• 제목/요약/키워드: Al doping

검색결과 339건 처리시간 0.024초

UV Laser를 이용한 Borosilicate-Glass (BSG)층의 선택적 에미터 형성 (Selective Emitter Formation of Borosilicate-Glass (BSG) Layer using UV Laser)

  • 김가민;장효식
    • 한국재료학회지
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    • 제31권12호
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    • pp.727-731
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    • 2021
  • In this study, we have investigated a selective emitter using a UV laser on BBr3 diffusion doping layer. The selective emitter has two regions of high and low doping concentration alternatively and this structure can remove the disadvantages of homogeneous emitter doping. The selective emitters were fabricated by using UV laser of 355 nm on the homogeneous emitters which were formed on n-type Si by BBr3 diffusion in the furnace and the heavy boron doping regions were formed on the laser regions. In the optimized laser doping process, we are able to achieve a highly concentrated emitter with a surface resistance of up to 43 Ω/□ from 105 ± 6 Ω/□ borosilicate glass (BSG) layer on Si. In order to compare the characteristics and confirm the passivation effect, the annealing is performed after Al2O3 deposition using an ALD. After the annealing, the selective emitter shows a better effect than the high concentration doped emitter and a level equivalent to that of the low concentration doped emitter.

Roles of Fluorine-doping in Enhancing Initial Cycle Efficiency and SEI Formation of Li-, Al-cosubstituted Spinel Battery Cathodes

  • Nguyen, Cao Cuong;Bae, Young-San;Lee, Kyung-Ho;Song, Jin-Woo;Min, Jeong-Hye;Kim, Jong-Seon;Ko, Hyun-Seok;Paik, Younkee;Song, Seung-Wan
    • Bulletin of the Korean Chemical Society
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    • 제34권2호
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    • pp.384-388
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    • 2013
  • Fluorine-doping on the $Li_{1+x}Mn_{1.9-x}Al_{0.1}O_4$ spinel cathode materials is found to alter crystal shape, and enhance initial interfacial reactivity and solid electrolyte interphase (SEI) formation, leading to improved initial coulombic efficiency in the voltage region of 3.3-4.3 V vs. Li/$Li^+$ in the room temperature electrolyte of 1 M $LiPF_6$/EC:EMC. SEM imaging reveals that the facetting on higher surface energy plane of (101) is additionally developed at the edges of an octahedron that is predominantly grown with the most thermodynamically stable (111) plane, which enhances interfacial reactivity. Fluorine-doping also increases the amount of interfacially reactive $Mn^{3+}$ on both bulk and surface for charge neutrality. Enhanced interfacial reactivity by fluorine-doping attributes instant formation of a stable SEI layer and improved initial cyclic efficiency. The data contribute to a basic understanding of the impacts of composition on material properties and cycling behavior of spinel-based cathode materials for lithium-ion batteries.

Electron Paramagnetic Resonance Study of Al-incorporated ZnO:Mn Diluted Magnetic Semiconductors

  • Park, Jun Kue;Lee, K.W.;Choi, D.M.;Lee, Cheol Eui
    • Journal of the Korean Physical Society
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    • 제73권12호
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    • pp.1884-1888
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    • 2018
  • We have employed electron paramagnetic resonance spectroscopy and magnetization measurements in order to study the effect of Al-incorporation on the magnetic interactions in ZnO:Mn diluted magnetic semiconductors. Al-doping is shown to decrease the antiferromagnetic correlation and to increase the ferromagnetic interaction, which is attributed to the hydrogen-mediated ferromagnetic Mn complexes in our Mn-doped ZnO samples.

ZnO:Al 과 ITO 투명전도막을 이용한 플랙시블 타입 DSCs변환효율 특성 (Some properties on Conversion Efficiency of Flexible Film-Typed DSCs with ZnO:AI / ITO TCO layers)

