• Title/Summary/Keyword: Air Flow Distribution Plate

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LCD 제조용 스퍼터링 장비의 비접촉식 유리평판 이송장치에 대한 수치적 연구

  • Gang, U-Jin;Im, Ik-Tae;Kim, U-Seung
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2007.06a
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    • pp.149-156
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    • 2007
  • Non-contact transportation of the large-sized glass plate using air-cushion is considered for sputtering system of LCD panel. The Argon gas from second gas injection holes is injected to levitate and transport the glass plate. Low maximum pressure and uniform pressure distribution on the bottom surface of the glass plate must be maintained for stable levitation and transportation of the glass plate. Therefore, the analysis of fluid flow between the glass plate and the air-pad is numerically performed for varying space between the injection holes in this study. The pressure uniformity on the bottom surface of the glass plate is evaluated for overall glass plate. The distance between the injection holes must be designed below 90 mm for obtaining the low maximum pressure and uniform pressure distribution.

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Performance Evaluation of Air-to-Air Total Heat Transfer with Rotating Porous Plates (다공의 전열판이 내장된 공기 대 공기 전열교환기의 성능 평가)

  • Lim, T.W.;Cho, D.H.
    • Journal of Power System Engineering
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    • v.11 no.2
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    • pp.20-25
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    • 2007
  • The performance of air-to-air heat exchanger has been investigated with rotating porous plates newly developed in this study. With an equal interval of 18 mm, the rotating porous plates are installed inside the heat exchanger where the hot and cold airs enter at opposite ends. When flowing in opposite directions by the separating plate installed in the center of the rotating porous plates, the airs give and receive the heat each other. Dry bulb temperature is set by adjusting heat supply at heater. In order to measure the temperature distribution of the hot air side inside heat exchanger, the thermocouples are inserted between the plates. The first location of thermocouple is 10mm downstream from the inlet of heat exchanger, and succeeding ten locations are aligned at an equal interval of 18mm. From the experiment of air-to-air heat exchanger with the rotating porous plates, the heat transfer rate increased as both air flow rate and RPM of the rotating porous plate increased. It was found that the overall heat transfer coefficient increased with the increase in RPM of porous plate at the conditions of the same air flow rate.

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A Study on the Characteristics of Heat Transfer in Quadrangle Duct with Solar Absorber Plate (태양열 집열면이 있는 4각 덕트 내의 열전달 특성에 관한 연구)

  • 고동국;조대진;윤석주;박상규
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.14 no.12
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    • pp.1014-1022
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    • 2002
  • This paper analyzed the characteristics of heat transfer in quadangle duct with absorber plate by solar radiation. Effects o( Reynolds number on increasing temperature at outlet for variation of absorber plate temperature were analyzed by using numerical analysis technique. And also the effects of turbulent intensity of inlet flow on increasing temperature at outlet for various duct height and effects of inlet aspect ratio of quadrangle duct and position of heating surface on the outlet temperature were analysed. As the results, Outlet temperature was greatly influenced in low Reynolds number. And the highest outlet temperature distribution appeared on the inlet aspect ratio 2 because of the buoyancy effect.

Numerical and Exprimental Study of the Air Plate in a Fuel Cell Considering Structural Deformation (연료전지 공기판의 구조적 변형을 고려한 유동 해석과 실험)

  • Yang, Ji-Hae;Hahn, Oh-Hyun;Park, Jung-Sun
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.32 no.5
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    • pp.41-49
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    • 2004
  • The porous media of a proton exchange membrane fuel cell (PEMFC) is made of deformable materials. The shape of cross sectional area in air plate channels has been changed by structural deformation of the porous media. The uniform mass flow rate and pressure are major factors for safe and efficient operation in the PEMFC. Two kinds of models are provided for the flow analyses. Deformable and undeformable porous media are considered for numerical analysis and experiment of the air plate model. The numerical flow analysis results with deformable and undeformable porous media has some discrepancy in pressure distribution. The pressure differences are measured in order to compare with numerical analysis results. Pressures are measured between inlet and outlet of the air plate. The numerical analysis and experimental results show similar pressure distribution. It is shown that the pressure drops in the two approaches are well matched each other. It is proven that the consideration of structural deformation is required in the numerical analysis/experiment for the PEMFC design.

The Effect of Header and Channel Angle Variation on Two-Phase Flow Distribution at Multiple Junctions (헤더-채널 분기관의 각도변화가 2상 유동 분배에 미치는 영향에 대한 연구)

  • Lee, Jun Kyoung
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.27 no.11
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    • pp.559-566
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    • 2015
  • The main objective of this work is to experimentally investigate the effect of angle variation on the distribution of two-phase flow at header-channel junctions. The cross-sections of the header and the channels were fixed at $16mm{\times}16mm$ and $12mm{\times}1.8mm$, respectively. Air and water were used as the test fluids. Four different header-channel positions were tested : Vertical header with Horizontal channels (case VM-HC), Horizontal header with Horizontal channels (case HM-HC), Horizontal header with Vertical Downward channels (case HM-VDC), and Horizontal header with Vertical Upward channels (case HM-VUC). In all cases, liquid flow distribution tended to decrease gradually in the upstream header region. However, in the downstream region, different trends could be seen. The reason for these different tendencies were identified by flow visualization in each case. The standard deviations for the liquid and gas flow distribution in each case were calculated, and the case of VM-HC had the lowest values compared to other cases because of the symmetrically distributed liquid film and strong flow recirculation near the end plate.

