• Title/Summary/Keyword: Air gap

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유한요소해석을 이용한 알루미나 정전척의 글라스 기판 흡착 특성 연구 (A Study on Attractive Force Characteristics of Glass Substrate Using Alumina Electrostatic Chuck by Finite Element Analysis)

  • 이재영;장경민;민동균;강재규;성기현;김혜동
    • 반도체디스플레이기술학회지
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    • 제19권4호
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    • pp.46-50
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    • 2020
  • In this research, the attractive force of Coulomb type electrostatic chuck(ESC), which consisted of alumina dielectric, on glass substrate was studied by using the finite element analysis. The attractive force is caused by the high electrical resistance which occurs in contact region between glass substrate and dielectric layer. This research tries the simple geometrical modeling of ESC and glass substrate with air gap. The influences of the applied voltage, and air gap are investigated. When alumina dielectric with 1014 Ω·cm, 1.5 kV voltage, and 0.01 mm air gap were applied, electrostatic force in this work reached to 4 gf/㎠. This results show that the modeling of air gap is essential to derive the attractive force of the ESC.

Effects of Air Gap on HTS Magnet Consisting of Double Pancake Windings

  • Ku, Myung-Hwan;Kang, Myung-Hun;Kim, Young-Min;Lee, Hee-Joon;Cha, Guee-Soo
    • 한국초전도ㆍ저온공학회논문지
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    • 제11권4호
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    • pp.33-36
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    • 2009
  • An air gap between the pancake windings was provided in this paper to increase the central magnetic field of a high temperature superconducting (HTS) magnet consisting of pancake windings. Unlike the LTS magnet, providing an air gap between the pancake windings increases the central magnetic field of a HTS magnet. Furthermore, the uniformity of the magnetic field near the center of the magnet increased because the pancake windings spread out in wider area. Effects of the air gap on the central magnetic field of an HTS magnet was described in this paper, Calculation of the critical current was carried out by using E-J relation of the HTS wire and the optimization technique was adopted to obtain the appropriate critical current which could maximize the central magnetic field. Pancake windings with BSCCO-2223 HTS wire were wound on glass epoxy bobbin. 6 double pancake windings with 200 turns were used to construct a HTS magnet. Characteristics of the HTS magnet including the central magnetic field and the uniformity of the magnetic field were measured and compared with the results of calculation.

SIL 기반 플라즈모닉 리소그래피에서 주파수 적응형 필터를 이용한 나노간극 제어의 성능향상 (Improving nano gap control using frequency adaptive peak filter in Solid Immersion Lens-based plasmonic lithography)

  • 최국종;임건;박노철
    • 정보저장시스템학회논문집
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    • 제10권1호
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    • pp.1-6
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    • 2014
  • Plasmonic lithography is the latest technique to overcome diffraction limit of previous optical lithography. In the plasmonic lithography, the nano gap between nano metal wave guide and photoresist should be in sub-wavelength region. SIL-based plasmonic lithography is the one of the solutions to maintain small air gap. However, the nano gap control is so sensitive that a little disturbance is able to have a large effect on the nano gap control. So, we analyzed the characteristics of disturbance, and then modified the previous controller to suppress the disturbance. We applied two peak filters which were fixed one and adaptively changeable one. We experimentally confirmed the improvement of the nano gap control, which reduced nano gap error by 30 %. The proposed control will improve the quality of lithography pattern.

Measurement of Refractive Index of Solid Medium by Critical Angle Method When Air Gap is Present

  • Lim, Hwan-Hong;Kwon, Moon-Soo;Choi, Hee-Joo;Kim, Byoung-Joo;Cha, Myoung-Sik
    • Journal of the Optical Society of Korea
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    • 제12권3호
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    • pp.210-214
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    • 2008
  • A critical angle method was used to measure the index of refraction of a solid medium when an air gap between the prism and the medium is present. The gap effect was analyzed both numerically and experimentally. Since the total internal reflection is severely disturbed by the large gap, determination of the critical angle and the resulting refractive index becomes ambiguous and inaccurate. By using an index matching fluid, we could determine the index of refraction with an uncertainty of ${\pm}2{\times}1^{-3}$ even when the gap is as large as 1 ${\mu}m$.

