• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2005년도 ICCAS
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• pp.123-128
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• 2005

A novel tri-mode ultraprecision positioning system for machine tools and measuring machine is proposed. The basic coarse mode uses a Twist-roller Friction Drive (abbr. TFD), and controls several tens of millimeters of the machine-table travel with nanometer order of positioning resolution. The fine mode also utilizes the TFD with a fine adjusting mechanism. The resolution of the fine mode is in the range of sub-nanometer. For realizing picometer positioning, the ultra-fine mode is executed by using an active aerostatic guideway. On the bearing surface of this active guideway, several Active Inherent Restrictors (abbr. AIRs) are embedded for controlling the table position. An AIR unit consists of a piezoelectric actuator having a through hole, one end of the hole on the bearing surface acts as an inherent restrictor. Owing to the aerostatic mechanism of the AIR, the deformation of the piezoelectric actuator in the AIR unit causes much reduced table displacement. Such motion reduction is effective for ultraprecision positioning. Current positioning resolution of the ultra-fine mode is 50pm, however the final goal of the positioning resolution is expected to be in the order of picometer.

• 한국자동차공학회논문집
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• 제16권4호
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• pp.128-134
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• 2008

In this paper, a hydropneumatic modeling and analysis of a heavy truck cabin air suspension system is presented. Cabin air suspension system is a system which improves ride comfort of a heavy truck and it can reduce vibration between truck frame and cabin. The components of the system, air spring, shock absorber, leveling valve and full cabin system are mathematically modelled using AMESim software. Simulation results of components and full cabin system are compared with experimental data of components and test results of a cabin using 6 axis simulation table. It is found that the simulation results are in good agreements with test results, and the hydropneumatic model can be used well to predict dynamic characteric of heavy truck cabin air suspension system.

• 한국소음진동공학회논문집
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• 제12권2호
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• pp.124-131
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• 2002

This paper presents the design of an active vibration suppression controller for an air-spring type vibration isolation table. Firstly, isolation system model is constructed considering the isolation table, attached equipment and voice-coil actuator. An active control system is designed based on frequency-shaped sliding mode control theory rewarding high frequency uncertainties with respect to attached equipments on the isolation table. Finally. the performance of the active isolation system is evaluated by simulation under some disturbance conditions which are transmitted from base structure of the isolation system.

• 한국방사선학회논문지
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• 제14권6호
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• pp.819-825
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• 2020

전산화단층촬영장비 테이블로 인한 화질 저하의 경감을 위하여 개발한 에어 매트리스(Air mattress)의 유용성을 평가하고자 하였다. 5, 10 cm 두께의 에어 매트리스(Air mattress)를 개발하여 적용 유무와 두께에 따른 AAPM 팬텀을 스캔한 영상을 통하여 화질을 측정하였으며 일원배치 분산분석으로 통계적 유의성을 확인하였다. AAPM 팬텀을 표준 방식으로 스캔한 영상과 비교했을 때 에어 매트리스를 적용한 영상은 차이가 나타나지 않았으나, 에어 매트리스를 적용하지 않았을 때의 영상은 CT Number와 균일도가 낮아지고 노이즈가 높게 나타났으며 공간분해능이 낮아지는 것으로 나타났다. 개발된 에어 매트리스는 진단 영상에 아무런 해가 없을 뿐만 아니라, 화질을 높이는 데에 매우 효과적이며 최신, 고가 장비에 적용되는 기술을 이용하지 않고도 기존의 장비에 단순히 에어 매트리스를 적용함으로써 화질을 증가시킬 수 있다.

• 약학회지
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• 제2권1_2호
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• pp.33-41
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• 1953

According to the results of the investigation of air condition on a movie hause in Seoul city, for the period August 1948 to August 1949, the results were considerable condition contrary to the expection due to lack of Ventilation. By the above equation, the total air ventilation volume, the avarage air volume of natural ventilation, and the air volume of artifical ventilation to be required of the seven movie hause in Seoul city are discussed (See table in page in this Journal)

• 한국정밀공학회지
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• 제20권5호
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• pp.5-10
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• 2003

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.73-74
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• 2011

• 한국지진공학회논문집
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• 제12권1호
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• pp.57-66
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• 2008

본 연구에서는 원전 주제어실의 3차원 층 지진격리시스템에 대한 지진동 저감성능과 적용성을 평가하기 위해서 실험연구를 수행하였다. 3차원 층 지진격리시스템에 적용하기 위해서 마찰진자시스템과 에어 스프링을 설계하고 제작하였다. 제어 캐비닛과 액세스 플로어, 격자 프레임, 4개의 마찰진자와 에어 스프링으로 구성된 원전 주제어실 부분 실험모형을 2종류 제작하여 층 지진격리시스템의 원전 적용성을 평가하였다. 실험을 위해서 원전 주제어실의 운전기준지진(OBE)과 안전정지지진(SSE)의 수직방향, 수평방향 층 응답 스펙트럼을 이용하여 인공지진 시간이력을 만들어서 진동대 실험에 사용하였다. 입력지진에 대한 실험모형의 지진응답은 비 지진격리에 비해 3차원 층 지진격리시스템을 적용한 경우, 우수한 지진동 저감특성을 나타냈다

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.20-23
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• 2002

In silicon wafer manufacturing process, the grinding process has been adopted to improve the quality of wafer such as flatness, roughness and so on. This paper describes the effect of grinding process on the surface quality of wafer. The experiments are carried out by high precision in fred grinder with air bearing spindle. The relationship between the inclination of chuck table and the flatness of wafer is investigated, and the effect of grinding conditions including wheel speed, table speed, and feed rate on damage depth and roughness of wafer is also investigated. The experimental results show that there is close relationship between the inclination of the chuck table and the flatness of wafer, and the grinding conditions within this paper little affect the flatness of wafer and relatively high affect the damage depth of wafer.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.466-469
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• 1995

This paper presents a design and performance of the 6 D.O.F linear motion table with a magnetic bearing suspension. The linear positioning of the table with a 150mm stroke is driven by a brushless DC Linear motor and the other attitudes of the stage are controlled by the analog PD controller with magnetic bearing actuators. Each magnetic bearing unit which consists of 3 electromagnets, 3 capacitance probes and 3 backup bearings affords controlled forces by detecting the air gap between the probes and guideways. An integral type capacitance probe amplifier is equipped on the upper plate of the table so that the probe line to the probe amplifier can be shorter therefore the problems due to the stray capacitance and noise can be reduced. Form the pitch-yaw errormeasured by the autocollimator, the vertical and horizont straightness errors of the table are derived that they are maintained below 1.mu. m over 100mm stroke. The positioning accuracy of the linear motion is maintained below 2 .mu. m and the repeatability error is below 1 .mu. m