  • 김지훈;곽동주;성열문;김태우
    • 한국조명전기설비학회:학술대회논문집
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    • 한국조명전기설비학회 2009년도 추계학술대회 논문집
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    • pp.177-179
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    • 2009
  • In order to investigate the possible application of ZnO films as a transparent conducting oxide (TCO) electrode, ZnO:Al films were prepared by RF magnetron sputtering method. The effects of surface treatment and doping concentration on the structural and electrical properties of ZnO films were mainly studied experimentally. Five-inch PDP cells using either a ZnO:Al or indium tin oxide (ITO) electrode were also fabricated separately under the same manufacturing conditions. The luminous properties of both the transparent conducting oxide electrode were measured and compared with each other. By doping the ZnO target with 2 wt% of Al2O3, the film deposited at a chemical surface treatment resulted in the minimum resistivity of 8.5 _ 10_4 U-cm and a transmittance of 91.7%. And DBD surface treatment resulted in the minimum resistivity of 8.5 _ 10_4 U-cm and a transmittance of 91.7%. Although the luminance and luminous efficiency of the transparent conducting oxide electrode using ZnO:AI are lower than those of the cell with the ITO electrode by about 10%, these values are sufficient enough to be considered for the normal operation of TCO.

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DC 마그네트론 스퍼터링에 의해 증착한 AZO 박막의 특성 (Characterization of AI-doped ZnO Films Deposited by DC Magnetron Sputtering)

  • 박이섭;이승호;송풍근
    • 한국표면공학회지
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    • 제40권3호
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    • pp.107-112
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    • 2007
  • Aluminum doped zinc oxide (AZO) films were deposited on non-alkali glass substrate by DC magnetron sputtering with 3 types of AZO targets (doped with 1.0 wt%, 2.0 wt%, 3.0 wt% $Al_2O_3$). Electrical, optical properties and microstructure of AZO films have been investigated by Hall effect measurements, UV/VIS/NIR spectrophotometer, and XRD, respectively. Crystallinity of AZO films increased with increasing substrate temperature ($T_s$) and doping ratio of Al. Resistivity and optical transmittance in visible light were $8.8{\times}10^{-4}{\Omega}cm$ and above 85%, respectively, for the AZO film deposited using AZO target (doped with 3.0 wt% $Al_2O_3$) at $T_s$ of $300^{\circ}C$. On the other hand, transmittance of AZO films in near-infrared region decreased with increasing $T_s$ and doping ratio of Al, which could be attributed to the increase of carrier density.

Electrical and Optical Characteristics of Isoelectronic Al-doped GaN Films

  • Lee, Jae-Hoon;Ko, Hyun-Min;Park, Jae-Hee;Hahm, Sung-Ho;Lee, Jung-Hee
    • 한국반도체및디스플레이장비학회:학술대회논문집
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    • 한국반도체및디스플레이장비학회 2002년도 추계학술대회 발표 논문집
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    • pp.81-84
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    • 2002
  • The effects of the isoelectronic AI-doping of GaN grown by metal organic chemical vapor deposition were investigated for the first time using scanning electron microscopy (SEM), Hall measurements, photoluminescence (PL), and time-resolved PL. When a certain amount of Al was incorporated into the GaN films, the room temperature photoluminescence intensity of the films was approximately two orders larger than that of the undoped GaN. More importantly, the electron mobility significantly increased from 130 for the undoped sample to $500\textrm{cm}^2/Vs$ for the sample grown at a TMAl flow rate of $10{\mu}mol/min$, while the unintentional background concentration only increased slightly relative to the TMAl flow. The incorporation of Al as an isoelectronic dopant into GaN was easy during MOCVD growth and significantly improved the optical and electrical properties of the film. This was believed to result from a reduction in the dislocation-related non-radiative recombination centers or certain other defects due to the isoelectronic Al-doping.

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(CexLu1-x)3MgAl3SiO12 황색 형광체의 광학적 특성 (Optical properties of (CexLu1-x)3MgAl3SiO12 yellow phosphor)

  • 이정일;김태완;오호라;홍창우;류정호
    • 한국결정성장학회지
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    • 제26권1호
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    • pp.14-18
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    • 2016
  • $Ce^{3+}$ 이온을 도핑한 $(Ce_xLu_{1-x})_3MgAl_3SiO_{12}$ 형광체 샘플을 고상합성법으로 합성하였다. 열처리 온도를 1250부터 $1550^{\circ}C$ 온도영역에서 조절하면서 5 h 동안 소성하였으며, 소성된 샘플들의 XRD와 PL 특성을 조사하여 가장 최적의 열처리 온도를 구하고자 하였다. 또한 $Ce^{3+}$ 이온의 도핑농도를 2.0에서 10.0 mol%로 변화시키면서 $Ce^{3+}$ 이온의 도핑농도와 광학적 특성과의 관계를 고찰하였다. $Ce^{3+}$ 이온의 도핑농도에 따른 형광체들의 PL 강도, 피크위치, 반치폭을 계산하여 실제적인 LED 패키징에 가장 적절한 Ce 도핑 농도를 구하고자 하였다. 또한 최적의 소성온도와 Ce 도핑농도 조건에서 합성한 형광체 샘플의 입도와 입형을 분석하였다.