대면적 AMLCD의 신호 지연 감소를 위해 Air-gap을 갖는 게이트-데이터 라인 교차 구조 (A Novel Air-Bridge Type Gate-Data Line Inter-Crossing to Reduce Signal Delay for Large Size AMLCD)

  • 박진우;강지훈;이민철;한민구
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제48권12호
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    • pp.768-772
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    • 1999
  • A new TFT-LCD panel with air-bridge type gate to data line inter-crossing has been proposed and its characteristics have been measured. The proposed structure has air-gap between gate and data line inter-crossing. This air-bridge TFT-LCD panel has very small capacitance between gate and data line. The new panes structure achieves 9 times fast signal propagation compared with conventional panel, which enables to have enough design margin for 20-inch diagonal and larger size UXGA panel. We have examined thermal and mechanical durability of new panel to verify applicability for commercial AMLCD production. After TEOS and polyimide passivation, this panel withstood a thermal stress at $250^{\circ}C$ and a mechanical stress during the rubbing process.

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Air-gap effect on life boat arrangement for a semi-submersible FPU

  • Kim, Mun-Sung;Park, Hong-Shik;Jung, Kwang-Hyo;Chun, Ho-Hwan
    • International Journal of Naval Architecture and Ocean Engineering
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    • 제8권5호
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    • pp.487-495
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    • 2016
  • In the offshore project such as semi-submersible FPU and FPSO, the free fall type life boat called TEMPSC (Totally Enclosed Motor Propelled Survival Craft) has been installed for the use of an emergency evacuation of POB (People on Board) from the topside platform. For the design of life boat arrangement for semi-submersible FPU in the initial design stage, the drop height and launch angle are required fulfill with the limitation of classification society rule and Company requirement, including type of approval as applicable when intact and damage condition of the platform. In this paper, we have been performed the numerical studies to find proper arrangement for the life boats consider drop height in various environmental conditions such as wave, wind and current. In the calculations, the contributions from static and low frequency (LF) motions are considered from the hydrodynamic and mooring analysis as well as damage angle from the intact and damage stability analysis. Also, Air-gap calculation at the life boat positions has been carried out to check the effect on the life boat arrangement. The air-gap assessment is based on the extreme air-gap method includes the effect of 1st order wave frequency (WF) motions, 2nd order low frequency roll/pitch motion, static trim/heel and set down.

국부적 자속 포화 현상을 이용한 리엑터 및 변압기의 공극 등가 모델에 관한 연구 (Study on Transformer and Inductor Using Equivalent Air gap to Partial Flux Saturation)

  • 박성준;이상훈;김정훈
    • 한국산업융합학회 논문집
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    • 제17권3호
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    • pp.103-112
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    • 2014
  • BY the Transformers and reactors, the input electrical energy is converted into magnetic energy. At the end through the magnetic energy was passed at the output parameter. Specially At the flyback transformer or a reactor airgap were designed to contain more magnetic energy. But that work is very difficult for the optimal design. It is that Contradictions are between the length of the Air-gap, Winding inductance, DC bias. As to e Several conflicting conditions in order to determine the optimum Air-gap has a lot of experience and trial & error is necessary. The approach proposed in this paper, the auxiliary winding on the core attached to part of primary core, that by applying a DC voltage has a dramatic effect like Core with designed Air-gap. This inventiveness and advantage is to regulate arbitrarily the Saturation Flux Quantity by the input signal to secondary winding. Accordingly obtained the biggest effect is that increasing limits of the saturation current destined by the material and shape of the conventional core. In other words, that can decreas the size of the transformer and reactor, While maintaining the current saturation capacity. This paper, prove its effect as using the local flux saturation in transformers and reactors for research by the computer program using the finite element method (FEM) simulation, followed by actual experiment to verify

