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Ridge Formation by Dry-Etching of Pd and AlGaN/GaN Superlattice for the Fabrication of GaN Blue Laser Diodes

  • Kim, Jae-Gwan;Lee, Dong-Min;Park, Min-Ju;Hwang, Seong-Ju;Lee, Seong-Nam;Gwak, Jun-Seop;Lee, Ji-Myeon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.391-392
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    • 2012
  • In these days, the desire for the precise and tiny displays in mobile application has been increased strongly. Currently, laser displays ranging from large-size laser TV to mobile projectors, are commercially available or due to appear on the market [1]. In order to achieve a mobile projectors, the semiconductor laser diodes should be used as a laser source due to their size and weight. In this presentation, the continuous etch characteristics of Pd and AlGaN/GaN superlattice for the fabrication of blue laser diodes were investigated by using inductively coupled $CHF_3$ and $Cl_2$ -based plasma. The GaN laser diode samples were grown on the sapphire (0001) substrate using a metal organic chemical vapor deposition system. A Si-doped GaN layer was grown on the substrate, followed by growth of LD structures, including the active layers of InGaN/GaN quantum well and barriers layer, as shown in other literature [2], and the palladium was used as a p-type ohmic contact metal. The etch rate of AlGaN/GaN superlattice (2.5/2.5 nm for 100 periods) and n-GaN by using $Cl_2$ (90%)/Ar (10%) and $Cl_2$ (50%)/$CHF_3$ (50%) plasma chemistry, respectively. While when the $Cl_2$/Ar plasma were used, the etch rate of AlGaN/GaN superlattice shows a similar etch rate as that of n-GaN, the $Cl_2/CHF_3$ plasma shows decreased etch rate, compared with that of $Cl_2$/Ar plasma, especially for AlGaN/GaN superlattice. Furthermore, it was also found that the Pd which is deposited on top of the superlattice couldn't be etched with $Cl_2$/Ar plasma. It was indicating that the etching step should be separated into 2 steps for the Pd etching and the superlattice etching, respectively. The etched surface of stacked Pd/superlattice as a result of 2-step etching process including Pd etching ($Cl_2/CHF_3$) and SLs ($Cl_2$/Ar) etching, respectively. EDX results shows that the etched surface is a GaN waveguide free from the Al, indicating the SLs were fully removed by etching. Furthermore, the optical and electrical properties will be also investigated in this presentation. In summary, Pd/AlGaN/GaN SLs were successfully etched exploiting noble 2-step etching processes.

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Identification of Enteric Bacteria from Nephila clavata (한국산 무당거미(Nephila clavata)에서 분리한 장내 세균의 동정)

  • 문은영;오현우;맹필재;배경숙
    • Korean Journal of Microbiology
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    • v.37 no.1
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    • pp.1-8
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    • 2001
  • Spiders are carnivores that prey upon insects and other small arthropods through digestion of food outside the body. Although spider poison may contain proteolytic enzymes, these are thought to play an insignificant role in actual digestion. The source of active proteolytic enzymes can be either the digestive tract cells of spider, or natural microbial flora in the digestive tract of spider. In this study, digestive tracts from the spider, Nephila clavata, were screened for bacteria that have protease or lipase activity. A total of $10^3-10^5$ CFU was recovered from a spider and more than 90% of them showed protease and lipase activity respectively. Of the microbial isolates, 63.3% showed protease or lipase activity, and 50% of these showed both protease and lipase activity. Some of the isolates were characterized using a battery of chemical, phenotypic and genotypic methods. Eleven Gram negative bacteriaa (Acinetobacter calcoaceticus, A. haemolyticus, Alcaligenes faecalis, Cedecea davisae, C. neteri, Klebsiella pneumoniae, Proteus vulgaris, Pseudomonas fluorescens, Serratia marcescens, Stenotrophomonas maltophilia, Suttonella indologenes) and 11 Gram positive bacteria (Bacillus cereus, B. coagulans, B. pasteurii, B. thuringiensis, Cellulomonas flavigena, Corynebacterium martruchotii, Enterococcus durans, E. faecalis, Micrococcus luteus, Staphylococcus hominis, S. sciuri) were identified.

