• Title/Summary/Keyword: Al-AlN system

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Effect of Annealing and Co contents on the Structural and Physical Properties in AlN Thin Films

  • Han, Chang-Suk;Han, Seung-Oh
    • Journal of the Korean Society for Heat Treatment
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    • v.23 no.6
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    • pp.331-337
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    • 2010
  • Aluminum nitride (AlN) thin films containing various amounts of Co content have been deposited by using a two-facing targets type sputtering (TFTS) system. The deposited films were also annealed successively and isothermally at different temperatures. Annealing treatment can control the physical properties as well as the microstructure of AlN films with Co particles. High magnetization and high resistivity are obtainable in AlN films containing dispersed Co particles. The coercivity of the films does not depend on annealing time, but it increases with increasing annealing temperature due to the increase of the grain size. A high saturation magnetization of 46 kG and resistivity of 2200 ${\mu}{\Omega}$-cm was obtained for AlN films containing 25 at% Co.

Synthesis and mechanical properties of $CrAlC_xN_{1-x}$ coatings by a hybrid coating system (하이브리드 코팅 시스템을 이용한 $CrAlC_xN_{1-x}$ 코팅의 합성과 기계적 특성)

  • Choi, Ji-Hwan;Hong, Yeong-Su;Kim, Kwang-Ho
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2009.10a
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    • pp.200-200
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    • 2009
  • 아크이온플래이팅 기술과 DC 마그네트론 스퍼터링 기술이 결합된 하이브리드 코팅 시스템을 이용하여 STS 304와 Si 기판에 4성분계 CrAlCxN1-x 코팅을 증착하였다. 합성된 CrAlCxN1-x 코팅은 주로 유도결합형로 f구성되었다. CrAlCxN1-x 코팅의 carbon 함량이 0.17 at.%일 때 약 34 GPa을 나타내었으며 마찰계수는 carbon 함량이 0에서 1 at.%로 증가함에 따라 0.82에서 0.38까지 크게 감소하였다. 이는 코팅 표면과 steel 볼 사이에 amorphous carbon layer가 형성되어 고체윤활제로 작용한 것으로 사료된다.

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Mechanical Milling of Lithium with Metal Oxide and its Reactivity with Gases

  • Yokoi, Tomomichi;Yamasue, Eiji;Okumura, Hideyuki;Ishihara, Keiichi N.
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 2006.09b
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    • pp.959-960
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    • 2006
  • Li reacts with $N_2$ at room temperature. In order to activate Li, the mechanical milling of Li with stable metal oxide, namely, $Al_2O_3$ and MgO, using a high energy vibrating ball mill was performed. In the case of Li-MgO system, it reacts with $N_2$, but hardly reacts with $O_2$. The reaction with $N_2$ generally produces $Li_3N$, while for some vigorous reactions the $Mg_3N_2$ is produced as the major phases. In the case of $Li-Al_2O_3$ system, reactivities with both $N_2$ and $O_2$ are high. The difference is explained in terms of the reaction mechanism and the Li state.

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Effects of hydrogen gas addition on insulator thin film of Al/AlN/GaAs MIS system fabricated by sputtering method (스퍼터링법으로 저작한 Al/AlN/GaAs MIS 구조에서 절연박막에 수소가스첨가가 미치는 영향)

  • Kwon, Jung-Youl;Kim, Min-Suk;Kim, Jee-Gyun;Lee, Hwan-Chul;Lee, Heon-Yong
    • Proceedings of the KIEE Conference
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    • 1999.07d
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    • pp.1925-1927
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    • 1999
  • At the study, it has fabricated Al/AlN/GaAs MIS capacitor using DC reactive sputtering method. To applicate GaAs semiconductor in a MIS devices, investigated capability of AIN thin film by the insulator layer. Also it has investigated inversion of C-V characteristics by addition of the hydrogen(hydrogen concentration: 5%) and it has investigated that leakage current has $10^{-8}A/cm^2$ for 1 MV/cm breakdown electric field of I-V characteristics.

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A Study on the Microstructures and Electromagnetic Properties of Al-Co/AlN-Co Thin Films

  • Han, Chang-Suk;Han, Seung-Oh
    • Journal of the Korean Society for Heat Treatment
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    • v.24 no.1
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    • pp.16-22
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    • 2011
  • Al-Co/AlN-Co multilayer films with different layer thicknesses were prepared by using a two-facing target type D.C sputtering (TFTS) system. The deposited films were annealed isothermally at different temperatures and their microstructure, magnetic properties and resistivity were investigated. The magnetization of as-deposited films is very small irrespective of layer thickness. It was found that annealing conditions and layer thickness ratio (LTR) of Al-Co to AlN-Co can control the microstructure as well as the physical properties of the prepared films. The resistivity and magnetization increase and the coercivity decreases with decreasing LTR. High resistivity and sufficient magnetization were obtained for the films with LTR = 0.35. Films having such considerable magnetization and resistivity will be a potential candidate to be used for a high density recording material.

A Study on the Fabrication and Structural Properties of Al-Co/AlN-Co Thin Films

  • Han, Chang-Suk;Han, Seung-Oh
    • Korean Journal of Metals and Materials
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    • v.49 no.3
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    • pp.256-263
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    • 2011
  • We have synthesized Al-Co/AlN-Co multilayer films with different layer thicknesses by using a Two-Facing Target Type dc Sputtering (TFTS) system. The deposited films were annealed isothermally at different temperatures and their microstructure, magnetic properties and resistivity were investigated. The magnetization of the as-deposited films was found to be very small, irrespective of layer thickness. It was found that the annealing conditions and layer thickness ratio of Al-Co to AlN-Co (LTR) were able to control the microstructure, as well as the physical properties of the prepared films. The resistivity and magnetization increased and the coercivity decreased with a decreasing LTR. A high resistivity of 2500 ${\mu}{\Omega}-cm$, a magnetization of 360 $emu/cm^3$, and a coercivity of 5 Oe were obtained for the films with LTR=0.175.

