• 제목/요약/키워드: AlN layer

검색결과 731건 처리시간 0.026초

MgFe$_2$/GeO$_2$ AR Coating on o-type(100) Cz Silicon Solar Cells

  • Lim, D.G.;Lee, I.;Lee, U.J.;Yi, J.
    • Transactions on Electrical and Electronic Materials
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    • 제1권4호
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    • pp.11-15
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    • 2000
  • This paper presents a process optimization of antireflection (AR) coating on crystalline Si solar cells. Theoretical and experimental investigations were performed on a double-layer AR(DLAR) coating of MgFe$_2$/GeO$_2$. We investigated GeO$_2$ films as an AR layer because they have a proper refractive index of 2.46 and demonstrate the same lattice constant as Si substrate. RF sputter grown GeO$_2$ film showed deposition temperature strong dependence. The GeO$_2$ at 400$\^{C}$ exhibited a strong (111) preferred orientation and the lowest surface roughness of 6.87 $\AA$. Refractive index of MgFe$_2$film was measured as 1.386 for the most of growth temperature. An optimized DLAR coating showed a reflectance as low as 2.04% in the wavelengths ranged from 0.4 ㎛ to 1.1 ㎛. Solar cells with a structure of MgFe$_2$/GeO$_2$/Ag/N$\^$+//p-type Si/P$\^$+//Al were investigated with the without DLAR coatings. We achieved the efficiency of solar cells greater than 15% with 3.12% improvement with DLAR coatings. Further details about MgFe$_2$,GeO$_2$ films, and cell fabrication parameters are presented in this paper.

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Effects as Plasma Treatments on CdS Buffer Layers in CIGS Thin Film Solar Cells

  • Jo, Hyun-Jun;Sung, Shi-Joon;Hwang, Dae-Kue;Bae, In-Ho;Kim, Dae-Hwan
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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    • pp.171-171
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    • 2012
  • We have studied the effects of plasma treatments on CdS buffer layers in CIGS thin film solar cells. The CdS layers were deposited on CIGS films by chemical bath deposition (CBD) method. The RF plasma treatments of the CdS thin films were performed with Ar, $O_2 and $N_2 gases, respectively. After plasma treatments, the solar cells with Al:ZnO/i-ZnO/CdS/CIGS structures were fabricated. The surface properties of the CdS/CIGS thin films after plasma treatments were investigated with SEM, EDX and AFM measurements. The electrical properties of manufactured solar cell were discussed with the results of current-voltage measurements. The plasma treatments have a strong influence on the open circuit voltage (VOC) and the fill factor of the solar cells. Finally, a correlation between the surface properties of CdS layer and the efficiencies of the CIGS thin film solar cells is discussed.

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회전 후 묵밭의 식생 천이 진행에 따른 환경요인의 변화와 토양 비옥도의 회복 (Seral Changes in Environmental Factors and Recovery of Soil Fertility during Abandoned Field Succession after Shifting Cultivation)

  • Lee, Kyu Song;Joon-Ho Kim
    • The Korean Journal of Ecology
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    • 제18권2호
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    • pp.243-253
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    • 1995
  • Seral changes in environmental factors and recovery of soil fertility during abandoned field succession after shifting cultivation were investigated in eastern Kangwon-Do, Korea. Relative light intensity of herb and shrub layer decreased gradually until 50 years and increased slightly thereafter. Amount of litter and nutrients derived from it were depicted as a parabola form showing the gradual increment during the first 50 years and slight decrease thereafter. Organic matter, pH value, total-N and Mg of soil were plotted as an early depletion-mid pinnacle form showing the extrems depletion during the first 10 years, abrupt increase in about 20 or 50 years and gradual decrease thereafter. Ca, Al, Mn and Na of soil were depicted as a pinnacle form showing the peak in about 20 or 50 years. Thickness and field capacity of soil increased gradually, but K and total-P did not show any tendency as succession proceeded. The soil fertility, overall capacity of soil nutrients and water for plant growth, was plotted as the early depletion-mid pinnacle form.

