• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.31-31
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• 2008

고주파 잡음 발생과 고집적화 문제 해결을 위해 고용량 디커플링 캐패시터를 기판에 내장하는 연구가 활발히 진행되고 있다. 본 연구에서는 초고주파 환경에서 고용량 기판 내장형 디커플링 캐패시터로의 응용을 위해 $BaTiO_3$박막을 에어로졸 데포지션 법을 이용하여 12~0.2 ${\mu}m$의 두께로 제조하였고 그 유전특성을 조사하였다. 그결과, 1 MHz에서 permittivity가 70, loss tangent은 3% 이하였으며, capacitance density는 $1{\mu}m$의 두께에서 59 nF/$cm^2$이었다. 하지만, 박막의 두께가 $1{\mu}m$ 이하에서는 XRD를 통해 결정성이 확인 되었음에도 큰 누설전류로 인해 유전특성을 확인할 수 없었다. 이 누설전류의 발생 원인을 조사하기 위해 $BaTiO_3$박막의 표면의 미세구조를 SEM으로 관찰한 결과 여러 결함들이 확인되었으며, 또한 전극 직경의 크기를 1.5 mm에서 0.33 mm로 작게 변화시킴으로서 그 유전특성을 조사하여 박막의 불균일성과 박막화의 가능성을 확인하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.37-37
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• 2008

에어로졸데포지션법을 이용하여 집적화 기판을 위한 $Al_2O_3$-PMMA 복합체 후막을 상온에서 구리 기판 위 에 제조하였다. XRD, FT-IR 분석을 통해 코팅된 막은 $Al_2O_3$와 PMMA의 혼합물로 존재함을 확인하였으며 성막 중 $Al_2O_3$. PMMA의 상호작용과 PMMA 파우더의 거동에 대한 분석을 통해 $Al_2O_3$-PMMA 복할체 후막의 성막 양상을 확인할 수 있었다. 또한 기판 거칠기에 따라 초기 계면의 양상이 달라질 수 있음을 확인하였고 이러한 초기 계면의 상태가 $Al_2O_3$-PMMA 복합체 후막의 제조에 있어 매우 중요함을 알 수 있었다. 본 연구에서는 에어로졸데포지션법을 이용한 $Al_2O_3$-PMMA 복합체 후막의 성막 양상을 통해 세라믹-폴리머 복합체의 제조에 있어서의 주요 변수들을 알아보고 $Al_2O_3$-PMMA 복합체 후막의 전기적인 특성을 확인하였다.

• Particle and aerosol research
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• v.5 no.2
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• pp.83-90
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• 2009

This paper describes a condensation-evaporation method (CEM) to produce size-controlled spherical silver nanoparticles by perturbing coagulation and coalescence processes in the gas phase. Polydisperse silver nanoparticles generated by the CEM were first introduced into a differential mobility analyzer (DMA) to select a group of silver nanoparticles with same electrical mobility, which also enables to make a group of nanoparticles with elongated structures and same projected area. These silver nanoparticles selected by the DMA were then in-situ sintered at ${\sim}600^{\circ}C$, and then they were observed to turn into spherical shaped nanoparticles by the rapid coalescence process. With the assistance of modified converging-typed quartz reactor, we can also produce the 10 times higher number concentration of silver nanoparticles compared with a general quartz reactor with uniform diameter. Finally, the spherical silver nanoparticles with 30 nm were electrostatically deposited on the surface of silicon substrate with the coverage rate of ~4%/hr. This useful preparation method of size-controlled monodisperse silver nanoparticles developed in this work can be applied to the various studies for characterizing the physical, chemical, optical, and biological properties of nanoparticles as a function of their size.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.160-160
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• 2011

I-III-VI족 화합물 반도체인 $CuInS_2$(CIS) 박막은 Cu(In,Ga)$Se_2$에 비해서 독성원소를 사용하지 않으므로 환경 친화적이고 Ga, Se를 사용하지 않아 조성의 조절이 쉬우며 태양전지의 이상적인 밴드갭인 1.5 eV에 근접한 1.53 eV의 직접천이형 에너지 밴드갭을 가지고 있어 태양전지의 광흡수층으로써 유망한 재료이다. CIS 박막 증착에는 다양한 방법이 있으며 본 연구에서는 chamber를 진공으로 만들고 CIS를 구성하는 용액으로부터 미립자화 된 입자를 노즐을 통하여 팽창시켜 에어로졸을 생성하고 입자들의 운동에너지를 증착에 직접 이용 할 수 있는 Aerosol Jet Deposition (AJD)라는 방법을 이용하려고 한다. 이 방법은 높은 증착속도로 우수한 박막을 성장시킬 수 있는 저비용 및 단순공정으로 CIS를 증착 할 수 있는 새로운 방법이다. 물을 용매로 하여 수용액 상태의 $CuCl_2{\cdot}2H_2O$, $InCl_3$, $(NH_2)_2CS$를 혼합하여 CIS 용액을 제조하고 carrier gas를 주입하여 CIS 용액을 노즐로 이동시켜 팽창시킨다. 용액이 팽창되면서 온도가 감소하여 응축이 일어나며 이 응축된 용액이 가열된 기판 위에 충돌하여 용매가 증발하면서 결정화된 CIS가 증착이 된다. CIS의 특성은 용액의 전구체 비율, 기판 온도, 팽창 전 압력, chamber 압력 등의 영향을 받는데 본 연구에서는 기판 온도를 증착변수로 선택하여 CIS 박막을 증착하고 박막의 특성을 고찰하고자 한다.

