• Title/Summary/Keyword: Air Pad

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Planarization Uniformity Improvement by a Variable Pressure Type of the Polishing Head with the Thin Rubber Sheet (얇은 고무막 형태의 압력가변 연마헤드를 이용한 웨이퍼 평탄도 개선 방법에 관한 연구)

  • Lee Hocheol
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.4
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    • pp.44-51
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    • 2005
  • In this paper, a new polishing head with the variable pressure structure was studied to improve the planarization uniformity of the conventional template-metal head. Metal surface waviness and slurry distribution on the pad have been known to affect the polishing uniformity even in the synchronized quill and platen velocities. A polishing head with silicon rubber sheet was used to get a curved pressure distribution. In the experiment, the vertical deflection behavior on the pad was characterized with back pressure in the air chamber. Quill force increased linearly with backpressure. However, backpressure under a quill force made the upward movements of the quill. In the wafer polishing experiments, polishing rate and polishing thickness distribution were severely changed with backpressure. The best uniformity was observed with the standard deviation off.5% level of average polishing removal 215nm at backpressure 12.1kPa.

A study of Heat Analysis on Track Rubber Parts (궤도고무부품의 열해석에 관한 연구)

  • Kim, Young-Soo
    • Journal of the Korean Society for Precision Engineering
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    • v.16 no.9
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    • pp.117-122
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    • 1999
  • Track rubber parts has heat built-up as long as dynamic loading is applied from running tracked vehicles. Durability is required for rubber part to sustain the heat accumulation and heat exchange between rubber-metal assembly and environmental air and ground. For this research, the track assembly was divided into four parts i.e., bottom track shoe, upper track pad, pin busing and metal structure. Three rubber parts and metal structure were modelled and analyzed with MARC package program to obtain time-temperature data which was induced form mechanical work of tracked vehicles. heat accumulation data was obtained from special experiments under the room temperature of 25$^{\circ}C\;and\;35^{\circ}C$ to simulate the actual environmental conditions. From this research, it is cleared that the environmental temperature does not affect to the heat accumulation speed in rubber parts. Also, the heat built-up mechanism was clarified from the thermo-mechanical work based on numerical analysis and experiments.

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A Study on the Wet Clutch Pattern Design for the Drag Torque Reduction in Wet DCT System (습식 DCT의 드래그 토크 저감을 위한 클러치 패드 유로 설계)

  • Cho, Junghee;Han, Juneyeol;Kim, Woo-Jung;Jang, Siyoul
    • Tribology and Lubricants
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    • v.33 no.2
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    • pp.71-78
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    • 2017
  • The drag torque in the wet clutch system of a dual clutch transmission system is investigated because it is relatively high, up to 10 of the total output torque of the engine, even when the clutch is in the disengagement state with zero torque transfer. Drag torque results from the shear resistance of the DCTF between the friction pad and separator plate. To reduce the drag torque for ensuring fuel economy, the groove pattern of the wet clutch friction pad is designed to have a high flow rate through the pattern groove. In this study, four types of groove patterns on the friction pad are designed. The volume fraction of the DCTF (VOF) and hydrodynamic pressure developments in the gap between the friction pad and separator plate are computed to correlate with the computation of the drag torque. From the computational results, it is found that a high VOF and hydrodynamics increase the drag torque resulting from the shear resistance of the DCTF. Therefore, a patterned groove design should be used for increasing the flow rate to have more air parts in the gap to reduce the drag torque. In this study, ANSYS FLUENT is used to solve the flow analysis.