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집속이온빔 연마에 의한 패턴의 형태에 관한 연구 (A Study on the Shape of the Pattern Milled Using FIB)

  • 정원채
    • 한국전기전자재료학회논문지
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    • 제27권11호
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    • pp.679-685
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    • 2014
  • For the measurements of surface shape milled using FIB (focused ion beam), the silicon bulk, $Si_3N_4/Si$, and Al/Si samples are used and observed the shapes milled from different sputtering rates, incident angles of $Ga^+$ ions bombardment, beam current, and target material. These conditions also can be influenced the sputtering rate, raster image, and milled shape. The fundamental ion-solid interactions of FIB milling are discussed and explained using TRIM programs (SRIM, TC, and T-dyn). The damaged layers caused by bombarding of $Ga^+$ ions were observed on the surface of target materials. The simulated results were shown a little bit deviation with the experimental data due to relatively small sputtering rate on the sample surface. The simulation results showed about 10.6% tolerance from the measured data at 200 pA. On the other hand, the improved analytical model of damaged layer was matched well with experimental XTEM (cross-sectional transmission electron microscopy) data.

R-면 사파이어 기판 위에 제작된 계단형 모서리 조셉슨 접합의 특성 (Fabrication and Characterization of Step-Edge Josephson Junctions on R-plane Al$_2O_3$ Substrates)

  • 임해용;김인선;김동호;박용기;박종철
    • 한국초전도학회:학술대회논문집
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    • 한국초전도학회 1999년도 High Temperature Superconductivity Vol.IX
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    • pp.147-151
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    • 1999
  • YBCO step-edge Josephson junction were fabricated on sapphire substrates. The steps were formed on R-plane sapphire substrates by using Ar ion milling with PR masks. The step angle was controlled in the wide range from 25$^{\circ}$ to 50$^{\circ}$ by adjusting both the Ar ion incident angle and the photoresist mask rotation angle relative to the incident Ar ion beam. CeO$_2$ buffer layer and in-situ YBa$_2Cu_3O_{7-{\delta}}$ (YBCO) thin films was deposited on the stepped R-plane sapphire substrates by pulsed laser deposition method. The YBCO film thickness was varied to obtain the ratio of film thickness to step height in the range from 0.5 to 1. The step edge junction exhibited RSJ-like behaviors with I$_cR_n$ product of 100 ${\sim}$ 300 ${\mu}$V, critical current density of 10$^3$ ${\sim}$ 10$^5$ A/ cm$^2$ at 77 K.

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X-band용 MMIC 오실레이터 설계연구 (Studies on MMIC oscillator using HBT for X-band)

  • 채연식;안단;이진구
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 1998년도 하계종합학술대회논문집
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    • pp.387-390
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    • 1998
  • In this paper, HBT's with lower phase noise and passive elements, such as resistors, capacitors and inductors, for resonance and impedance matching networks are designed, fabricated, tested, and carefully analysed, respectively, and then, they are integrated for the design and fabrication of functional X-band oscillators with lower phase noise. Epi-wafers for HBT's with the structure of graded $Al_{x}$G $a_{1-x}$ As emitter and C-doped base layer of 700.angs. thick were used to specially emphasize the improvement of $f_{T}$ and $f_{max}$, and the lowering of phase noise, in design aspects. At the test frequencies of 12GHz, capacitances of MIM capacitors, spiral inductor, and resistances are 0.5~10pF, 0.4~11.06nH, and 20~1,380.ohm., respectively. The emitter size of HBY's for the X-band MMIC oscillators is 3*10u $m^{2}$, and find chip size is 0.9*0.9m $m^{2}$..EX>.

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Nonlocal dynamic modeling of mass sensors consisting of graphene sheets based on strain gradient theory

  • Mehrez, Sadok;Karati, Saeed Ali;DolatAbadi, Parnia Taheri;Shah, S.N.R.;Azam, Sikander;Khorami, Majid;Assilzadeh, Hamid
    • Advances in nano research
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    • 제9권4호
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    • pp.221-235
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    • 2020
  • The following composition establishes a nonlocal strain gradient plate model that is essentially related to mass sensors laying on Winkler-Pasternak medium for the vibrational analysis from graphene sheets. To achieve a seemingly accurate study of graphene sheets, the posited theorem actually accommodates two parameters of scale in relation to the gradient of the strain as well as non-local results. Model graphene sheets are known to have double variant shear deformation plate theory without factors from shear correction. By using the principle of Hamilton, to acquire the governing equations of a non-local strain gradient graphene layer on an elastic substrate, Galerkin's method is therefore used to explicate the equations that govern various partition conditions. The influence of diverse factors like the magnetic field as well as the elastic foundation on graphene sheet's vibration characteristics, the number of nanoparticles, nonlocal parameter, nanoparticle mass as well as the length scale parameter had been evaluated.

