• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.256-256
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• 2012

Cu가 기존 배선물질인 Al을 대체함에 따라 resistance-capacitance delay와 electromigration (EM) 등의 문제들이 어느 정도 해결되었다. 그러나 지속적인 배선 폭의 감소로 배선의 저항 증가, EM 현상 강화 그리고 stability 악화 등의 문제가 지속적으로 야기되고 있다. 이를 해결하기 위한 방법으로 Cu alloy seed layer를 이용한 barrier 자가형성 공정에 대한 연구를 진행하였다. 이 공정은 Cu 합금을 seed layer로 사용하여 도금을 한 후 열처리를 통해 $SiO_2$와의 계면에서 barrier를 자가 형성시키는 공정이다. 이 공정은 매우 균일하고 얇은 barrier를 형성할 수 있고 별도의 barrier와 glue layer를 형성하지 않아 seed layer를 위한 공간을 추가로 확보할 수 있는 장점을 가지고 있다. 또한, via bottom에 barrier가 형성되지 않아 배선 전체 저항을 급격히 낮출 수 있다. 합금 물질로는 초기 Al이나 Mg에 대한 연구가 진행되었으나, 낮은 oxide formation energy로 인해 SiO2에 과도한 손상을 주는 문제점이 제기되었다. 최근 Mn을 합금 물질로 사용한 안정적인 barrier 형성 공정이 보고 되고 있다. 하지만, barrier 형성을 하기 위해 300도 이상의 열처리 온도가 필요하고 열처리 시간 또한 긴 단점이 있다. 본 실험에서는 co-sputtering system을 사용하여 Cu-V 합금을 형성하였고, barrier를 자가 형성을 위해 300도에서 500도까지 열처리 온도를 변화시키며 1시간 동안 열처리를 실시하였다. Cu-V 공정 조건 확립을 위해 AFM, XRD, 4-point probe system을 이용하여 표면 거칠기, 결정성과 비저항을 평가하였다. Cu-V 박막 내 V의 함량은 V target의 plasma power density를 변화시켜 조절 하였으며 XPS를 통해 분석하였다. 열처리 후 시편의 단면을 TEM으로 분석하여 Cu-V 박막과 $SiO_2$ 사이에 interlayer가 형성된 것을 확인 하였으며 EDS를 이용한 element mapping을 통해 Cu-V 내 V의 거동과 interlayer의 성분을 확인하였다. PVD Cu-V 박막은 기판 온도에 큰 영향을 받았고, 200도 이상에서는 Cu의 높은 표면에너지에 의한 agglomeration 현상으로 거친 표면을 가지는 박막이 형성되었다. 7.61 at.%의 V함량을 가지는 Cu-V 박막을 300도에서 1시간 열처리 한 결과 4.5 nm의 V based oxide interlayer가 형성된 것을 확인하였다. 열처리에 의해 Cu-V 박막 내 V은 $SiO_2$와의 계면과 박막 표면으로 확산하며 oxide를 형성했으며 Cu-V 박막 내 V 함량은 줄어들었다. 300, 400, 500도에서 열처리 한 결과 동일 조성과 열처리 온도에서 Cu-Mn에 의해 형성된 interlayer의 두께 보다 두껍게 성장했다. 이는 V의 oxide formation energy가 Mn 보다 작으므로 SiO2와의 계면에서 산화막 형성이 쉽기 때문으로 판단된다. 또한, $V^{+5}$이온 반경이 $Mn^{+2}$이온 반경보다 작아 oxide 내부에서 확산이 용이하며 oxide 박막 내에 여기되는 전기장이 더 큰 산화수를 가지는 V의 경우 더 크기 때문으로 판단된다.

• 자원환경지질
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• 제32권3호
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• pp.247-260
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• 1999

Geochermical characteristics of the fluvial sediments deprnding on particle size distribution size were investigated in the respect of majir, minor and rare eath element chemisitry. Ratios of $Al_{2}O_{3}/Na_{2}O$ and $K_{2}O/Na_{2}O$ of the sediments show the homogeneous valus, and partly positive correlation with $SiO_{2}/Al_{2}O_{3}$, respecively. Characteristics of minor element ratios (V/Ni, Cr/V, Ni/Co and Zr/Hf)are within the lower and narrow range. Thesesuggested that sediment sources may be acidic to intermediate granitic rock, and may be explained by simple weathering and sedimentation. With increasing SiO2 contents, concentrations of $Al_{2}O_{3}$, $Fe_{2}O_{3}$, CaO and MgO decreased, but those of $K_{2}O$ and $Na_{2}O$ increased, Concentrations of Ba, Be, Cs, Cu, Li, Ni, Sr, V and Zr show comparatively normal negative and some positive trends. Compared with the mean composition of granite, concentrations of $Al_{2}O_{3}$, $Fe_{2}O_{3}$, MnO, CaO and MgO in the sediments of the study area were highly enriced. Among some minor and rare earth elements, concentrations of As, Cd, Cu, and V were enriched, but those of Be, Ce, Rb, Sc, Sr and Zn were depleted when compared with average composition of granite. By decreasing of particle size fractions, SiO2, Rb and Sr conterts decreased, but concentrations of $Al_{2}O_{3}$, $Fe_{2}O_{3}$, CaO, MgO, $TiO_{2}$, MgO, $P_{2}O_{5}$, Be, Cu, Hf, Pb, V and Zr increased. From the correlations between particle size fractions and element concenreations, some elements of $Fe_{2}O_{3}$, CaO, MgO, $P_{2}O_{5}$, Cu, Ni, Zn and Zr showed typical trends in the secondary contramination sediments. These trends are typically shown under 100 mesh fractions. It indicates that the fraction of minus 100 mesh is the optimum size fraction for geochemical and environmental survey.

