• Title/Summary/Keyword: AlO(OH)

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Physical Properties of the Al2O3 Thin Films Deposited by Atomic Layer Deposition (ALD법으로 제조된 Al2O3 박막의 물리적 특성)

  • Kim, Jae-Bum;Kwon, Duk-Ryel;Oh, Ki-Young;Lee, Chong-Mu
    • Korean Journal of Materials Research
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    • v.12 no.6
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    • pp.493-498
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    • 2002
  • $Al_2O_3$ is a promising gate dielectric because of its high dielectric constant, high resistivity and low leakage current. Since $OH^-$ radical in $Al_2O_3$ films deposited by ALD using TMA and $H_2O$ degrades the good properties of $Al_2O_3$, TMA and $O_3$ were used to deposite $Al_2O_3$ films and the effects of $O_3$ on the properties of the $Al_2O_3$ films were investigated. The growth rate of the $Al_2O_3$ film under the optimum condition was 0.85 $\AA$/cycle. According to the XPS analysis results the $OH^-$ concentration in the $Al_2O_3$ film deposited using $O_3$ is lower than that using $H_2O$. RBS analysis results indicate the chemical formula of the film is $Al_{2.2}O_{2.8}$. The carbon concentration in the film detected by AES is under 1 at%. SEM observation confirms that the step coverage of the $Al_2O_3$ film deposited by ALD using $O_3$ is nearly 100%.

Effect of pH on Pore Characteristics in Synthesis of High Porous AlO(OH) Gel by Hydrolysis of Al2(SO4)3 and Na2SO4 Mixed Solution (Al2(SO4)3와 Na2SO4 혼합용액의 가수분해에 의한 고기공 AlO(OH) 겔의 합성에서 pH가 기공특성에 미치는 영향)

  • Park, Byung-Ki;Choe, Dong-Uk;Lee, Jae-Rock
    • Journal of the Korean Ceramic Society
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    • v.44 no.6 s.301
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    • pp.325-330
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    • 2007
  • High porous AlO(OH) gel is used in precursor of ceramic material, coating material and porous catalyst. For use of these, not only physiochemical control for particle morphology, pore characteristic and peptization but also studies of synthetic method for preparation of high porous AlO(OH) gel were required. In this study, high porous AlO(OH) gel was prepared through the aging and filtration process of aluminum hydroxides gel precipitated by the hydrolysis reaction of $Na_2CO_3$ solution and $Al_2(SO_4)_3$ and $Na_2SO_4$ mixed solution. In this process, optimum synthetic condition of AlO(OH) gel having excellent pore volume as studying the effect of hydrolysis pH on gel precipitates has been studied. Hydrolysis pH brought about numerous changes on crystal morphology, surface area, pore volume and pore size. Physiochemical properties of gel were investigated as using XRD, TEM, TG/DTA, FT-IR and $N_2$ BET method.

Synthesis and Properties of $Al_2$$O_3$-$TiO_2$Composites by Wet Method -1. Synthesis of $Al_2$$O_3$-$TiO_2$Composite Powders- (습식법에 의한 $Al_2$$O_3$-$TiO_2$복합체의 합성 및 특성연구 -1. $Al_2$$O_3$-$TiO_2$계 복합분체의 합성(1)-)

  • 류수착;엄지영
    • Journal of the Korean Ceramic Society
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    • v.38 no.5
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    • pp.412-417
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    • 2001
  • 본 연구는 습식법으로 수산화 알루미늄과 티타니아를 출발물질로 하여 $Al_2$O$_3$-TiO$_2$복합분체를 제조하였으며, 2 mol의 Al(OH)$_3$분말에 대하여 TiO$_2$분말량을 1, 3, 5, 7, 9, 11 wt%로 첨가하여 $Al_2$O$_3$-TiO$_2$복합분체의 특성을 조사하였다. 제조된 $Al_2$O$_3$-TiO$_2$계 복합분체는 $700^{\circ}C$~140$0^{\circ}C$까지 하소하여 XRD 분석을 한 결과 100$0^{\circ}C$까지는 TiO$_2$(rutile)상과 η-Al$_2$O$_3$상이 공존하다가 110$0^{\circ}C$부터 130$0^{\circ}C$까지는 η-Al$_2$O$_3$에서 $\alpha$-Al$_2$O$_3$로의 상전이가 일어나서 $\alpha$-Al$_2$O$_3$상과 TiO$_2$(rutile)상이 나타났으며 하소온도 140$0^{\circ}C$, TiO$_2$첨가량이 5 wt%일 때부터 $Al_2$TiO$_{5}$가 생성되기 시작하였다. TiO$_2$첨가량에 따른 비표면적값은 첨가량이 7 wt%까지는 감소하였으나 그 이상 첨가시 증가하였다. 입도분석 결과 평균입경은 15.74~23.21$mu extrm{m}$로서 TiO$_2$첨가량이 3 wt%일 때 가장 작은 값을 가졌으며 TiO$_2$첨가량은 5 wt% 이상부터 점차 감소하였다.

