• 제목/요약/키워드: Al

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플라즈마분자선에피탁시법을 이용한 알루미늄 플럭스 변화에 따른 질화알루미늄의 성장특성 (Growth Characteristics of AlN by Plasma-Assisted Molecular Beam Epitaxy with Different Al Flux)

  • 임세환;이효성;신은정;한석규;홍순구
    • 한국재료학회지
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    • 제22권10호
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    • pp.539-544
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    • 2012
  • We have grown AlN nanorods and AlN films using plasma-assisted molecular beam epitaxy by changing the Al source flux. Plasma-assisted molecular beam epitaxy of AlN was performed on c-plane $Al_2O_3$ substrates with different levels of aluminum (Al) flux but with the same nitrogen flux. Growth behavior of AlN was strongly affected by Al flux, as determined by in-situ reflection high energy electron diffraction. Prior to the growth, nitridation of the $Al_2O_3$ substrate was performed and a two-dimensionally grown AlN layer was formed by the nitridation process, in which the epitaxial relationship was determined to be [11-20]AlN//[10-10]$Al_2O_3$, and [10-10]AlN//[11-20]$Al_2O_3$. In the growth of AlN films after nitridation, vertically aligned nanorod-structured AlN was grown with a growth rate of $1.6{\mu}m/h$, in which the growth direction was <0001>, for low Al flux. However, with high Al flux, Al droplets with diameters of about $8{\mu}m$ were found, which implies an Al-rich growth environment. With moderate Al flux conditions, epitaxial AlN films were grown. Growth was maintained in two-dimensional or three-dimensional growth mode depending on the Al flux during the growth; however, final growth occurred in three-dimensional growth mode. A lowest root mean square roughness of 0.6 nm (for $2{\mu}m{\times}2{\mu}m$ area) was obtained, which indicates a very flat surface.

자전 고온 반응 합성법에 의한 AlN 분말의 제조 II, Al 분말로부터 AlN 분말의 형성기구 (Fabrication of AlN Powder by Self-propagating High-temperature Synthesis II. The formation Mechanism of AlN Powder from Al Powder)

  • 안도환;전형조;김석윤;김용석
    • 한국세라믹학회지
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    • 제33권10호
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    • pp.1089-1094
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    • 1996
  • In this study the formation mechanism of AlN synthesized by SHS(Self-propagating high-temperature Syn-thesis) was studied in order to obtain uniform AlN powder size and morphology. Based on the morphology of AlN synthesized and the calculation of the temperature of Al powder as a function AlN layer thickness the formation mechanism of AlN was proposed.

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Effect of Aluminium Content on High Temperature Deformation Behavior of TiAl Intermetallic Compound

  • Han, Chang-Suk
    • 한국재료학회지
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    • 제25권8호
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    • pp.398-402
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    • 2015
  • Fundamental studies of microstructural changes and high temperature deformation of titanium aluminide (TiAl) were conducted from the view point of the effect of Al content in order to develop the manufacturing process of TiAl. Microstructures in an as cast state consisted mainly of lamellar structure irrespective of Al content. By homogenization at 1473 K, the microstructures of Ti-49Al and Ti-51Al were transformed into an equiaxial structure which was composed of ${\gamma}$-TiAl, while the lamellar structure that was observed in Ti-46Al and Ti-47Al was much more stable. We found that the reduction of Al content suppressed the formation of equiaxial grains and resulted in a microstructure of only a lamellar structure. On Ti-49Al and Ti-51Al, dynamic recrystallization occurred during high temperature deformation, and the microstructure was transformed into a fine equiaxial one, while the microstructures of Ti-46Al and Ti-47Al contained few recrystallized grains and consisted mainly of a deformed lamellar structure. We observed that on the low-Al alloys the lamellar structure under hard mode deformation conditions deformed as kink observed B2-NiAl. High temperature deformation characteristics of TiAl were strongly affected by Al content. An increase of Al content resulted in a decrease of peak stress and activation energy for plastic deformation and an increase of the recrystallization ratio in TiAl.

Al-isopropoxide로부터 제조한 AlN 세라믹스의 기계적 성질과 미세구조에 미치는 산화물 첨가제의 영향 (Effects of Oxide Additions on Mechanical Properties and Microstructures of AlN Ceramics Prepared from Al-isopropoxide)

  • 이홍림;황해진
    • 한국세라믹학회지
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    • 제27권6호
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    • pp.799-807
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    • 1990
  • In this study, effects of oxide additives on mechanical properties and microstructure of A1N and A1N polytype ceramics were investigated. Fine A1N powder was synthesized by nitriding alumiuim hydroxide prepared from Al-isopropoxide, at 1350$^{\circ}C$ for 10h in N2 atmosphere. By adding 3w/o Y2O3, 0.56w/o CaO, and 10w/o SiO2 to AlN powder, AlN and AlN polytype ceramics were prepared by hot-pressing under the pressure of 30 MPa at 1800$^{\circ}C$ for 1h. AlN ceramics with no additives formed considerable amount of AlON phase, while AlN ceramics doped with Y2O3 or CaO decreased AlON phase and formed Y-Al or Ca-Al oxide compound. AlN+10w/o SiO2(+3w/o Y2O3) composition produced AlON and AlN polytype compound having 21R as a major phase. Room temperature flexural strength of AlN ceramics with no additive was 246MPa, and room temperature flexural strength and critical temperature difference by thermal shock(ΔTc) of AlN ceramics dooped with Y2O3 or CaO were 532MPa/340$^{\circ}C$ and 423MPa/300$^{\circ}C$, respectively. Y2O3 and CaO used as sintering agent played roles of densification and oxygen removal of AlN ceramics, and affected grain growth/grain morphologies of AlN ceramics.

