• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.21 no.3
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• pp.473-478
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• 2012

In this paper, the air bubble formation mechanism in the rectangular and triangular line-and-space pattern during dispensing UV Nanoimprint Lithography (UV-NIL) at an atmospheric condition is studied. To investigate the air bubble formation, an analytic model based on geometric approach and a numerical model based on CFD(computational fluid dynamics) were used in the analysis. It was found in the numerical analysis that every time the flow front passed through a corner of the pattern, it proceeded with a newly formed shape, occurring due to interface reconfiguration, since the flow fronts were formed such that they minimized the surface energy. Moreover, the conditions for the air bubble formation were investigated by applying the analytic analysis based on geometric approach and the numerical analysis. Good overall agreement was found between the analytic and numerical analysis.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1934-1938
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• 2008

Formation of air bubble is the one of common defects in UV nano imprint lithography. Location of dispensing and volume of droplets are among the most important parameters in the process. ]n this study, UV curable resin droplets with different volumes were dispensed at different locations and pressed to investigate air bubble formation. By varying volume of droplet and dispensing location, process conditions were found for minimum air bubble area.

• Journal of Korean Society of Environmental Engineers
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• v.35 no.12
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• pp.929-936
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• 2013

The saturator and injection nozzle are important facilities on the dissolved air flotation process. To increase the formation of micro bubble, it is required to improve the air dissolving performance in the saturator and keep the pressure uniform from the saturator to the nozzle. This study aimed to evaluate the performance of the saturator and the hydraulic effect of the nozzle and the pipe structure. The air volume concentration, bubble size and bubble residual time were measured in the test. The saturator, which had mounted with the spray nozzle, showed a good performance for bubble formation. Also, the characteristics of micro bubble formation were influenced by pressure uniformity and flow velocity through the orifice in the nozzle.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.579-580
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• 2013

• Journal of the Korea Academia-Industrial cooperation Society
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• v.14 no.9
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• pp.4178-4184
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• 2013

Nanoimprint lithography (NIL) is an emerging technology enabling cost-effective and high-throughput nanofabrication. Recently, the major trends of NIL are high throughput and large area patterning. UV curable type NIL (UV NIL) can be performed at room temperature and low pressure. And one advantage of UV NIL is that it does not need vacuum, which greatly simplifies tool construction, so that vacuum oprated high-precision stages and a large vacuum chamber are no longer needed. However, one key issue in non-vacuum environment is air bubble formation problem. Namely, can the air bubbles be completely removed from the resist. In this paper, the air bubbles formation by the method of droplet application in UV NIL with non-vacuum environment are experimentally studied. The effects of the volume of droplet and the number of dispensing points on air bubble formation are investigated.

• Journal of the Semiconductor & Display Technology
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• v.14 no.3
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• pp.61-66
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• 2015

Recently, the major trends of NIL are high throughput and large area patterning. For UV NIL, if it can be proceeded in the non-vacuum environment, which greatly simplifies tool construction and greatly shorten process times. However, one key issue in non-vacuum environment is air bubble formation problem. In this paper, numerical analysis of bubble defect of UV NIL is performed. Fluent, flow analysis focused program was utilized and VOF (Volume of Fluid) skill was applied. For various resist-substrate and resist-mold angles, effects of velocity inlet and residual layer thickness of resist on bubble defect formation were investigated. The numerical analyses show that the increases of velocity inlet and residual layer thickness can cause the bubble defect formation, however the decreases of velocity inlet and residual layer thickness take no difference in the bubble defect formation.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.10a
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• pp.357-358
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• 2012

• Journal of the Korean Society of Visualization
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• v.8 no.3
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• pp.41-48
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• 2010

A visualization study to evaluate bubble motion in a tab water filled cylindrical tank with a varying flow rate of compressed air is conducted. The flow rate of compressed air varies from 1 to 5 L/min. Time resolved images are acquired by a high speed camera in 10 bit gray level at 100 fps and the measurement volume is irradiated by a 230 W halogen lamp. It is observed that there are three different regions; the bubble formation region, the rising bubble region and the free surface region. During the rise of bubble, the shape is changed as if an elastic body. Based on the binarized bubble image, the mean diameters of rising bubbles are estimated at beneath of the free surface. As the gas flow rate increases, the mean diameter is increased and the rising velocity also increases with buoyancy force.

• The Journal of the Acoustical Society of Korea
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• v.40 no.4
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• pp.320-329
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• 2021

In this paper, an empirical model of air bubble size to be applied to an air masker for reduction of underwater radiation noise is presented. The proposed model improves the divergence problem under the low-speed flow condition of the existing model derived using Rayleigh's jet instability model and simple continuity condition by introducing a jet flow velocity of air. The jet flow velocity of air is estimated using the bubble size where the liquid is quiescent. In a medium without flow, the size of the bubble is estimated by an empirical method where bubble formation regime is divided into a laminar-flow range, a transition range, and a turbulent-flow range based on the Reynolds number of the injected air. The proposed bubble size model is confirmed to be in good agreement with the Computational Fluid Dynamics (CFD) analysis result and the experimental results of the existing literature. Using the acoustic inversion method, the air bubble population is estimated from the insertion loss measured during the air injection experiment of the air- masker model in a large cavitation tunnel. The results of the experiments and the bubble size model are compared in the paper.

• Proceedings of the Korea Water Resources Association Conference
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• 2016.05a
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• pp.386-390
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• 2016

Water aeration is an effective water treatment process, which involves the injection of air or air-water mixture into water treatment reservoir commonly through pipes. The main purpose of water aeration is to maintain healthy levels of dissolved oxygen (DO), which is the most important water quality factor. The pipes' operating conditions are important for controlling the efficiency and effectiveness of aeration process. Many studies have been conducted on two-phase flows in pipes, however, there are a few studies to deal with small s ale in millimeter. The main objective of this study is to perform 2-dimensional two-phase simulations inside various straight pipes using the computational fluid dynamic (CFD) OpenFOAM (Open source Field Operation And Manipulation) tools to examine the influence of flow patterns on bubble size, which is closely related to DO concentration in a water body. The both flow regimes, laminar and turbulence, have been considered in this study. For turbulence, Reynolds-averaged Navier-Stokes (RANS) has been applied. The coalescence and breakage of bubbles caused by random collisions and turbulent eddies, respectively, are considered in this research. Sauter mean bubble diameter and water velocity are compared against experimental data. The simulation results are in good agreement with the experimental measurements.