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Effects of Concentration of Precipitants and Aging Time on Synthesis of Mn-Substituted Barium Hexaaluminates by Homogeneous Precipitation (균일용액침전법을 이용한 침전제의 농도와 합성 시간에 따른 Mn이 대체된 바륨 헥사알루미네이트의 합성의 영향)

  • Park, Ji Yun;Jung, You Shick;Rhee, Young Woo
    • Korean Chemical Engineering Research
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    • v.56 no.3
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    • pp.349-355
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    • 2018
  • $BaMnAl_{11}O_{19}$ was prepared by urea-induced homogeneous precipitation and characterized by X-ray diffraction and scanning electron microscopy. At increased precipitant concentrations, AlOOH replaced $Al(OH)_3$ as an Al precursor. $BaMnAl_{11}O_{19}$ exhibited enhanced catalytic combustion performance and inhibited CO generation. Catalytic performance was also enhanced by the presence of $BaAl_2O_4$ and $BaMnAl_{11}O_{19}$. Compared to $BaAl_2O_4$, $BaMnAl_{11}O_{19}$ exhibited superior catalytic combustion activity.

Synthesis of Single Crystalline Analcime and Its Single-crystal Structure, |Na0.94(H2O)|[Si2.06Al0.94O6]-ANA: Determination of Cation Sites, Water Positions, and Si/Al Ratios (결정성 아날심(|Na0.94(H2O)|[Si2.06Al0.94O6]-ANA)의 합성 및 단결정구조: 양이온 및 물 분자의 위치, Si/Al 비의 결정)

  • Seo, Sung-Man;Suh, Jeong-Min;Ko, Seong-Oon;Lim, Woo-Taik
    • Journal of the Korean Chemical Society
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    • v.55 no.4
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    • pp.570-574
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    • 2011
  • Large colorless single crystals of analcime with diameters up to 0.20 mm have been synthesized from gels with the composition of $3.00SiO_2$ : $1.50NaAlO_2$ : 8.02NaOH : $454H_2O$ : 5.00TEA. The fully $Na^+$-exchanged analcime have been prepared with aqueous 0.1 M NaCl (pH adjusted from 6 to 11 by dropwise addition of NaOH). The single-crystal structure of hydrated $|Na_{0.94}(H_2O)|[Si_{2.06}Al_{0.94}O_6]$-ANA per unit cell, a=13.703(3) ${\AA}$, has been determined by single-crystal X-ray diffraction technique in the orthorhombic space group Ibca at 294 K. The structure was refined using all intenties to the final error indices (using only the 1,446 reflections for which $F_o$ > $4{\sigma}(F_o))R_1/wR_2$ = 0.054/0.143. About 15 $Na^+$ ions are located at three nonequivalent positions and octahedrally coordinated. The chemical composition is $Na_{0.94}(H_2O)Si_{2.06}Al_{0.94}O_6$. The Si/Al ratio of synthetic analcime is 2.19 determined by the occupations of cations, 14.79, in the single-crystal determination work.

Effect of Water and Aluminum Sulfate Mole Ratio on Pore Characteristics in Synthesis of AlO(OH) Nano Gel by Homogeneous Precipitation (균일침전에 의한 AlO(OH) 나노 겔 합성에서 물/황산알루미늄의 몰 비가 세공특성에 미치는 영향)

  • Choe, Dong-Uk;Park, Byung-Ki;Lee, Jung-Min
    • Journal of the Korean Ceramic Society
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    • v.43 no.9 s.292
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    • pp.564-568
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    • 2006
  • AlO(OH) nano gel is used in precursor of ceramic material, coating material and catalyst. For use of these, not only physiochemical control for particle morphology, pore characteristic and peptization but also studies of synthetic method for preparation of advanced application products were required. In this study, AlO(OH) nano gel was prepared through the aging and drying process of aluminum hydroxides gel precipitated by the hydrolysis reaction of dilute NaOH solution and aluminum sulfate solution. In this process, optimum synthetic condition of AlO(OH) nano gel having excellent pore volume as studying the effect of water and aluminum sulfate mole ratio on gel precipitates has been studied. Water and aluminum sulfate mole ratio brought about numerous changes on crystal morphology, surface area, pore volume and pore size. Physiochemical properties were investigated as using XRD, TEM, TG/DTA, FT-IR, and $N_2$ BET method.