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AlN-Al2O3 계에서의 상압소결 질화물복합체 (Pressureless Sintered Nitride Composites in the AlN-Al2O3 System)

  • 김영우;김규헌;김동현;윤석영;박홍채
    • 한국세라믹학회지
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    • 제51권5호
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    • pp.498-504
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    • 2014
  • Particulate nitride composites have been fabricated by sintering the compacted powder of AlN and 5 - 64.3 mol% $Al_2O_3$, with a small addition of $Y_2O_3$ ($Y_2O_3$/AlN, 1 wt%), in 1-atm nitrogen gas at $1650-1900^{\circ}C$. The composites were characterized in terms of sintering behavior, phase relations, microstructure and thermal shock resistance. AlN, 27R AlN pseudopolytype, and alminium oxynitride (AlON, $5AlN{\cdot}9Al_2O_3$) were found to existin the sintered material. Regardless of batch composition, the AlN-$Al_2O_3$ powder compacts exhibited similar sintering behavior; however, the degree of shrinkage commonly increased with increasing $Al_2O_3$ content, consequently giving high sintered bulk density. By increasing the $Al_2O_3$ addition up to ${\geq}50 mol%$, the matrix phase in the sintered material was converted from AlN or 27R to AlON. Above $1850^{\circ}C$, a liquid phase was formed by the reaction of $Al_2O_3$ with AlN, aided by $Y_2O_3$ and mainly existed at the grain boundaries of AlON. Thermal shock resistance was superior in the sintered composite consisting of AlON with dispersed AlN or AlN matrix phase.

In-situ 반응에 의한 $Al_2O_{3p}/Al$기 복합재료의 제조 (Fabrication of $Al_2O_{3p}/Al$ composites by in-situ Reaction Process of Molten Al)

  • 김재동;정해용;고성위
    • Composites Research
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    • 제12권3호
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    • pp.36-44
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    • 1999
  • In-situ process에 의한 $Al_2O_{3p}/Al$기 복합재료 제조시, Mg의 첨가형태와 함량, 공정온도 및 유지시간이 응용Al의 침투거동과 미세조직 및 경도에 미치는 영향을 조사하였다. Mg분말과 $Al_2O_3$입자의 혼합분말에 순 Al을 침투시켜 복합재를 제조하는 경우, 침투율에 영향을 주는 가장 유력한 변수는 Mg분말의 함량이며, Mg의 활발한 반응으로 $700^{\circ}C$의 낮은 온도에서도 침투가 가능했다. 한편 Al-Mg합금을 $Al_2O_3$입자에 침투시켜 복합재를 제조하는 경우 Mg함량과 공정온도에 관계없이 거의 동일한 침투율을 나타냈으며 침투 가능한 공정온도는 $800^{\circ}C$이었다. Mg과 $Al_2O_3$의 혼합분말로 제조한 복합재가 Al-Mg합금으로 제조한 복합재 보다 월등히 높은 경도를 나타냈으나, 과도한 계면방응에 의한 불균일한 강화상의 분산으로 경도의 산포도는 컸다.

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TFT(Two-Facing-Targets) 스퍼터장치에 의해 증착된 (TiAl)N 박막의 상변태에 관한 연구 (A Study on the Phase Transformations of (TiAl)N Films Deposited by TFT Sputtering System)

  • 한창석
    • 열처리공학회지
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    • 제18권5호
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    • pp.281-287
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    • 2005
  • Titanium aluminium nitride((TiAl)N) film is anticipated as an advanced coating film with wear resistance used for drills, bites etc. and with corrosion resistance at a high temperature. In this study, (TiAl)N thin films were deposited both at room temperature and at elevated substrate temperatures of 573 to 773 K by using a two-facing-targets type DC sputtering system in a mixture Ar and $N_2$ gases. Atomic compositions of the binary Ti-Al alloy target is Al-rich (25Ti-75Al (atm%)). Process parameters such as precursor volume %, substrate temperature and Ar/$N_2$ gas ratio were optimized. The crystallization processes and phase transformations of (TiAl)N thin films were investigated by X-ray diffraction, field-emission scanning electron microscopy. The microhardness of (TiAl)N thin films were measured by a dynamic hardness tester. The films obtained with Ar/$N_2$ gas ratio of 1:3 and at 673 K substrate temperature showed the highest microhardness of $H_v$ 810. The crystallized and phase transformations of (TiAl)N thin films were $Ti_2AlN+AlN{\rightarrow}TiN+AlN$ for Ar/$N_2$ gas ratio of 1:3, $Ti_2AlN+AlN{\rightarrow}TiN+AlN{\rightarrow}Ti_2AlN+TiN+AlN$ for Ar/$N_2$ gas ratio of 1:1 and $TiN+AlN{\rightarrow}Ti_2AlN+TiN+AlN{\rightarrow}Ti_2AlN+AlN{\rightarrow}Ti_2AlN+TiN+AlN$ for Ar/$N_2$ gas ratio of 3:1. The above results are discussed in terms of crystallized phases and microhardness.