A Numerical Analysis of Flow and Beat Transfer Characteristics of a Two-Dimensional Multi-Impingement Jet(I) (이차원 다중젯트의 유동 및 열전달 특성의 수치적 해석(I) -돌출열원이 없는 경우의 유동특성-)

  • 장대철;이기명
    • Journal of Biosystems Engineering
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    • v.20 no.1
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    • pp.58-65
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    • 1995
  • A numerical study for a two dimensional multi-jet with crossflow of the spent fluid has been carried out. Three different distributions of mass-flow rate at 5 jet exits were assumed to see their effects upon the flow characteristics, especially in the jet-flow region. For each distribution, various Reynolds numbers ranging from laminar to turbulent flows were considered. Calculations drew the following items as conclusion. 1) The development of the free jets issued from downstream jets was hindered by the crossflow formed due to jets. Consequently, the free jet was developed into the channel flow without any evident symptom of impingement jet flow characteristics 2) The crossflow induced the pressure gradient along the cross section of jet exits and the value of the pressure gradient increased as going downstream. The crossflow generated also the turbulent kinetic energy as it collied with the downstream jets. 3) The skin friction coefficient along the impingement plate was affected more by the distribution of mass flow rate at jet exits rather than by the Reynolds number. The skin friction coefficient was inversely proportional to the square root of the Reynolds number, regardless of flow regime when a fully developed flow was formed in the jet flow region. 4) The distribution of the skin friction coefficient along the impingement plate was found to be controlled by adjusting the distribution of mass flow rate at jet exits.

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A Numerical Study on the Characteristics of Flow Field, Temperature and Concentration Distribution According to Changing the Shape of Separation Plate of Kitchen Hood System (주방용 후드시스템의 분리판 형상 변화에 따른 유동장, 온도 및 농도특성에 관한 수치적 연구)

  • Lee, Kwang-Sub;Lee, Chang-Hee;Lim, Kyoung-Bin
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.30 no.2 s.245
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    • pp.177-185
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    • 2006
  • This study aims deriving analysis the flow characteristic of kitchen hood system with using 3-D numerical analysis method and improving the system to expel pollutes more efficiently. To understand the flow characteristics of four models, this study only focuses on velocity field, temperature field, and concentration field varying with followings whether separation plate is set or not and the shapes of separation plates. The quantity of air, speed of exhaust fan and temperature and concentration of heating source are concerned as constant values. The three models having different shapes have one exhaust port and the model which has the vent at the closest position to where pollutes are generated is discovered to be the most efficient model. Compare to the initial model (having no separation plate), it was $1.4-1.9\%$ more efficient at temperature distribution and $9.4-11.9\%$ more at $CO_2$ concentration distribution.

A Study on the Air Cushion Pad of Non-contact Glass Transportation Unit (비접촉식 유리 평판 이송 장치 공기 패드 형상에 대한 연구)

  • Jeon, Hyeon-Ju;Kim, Gwang-Seon;Im, Ik-Tae
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2006.10a
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    • pp.138-144
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    • 2006
  • Non-contact transportation of a large-sized glass plate using air cushion for the sputtering system of liquid crystal display panel was considered. The gas is injected through multiple small holes to maintain the force for levitating glass plate. Complex flow field and resulting pressure distribution on the glass surface was numerically studied to design the air injection pad. The exhaust hole size was varied to obtain evenly distributed pressure distribution at fixed diameter of the injection hole. Considering the force for levitating glass plate, the diameter of the exhaust hole of 30 to 40 times of the gas injection hole was recommended.

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A Study on the Conjugate Heat Transfer from Horizontal Plate with Protruding Heat Source (열원이 부착된 수평 평판에서 복합 열전달에 관한 연구)

  • 김병철;주동인
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.14 no.6
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    • pp.512-518
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    • 2002
  • The real chip and similarity model were used to investigate the thermal behavior and velocity distribution of air from the heat source with the location and the amount of heat experimentally and numerically, and compared. The heat generated in the block is not cooled by convection and show the high temperature by the stagnation of heat flow. After maintaining the high temperature of block by the natural convection, the sudden drop of temperature with the air flow was shown in the channel but the decreasing rate was small with the time. The inward block was effected by infinitesimal air flow generated between block and channel and outward block was effected by the entry condition.

A Study on the Heat Transfer Characteristics on Flat Plate Surface by Two-dimensional Impinging Air Jet (평판전열면(平板傳熱面)에 충돌(衝突)하는 2차원충돌분류계(二次元衝突噴流系)의 열전달특성(熱傳達特性)에 관(關)한 연구(硏究))

  • Lee, Y.H.;Kim, S.P.;Seo, J.Y.
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.3 no.1
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    • pp.61-68
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    • 1991
  • The purpose of this study is to investigate the heat transfer characteristics and the flow structure in the case of rectangular air jet impinging vertically on the flat heating surface. The maximum value of Nusselt number at stagnation point is observed at H/B=10. It is found that this trend has been caused by the effect of stretching of large scale vortex in the stagnation region. For potential core region the Nusselt number distribution in the downstream of the stagnation point decreases gradually and begins to increase at about X/B=3. From the flow visualization it could be seen that small eddy produced from the nozzle edge grows in large scale and that large scale eddy disturbed the thermal boundary layer on the heating plate. The local average Nusselt number becomes maximum at X/B=0.5 regardless of H/B variation.

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