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Studies on Expanding Application for the Recycling of Coal Ash in Domestic (국내 석탄재 재활용 확대 방안 연구)

  • Cho, Hanna;Maeng, Jun-Ho;Kim, Eun-young
    • Journal of Environmental Impact Assessment
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    • v.26 no.6
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    • pp.563-573
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    • 2017
  • Coal ash is generated from coal-fired thermal power plants every year. The remaining quantity of coal ash ends up in the landfills except for the recycled portion, and the existing ash pond capacity is limited almost. Currently, the difficulties are faced in building a new ash treatment plant because of the concerns about the environmental impacts of landfills at individual plant facilities. In terms of minimizing the environmental impact, the recycling and effective uses of coal ash are recognized as urgent issues to be challenged. Accordingly, this study examines the obstacles in expanding the recycling of the coal ash in South Korea and proposes solutions based on the case study analysis. The analysis results are as follows: 1) specific recycling guidelines and standards are required to be established in accordance with the contact medium (soil, ground water, surface water and sea water) and the chemical. 2) by providing the recognition environmentally safe in recycling the coal ash, transparency in establishing the planning stages and active communication with the community through promotion and research are essentially needed. 3) practical support system is required to encourage the power plant companies to use the coal ash as beneficial use.

Pt/AlGaN Schottky-Type UV Photodetector with 310nm Cutoff Wavelength

  • Kim, Bo-Kyun;Kim, Jung-Kyu;Park, Sung-Jong;Lee, Heon-Bok;Cho, Hyun-Ick;Lee, Young-Hyun;Hahn, Yoon-Bong;Lee, Jung-Hee;Hahm, Sung-Ho
    • Journal of Sensor Science and Technology
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    • v.12 no.2
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    • pp.66-71
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    • 2003
  • Pt/AlGaN Schottky-type UV photodetectors were designed and fabricated. A low-temperature AlGaN interlayer buffer was grown between the AlGaN and GaN film in the diode structure epitaxy to obtain crack-free AlGaN active layers. A comparison was then made of the structural, electrical, and optical characteristics of two different diodes: one with an AlGaN($0.5\;{\mu}m$)/n+-GaN(2 nm) structure (type 1) and the other with an AlGaN($0.5\;{\mu}m$)/AlGaN interlayer($150\;{\AA}$)/n+-GaN($3\;{\mu}m$) structure(type 2). A crack-free AlGaN film was obtained by the insertion of a low-temperature AlGaN interlayer with an aluminum mole fraction of 26% into the $Al_xGa_{1-x}N$ layer. The fabricated Pt/$Al_{0.33}Ga_{0.67}N$ photodetector had a leakage current of 1 nA for the type 1 diode and $0.1\;{\mu}A$ for the type 2 diode at a reverse bias of -5 V. For the photoresponse measurement, the type 2 diode exhibited a cut-off wavelength of 300 nm, prominent responsivity of 0.15 A/W at 280 nm, and UV-visible extinction ratio of $1.5{\times}10^4$. Accordingly, the Pt/$Al_{0.33}Ga_{0.67}N$ Schottky-type ultraviolet photodetector with an AlGaN interlayer exhibited superior electrical and optical characteristics and improved UV detecting properties.

Antioxidative Activity and Chemical Characteristics of Leaves, Roots, Stems and Fruits Extracts from Acanthopanax senticosus (가시오가피 잎·뿌리·추출물의 이화학적 특성 및 항산화 효과)

  • Heo, Su-Jin;Ahn, Hee-Young;Kang, Min-Jeong;Lee, Jae-Hong;Cha, Jae-Young;Cho, Young-Su
    • Journal of Life Science
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    • v.21 no.7
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    • pp.1052-1059
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    • 2011
  • The contents of bioactive and antioxidative activities (DPPH (${\alpha},{\alpha}'$-diphenyl-${\beta}$-picrylhydrazyl), free radical scavenging activity, peroxidation of linoleic acid and rat hepatocyte microsome, and Fe/Cu reducing power, tyrosinase inhibition activity) were tested by in vitro experimental models using water, hot water, ethanol and methanol extracts of leaves (ASL), roots (ASR), stems (ASS) and fruits (ASF) from Acanthopanax senticosus. Hot water extract from ASL showed the highest extraction yield (16.04%) as well as highest contents of phenolic compounds (2.67%) and flavonoids (1.43%). Major minerals were K, Ca and Mg. In oxidation in vitro models using DPPH free radical scavenging activity, Fe/Cu reducing power, $Fe^{2+}$/ascorbate-induced linoleic acid peroxidation by ferric thiocyanate and thiobarbituric acid (TBA) methods, tyrosinase inhibition activity and autooxidation of rat hepatic microsomes membrane, and antioxidative activities were strong in Acanthopanax senticosus. From these results, ASL extracts were shown to have the most potent antioxidative properties and contain the highest amounts of antioxidative compounds such as phenolic compounds and flavonoids. These results may provide the basic data to understand the biological activities of bio-active materials derived from leaves of Acanthopanax senticosus.