• Journal of the Korean Ceramic Society
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• v.46 no.5
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• pp.441-446
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• 2009

Dense crack-free yttria film with 10 $\mu m$ thickness was prepared on aluminum by aerosol deposition. X-ray diffraction pattern on the film showed that it contained the same crystalline phase as the raw powder. Transmission electron microscopy revealed a nanostructured yttria film with grains smaller than 100 nm. Tensile adhesion strength between the film and aluminum substrate was 57.8 $\pm$ 6.3MPa. According to the etching test with $CF_4-O_2$ plasma, the etching rate of the yttria film was 1/100 that of quartz, 1/10 that of sintered alumina and comparable to that of sintered yttria.

• Particle and aerosol research
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• v.9 no.2
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• pp.59-67
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• 2013

One of purposes in this study was to confirm the behavior of coughed particles under different ventilation conditions. Three types of ventilation systems were applied for this experiment and the properties of coughed particles were measured using computational fluid dynamics (CFD) in an intensive care unit. The changes of total airborne particles for each case showed different trends according to the ventilation type and time, but the deposited particles were similar in all conditions. Although the time taken for 50% of the particles to be deposited was the fastest in case 2, the portion of deposited particles after 300 seconds was only 5% in all conditions. In case 1, a relatively small number of particles were deposited on the wall, but the particle exhaust and deposition on the occupants were the highest. In case 3, the downward ventilation was applied as that recommended by the US Center for Disease Control and Prevention (CDC) and showed different exhaust efficiencies according to the particle size.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.113-113
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• 2010

유비쿼터스 시대를 맞이하여 현재의 전자제품은 초고주파 환경에서의 소형화된 마이크로파 소자를 요구하고 있다. 마이크로파 대역에서 세라믹 소재는 대부분의 폴리머 소재에 비해 낮은 유전손실 값을 보이고 있어 향후 확대되는 고주파화에 적합한 소재로 평가되고 있다. 하지만 세라믹 재료는 깨지기 쉬운 특성을 가지고 있어 공정 및 취급이 어려우며 높은 소결온도를 가지고 있어 융점이 낮은 재료와의 집적화에 있어서 난점을 가지고 있다. 이를 위해 본 연구실에서는 실온에서 세라믹을 비롯한 금속 및 폴리머 재료의 치밀한 코팅막의 성막 및 이종 접합이 가능한 Aerosol Deposition (AD 법)에 주목하였고 마이크로파 소자 제작 공정으로서 AD 법의 응용 가능성을 연구하였다. 마이크로파 소자의 기판으로서는 AD 법을 이용하여 유전손실이 낮고 플렉서블한 $Al_2O_3$-PTFE 혼합 기판을 제작하고 적용하였다. 금속 선로 패터닝 제작 공정으로는 도금법이 대표적이지만 고비용 및 복잡한 공정 절차, 폐화학용액으로 인한 환경문제 등의 단점을 지니고 있어 이를 대체하는 금속 선로 패터닝 공정이 절실히 요구되고 있다. 이를 위해 본 연구에서는 AD 법을 이용하여 금속 필름을 제작하고 대체 공정으로서의 가능성을 확인하였다. 하지만 AD 법을 이용한 세라믹 필름 제작에 관한 연구는 크게 활성화되어 있는 반면에 금속 필름의 제작, 특성 측정 및 개선에 관한 연구는 그에 비해 미비한 수준이다. 이를 위해 이번 연구에서는 AD 법을 이용하여 금속 필름을 성막 시에 영향을 미치는 요인을 고찰하였으며 또한 마이크로파 소자의 도체 손실에 크게 관계되는 금속 필름의 비저항 특성의 측정 및 개선에 관한 연구를 수행하였다. 이를 위해 본 연구에서는 정전장 시뮬레이션을 활용하여 AD 법으로 성막된 금속 필름의 정밀한 비저항 측정에 관한 연구방법을 마련하고 후열처리를 통한 비저항 특성을 개선시키는 연구를 진행하였다.

