• Electrical & Electronic Materials
• /
• v.8 no.3
• /
• pp.340-351
• /
• 1995

Electrical, physical and optical properties of Aluminum(Al), Copper(Cu) thin films were investigated in order to establish the optimum sputtering parameters in Liquid Crystal Display (LCD) panel applications. DC-magnetron sputtered film on coming 7059 samples were fabricated with variations of deposition power densities, deposition pressures and substrate temperatures. Low resistivity films(AI;2.80 .mu..ohm.-cm, Cu:1.84 .mu..ohm-cm),which lower than the reported values, were obtained under sputtering parameters of power density(250W), substrate temperature(450-530.deg. C) and 5*10$\^$-3/ Torr deposition pressure. Expected columnar growth and stable grain growth of both films was observed through the Scanning Electron Microscope(SEM) micrographs. Dependency of the applicable defect-free film density upon depositon power and temperature was also characterized. Not too noticable variations in X-ray diffraction patterns were remarked under the alterations of sputtering parameters. High optical reflectivities of Al, Cu films, approximately 70-90 %, showed high degree of surface flatness.

• Journal of the Institute of Electronics Engineers of Korea SD
• /
• v.40 no.3
• /
• pp.1-9
• /
• 2003

In this paper, we designed a highly suppressed sidelobe ladder type RF SAW bandpass filter based on 1-port resonator, for 800 MHz mobile communication system. In order to get the highest device characteristics, we optimized some important parameters such as the electrode thickness, electrode lambda weghting of the reflectors, and static capacitance ratio. Furthermore, we fabricated the Tx and Rx. filter using optimized parameters. Implemented filters can be used in 800 MHz mobile communication system and external impedance matching circuits are not needed. RF filter was fabricated on 36$^{\circ}$LiTaO$_3$ substrates with Al-Cu (W 3 %)and mounted 3.8mm$\times$3.8mm$\times$1.5mm SMD package. Developed filters has 2.3 dB insertion loss in the 25 MHz pass-band, 33MHz with 3-dB insertion loss, stop-band rejection of 30 dB, passband ripple is less than 0.5 The power durability of the filters measured about 3.5W and the maximum temperature variation within -2$0^{\circ}C$~8$0^{\circ}C$ was 0.09 dB/$^{\circ}C$ of 3-dB insertion loss.

• Journal of Environmental Science International
• /
• v.22 no.8
• /
• pp.945-951
• /
• 2013

Alumina-supported catalysts containing different transition metals such as Cu, Cr, Mn, Zn, Co, W were investigated for their activity in the selective oxidation of toluene. Catalytic oxidation of toluene was investigated at atmospheric pressure in a fixed bed flow reactor system over transition metals with $Al_2O_3$ catalyst. The result showed the order of catalytic activities for the complete oxidation of toluene was Mn > Cu> Cr> Co> W> Zn for 5wt.% transition $metals/Al_2O_3$. $Mn/Al_2O_3$ catalysts containing different amount of Mn were characterized by X-ray diffraction spectroscopy for decision of loading amount of metal to alumina. 5 wt.%$Mn/Al_2O_3$ catalyst exhibits the highest catalytic activity, over which the toluene conversion was up to 90% at a temperature of $289^{\circ}C$.

• Journal of the Microelectronics and Packaging Society
• /
• v.14 no.1
• /
• pp.61-68
• /
• 2007

Interfacial fracture energy(${\Gamma}$) between $Al_2O_3$ thin film deposited by Atomic Layer Deposition(ALD) and sputter deposited Cu electrode for embedded PCB applications is measured from a $90^{\circ}$ peel test. While the interfacial fracture energy of $Cu/Al_2O_3$ is very poor, Cr adhesion layer increases the interfacial fracture energy to $39.8{\pm}3.2g/mm\;for\;Ar^+$ RF plasma power density of $0.123W/cm^2$, which seems to come from the enhancement of the mechanical interlocking and Cr-O chemical bonding effects.

