Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Research of Liquid Crystal Alignment on Tantalum Oxide by Using Ion Beam Irradiation

이온빔 조사를 사용한 탄탈륨 산화막에서의 액정 배향에 대한 조사

  • Lim, Ji-Hun (Information Display Device Laboratory, Electric and Electronic engineering) ;
  • Oh, Byeong-Yun (Information Display Device Laboratory, Electric and Electronic engineering) ;
  • Lee, Won-Kyu (Information Display Device Laboratory, Electric and Electronic engineering) ;
  • Lee, Kang-Min (Information Display Device Laboratory, Electric and Electronic engineering) ;
  • Na, Hyun-Jae (Information Display Device Laboratory, Electric and Electronic engineering) ;
  • Park, Hong-Kyu (Information Display Device Laboratory, Electric and Electronic engineering) ;
  • Seo, Dae-Shik (Yonsei Univ.)
  • 임지훈 (정보 디스플레이소자 연구실, 전기전자 공학과) ;
  • 오병윤 (정보 디스플레이소자 연구실, 전기전자 공학과) ;
  • 이원규 (정보 디스플레이소자 연구실, 전기전자 공학과) ;
  • 이강민 (정보 디스플레이소자 연구실, 전기전자 공학과) ;
  • 나현재 (정보 디스플레이소자 연구실, 전기전자 공학과) ;
  • 박홍규 (정보 디스플레이소자 연구실, 전기전자 공학과) ;
  • 서대식 (연세대학교)
  • Published : 2008.11.06
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Abstract

In this study, the advanced DuoPIGatron-type ion beam (IB) system was applied to inorganic thin film for aligning liquid crystal (LC). LC alignment on $Ta_2O_5$ via IB irradiation was embodied. As a result of IB irradiation, the homogeneously aligned liquid crystal display (LCD) on $Ta_2O_5$ was observed with low pretilt angles. The $Ta_2O_5$ were deposited on indium-tin-oxide coated Coming 1737 glass substrates by rf magnetron sputtering at $200^{\circ}C$. The deposition process resulted in forming very uniform thin film on glass substrates without any defects. To confirm the application of the inorganic alignment on modem display optical devices, we fabricated twisted nematic LCD and measured optical property and response time. As a result of the experiment, the electro optical characteristics of the LCD fabricated by using IB irradiation on $Ta_2O_5$ alignment layer were similar with the other LCD fabricated by using rubbing process.

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