Isolation of an Anticariogenic Compound from Magnoliae Bark (후박피(Magnoliae bark)로부터 항충치활성을 갖는 물질의 분리)

  • Lee, Youn-Soo;Park, Hun-Joo;You, Jae-Sun;Park, Hyung-Hwan;Kwon, Ik-Boo;Lee, Hyeon-Yong
    • Korean Journal of Food Science and Technology
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    • v.30 no.1
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    • pp.230-236
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    • 1998
  • We have screened total 32 herbal drugs to find the highest activity against human cariogenic enzyme, glucosyltransferase (GTase) from the extracts of Magnoliae bark. The extracts were separated into three phases, i. e. water, n-butanol and ethylacetate according to their solvent polarity. Among them, ethylacetate fraction had approximately more than 70% of total activities, and the active principle was further isolated by prep. HPLC following silicagel column chromatography to yield single compound as white powder. The chemical structure of the compound was finally elucidated to be 4,4'-dihydroxy-3,3'-dimethoxylignan from the spectral data of FAB-MS. $^1H-\;and\;^{13}C-NMR$ spectrometries. The compound was also shown to have relatively strong antibacterial activity against ten types of cariogenic oral bacteria and one kind of Actinomyces sp.

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Development of AB2-Type Zr-Mn-Ni Hydrogen-Storage Alloys for Ni-MH Secondary Battery (Ni-MH 2차전지용 AB2계 Zr-Mn-Ni 수소저장합금의 개발)

  • Kwon, IkHyun;Ahn, DongSu;Park, HyeRyoung;Song, MyoungYoup
    • Journal of Hydrogen and New Energy
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    • v.12 no.1
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    • pp.29-38
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    • 2001
  • The alloys $ZrMn_2Ni_x$ (x=0.0, 0.3, 0.6, 0.9 and 1.2) as the alloys of Zr-Mn-Ni three component system were prepared and their hydrogen-storage properties and their electrochemical properties were investigated. The C14 Laves phase formed in all the alloys $ZrMn_2Ni_x$. Among these alloys $ZrMn_2Ni_{0.6}$ was activated relatively easily(after about 11 charge-discharge cycles), and had the largest discharge capacity(max. 45mAh/g). For all the alloys Zr was dissolved most easily into the 6M KOH solution. More Mn and Ni were dissolved from the $ZrMn_2Ni_{0.6}$ alloy than from the other alloys. Due to the active charge and discharge of the $ZrMn_2Ni_{0.6}$ alloys, related to the easier activation and the larger discharge capacity, Zr, Mn and Ni in this alloy were considered to be dissolved more easily into the 6M KOH solution, compared with the other alloys.

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Evaluations on Antioxidant Effect of Methanol Extract from Immature Cotton Boll (미성숙 목화다래 메탄올 추출물의 항산화 효능 평가)

  • Park, Hee-Jeong;Lee, Ki-Young
    • Korean Journal of Plant Resources
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    • v.26 no.4
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    • pp.426-432
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    • 2013
  • The results of the content of total polyphenol and flavonoid, DPPH (1-1-diphenyl-2-picryl-hydrazyl) radical scavenging activity, ABTS [2,2'-azino-bis(3-ethylbenzothiazoline-6-sulphonic acid)] radical scavenging activity, nitrite scavenging activity and SOD-like activity of methanol extracts from immature cotton boll are follows. The contents of total polyphenol and flavonoid compound were higher in small size cotton boll, and DPPH and ABTS radical scavenging activity also showed a relatively high activity in the small size. These results indicate that there is a correlation between phenol content and DPPH radical scavenging, ABTS radical scavenging. The test concentrations of immature cotton boll extract for measuring DPPH and ABTS radical scavenging activities were set as 1.25, 2.5, 5, 10 and 20 mg/ml. Immature cotton boll has high radical scavenging activity at the concentration of 1.25~20 mg/ml and the result showed a tendency to increase in a concentration-dependent. The nitrite scavenging activity showed high activity in the pH 1.2, and the result in the pH 4.2 showed progressively less active, and in the pH 6.0 near neutral was confirmed that does not affect the nitrite scavenging. In addition, SOD-like activity showed somewhat lower activity compared with ascorbic acid, but tended to be higher when compared with the results of the other natural substances. Through this experiment, we confirmed that immature cotton boll was excellent antioxidant activity. Therefore, it is demonstrated that the cotton suggest the possibility of development of new material for cosmetic product or functional food in the future, and is expected to make a greater usability.