The Characteristics of Persimmon Juice Dyeing Using Padding and UV Irradiation Method (Part I) -Color and Properties of Persimmon Juice Dyed Cotton Fabrics- (패딩과 자외선 조사법을 이용한 감즙 염색 특성(제1보) -감즙 염색 면직물의 염색성과 물성-)

  • 한영숙;이혜자;유혜자
    • Journal of the Korean Society of Clothing and Textiles
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    • v.28 no.6
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    • pp.795-806
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    • 2004
  • Unripe indigenous persimmons which contain rich tannins have been used as natural dye materials traditionally and have been using continuously for dyed clothes named Gal-ot in Jeju. Those persimmons were cheap and easy to use as dyes because of inedible and widely cultured in Korea. Persimmon juice dyes not only make fabrics brown-color but also give functional and hygienic properities such as stiffness, air ventilation of clothes, antibacterial activity, protectivity against ultraviolet light. However there are several serious problems which are ristriction of dyeing periods, longtime irradiation, uneven color and low color fastness etc. in persimmon juice dyeing. This study purpose to improve dye effect and method in order to enlarge useability of persimmon juice dyeing. Cotton fabrics were pad-dyed to 100% pick-up using padding machine after dipping in persimmon juice extracted from unripe persimmons indigenous from Jeju. It was possible and available to control pick-up rate. The color of dyed cotton fabrics by padding method was more even and repeatable than which by traditional hand method. Persimmon juice concentrations were 4 types of 10, 25, 50 and 100%. The more concentration increased, the more color deepened. UV Irradiation instead of sunlight was applied to color developing. Irradiation times were shortened till 1∼8 hrs. Same color values could be taken without water wetting which were required in sunlight irradiation. Tensile strengths of cotton fabrics pad-dyed with low concentration of persimmon juice decreased but recovered at high concentrations. Elongations(%) of cotton fabrics pad-dyed with persimmon juice were increased 1% more than undyed cotton in sunlight irradiation. Drape stiffness increased upto double times as much as.

Analysis of Contact Pressure for a 300mm Wafer Polishing Table with Air-Bag Head (Air-Bag Head 가압식 300mm 웨이퍼 폴리싱 테이블의 가압 분포 해석)

  • Ro, Seung-Kook
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.22 no.2
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    • pp.310-317
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    • 2013
  • In this paper, the contact pressure of the wafer and polishing pad for final polishing process for 300 mm-wafer were investigated through numerical analysis using FEM tool, ANSYS. The distribution of the contact pressure is one of main parameters which affects on the flatness and surface roughness of polished wafers. Two types of polishing head, a hard type head with ceramic disk and a soft type head with air bag were considered. The effects of the deformation and initial shape of table on the contact pressure were also examined. Both heads and tables were modeled as 3D finite element model from solid model, and the material properties of polishing pads and rubber plate for the air-bag head were obtained from tensile tests. The contact pressure deviation on wafer surface was smaller with air bag head than hard type head even when the table had form errors such as convex or concave. From this 3D analysis, it could be concluded that the air-bag head has better uniformity of the contact pressure on wafer. Also, the effects of inner diameter of air bag and radial clearance between wafer and retainer were investigated as view point of contact pressure concentration on the edge of wafer.

발사전 가열 해석 - Delta II 자료 분석

  • Choi, Sang-Ho;Kim, Seong-Lyong;Kim, In-Sun
    • Aerospace Engineering and Technology
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    • v.4 no.2
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    • pp.126-134
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    • 2005
  • Before the launch, launch vehicle is set up a few days ago at launch pad to check process and to supply fuels, etc. During the prelaunch process, the payload is exposed to the thermal environments. The purpose of a prelaunch thermal analysis is to predict maximum/minimum liftoff temperature of payload fairing and to evaluate air conditioning performance. The prelaunch thermal analysis of Delta II PLF is performed using Sinda/fluint, general thermal/fluid analyzer. The results are analyzed and compared with Delta II report.

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Characteristics of Surface Roughness in the High Speed Micro Turning of Aluminum Alloy (알루미늄 합금의 고속 미소 선삭에 있어서 표면거칠기 특성)

  • Seong, Chul-Hyun;Kim, Hyeung-Chul;Kim, Ki-Soo
    • Journal of the Korean Society for Precision Engineering
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    • v.16 no.7
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    • pp.94-100
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    • 1999
  • This study adopted the ultra precision machining system which was composed of an air bearing spindle, a granite bed, air pad and a linear feeding mechanism. It also applied the cutting experiment on the aluminum alloy. To evaluate the safety of high speed machining, we examined the surface roughness according to the changes of cutting speed and obtained the speed limit. This paper also studied the effect of cutting condition such as feed rates and depths of cut on the surface roughness within the speed limit. This provided practical information regarding ultra precision machining.