Surface Treatment of Air Gap Membrane Distillation (AGMD) Condensation Plates: Techniques and Influences on Module Performance

  • Harianto, Rachel Ananda;Aryapratama, Rio;Lee, Seockheon;Jo, Wonjin;Lee, Heon Ju
    • Applied Science and Convergence Technology
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    • 제23권5호
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    • pp.248-253
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    • 2014
  • Air Gap Membrane Distillation (AGMD) is one of several technologies that can be used to solve problems fresh water availability. AGMD exhibits several advantages, including low conductive heat loss and higher thermal efficiency, due to the presence of an air gap between the membrane and condensation wall. A previous study by Bhardwaj found that the condensation surface properties (materials and contact angle) affected the total collected fresh water in the solar distillation process. However, the process condition differences between solar distillation and AGMD might result in different condensation phenomena. In contrast, N. Miljkovic showed that a hydrophobic surface has higher condensation heat transfer. Moreover, to the best of our knowledge, there is no study that investigates the effect of condensation surface properties in AGMD to overall process performance (i.e. flux and thermal efficiency). Thus, in this study, we treated the AGMD condensation surface to make it hydrophobic or hydrophilic. The condensation surface could be made hydrophilic by immersing and boiling plate in deionized (DI) water, which caused the formation of hydrophilic aluminum hydroxide (AlOOH) nanostructures. Afterwards, the treated plate was coated using hexamethyldisiloxane (HMDSO) through plasma-enhanced chemical vapor deposition (PECVD). The result indicated that condensation surface properties do not affect the permeate flux or thermal efficiency significantly. In general, the permeate flux and thermal efficiency for the treated plates were lower than those of the non-treated plate (pristine). However, at a 1 mm and 3 mm air gap, the treated plate outperformed the non-treated plate (pristine) in terms of permeate flux. Therefore, although surface wettability effect was not significant, it still provided a little influence.

3차원 시뮬레이션을 활용한 성인여성용 팬츠 원형 비교 연구 - DC Suite Program을 중심으로 - (Comparison of pants for adults women by 3D simulation - Focus of the DC Suite Program -)

  • 차수정;강연경
    • 패션비즈니스
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    • 제17권4호
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    • pp.1-21
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    • 2013
  • A study using compare and analyze about differences among three basic pants patterns(shape and size of pattern, fitting and amount of air gap and so on) through 3D simulation. This study use 3D simulation program, DC Suite version 3.0. The results are as a follows: The results of comparison about total pants pattern shape, the ESMOD have two tucks of front and one dart of back and the Secoli and On&on have each dart of front and back. The results of estimation about total appearance, the On&on is the best of all pattern about total silhouette of front and back side and the ESMOD is the worst of all. In a case of the ESMOD, the thigh part has so many spaces between body and pants so it is rated low. When we examine about space between body and pants, amount of air gap of ESMOD is 0.6 at waist circumference and next is On&on(0.07). In case of hip circumference, the Secoli is 0.08 and the ESMOD is 0.14. The ESMOD's amount of air gap is 0.32 at thigh circumference and 0.62 at knee circumference. The Secoli's amount air gap is 0.26 at thigh circumference and 0.59 at knee circumference.

유도전동기의 슬룻 모양에 따른 공극 퍼미언스 분포 해석 (Analysis of the Airgap Permeance Distribution for Slot Type of the Induction Motor)

  • 정종호;이은웅;조현길
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2003년도 하계학술대회 논문집 B
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    • pp.717-719
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    • 2003
  • In terms of induction motor analysis, magnetic energy conversion takes place into mechanical energy in air gap. Therefore, flux distribution in air Sap has to be analyzed in detail more than other place of induction motor. In this paper, the air gap permeance of induction motor, which was effected by means of skewed angle and fringing, was analyzed.

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