Synthesis and Hydration Property of 3CaO.${3Al_2}{O_3}$.$CaSO_4$ Clinker by Solid State Reaction (고상반응에 의한 3CaO.${3Al_2}{O_3}$.$CaSO_4$ 클링커의 제조 및 수화)

  • 전준영;김형철;조진상;송종택
    • Journal of the Korean Ceramic Society
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    • v.37 no.5
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    • pp.459-465
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    • 2000
  • 3CaO.3Al2O3.CaSO4(C4A3)clinker was prepared by solid state reaction and then its hydration property was investigated. C4A3 clinker was fired at various temperatures in the range of 700~135$0^{\circ}C$. The hydration of it was studied by XRD, DSC, Solid-state 27Al MAS NMR and SEM. According to the results, the Ca4A3 clinker was produced by reacting calcium aluminates with CaSO4 and Al2O3 and C4A3 was formed as a main phase after calcining at 120$0^{\circ}C$. The hydration products were mainly calcium monosulfoaluminate hydrate and Al(OH)3, and they were produced after 2hrs of hydration. However the hydration rate was about 74% at 3days.

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Fabrication and Characterization of High Purity Al2O3 by Decomposition of Selicite (세리사이드 분해에 의한 고순도 Al2O3의 제조 및 특성에 관한 연구)

  • 이경희;박한수;송명신
    • Journal of the Korean Ceramic Society
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    • v.24 no.5
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    • pp.431-436
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    • 1987
  • High purity Al2O3 has been extracted from serlcite of clayminerals, selicite was treated by H2SO4(2N∼18N) solution, NH4OH treatment(PH8.5∼10.0) and metallic impurities such as Fe were removed by NaOH treatment. The tendency of extraction yield of ${\alpha}$-Al2O3 have been investigated by relating reaction time, acid concentration. Reaction products were analyzed by DT-TGA, chemical analysis and X-ray diffractometer. Prepared ${\alpha}$-Al2O3 power is fired in air at 1400$^{\circ}C$, 1600$^{\circ}C$ 2hr. The results are as follows; 1. The most suitable extracting conditions of ${\alpha}$-Al2O3 from Selicite were N-H2SO4, 120 min acidtreating time. 2. The optimum pH condition was 9.0. 3. Physical properties of sintered Al2O3 bodies were as follows. Relative density is 99%. Water absorption is 0.26%. Rock well hardness is 89.

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Some Physical and Chemical Properties of Synthesized Dawsonite (합성 Dawsonite의 물리적, 화학적 성질)

  • Kwon Sang Wook
    • Journal of the Korean Chemical Society
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    • v.13 no.2
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    • pp.149-156
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    • 1969
  • $NaAl(OH)_2CO_3$was synthesized using colloidal earth (Allophane) as the starting material and some of its were studied in detail. It was found that Dawsonite was formed in the pH range (pH 12.5~12.0) that the concentration of $HCO_3^-$ was just begun to increase and the presence of $HCO_3^-$ in the product was clarified from the infrared absorption spectrum. The chemical formular of Dawsonite was therefore presumed as $NaAlO (OH) HCO_3$. From toahhe results of X-ray powder diffraction, both peaks at 5.7 $\AA$ and 2.8 $\AA$ were observed, and fibrous crystalline structure was observed from electron micrograph and also found from the microscopic electron diffraction at 5.7 $\AA.$ Therefore the fibrous axis was considered as =Al=O2=Al=O2=Al=(*image) direction. True specific gravity of Dawsonite was 2.44 and its porosity was 91.4%. It was practically insoluble in water, but decomposed in the boiling water to form Pseudo Boehmite. Stable pH range of Dawsonite was about 4.5~11.5. From the results of D.T.A. and T.G.A., it was observed that $CO_2$was liberated at $350^{\circ}C$, and $H_2O$ at $650^{\circ}C$, and converted into strongly hygroscopic $NaAlO_2$, which was easily decomposed in water into $\beta-Al(OH)_3(Bayerite)$ and NaOH.

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Synthesis of Mullite from Kaolin and Industrial By-Products (Kaolin과 산업부산물을 이용한 Mullite 합성)

  • 김인섭;김동한;심광보;이명웅;이병하
    • Journal of the Korean Ceramic Society
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    • v.36 no.1
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    • pp.1-6
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    • 1999
  • Mullite was synthesized by adding industrial by-products, Al(OH)3 and boehmite, to a natural kaolin of pink A-grade. The attrition milling method, which has simultaneously milling and mixing effects, was carried out. The specimens were formed by uni-axial pressing of 1.5 ton/$\textrm{cm}^2$ and then fired. When the Al(OH)3 was added, the flexural strength of 71.8 wt% Al2O3 specimen fired at 1600$^{\circ}C$ for 4 hrs was 22.3 MPa and the amount of synthesized of 71.8 wt% Al2O3 specimen fired at 1600$^{\circ}C$ for 10 hrs was about 85%. When the boehmite was added, the flexural strength of 68 wt% Al2O3 speciment fired at 1600$^{\circ}C$ for 10 hrs was 147 MPa, and the high purity mullite of about 95% was synthesized for 71.8 wt% Al2O3 specimen fired at 1600$^{\circ}C$ for 10 hrs.

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