• 제목/요약/키워드: Alignment &deposition

검색결과 124건 처리시간 0.036초

Structure of Deposition Chamber using Belt Source Evaporation Techniques in AMOLED Manufacturing

  • Hwang, Chang-Hun
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권1호
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    • pp.186-189
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    • 2007
  • The organic deposition chamber has been developed using belt source evaporation techniques for the first time. The deposition chamber is consisted of the belt source, organic vapor source, and the mask alignment assembly. The rollers operate for the thin metal belt to continuously move with the automatic tension control. It has been proved for the belt source evaporation easy to operate and the alignment of the substrate/shadow mask becomes so simple to use in AMOLED manufacturing industry.

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Synthesis of aligned and length-controlled carbon nanotubes by chemical vapor deposition

  • Park, Young Soo;Moon, Hyung Suk;Huh, Mongyoung;Kim, Byung-Joo;Kuk, Yun Su;Kang, Sin Jae;Lee, Seong Hee;An, Kay Hyeok
    • Carbon letters
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    • 제14권2호
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    • pp.99-104
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    • 2013
  • We investigated the effects of parametric synthesis conditions of catalysts such as sintering temperature, sorts of supports and compositions of catalysts on alignment and length-control of carbon nanotubes (CNTs) using catalyst powders. To obtain aligned CNTs, several parameters were changed such as amount of citric acid, calcination temperature of catalysts, and the sorts of supports using the combustion method as well as to prepare catalyst. CNTs with different lengths were synthesized as portions of molybdenum and iron using a chemical vapor deposition reactor. In this work, the mechanisms of alignment of CNTs and of the length-control of CNTs are discussed.

Alignment of Liquid Crystal on Ion-Beam Exposed ZnO Film

  • Hwang, Soo-Won;Yoon, Tae-Hoon;Kim, Jae-Chang
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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    • pp.648-650
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    • 2009
  • We investigate nematic liquid crystal (NLC) alignment on ion-beam exposed ZnO films. ZnO is optically transparent material in the visible range. We optimized the deposition parameters such as deposition temperature and gas ratio for high transmittance and resistivity. Using ion-beam treated ZnO films, LC cells are fabricated and the conditions such as exposure energy and time for uniform alignment are found. The NLC molecules align parallel to the ion-beam exposure direction. The electro-optic and response characteristics show the possibility of application of this method in liquid crystal display.

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새로운 이온빔을 이용한 $SiO_x$ 박막 표면의 액정 배향 효과 (Homeotropic Alignment Effect for Nematic Liquid Crystal on the $SiO_x$ Thin Film Layer by New Ion beam Exposure)

  • 최성호;김병용;한진우;오용철;서대식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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    • pp.311-312
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    • 2006
  • We studied homeotropic alignment effect for a nematic liquid crystal (NLC) on the $SiO_x$, thin film irradiated by the new ion beam method $SiO_x$ thin films were deposited by plasma enhanced chemical vapor deposition (PECVD) and were treated by the DuoPIGatron ion source. A uniform liquid crystal alignment effect was achieved over 2100 eV ion beam energy. Tilt angle were about $90^{\circ}$ and were not affected by various ion beam energy.

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단일벽 탄소나노튜브의 수평배향도 및 밀도 향상 합성 (Synthesis of Single-Walled Carbon Nanotubes for Enhancement of Horizontal-Alignment and Density)

  • 곽은혜;임호빈;정구환
    • 한국표면공학회지
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    • 제47권6호
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    • pp.347-353
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    • 2014
  • We present a synthesis of single-walled carbon nanotubes(SWNTs) for enhancement of parallel-alignment and density using chemical vapor deposition with methane feed gas. As-purchased ST-cut quartz substrates were heat-treated and line-patterned by electron-beam lithography in order to grow SWNTs with parallel alignment. We investigated the effects of various synthesis parameters such as catalyst oxidation, reduction, and synthesis conditions in order to enhance both tube density and degree of parallel alignment. The condition of $1{\AA}$ of Fe catalyst film, atmospheric oxidation at $750^{\circ}C$ for 10 min, reduction under 400 Torr for 5 min, and growth at $865^{\circ}C$ under 300 Torr yields $33tubes/10{\mu}m$, which is the highest tube density with parallel alignment. Based on the results of atomic force microscope and Raman spectroscopy, it was found that SWNTs have diameter range of 0.8-2.0 nm. We believe that the present work would contribute to the development of SWNTs-based flexible functional devices.