• Asian Journal of Atmospheric Environment
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• v.7 no.1
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• pp.1-7
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• 2013

To establish the method for investigating the behavior of aerosol particles deposited on the leaf surface against fog water under natural conditions, scanning electron microscopy with energy-dispersive X-ray (SEM-EDX) analysis and wash water analysis by ion chromatography after the washing treatment were performed using leaves of white birch collected from low part of the tree crown and the top of the tree in Sapporo City, Hokkaido, northern Japan. Each of collected leaves was divided into two parts according to the treatment performed: leaf surface (adaxial side) was 1) untreated, and 2) washed with deionized water with a pipette. In untreated samples, many particles of various shapes, including soil particles and organic debris, were deposited on the surface. Particles containing S were found on the surface of samples collected from only low part of the tree crown. After the washing treatment, SEM-EDX analysis revealed that soil particles and particles containing S had been washed off with water, although some particles such as soil particles and organic debris still remained on the leaf surface. The major anion such as $SO{_4}^{2-}$ was detected in wash water of all samples, although the peak of S in X-ray spectra was not detected from samples collected at top of the tree. The combination of SEM-EDX analysis with wash water analysis indicated that $SO{_4}^{2-}$ was deposited on the leaf surface in dissolved state and/or in state of submicron particles. These results suggested that fog water could remove soil particles and particles containing S and $SO{_4}^{2-}$ from the leaf surfaces, but not all particles. There was no difference in sampling position in the tree crown. Our study suggested that combination with SEM-EDX analysis and wash water analysis would be effective for investigation of the behavior of particles on the leaf surface against fog water.

• Korean Journal of Materials Research
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• v.29 no.11
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• pp.684-689
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• 2019

Single crystals, which have complexed composition, are fabricated by solid state grain growth. However, it is hard to achieve stable properties in a single crystal due to trapped pores. Aerosol deposition (AD) is suitable for fabrication of single crystals with stable properties because this process can make a high density coating layer. Because of their unique features (nano sized grains, stress inner site), it is hard to fabricate single crystals, and so studies of grain growth behavior of AD film are essential. In this study, a $BaTiO_3$ coating layer with ${\sim}9{\mu}m$ thickness is fabricated using an aerosol deposition method on (100) and (110) cut $SrTiO_3$ single crystal substrates, which are adopted as seeds for grain growth. Each specimen is heat-treated at various conditions (900, 1,100, and $1,300^{\circ}C$ for 5 h). $BaTiO_3$ layer shows different growth behavior and X-ray diffraction depending on cutting direction of $SrTiO_3$ seed. Rectangular pillars at $SrTiO_3$ (100) and laminating thin plates at $SrTiO_3$ (110), respectively, are observed.

• The Korean Journal of Nuclear Medicine
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• v.24 no.2
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• pp.229-236
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• 1990

Perfusion and ventilaion imagings of the lung are well established procedure for diagnosing pulmonary embolism, differentiation it from chronic obstructive lung disease, and making an early detection of chronic obstructive lung disease. To evaluate the usefulness of radioaerosol inhalation imaging (RII) in chronic obstructive lung disease, especially pulmonary emphysema, we analyzed RIIs of five normal adult non-smokers, five asymptomatic smokers (age 25-42 years with the mean 36), and 21 patients with pulmonry emphysema (age 59-78 years with the mean 67). Scintigrams were obtained with radioaerosol produced by a BARC nebulizer with 15 mCi of Tc-99m-phytate. Scanning was performed in the anterior, posterior, and lateral projections after five to 10-minute inhalation of the radioaerosol on sitting position. The scans were analyzed and correlated with the results of pulmonary function studies and chest radiographs. Also lung perfusion scan with $^{99m}Tc-MAA$ was performed in 12 patients. In five patients, we performed follow-up scans for the evaluation of the effects of a bronchodilator. Based on the X-ray findings and clinical symptoms, pulmonary emphysema was classified into four types: centrilobular (3 patients), panlobular (4 patients), intermediate (10 patients), and combined (4 patients). RII findings were patternized according to the type, extent, and intensity of the aerosol deposition in the central bronchial and bronchopulmonary system and lung parenchyma. 10 controls, normal five non-smokers and three asymptomatic smokers revealed homogeneous parenchymal deposition in the entire lung fields without central bronchial deposition. The remaining two of asymptomatic smokers revealed mild central airway deposition. The great majority of the patients showed either central (9/21) or combined type (10/21) of bronchopulmonary deposition and the remaining two patients peripheral bronchopulmonary deposition. Parenchymal aerosol deposition in pulmonary emphysema was diffuse (6/21), discrete(6/21), intermediate (3/21), or combined (6/21). In 12 patients studied also with perfusion scans, perfusion defects matched closely with ventilation defects in location and configuration. But the size of the ventilation defects was generally larger than the perfusion defects. In all four patients treated with bronchodilators, the follow-up study demonstrated decrease in abnormal of radioaerosol deposition in the central airway with improvement of ventilation defects. RII was useful technique for the evaluation of regional ventilatory abnormality and the effects of treatment with bronchodilators in pulmonary emphysema.