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Characteristics of Surface Roughness in Micro fuming using PCD Tools (PCD공구를 이용 미소가공시 표면거칠기 특성)

  • 한복수;이소영
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.10 no.5
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    • pp.31-38
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    • 2001
  • This paper deals with the micro turning property of setting angle using diamond tool. The bed of the system has used the granite which has the thermal and vibrational characteristics superior to the cast iron bed for the common machine tool. To minimize the inner and outer vibration of the fuming system, an air pad system was manufactured and tested. The aero-static spindle system which has the excellent rotation accuracy was designed and manufactured. As a result of the micro-cutting test on aluminum alloy, tool setting angel have effected on surface roughness. From the results, the micro-cutting conditions hope to provide the useful actual data using in industrial fields.

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Filtration Performance of Fibrous Air Filter under External Electric Field using Insulated Electrodes (외부전기장 적용 섬유상 에어필터의 절연 전극 사용에 따른 여과특성)

  • Ji, Sung-Mi;Sohn, Jong-Ryeul;Park, Hyun-Seol
    • Journal of Korean Society for Atmospheric Environment
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    • v.28 no.6
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    • pp.675-687
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    • 2012
  • Applying an external electric field across air filter media is one of methods to improve the filtration performance. Metal wire meshes have been commonly used as electrodes situated on both sides of a thick filter pad. For a thin filter medium a short circuit, known as the biggest drawback for applying an external electric field to air filter, can occur at the closest point between electrodes. In this study several types of insulated meshes were prepared by coating #50 meshes with a dielectric material, Nylon 66, and the filtration property of air filter was evaluated at the presence of external electric field using those insulated meshes as electrodes and compared with that of filters using bared meshes. The collection efficiency of tested filter was increased from 78% to 95% for singly charged 100 nm particles by application of external electric field. As a result, there was no significant difference in collection efficiency between filters with insulated and bared electrodes. Similar results could be also seen from the tests using polydisperse particles. Finally, through this study, we found that the insulation of mesh electrodes doesn't affect the filtration performance of fibrous air filter under external electric field.

Rotordynamic Performance Analysis and Operation Test of a Power Turbine for the Super critical CO2 Cycle Application (초임계 CO2 발전용 파워 터빈의 회전체 동역학 해석 및 구동 시험)

  • Lee, Donghyun;Kim, Byungok;Sun, Kyungho;Lim, Hyungsoo
    • Tribology and Lubricants
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    • v.33 no.1
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    • pp.9-14
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    • 2017
  • This paper presents a rotordynamic analysis and the operation of a power turbine applied to a 250 kW super-critical $CO_2$ cycle. The power turbine consists of a turbine wheel and a shaft supported by two fluid film bearings. We use a tilting pad bearing for the power turbine owing to the high speed operation, and employ copper backing pads to improve the thermal management of the bearing. We conduct a rotordynamic analysis based on the design parameters of the power turbine. The dynamic coefficients of the tilting pad bearings were calculated based on the iso-thermal lubrication theory and turbine wheel was modeled as equivalent inertia. The predicted Cambell diagram showed that there are two critical speeds, namely the conical and bending critical speeds under the rated speed. However, the unbalance response prediction showed that vibration levels are controlled within 10 mm for all speed ranges owing to the high damping ratio of the modes. Additionally, the predicted logarithmic decrement indicates that there is no unstable mode. The power turbine uses compressed air at a temperature of $250^{\circ}C$ in its operation, and we monitor the shaft vibration and temperature of the lubricant during the test. In the steady state, we record a temperature rise of $40^{\circ}C$ between the inlet and outlet lubricant and the measured shaft vibration shows good agreement with the prediction.