The Anti-Fibrogenic Effect of a Pharmaceutical Composition of[5-(2-Pyrazinyl)-4-methyl-1,2-dithiol-3-thione] (Oltipraz) and Dimethyl-4,4′-dimethoxy-5,6,5′,6′-dimethylene dioxybiphenyl-2,2′-dicarboxylate (DDB)

  • Kang, Keon-Wook;Kim, Yoon-Gyoon;Kim, Choon-Won;Kim, Sang-Geon
    • Archives of Pharmacal Research
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    • v.25 no.5
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    • pp.655-663
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    • 2002
  • Liver fibrosis is a prepathological state wherein damaged liver tissues in chronic liver diseases, such as hepatitis, are not repaired to normal tissues, but converted to fibrous tissue. 5-(2-Pyrazinyl)-4-methyl-1,2-dithiol-3-thione (oltipraz), a cancer chemopreventive agent, is effective against a wide variety of chemical carcinogens. Recently, we reported that oltipraz inhibits liver fibrogenesis (Kang et al., 2002). In the present study, the effects of oltipraz in combination with dimethyl-4,4'-dimethoxy-5,6,5',6'-dimethylene dioxybiphenyl-2,2'-dicarboxylate (DDb) on dimethylnitrosamine (DMN)-induced liver fibrogenesis were assessed in rats. Oltipraz (30 mg/kg body weight, po, 3 times per week for 4 weeks) was found to inhibit the increases in plasma ALT, AST and bilirubin by DMN, whereas DDB (30 mg/kg body weight, po, 3 times per week for 4 weeks) attenuated the increases in the plasma ALT and bilirubin. The lowered plasma protein and albumin contents in DMN-treated rats were completely restored by oltipraz, but not by DDB. DDB decreases liver cell injury and inflammation through inhibition of nuclear factor-kB. DMN increased the accumulation of liver collagen, as indicated by the increase in the 4-hydroxyproline content in liver homogenates, which was reduced by treatment with oltipraz, but not by DDB. Given the differential effect between oltipraz and DDB, the potential enhancement of antifibrotic efficacy by the drugs was assessed in the animal model. Despite the minimal effect of DDB on DMN-induced fibrogenesis, DDB (5-25 mg/kg), administered together with oltipraz (25-5 mg/kg), showed an additive protective effect against hepatotoxicity and fibrosis induced by DMN, which was shown by the blood chemistry parameters and histopathological analysis. The adequate composition ratio of oltipraz to DDB was 5:1. These results provide information on the pharmaceutical composition, comprising of oltipraz and DDB as the active components, for the treatment and/or prevention of liver fibrosis and cirrhosis.

An Array-Type RGB Sensor for Precision Measurement of pH

  • Kim, Ji-Sun;Oh, Han-Byeol;Kim, A-Hee;Kim, Jun-Sik;Lee, Eun-Suk;Goh, Bong-Jun;Choi, Ju-Hyeon;Shin, Ye-Ji;Baek, Jin-Young;Lee, Ki Sung;Jun, Jae-Hoon
    • Journal of the Optical Society of Korea
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    • v.19 no.6
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    • pp.700-704
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    • 2015
  • As pH is a widely used index in chemical, medical, and environmental applications, research on pH sensors has been active in recent years. This study obtained RGB values by measuring the reflected light from a liquid sample to detect fine changes in pH, and performed mathematical modeling to investigate the relationship between the detected optical signal and pH value. Also, the trends in pH changes were easily identified by analyzing RGB values and displaying them in the color coordinate for easy visualization of data. This method implemented a user-friendly system that can measure and analyze in real time. This system can be used in many fields such as genetic engineering, environmental engineering, and clinical engineering, because it not only can measure pH but also replaces a colorimeter or turbidimeter.