• Journal of the Korean Magnetics Society
• /
• v.5 no.5
• /
• pp.421-426
• /
• 1995

The magnetic properties of the hot-pressed magnets made from the Fe-Nd-B alloys, mechanically ground and subsequently blended with binary additives such as Al-Cu and Ag-Zn before hot pressing, were investigated. The coercivities of the magnets increased as the concentration of Al-Cu increased up to 1 wt.% or up to 3 wt.% in the case of Ag-Zn. At higher concentrations the coercivities decreased markedly. The maximum gain in coercivity by the addition was about 20 %. typical values of $_{i}H_{c}$ and $B_{r}$ of a hotpressed magnet containing 1 wt.% Al-Cu were 18 kOe and 7 kG, respectively. It was found that Cu, Ag, and Zn, which diffused into the magnet during hot pressing, were mostly concentrated on the Nd-rich grain boundary phase whereas Al was present not only in the grain boundary region but also in the matrix grains.

• Proceedings of the Korean Society of Propulsion Engineers Conference
• /
• 1995.05a
• /
• pp.85-92
• /
• 1995

HTPB/AP/Al이 기본 조성인 ADP 302 혼합형 추진제를 대상으로 4종의 금속선(Ag, Cu, Al, Ni-Cr)을 삽입하여 금속선 직경(0.1mm~0.8mm)별로 압력에 따른 금속선과 인접한 추진제의 연소 속도($r_w)를 측정하여 금속선 삽입 추진제의 연소 속도 증가비($r_w$/$r_sb$)와 압력 지수( n )의 변화를 고찰한 결과 금속선 종류에 따른 연소 속도 증가비($r_w$/$r_sb$)는 Ag> Cu>Al>Ni-Cr선을 삽입한 추진제의 순으로 나타났고 금속선의 열확 산 계수의 크기순과 일치하였다. Buckingham $\pi$ 이론을 적용한 무차원 해석으로부터 실험식을 구하여, 이 실험식에 의해 계산된 ($r_w)와 실험으로부터 얻어진 ($r_w)를 서로 비교하여 본 결과 잘 부합됨을 알 수 있었다. 또한 금속선 수에 따른 추진제 그레인의 연소 면적을 해석적으로 계산하여,($r_w$/$r_sb$)가 2, 3, 4, 5 배로 증가함에 따른 시간에 따른 연소 면적 증가비의 변화를 금속선 수에 따라서 비교하여 본 결과 정상 상태에서의 그레인의 연소 면적의 증가비($A_b$/$A_0$)는 금속선에 인접한 추진제의 연소 속도 증가비($r_w$/$r_sb$)와 일치했으며, 정상 상태의 연소 면적 증가비는 삽입된 금속선의 수와는 무관하며 정상 상태에 도달하는 시간에만 영향을 주는 것으로 나타났다.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2014.02a
• /
• pp.354.2-354.2
• /
• 2014

최근 반도체 산업의 발전에 따라 반도체 소자 내 배선재료로 사용되던 Aluminium (Al)의 대체물로 Copper (Cu)가 사용되고 있다. Cu는 Al보다 우수한 전도성과 비용이 저렴하다는 장점이 있으나 반도체 기판과의 확산으로 이를 해결해야만 하는 문제점이 있다. 이는 Si와 Cu사이에 확산방지막을 사용하여 해결할 수 있는데 Hafnium Nitride (HfN) 박막은 다른 물질과 비교해 고온에서의 안정성과 낮은 비저항을 가지고 있어 주목을 받고 있다. 본 연구에서는 rf magnetron sputter 방법으로 박막 증착 시에 인가하는 rf power가 박막의 표면 특성에 어떠한 영향을 미치는지 nano-indenter를 사용해 surface hardness와 elastic modulus의 변화를 중심으로 알아보았다. 시료는 rf magnetron sputter로 증착 시 인가하는 plasma power를 60W와 80W로 달리하여 증착하였다. 증착가스는 Ar과 $N_2$를 조절하여 사용하였고 총 유량을 40 sccm 으로 고정하였으며, 이 때 압력은 3mTorr로 유지하였다. 실험결과 plasma power를 80W로 인가하여 증착한 시료의 surface hardness (18.48 GPa)가 60W로 증착한 시료의 surface hardness (12.03 GPa)보다 큰 값을 나타내었다. 이와 마찬가지로 80W로 증착한 시료의 elastic modulus(187.16 GPa)도 60W로 증착한 시료의 탄성계수 (141.15 GPa)보다 큰 값을 나타내었다. 이는 증착 시 인가하는 plasma power의 크기가 증가하면 박막표면에 compressive stress가 생성되어 박막의 surface hardness와 elastic modulus가 상대적으로 높게 측정되는 것으로 생각된다.