금형 예열온도에 따른 Al-Cu-Si 3원계 공정합금의 미세조직 변화 (Changes on the Microstructure of an Al-Cu-Si Ternary Eutectic Alloy with Different Mold Preheating Temperatures)

  • 오승환;이영철
    • 한국주조공학회지
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    • 제42권5호
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    • pp.273-281
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    • 2022
  • Al-Cu-Si 3원계 공정합금의 응고거동과 미세조직 변화를 이해하기 위해서, 금형 예열온도를 달리하여 Al-Cu-Si 3원계 공정합금의 미세조직 변화를 관찰하였다. 금형 예열온도가 500℃일 때, 초정 Si과 덴드라이트 형상의 Al2Cu상이 관찰되며, 이후 (α-Al+Al2Cu)의 2원계 공정상이 관찰된다. 금형 예열온도가 300℃일 때 미제조직은 금형 예열온도가 500℃일 때와 유사하나 (α-Al+Al2Cu+Si)의 3원계 공정상이 관찰되는 영역과 관찰되지 않는 영역이 나타난다. 금형 예열온도가 150℃인 경우에는 미세조직이 (α-Al+Al2Cu)의 2원계 공정상과 (α-Al+Al2Cu+Si)의 3원계 공정상이 관찰되는 Bimodal 구조를 나타낸다. 금형 예열온도를 달리 하였을 때 가장 큰 변화를 나타내는 상은 Si상이며, 임계냉각속도를 지나면 (α-Al+Al2Cu+Si)의 3원계 공정상이 형성되는 순간에 빠른 냉각에 의한 Si의 성장이 억제되면 Cooperative 성장을 하기 때문에 Al, Cu의 성장도 함께 억제된다. 서로 다른 합금설계 전산모사 프로그램을 통해 Al-27wt%Cu-5wt%Si의 3원계 공정 합금을 분석한 결과, 합금설계 전산모사 프로그램에 따라 결과의 차이가 발생하며, 전산모사의 신뢰성을 높이기 위해서는 실제 주조를 통한 미세조직 분석이 수반되어야 한다.

실리카 소결체와 용융 알루미늄과의 반응에 의한 $Al_2$O$_3$/Al 복합체의 제조 (Al2O3/Al Composites Fabricated by Reaction between Sintered SiO2 and Molten Al)

  • 정두화;배원태
    • 한국세라믹학회지
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    • 제35권9호
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    • pp.923-932
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    • 1998
  • Al2O3/Al composites were produced by displacement reaction method which was carried out by imm-ersing the sintered silica preform which was prepared form fused silica powder in molten aluminu. an ac-tivation energy of 94kJ/mole was calculated from Al-SiO2 reaction data in 1000-130$0^{\circ}C$ temperature range With increase of reaction temperature the alumina particle in the Al2O3/Al composites produced with pur metal Al showed grain growth and the growth of alumina particle in Al2O3/Al composite produced by using of Mg contained Al alloy was inhibited. The flexural strength of Al2O3/Al composites produced at 100$0^{\circ}C$ showed the highest value as 393 MPa. Flexural strength of the composite fabricated at 85$0^{\circ}C$ showed higher deviation than that of the composite produced at above 100$0^{\circ}C$ Low flexural strength of the composite fa-bricated at 120$0^{\circ}C$ due to the growth of pore and alumina particle size. The hardness of composites de-pended on alumina content in Al2O3/Al composite decreased with increasing of aluminium content in case the same alumina content and increased with increasing of silicon content in composite.

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반응용융 침투법에 의한 $Al_2O_3/AL$복합재료의 제조 및 기계적 특성 평가 (Fabrication and mechanical properties of $Al_2O_3/AL$ composites by reactive melt infiltration)

  • 윤여범;김송희;태원필
    • 한국결정성장학회지
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    • 제7권4호
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    • pp.610-618
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    • 1997
  • 반응용침법으로 제조된 $Al_2O_3$/Al 복합재료는 900-$1200^{\circ}C$의 온도범위에서 $Al_2O_3$ 분말성형체에 용융Al을 침투시켜 제조하였다. 용융침투는 각 온도에서 잠복기를 거친후 발생하였으며, 복합재료의 성장속도는 시간에 따라 선형적으로 비례하였다. 제조된 복합재료의 주성분은 $Al_2$O$_3$와 Al이었고 소량의 Si이 탐지되었다. 복합재료의 상대밀도는 $Al_2O_3$ 입자크기가 증가함에 따라 증가하였고 용융 침투온도가 높을수록 감소하였다.

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