)을 높은 반사율로 획득하기 위한 W/C 다층박막 거울의 최적화를 수행하였다. 반사율이 최대가 되는 조건에서 두께주기와 두께비를 결정하였다. 최적 설계된 다층박막 거울에 대한 두께주기와 브래그 정렬에 대한 공차를 구하였다. 증착(deposition) 공차 0.2nm와 회전정렬 공차 ${\pm}0.01^{\circ}$에서 이론 반사율의 85% 이상에 해당하는 반사율이 얻어질 수 있다. 다층박막 거울을 이용하면 높은 플루언스의 특성방사선을 얻어 낼 수 있기 때문에 의료영상 획득 장치에 많이 사용될 것이다.

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Study of Energy Level Alignment at the Interface of P3HT and PCBM Bilayer Deposited by Electrospray Vacuum Deposition

  • Kim, Ji-Hoon;Hong, Jong-Am;Seo, Jae-Won;Kwon, Dae-Gyoen;Park, Yong-Sup
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.134-134
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    • 2012
  • We investigated the interface of poly (3-hexylthiophene) (P3HT) and C61-butyric acid methylester (PCBM) by using photoelectron spectroscopy (PES). These are the most widely used materials for bulk heterojunction (BHJ) organic solar cells due to their high efficiency. Study of the BHJ interfaces is difficult because the organic films are typically prepared by spin coating in ambient conditions. This is incompatible with the interface electronic structure probes such as PES, which requires ultrahigh vacuum conditions. Study of interface requires gradual deposition of thin films that is also incompatible with the spin coating process. In this work, we used electrospray vacuum deposition (EVD) technique to deposit P3HT and PCBM in high vacuum conditions. EVD allows us to form polymer thin films onto ITO substrate in a step-wise manner directly from solutions and to use PES without exposing the sample to the ambient condition. Although the morphology of the EVD deposited P3HT films observed by optical and atomic force microscopes is quite different from that of the spin coated ones, the valence region spectra were similar. PCBM was deposited on the P3HT film in a similar manner and the energy level alignment between these two materials was studied. We discuss the relation between Voc of P3HT:PCBM solar cell and HOMO-LUMO energy offset obtained in this study.

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Selective Growth of Nanosphere Assisted Vertical Zinc Oxide Nanowires with Hydrothermal Method

  • Lee, Jin-Su;Nam, Sang-Hun;Yu, Jung-Hun;Yun, Sang-Ho;Boo, Jin-Hyo
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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    • pp.252.2-252.2
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    • 2013
  • ZnO nanostructures have a lot of interest for decades due to its varied applications such as light-emitting devices, power generators, solar cells, and sensing devices etc. To get the high performance of these devices, the factors of nanostructure geometry, spacing, and alignment are important. So, Patterning of vertically- aligned ZnO nanowires are currently attractive. However, many of ZnO nanowire or nanorod fabrication methods are needs high temperature, such vapor phase transport process, metal-organic chemical vapor deposition (MOCVD), metal-organic vapor phase epitaxy, thermal evaporation, pulse laser deposition and thermal chemical vapor deposition. While hydrothermal process has great advantages-low temperature (less than $100^{\circ}C$), simple steps, short time consuming, without catalyst, and relatively ease to control than as mentioned various methods. In this work, we investigate the dependence of ZnO nanowire alignment and morphology on si substrate using of nanosphere template with various precursor concentration and components via hydrothermal process. The brief experimental scheme is as follow. First synthesized ZnO seed solution was spun coated on to cleaned Si substrate, and then annealed $350^{\circ}C$ for 1h in the furnace. Second, 200nm sized close-packed nanospheres were formed on the seed layer-coated substrate by using of gas-liquid-solid interfacial self-assembly method and drying in vaccum desicator for about a day to enhance the adhesion between seed layer and nanospheres. After that, zinc oxide nanowires were synthesized using a low temperature hydrothermal method based on alkali solution. The specimens were immersed upside down in the autoclave bath to prevent some precipitates which formed and covered on the surface. The hydrothermal conditions such as growth temperature, growth time, solution concentration, and additives are variously performed to optimize the morphologies of nanowire. To characterize the crystal structure of seed layer and nanowires, morphology, and optical properties, X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), Raman spectroscopy, and photoluminescence (PL) studies were investigated.

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이온빔 조사를 사용한 탄탈륨 산화막에서의 액정 배향에 대한 조사 (Research of Liquid Crystal Alignment on Tantalum Oxide by Using Ion Beam Irradiation)

  • 임지훈;오병윤;이원규;이강민;나현재;박홍규;서대식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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    • pp.300-300
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    • 2008
  • In this study, the advanced DuoPIGatron-type ion beam (IB) system was applied to inorganic thin film for aligning liquid crystal (LC). LC alignment on $Ta_2O_5$ via IB irradiation was embodied. As a result of IB irradiation, the homogeneously aligned liquid crystal display (LCD) on $Ta_2O_5$ was observed with low pretilt angles. The $Ta_2O_5$ were deposited on indium-tin-oxide coated Coming 1737 glass substrates by rf magnetron sputtering at $200^{\circ}C$. The deposition process resulted in forming very uniform thin film on glass substrates without any defects. To confirm the application of the inorganic alignment on modem display optical devices, we fabricated twisted nematic LCD and measured optical property and response time. As a result of the experiment, the electro optical characteristics of the LCD fabricated by using IB irradiation on $Ta_2O_5$ alignment layer were similar with the other LCD fabricated by using rubbing process.