저온 공정의 Si을 이용한 PI 배향 막의 전기광학 특성 향상에 대한 연구 (Si Induced Polymer Based Alignment Layer for Liquid Crystal Orientations with High Electro-Optic Properties at Low Temperature)

  • 김대현
    • 한국전기전자재료학회논문지
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    • 제26권9호
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    • pp.677-681
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    • 2013
  • Apart from the deposition of alignment layer, alignment process needs to be involved for alignment of liquid crystal (LC) molecules. To simplify manufacturing process, several method were used such as rubbing, ion-beam irradiation, UV irradiation, and lithography. But, eventually it needs another treatment for LC alignment. Here, we suggested Si induced polyimide (PI) alignment layer at low temperature. Using this method, we are able to eliminate the alignment process and found that the alignment and electro-optic performance are much better than that of the rubbed PI LC cells. Compared to the rubbed PI cells, the response time was decreased by 70% and C-V characteristics have hysteresis-free.

Langmuir-Blodgett 법을 이용한 유기초박막의 제작조건 및 분자배향에 관한 연구 (A Study on the Deposition Condition and Molecular Orientation of the Ultrathin Organic Films using the Langmuir-Blodgett Technique)

  • 김태완;신동명;최강훈;권영수;강도열
    • 대한전기학회논문지
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    • 제43권2호
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    • pp.303-311
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    • 1994
  • Optimum conditions for the deposition of N-docosylquinolium-TCNQ ultrathin organic films using the Langmuir-Blodgett etchnique and the molecular orientation and alignment of the LB films were studied. The $\pi$-A isotherm of the N-docosylquinolium-TCNQ was measured at the air-water interface varying with the subphase temperature, subphase pH, compressing speed and amounts of solutions for spreading. The LB film was deposited under the surface pressure of 30mN.m and 45mN/m and other deposition conditions. The molecular orientation and alignment of the LB films were studied by the polarization absorption technique. The $\pi$-A isotherm showed that the stable N-docosylquinolium -TCNQ monolayer was formed on the water surface at the condition of 25$^{\circ}C$,pH 5.6, molecular density of 2.1${\times}$10S014T~2.6${\times}$10S014T/cmS02T. The LB film was deposited under the surface pressure of 45mN/m had better packing density, orientation and alignment than the film of 30mN/m.

Homeotropic Alignment Effect for Nematic Liquid Crystal on the SiOx Thin Film Layer by New Ion Beam Exposure

  • Han, Jeong-Min;Choi, Sung-Ho;Kim, Byoung-Yong;Han, Jin-Woo;Hwang, Jeoung-Yeon;Ok, Chul-Ho;Seo, Dae-Shik
    • Transactions on Electrical and Electronic Materials
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    • 제7권6호
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    • pp.293-296
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    • 2006
  • We studied homeotropic alignment effect for a nematic liquid crystal (NLC) on the $SiO_{x}$ thin film irradiated by the new ion beam method. $SiO_{x}$ thin films were deposited by plasma enhanced chemical vapor deposition (PECVD) and were treated by the DuoPIGatron ion source. A uniform liquid crystal alignment effect was achieved over 2100 eV ion beam energy. Tilt angle were about $90^{\circ}$ and were not affected by various ion beam energy.

이온빔보조증착법으로 합성한 hexagonal BN막의 hexagonal ring의 배열과 결정성 (Alignment and lattice quality of hexagonal rings of hexagonal BN films synthesized by ion beam assisted deposition)

  • 박영준;한준희;이정용;백영준
    • 한국진공학회지
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    • 제8권1호
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    • pp.43-50
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    • 1999
  • 이온빔보조증착법으로 h-BN을 증착하여 이온에너지 및 기판온도에 따른 hexagonal ring의 배열 및 결정성의 변화를 연구하였다. 보론은 전자빔으로 1.5 $\AA$/sec 의 속도로 증발시켰으며, 질소는 둥-hall 형 이온건으로 60, 80, 100eV의 에너지로 공급하였다. 기판의 온도는 상온(no heating), 200, 400, 500, $800^{\circ}C$로 변화시켰다. 질소이온에너지가 증가할수록 hexagonal ring의 c축은 기판에 평행하게 배열하여 100 eV의 질소이온에너지에서 가장 좋은 배열을 나타내었다. 이는 이온에너지가 높을수록 합성 막에 큰 압축응력이 발생하기 때문으로 생각된다. 기판온도에 따라서는 온도가 증가함에 따라 배열이 증가하다가 약 $400^{\circ}C$에서 최대가 되고 그 보다 높은 온도에서는 배열이 감소하였다. 그리고 결정도는 온도가 증가할수록 향상되었다. 이러한 경향들은 온도가 증가함에 따라 원자 이동도는 증가하고 응력발생은 어려워지는 경향으로부터 잘 설명된다. 또한 nano-indentor로 측정한 h-BN막의 경도는 c-축의 배열정도와 같은 경향을 보였다. 이온빔보조증착법은 hexagonal ring의 배열을 통해 h-BN막 성질의 최적화에 효과적인 방법으로 판단된다.

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