• Current Photovoltaic Research
• /
• v.3 no.1
• /
• pp.32-38
• /
• 2015

CIGS solar cell consisted of various films. In this research, we investigated electrode materials in $Cu(In,Ga)Se_2$ (CIGS) cells, including Al-doped ZnO (ZnO:Al), intrinsic ZnO (i-ZnO), and Al films. The sputtered ZnO:Al film with a sputtering power at 200W showed the lowest series resistance and highest cell efficiency. The electrical resistivity of the 200-W sputtered ZnO:Al film was $5.2{\times}10^{-4}{\Omega}{\cdot}cm$ by the rapid thermal annealing at $200^{\circ}C$ for 1 min. The electrical resistivity of i-ZnO was not measurable due to its high resistance. But the optical transmittance was highest with less oxygen supply and high efficiency cell was achieved with $O_2/(Ar+O_2)$ ratio was 1% due to the increase of short-circuit current. No significant change in the cell performance by inserting a Ni layer between Al and ZnO:Al films was observed.

• Journal of Powder Materials
• /
• v.11 no.3
• /
• pp.193-201
• /
• 2004

1960년 Au-Si계 합금에서 처음으로 비정질상이 급속 응고법에 의해 보고된 이래/sup 1)/ 지난 40년 간 많은 합금계에서 비정질상이 보고되어졌다. 대표적으로 Fe-, Ni-, Co기 합금 등 많은 합금계에서 비정질상이 보고되었으나, 비정질상의 형성을 위해서는 약 105 K/s이상의 높은 냉각속도를 필요로 하였다. 1980년대 수백 K/s의 낮은 냉각속도 하에서도 비정질상이 형성될 수 있는 다원계 합금(multi-component alloy)이 Mg-Ln-(Ni, Cu, Zn), Ln-Al-TM 합금에서 보고되어 졌으나 많은 관심을 받지 못하다가 1993년 Zr-Ti-Ni-Cu-Be 합금에서 수 ㎝ 크기의 비정질합금 제조가 보고되면서 전 세계적으로 많은 관심을 받게 되었다. Zr-Ti-Ni-Cu-Be계 벌크 비정질 합금이 보고된 후 Zr-(Nb,Pd)-Al-TM, Pd-Cu-Ni-P, Fe-Co-Zr-Mo-W-B, Ti-Zr-Ni-Cu-Sn등 여러 합금계에서 벌크 비정질 합금이 보고되었다. (중략)

• Textile Coloration and Finishing
• /
• v.18 no.5 s.90
• /
• pp.22-29
• /
• 2006

The purpose of this study was to investigate the dyeability and antibacterial activity on wool fabric dyed with cochineal at variable dyeing conditions. Al, Cr, Fe, Cu and Sn were used as mordants and adsorption was compared with different mordanting methods. The optimum dyeing conditions of wool fabrics were dyeing concentration 2.0%(o.w.s), dyeing temperature $60^{\circ}C$, pH 3 and dyeing time 30 minutes. The pre-mordanting method was preferred for Al and Cr, and the post-mordanting one was preferred for Cu, Sn and Fe to achieve better dyeing. The optimum mordanting conditions of wool fabrics dyed with cochineal were mordanting concentration of 1%(o.w.s), mordanting temperature $60^{\circ}C$, and dyeing time 30 minutes. Wool fabrics dyed with cochineal showed a little antibacterial activity, but it was increased by Cu and Sn mordanting. The light fastness and perspiration fastness of wool fabric treated with cochineal were improved by mordanting.