Coating technique for use with remote measurement system at elevated temperatures (고온에서 원거리 측정 시스템을 활용하기 위한 코팅기술의 응용에 관한 연구)

  • 서창민;남승훈;이해무;김용일;김동석
    • Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
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    • 2000.04a
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    • pp.164-169
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    • 2000
  • The remote measurement system(RMS) as a new experimental method is limited in its application to crack measurements at elevated temperatures because of the oxide layer on the specimen surface. Since TiAlN and Cr coating layers have a high resistance to oxidation and wear, this paper proposed a TiAlN and Cr coating technique for specimens to facilitate the measurement of crack growth behavior using RMS. To investigate the effects of the coating layer, tension and fatigue tests were carried out at room temperature and at 538$^{\circ}C$, using specimens of 1Cr-1Mo-0.25V steel. From the experimental results, it was found that the mechanical properties of the TiAlN and Cr coated specimens were similar to those of the substrate. Accordingly, the TiAlN and Cr coated layer had hardly any influence on the fatigue crack propagation.

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Synthesis of Powder of the System Si-Al-O-N from Alkoxides II. Properties of Powders and Sintered Ceramics of Si3N4 and $\beta$-Sialon Prepared from Alkoxides (알콕사이드로부터 Si-Al-O-N계 분말합성 II. 알콕사이드로부터 합성한 Si3N4 및 $\beta$-Sialon의 분말 및 소결체의 특성)

  • 이홍림;전명철
    • Journal of the Korean Ceramic Society
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    • v.26 no.2
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    • pp.201-209
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    • 1989
  • Fine Si-Al-OH coprecipitate powders were prepared from Si- and Al-alkoxides by the hydrolysis method. $\beta$-Sialon powder was obtained from prepared Si-Al-OH coprecipitate by the simultaneous reduction and nitridation method. The syntehsized Sialon powder was pressureless sintered at 175$0^{\circ}C$ for 90 min in N2 atmosphere. The characterization of the Sialon powder was performed with XRD, BET, SEM, TEM and particle size analysis. The sinterability and mechanical properties of sintered bodies were investigated in terms of relative density, M.O.R., fracture toughness, hardness and the morphology of microstructure. The highest values of their mechanical properties were obtained for the $\beta$-Sialon ceramics at Z=1 and those values are as follows : M.O.R., KIC and HV of $\beta$-Sialon ceramics(Z=1) are 499.1 MPa, 5.9MN/m3/2 and 18.7GPa, respectively.

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Study on the Properties of $B_2O_3$-$SiO_2$and $Al_2O_3$-$SiO_2$Coating Films by the Sol-Gel Method (Sol-Gel법으로 제조한 $B_2O_3$-$SiO_2$$Al_2O_3$-$SiO_2$ 박막의 특성에 관한 연구)

  • 황규석;김병훈;최석진
    • Journal of the Korean Ceramic Society
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    • v.27 no.5
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    • pp.583-588
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    • 1990
  • Glass films in the binary system B2O3-SiO2 and Al2O3-SiO2 were prepared on soda-lime-silica slide glass by the dip-coating technique from TEOS and boric acid or aluminum nitrate. Thickness of the films varying with viscosity and withdrawal speed were measured and effect of composition and firing temperature on the properties such as transmittance and refractive index were investigated. nM2O3.(100-n)SiO2(M=B or Al) films containing up to 20mol% B2O3 and 40mol% Al2O3 were transparent. Maximum transmittance at visible range were obtained for the sample containing 15mol% Ba2O3 and 32.5mol% Al2O3 and heat-treated at 50$0^{\circ}C$, respectively. Refractive index of the film containing 15mol% B2O3 was mininum in the B2O3-SiO2 binary system and minimal refractive index was appeared at the film containing 32.5mol% Al2O3. In IP spectra, addition of B2O3 were increased absorption peak intensity of B-O and Si-O-B bond and addition of Al2O3 were decreased absorption peak intensity of Si-O bond, respectively.

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Machinability and Strength of AlN-BN Ceramics (AlN-BN계 세라믹스의 기계가공성과 강도)

  • 감직상;하정수;정덕수;한경섭
    • Journal of the Korean Ceramic Society
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    • v.31 no.2
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    • pp.177-184
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    • 1994
  • AlN-BN ceramics with BN contents in the range of 10 to 40 wt% were prepared by hot pressing using no additive, or 3 wt%, Y2O3 or CaO, which are common densification aids for AlN. And their machinability, bend strength, and microstructures were investigated. Both the main and radial cutting forces decreased with increasing BN content in all three kinds of samples. For the BN contents of 30 wt% or above, the cutting forces were lower than that of a mild steel tested at a same condition. Especially in the case of main forces, the values were less than a quarter of that of a mild steel, indicating excellent machinability. Bend strength (when the tensile surfaces of specimens were perpendicular to the hot pressing direction) also decreased with BN content mainly due to the much lower Young's modulus of BN compared to AlN. With the composition of 30 wt% BN at which the AlN-BN ceramics started to show better machinability than a mild steel, the bend strength was 150 to 160 MPa, which is greater than that of machinable glass-ceramics of a mica system. With tensile surfaces parallel to the hot pressing direction, however, the bend strength obtained for the samples processed with the sintering acids showed low values (about 40 MPa), since most BN particles had such orientation that their cleavage planes (i.e., basal planes) were perpendicular to the pressing direction.

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