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Band Alignment at CdS/wide-band-gap Cu(In,Ga)Se2 Hetero-junction by using PES/IPES

  • Kong, Sok-Hyun;Kima, Kyung-Hwan
    • Transactions on Electrical and Electronic Materials
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    • 제6권5호
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    • pp.229-232
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    • 2005
  • Direct characterization of band alignment at chemical bath deposition $(CBD)-CdS/Cu_{0.93}(In_{1-x}Ga_x)Se_2$ has been carried out by photoemission spectroscopy (PES) and inverse photoemission spectroscopy (IPES). Ar ion beam etching at the condition of the low ion kinetic energy of 400 eV yields a removal of surface contamination as well as successful development of intrinsic feature of each layer and the interfaces. Especially interior regions of the wide gap CIGS layers with a band gap of $1.4\~1.6\;eV$ were successfully exposed. IPES spectra revealed that conduction band offset (CBO) at the interface region over the wide gap CIGS of x = 0.60 and 0.75 was negative, where the conduction band minimum of CdS was lower than that of CIGS. It was also observed that an energy spacing between conduction band minimum (CBM) of CdS layer and valance band maximum (VBM) of $Cu_{0.93}(In_{0.25}Ga_{0.75})Se_2$ layer at interface region was no wider than that of the interface over the $Cu_{0.93}(In_{0.60}Ga_{0.40})Se_2$ layer.

플라즈마 에칭 후 게이트 산화막의 파괴 (Pinholes on Oxide under Polysilicon Layer after Plasma Etching)

  • 최영식
    • 한국정보통신학회논문지
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    • 제6권1호
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    • pp.99-102
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    • 2002
  • 다결정 실리콘층 아래의, 게이트 산화막이라고 불리는 높은 온도에서 형성된 산화막에서 핀홀이 관찰되었으며 그 메카니즘이 분석되었다. 다결정 실리콘층 아래의 산화막은 다른 다결정 실리콘층의 플라즈마 에칭 과정 동안에 파괴되어진다. 두 개의 다결정 실리콘층은 CVD증착에 의해 만들어진 0.8$\mu\textrm{m}$의 두꺼운 산화막에 의해 분리되어 있다. 파괴된 산화막들이 아크가 발생한 부분을 중심으로 흩어져 있으며 아크가 발생한 부분에서 생성된 극도로 강한 전계가 게이트 산화막을 파괴 시켰다고 가정된다. 아크가 발생한 부분은 Alignment key에서 관찰되었고 그리고 이것이 발견된 웨이퍼는 낮은 수율을 보여주었다. 아크가 발생한 부분이 칩의 내부가 아니더라도 게이트 산화막의 파괴에 의해 칩이 정상적으로 동작하지 않았다.

EFFECT OF CATALYST ON THE GROWTH OF CARBON NANOTUBES IN CVD PROCESS

  • Yoon, Young-Joon;Song, Kie-Moon;Lee, Se-Jong;Baik, Hong-Koo
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2000년도 제1회 학술대회 논문집
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    • pp.137-138
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    • 2000
  • We synthesized highly aligned carbon nanotubes by thermal decomposition of acetylene gas using metal catalyst island. The alignment technique in this experiment is a very efficient method because it does not require any treatments before and after catalyst metal deposition. Alignment of nanotubes was dominated by the uniform diameter and the high density of metal catalysts. In the field emission test, the uniform emission spots on phosphor screen were obtained from the nanotubes in spite of non-aligned tube nature.

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Multidirectional Liquid Crystal Orientation by Using Ion Beam Irradiation

  • Ahn, Han-Jin;Kim, Kyung-Chan;Kim, Jong-Bok;Hwang, Byung-Har;Baik, Hong-Koo
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.I
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    • pp.543-546
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    • 2005
  • We have investigated the alignment ability of multi-domains by using ion beam irradiation on diamond-like carbon (DLC) thin film layers. The DLC thin films were deposited by plasma enhanced chemical vapor deposition (PECVD) system and the low energy ion beam is irradiated from Kaufman type ion gun. The direction of liquid crystal alignment is varied by the direction of Ar ion beam irradiation.

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미세액적의 자기정렬 기법을 포함한 패터닝 공법에 대한 해석적인 연구 (A Numerical Study on Patterning Process Including a Self-Alignment Technique of a Microdroplet)

  • 서영호;손기헌
    • 대한기계학회논문집B
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    • 제33권1호
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    • pp.28-38
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    • 2009
  • Numerical simulation is performed for microdroplet deposition on a pre-patterned micro-structure. The liquid-air interface is tracked by a level-set method, which is improved by incorporating a sharp-interface modeling technique for accurately enforcing the matching conditions at the liquid-gas interface and the no-slip condition at the fluid-solid interface. The method is further extended to treat the contact angle condition at an immersed solid surface. The present computation of a patterning process using microdroplet ejection demonstrates that the multiphase characteristics between the liquid-gas-solid phases can be used to improve the patterning accuracy.

A Defect Free Bistable C1 SSFLC Devices

  • Wang, Chenhui;Bos, Philip J.
    • Journal of Information Display
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    • 제4권1호
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    • pp.1-8
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    • 2003
  • Recent progress in both low pretilt and high pretilt defect free C1 surface stabilized ferroelectric liquid crystal (SSFLC) devices is reviewed. First, by numerical calculation to investigate the balance between surface azimuthal anchoring energy and bulk elastic energy within the confined chevron layer geometry of C1 and C2, it is possible to achieve a zigzag free C1 state by low azimuthal anchoring alignment with a low pretilt angle. The critical azimuthal anchoring coefficient for defect free C1 state is calculated. Its relationship with elastic constant, chevron angle as well as surface topography effect are also discussed. Second, using $5^{\circ}$ oblique SiO deposition alignment method a defect free, large memory angle, high contrast ratio and bistable C1 SSFLC display, which has potential for electronic paper applications has also been developed. The electrooptical properties and bistability of this device have been investigated. Various aspects of defect control are also discussed.