• 제어로봇시스템학회:학술대회논문집
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• 2005.06a
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• pp.123-128
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• 2005

A novel tri-mode ultraprecision positioning system for machine tools and measuring machine is proposed. The basic coarse mode uses a Twist-roller Friction Drive (abbr. TFD), and controls several tens of millimeters of the machine-table travel with nanometer order of positioning resolution. The fine mode also utilizes the TFD with a fine adjusting mechanism. The resolution of the fine mode is in the range of sub-nanometer. For realizing picometer positioning, the ultra-fine mode is executed by using an active aerostatic guideway. On the bearing surface of this active guideway, several Active Inherent Restrictors (abbr. AIRs) are embedded for controlling the table position. An AIR unit consists of a piezoelectric actuator having a through hole, one end of the hole on the bearing surface acts as an inherent restrictor. Owing to the aerostatic mechanism of the AIR, the deformation of the piezoelectric actuator in the AIR unit causes much reduced table displacement. Such motion reduction is effective for ultraprecision positioning. Current positioning resolution of the ultra-fine mode is 50pm, however the final goal of the positioning resolution is expected to be in the order of picometer.

• Transactions of the Korean Society of Automotive Engineers
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• v.16 no.4
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• pp.128-134
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• 2008

In this paper, a hydropneumatic modeling and analysis of a heavy truck cabin air suspension system is presented. Cabin air suspension system is a system which improves ride comfort of a heavy truck and it can reduce vibration between truck frame and cabin. The components of the system, air spring, shock absorber, leveling valve and full cabin system are mathematically modelled using AMESim software. Simulation results of components and full cabin system are compared with experimental data of components and test results of a cabin using 6 axis simulation table. It is found that the simulation results are in good agreements with test results, and the hydropneumatic model can be used well to predict dynamic characteric of heavy truck cabin air suspension system.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.12 no.2
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• pp.124-131
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• 2002

This paper presents the design of an active vibration suppression controller for an air-spring type vibration isolation table. Firstly, isolation system model is constructed considering the isolation table, attached equipment and voice-coil actuator. An active control system is designed based on frequency-shaped sliding mode control theory rewarding high frequency uncertainties with respect to attached equipments on the isolation table. Finally. the performance of the active isolation system is evaluated by simulation under some disturbance conditions which are transmitted from base structure of the isolation system.

• Journal of the Korean Society of Radiology
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• v.14 no.6
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• pp.819-825
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• 2020

The purpose of this study was to evaluate the usefulness of the developed air mattress for reducing the deterioration of image quality due to the scattered radiation generated on the computed tomography equipment table. 5 cm and 10 cm thick air mattresses were developed and the image quality was measured by scanning the AAPM phantom according to thickness and thickness. Statistical significance was confirmed by One Way Analysis of Variance(ANOVA) Compared with the AAPM phantom scanned in the standard method, the image with the air mattress did not show any difference, but when the air mattress was not applied, the CT number and uniformity were low and the noise was high, and the spatial resolution Respectively. The developed air mattress has no harmful effect on the diagnostic image, it is very effective in improving the image quality and can increase the CT image quality by simply applying Air Mattress to existing equipment without using the technology applied to the latest and high-cost equipment.

• YAKHAK HOEJI
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• v.2 no.1_2
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• pp.33-41
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• 1953

According to the results of the investigation of air condition on a movie hause in Seoul city, for the period August 1948 to August 1949, the results were considerable condition contrary to the expection due to lack of Ventilation. By the above equation, the total air ventilation volume, the avarage air volume of natural ventilation, and the air volume of artifical ventilation to be required of the seven movie hause in Seoul city are discussed (See table in page in this Journal)

• Journal of the Korean Society for Precision Engineering
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• v.20 no.5
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• pp.5-10
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• 2003

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.73-74
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• 2011

• Journal of the Earthquake Engineering Society of Korea
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• v.12 no.1
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• pp.57-66
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• 2008

An experimental study was performed to evaluate seismic reduction performance and applicability of 3-dimensional floor isolation system to the main control room of nuclear power plant. A friction pendulum system(FPS) and air spring were designed and fabricated for 3-dimensional floor isolation system. Two kind of the partial experimental model of a main control room attached to the FPS and air spring were tested on the shaking table. The experimental model consisted of a control panel, a $2.5m{\times}2.5m$ access floor, four FPS and air springs. The artificial time histories based on the vertical and horizontal floor response spectrums(OBE, SSE) of the main control room were used as the earthquake input signals in the test. Compared to non-isolated system, the seismic response of experimental models using 3-dimensional floor isolation system were shown considerable seismic reduction performance.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.20-23
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• 2002

In silicon wafer manufacturing process, the grinding process has been adopted to improve the quality of wafer such as flatness, roughness and so on. This paper describes the effect of grinding process on the surface quality of wafer. The experiments are carried out by high precision in fred grinder with air bearing spindle. The relationship between the inclination of chuck table and the flatness of wafer is investigated, and the effect of grinding conditions including wheel speed, table speed, and feed rate on damage depth and roughness of wafer is also investigated. The experimental results show that there is close relationship between the inclination of the chuck table and the flatness of wafer, and the grinding conditions within this paper little affect the flatness of wafer and relatively high affect the damage depth of wafer.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.466-469
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• 1995

This paper presents a design and performance of the 6 D.O.F linear motion table with a magnetic bearing suspension. The linear positioning of the table with a 150mm stroke is driven by a brushless DC Linear motor and the other attitudes of the stage are controlled by the analog PD controller with magnetic bearing actuators. Each magnetic bearing unit which consists of 3 electromagnets, 3 capacitance probes and 3 backup bearings affords controlled forces by detecting the air gap between the probes and guideways. An integral type capacitance probe amplifier is equipped on the upper plate of the table so that the probe line to the probe amplifier can be shorter therefore the problems due to the stray capacitance and noise can be reduced. Form the pitch-yaw errormeasured by the autocollimator, the vertical and horizont straightness errors of the table are derived that they are maintained below 1.mu. m over 100mm stroke. The positioning accuracy of the linear motion is maintained below 2 .mu. m and the repeatability error is below 1 .mu. m