Organic-Inorganic Nanohybrid Structure for Flexible Nonvolatile Memory Thin-Film Transistor

  • 윤관혁;;성명모
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.118-118
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    • 2011
  • The Nano-Floating Gate Memory(NFGM) devices with ZnO:Cu thin film embedded in Al2O3 and AlOx-SAOL were fabricated and the electrical characteristics were evaluated. To further improve the scaling and to increase the program/erase speed, the high-k dielectric with a large barrier height such as Al2O3 can also act alternatively as a blocking layer for high-speed flash memory device application. The Al2O3 layer and AlOx-SAOL were deposited by MLD system and ZnO:Cu films were deposited by ALD system. The tunneling layer which is consisted of AlOx-SAOL were sequentially deposited at $100^{\circ}C$. The floating gate is consisted of ZnO films, which are doped with copper. The floating gate of ZnO:Cu films was used for charge trap. The same as tunneling layer, floating gate were sequentially deposited at $100^{\circ}C$. By using ALD process, we could control the proportion of Cu doping in charge trap layer and observe the memory characteristic of Cu doping ratio. Also, we could control and observe the memory property which is followed by tunneling layer thickness. The thickness of ZnO:Cu films was measured by Transmission Electron Microscopy. XPS analysis was performed to determine the composition of the ZnO:Cu film deposited by ALD process. A significant threshold voltage shift of fabricated floating gate memory devices was obtained due to the charging effects of ZnO:Cu films and the memory windows was about 13V. The feasibility of ZnO:Cu films deposited between Al2O3 and AlOx-SAOL for NFGM device application was also showed. We applied our ZnO:Cu memory to thin film transistor and evaluate the electrical property. The structure of our memory thin film transistor is consisted of all organic-inorganic hybrid structure. Then, we expect that our film could be applied to high-performance flexible device.----못찾겠음......

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III-V족 질화물 반도체 성장과 청색 LED 제작 특성

  • 이철로;임재영;손성진
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 1998년도 제14회 학술발표회 논문개요집
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    • pp.93-93
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    • 1998
  • III-V족 질화물반도체를 이용한 광 및 전자소자 용용에 있어서 가장 중요한 고홈위 u undoped GaN 에피충 성장과 GaN 에피충의 doping 특허 p-type doping의 복성융 고찰한다. 그리고 III-V nitride 이용한 band gap en명neertng에 있어서 가장 중요한 InGaN 생장파 81 및 :at codoplng 륙성융 평가 분석 한다. 위의 기반기술융 기본으로 하여 InGaN/AlG때 DH s$\sigma$ucture lED훌 제작하고 이의 륙성 용 명가분석하였다.

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Photoluminescence Up-conversion in GaAs/AlGaAs Heterostructures

  • Cheong, Hyeonsik M.
    • Journal of Korean Vacuum Science & Technology
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    • 제6권2호
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    • pp.58-61
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    • 2002
  • Photoluminescence up-conversion in semiconductor heterostructures is a phenomenon in which luminescence occurs at energies higher than that of the excitation photons. It has been observed in many semiconductor heterostructure systems, including InP/AnALAs, CdTe/CdMgTe, GaAs/ordered-(Al)GalnP, GaAs/AIGaAs, and InAs/GaAs. In this wort, GaAs/AIGaAs heterostructures are used as a model system to study the mechanism of the up-conversion process. This system is ideal for testing different models because the band offsets are quite well documented. Different heterostructures are designed to study the effect of disorder on the up-converted luminescence efficiency. In order to study the roles of different types of carriers, the effect of doping was investigated. It was found that the up-converted luminescence is significantly enhanced by p-type doping of the higher-band-gap material.

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