과잉 Ti 성분의 티탄산 바륨과 실리콘 산화막으로 구성된 안티퓨즈 (Antifuse with Ti-rich barium titanate film and silicon oxide film)

  • 이재성;이용현
    • 전자공학회논문지D
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    • 제35D권7호
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    • pp.72-78
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    • 1998
  • This paper is focused on the fabrication of reliable novel antifuse, which could operate at low voltage along with the improvement in OFF and ON-state properties. The fabricated antifuse consists of Al/BaTi$_{2}$O$_{3}$/SiO$_{2}$/TiW-silicide structure. Through the systematic analyses for bottom metal and the intermetallic insulator, material and electri cproperties were investiaged. TiW-silicide as the bottom electrode had smooth surface with average roughness of 11.angs. at 10X10.mu.m$^{2}$ and was bing kept as-deposited SiO$_{2}$ film stable. Amorphous BaTi$_{2}$O$_{3}$ film as the another insulator was chosen because of its low breakdown strength (2.5MV/cm). breakdown voltage of antifuse is remarkably reduced by using BaTi$_{2}$O$_{3}$ film, and leakage current of that maintained low level due to the SiO$_{2}$ film. Low ON-resistance (46.ohm./.mu.m$^{2}$) and low programming voltage(9.1V) can be obtained in theses antifuses with 220.angs. double insulator layer and 19.6X10$^{-6}$ cm$^{2}$ area, while keeping sufficient OFF-state reliability (less than 1nA).

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The Effects of Growth Temperature and Substrate Tilt Angle on GalnP/GaAs Tandem Solar Cells

  • Jun, Dong-Hwan;Kim, Chang-Zoo;Kim, Hog-Young;Shin, Hyun-Beom;Kang, Ho-Kwan;Park, Won-Kyu;Shin, Ki-Soo;Ko, Chul-Gi
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제9권2호
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    • pp.91-97
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    • 2009
  • The performance of GaInP/GaAs tandem solar cells with AlInP growth temperatures of 680$^{\circ}C$ and 700 $^{\circ}C$ on n-type GaAs (100) substrate with 2$^{\circ}$ and 6$^{\circ}$ tilt angles has been investigated. The series resistance and open circuit voltage of the fabricated tandem solar cells are affected by the substrate tilt angles and the growth temperatures of the window layer when zinc is doped in the tunnel diode. With carbon doping as a p-type doping source in the tunnel diode and the effort of current matching between top and bottom cells, GaInP/GaAs tandem solar cell has been exhibited 25.58% efficiency.

혼성물리화학기상 증착법으로 여러가지 불순물층 위에 제조한 $MgB_2$ 박막에 대한 연구 (Study of $MgB_2$ Films Grown on Various Impurity Layers by using HPCVD Method)

  • 박세원;성원경;정순길;강원남
    • Progress in Superconductivity
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    • 제10권1호
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    • pp.35-39
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    • 2008
  • By using the hybrid physical-chemical vapor deposition (HPCVD) technique, we have fabricated $MgB_2$ thick films on $Al_{2}O_3$ substrates with various impurity layers of Ni, Ti, and SiC. We have found a significant enhancement of the critical current density ($J_c$) for $MgB_2$ films grown on impurity layered substrates, indicating that additional impurity layers were provided as possible pinning sites by chemical doping in $MgB_2$ films. All samples doped by Ni, Ti, and SiC were observed to have high superconducting transition temperatures of 39 - 41 K. The $J_c$ of $MgB_2$ films grown on SiC impurity layered substrates showed three times higher than that of undoped films at high magnetic fields above 1 T.

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