• Journal of Welding and Joining
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• 제31권6호
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• pp.65-70
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• 2013

In joining Alumina to copper plate by Mo-Mn metallizing process, the effects of the composition of metallizing paste on the bonding strength were investigated. The bonding strength increased with increasing Mn amount in the paste up to 20% but followed by the decrease with addition of Mn. The maximum bonding strength reached 50MPa at 20%Mn when heated to $1550^{\circ}C$ for 60minute. The addition of Si to the metallizing powder increased the bonding strength of the joint by enhancing the mechanical bonding between the Alumina and the metallizing layer due to the decrease of layer viscosity with the addition of $SiO_2$. It is thought that MnO reacted with $Al_2O_3$ to yield $MnAl_2O_4$ spinel, forming a joint.

• 소성∙가공
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• 제27권6호
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• pp.339-346
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• 2018

This study investigated the microstructure and wear properties of extruded hyper-eutectic Al-Si (15wt.%) alloy in an engine oil environment. The wear mechanism of the material was also analyzed and compared to conventional gray cast iron. In microstructural observation results of Al-15wt.%Si alloy, primary Si phase ($45.3{\mu}m$) and eutectic Si phase ($3.1{\mu}m$) were found in the matrix, and the precipitations of $Mg_2Si({\beta}^{\prime})$, $Al_2Cu({\theta}^{\prime})$ and $Al_6(Mn,Fe)$ were also detected. In the case of gray cast iron, ferrite and pearlite were observed. It was also observed that flake graphite ($20-130{\mu}m$) were randomly distributed. Wear rates were lower in the Al-Si alloy as compared to those of gray cast iron in all load conditions, confirming the outstanding wear resistance of Al-15wt.%Si alloy in engine oil environment. In the $4kg_f$ condition, the wear rate of gray cast iron was $6.0{\times}10^{-5}$ and that of Al-Si measured $0.8{\times}10^{-5}$. The microstructures after wear of the two materials were analyzed using scanning electron microscope (SEM) and electron backscatter diffraction (EBSD). The primary Si and eutectic Si of Al-Si alloy effectively mitigated the abrasive wear, and the Al matrix effectively endured to accept a significant amount of plastic deformation caused by wear.

• 한국재료학회지
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• 제9권6호
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• pp.609-614
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• 1999

The effect of the amount of $SiO_2$dopant on the behavior of $AlO_2$$O_3$-composite formation by melt oxdation of Al-alloy was examined in this paper. The $SiO_2$powder was spread on the top surface of the Al-1Mg-3-Si-5Zn-1Cu alloy in th alumina crucible. The selected amount of each powder was 0.03, 0.10, 0.16g/$\textrm{cm}^2$. The oxidation behavior was determined by observing the weight gain after the heat treatment for 10 hours at 1373K. The macroscopic structure of formed oxide layer was examined by an optical microscope. The top surface and the cross-section of the grown oxide layer were investigated by SEM and analysed by EDX. The $SiO_2$ powder was determined to enhance oxidation by thermit reaction with Al which reduced the growth incubation period of the oxidation layer. As the amount of the $SiO_2$dopant increased, the growth rate decreased due to the precipitated Si which blocked the Al-alloy channel in the composite materials. However, more uniform layer was obtained due to the occurrance of the enhanced oxidation reaction in the whole alloy surface compared to the case of addition of less amount of dopant.

• 에너지공학
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• 제13권2호
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• pp.133-143
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• 2004

Simultaneous removal technology of particulate/NOx/SOx/HCl using CuO/3Al$_2$O$_3$ㆍ2SiO$_2$catalyst impregnated ceramic candle filters is an advanced air pollution process and provides significantly to reduce hazardous gases emitted from coal-fired power plant. This process uses a high-temperature catalytic filter for integrating SOx and HCl reduction through injection an alkali sorbent (such as hydrated lime or sodium bicarbonate), NOx removal through ammonia injection and selective catalytic reduction (SCR), and particulate collection on the catalytic filter surface. The advantages of the process include : compact integration of the emission control technologies into a single component; easy handling of dry sorbent and by-product; and improved SCR catalytic life due to lowered SOx, HCl and particulate levels. CuO/3Al$_2$O$_3$ㆍ2SiO$_2$ catalyst impregnated ceramic candle filters showed a possibility of simultaneous treatment from results which have ascertained high removal efficiency at various combined gases conditions, and in pilot plant test for 3 months, NO conversion was showed 90% over.

