Physical Properties of the Al2O3 Thin Films Deposited by Atomic Layer Deposition |
Kim, Jae-Bum
(Department of Material Science and Engineering. Inha University)
Kwon, Duk-Ryel (Department of Material Science and Engineering. Inha University) Oh, Ki-Young (Jusung Engineering Co. Ltd.) Lee, Chong-Mu (Department of Material Science and Engineering. Inha University) |
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