• 환경위생공학
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• 제17권3호
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• pp.37-45
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• 2002

The Purpose of this study is to reduce environmental problems caused by landfill of bituminous coal fly ash emitted from the power plant and to reuse it. First of all, we experimented that Al and Si elements were extracted from fly ash and investigated that extracted Al and Si elements night use a coagulant. The extraction was carried out under various conditions ; concentration of the extraction solution, calcination temperature and calcination time. As the results, it was found that the optimum conditions of the extraction of Al and Si elements from fly ash were as follows, concentration of NaOH was 5N for both of them, calcination temperature was $700^{\circ}C$ and $600^{\circ}C$ and calcination time was 1hr and 1.5hr, respectively The extracted solution was used as a coagulant to treat the diluted metal-plating solutions which contained Pb and Cu, respectively. As the result of treatment on the diluted Pb-plating solution with 315NTU, the removal efficiency of turbidity was more than 90%, and the removal efficiency of Pb was about 80%. As for treatment of the non-turbid diluted Cu-plating solution, the removal efficiency of Cu was about 98%.

• 한국재료학회지
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• 제30권1호
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• pp.44-49
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• 2020

The effect of intercritical annealing temperature on the microstructure and mechanical properties of Fe-9Mn-0.2C-3Al-0.5Si medium manganese steels containing Cu and Ni is investigated in this study. Six kinds of medium manganese steels are fabricated by varying the chemical composition and intercritical annealing temperature. Hardness and tensile tests are performed to examine the correlation of microstructure and mechanical properties for the intercritical annealed medium manganese steels containing Cu and Ni. The microstructures of all the steels are composed mostly of lath ferrite, reverted austenite and cementite, regardless of annealing temperature. The room-temperature tensile test results show that the yield and tensile strengths decrease with increasing intercritical annealing temperature due to higher volume fraction and larger thickness of reverted austenite. On the other hand, total and uniform elongations, and strain hardening exponent increase due to higher dislocation density because transformation-induced plasticity is promoted with increasing annealing temperature by reduction in reverted austenite stability.

• 대한금속재료학회지
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• 제49권6호
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• pp.488-492
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• 2011

Heat-treatable Al-Mg-Si-Cu alloy sheets, which are expected to have a growing demand, were fabricated by Cross rolling to improve their formability. The mechanical properties and texture of the sheets after the final annealing process were investigated by a tensile test, EBSD and XRD analysis. The grain size of the cross-rolled sheets was remarkably decreased compared to conventional rolled sheets, and the R-value of the cross-rolled sheets was notably increased by about one and a half times that of the conventional rolled sheet. Cube{001}<100> and cubic system orientations were strongly developed in conventional rolled sheets. However, randomized textures were formed in the cross-rolled sheets without specific texture. It is thought that much shear deformation was induced during the cross rolling. The results show that the cross rolling method is effective for improving the R-value of aluminum alloys sheets and their grain refinement. As a result, it is considered that cross rolling is effective for improving formability.

• 한국주조공학회지
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• 제44권4호
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• pp.97-102
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• 2024

본 연구는 부분적으로 비정질 구조와 특성을 가진 Zr-14Cu-7.5Ni-2.6Al 광폭 리본의 특성을 Hall effect, SEM-EDX, XRD 등을 사용하여 분석하였다. 멜트 스피닝 방법으로 제작된 이 Zr-14Cu-7.5Ni-2.6Al 기반 합금 리본은 두께가 96㎛ 이하이고 폭이 100mm이다. 인장강도 l,641MPa, 항복강도 l,541MPa, 연신율 1%, 탄성계수 98GPa의 성능을 나타냈다. Bulk concentration, Resistivity, Mobility 값은 일반적인 heavy doping 세라믹과 금속의 중간값을 보이고 일반 금속보다 약 100배 정도 약하여 Si에 근접하며 전기 전도도가 좋은 편이다. 또한, 극한 온도에서의 폴딩 테스트를 수행하여 -20℃에서 150,000회, 24℃에서 300,000회, 60℃에서 150,000회를 견디며 폴딩 불량이 나타나지 않았다. 이 결과는 Zr-14Cu-7.5Ni-2.6Al 광폭리본 합금의 우수한 내구성과 신뢰성을 보여주며, 이러한 합금을 사용한 전자 제품의 개발 가능성을 시사한다.