• 한국소음진동공학회:학술대회논문집
• /
• 한국소음진동공학회 2010년도 추계학술대회 논문집
• /
• pp.47-48
• /
• 2010

• 한국세라믹학회지
• /
• 제38권11호
• /
• pp.980-986
• /
• 2001

5.2GHz 중심 주파수를 갖는 Bragg reflector형 FBAR를 제작하여 주파수 응답 특성을 측정하고, 공진기 구조에서 각 층의 탄성 손실(acoustic loss)을 고려한 주파수 응답의 수치적 계산을 통해서 그 특성을 분석하였다. W과 $SiO_2$쌍을 선택하여 RF sputtering법으로 총 9층의 Bragg reflector를 제작하였고, 공진기의 압전층으로 pulsed dc 전원에 의한 sputtering법으로 AlN과 Al 전극을 증착하여 제작하였다. 제작된 공진기의 반사손실( $S_{11}$)은 중심주파수 5.38GHz에서 12dB이었고 직렬 공진 주파수( $f_{s}$)는 5.376GHz, 병렬 공진 주파수 ( $f_{p}$)는 5.3865GHz로 관찰되었다. 공진기의 성능지수인 유효 전기기계결합계수( $K_{ef{f^2}}$)값이 약 0.48%, 품질계수 ( $Q_{s}$) 값이 411이었다. 수치적으로 계산된 주파수 응답 특성으로부터 AlN 박막의 acoustic 상수들과 Bragg reflector의 반사계수를 도출한 결과 AlN 박막의 material acoustic impedance와 wave velocity는 AlN 고유의 값보다 감소되었으며, AlN 박막의 전기기계 결합계수( $K^2$)값은 c축 배향성 저하에 의해 매우 작은 값(0.49%)을 가졌다. 주파수 대역에서 Bragg reflector의 반사계수는 약 0.99966으로 계산되었으며 약 2.5 GHz에서 9.5 GHz까지의 넓은 반사대역을 나타내었다.다.었다.

• Journal of electromagnetic engineering and science
• /
• 제7권1호
• /
• pp.12-16
• /
• 2007

A UHF band wireless identification system based on passive surface acoustic wave(SAW) devices is presented in this paper. SAW ID tags were fabricated on Y-Z $LiNbO_3$ piezoelectric substrate with a good electro-mechanical coupling property. To reduce degradation of the antenna performance associated with the piezoelectric materials, an efficient design of the SAW RFID antenna is introduced. By measuring the parameters of the SAW ID tag, the performance of the antenna was tested by experimentation.

• 대한원격탐사학회:학술대회논문집
• /
• 대한원격탐사학회 1998년도 Proceedings of International Symposium on Remote Sensing
• /
• pp.138-148
• /
• 1998

The aim of the work described in this paper is to develop a complex underground acoustic system which detects and localizes the origin of an underground hammering sound using an array of hydrophones located about loom underground. Three different methods for the sound localization will be presented, a time-delay method, a power-attenuation method and a hybrid method. In the time-delay method, the cross correlation of the signals received from the way of sensors is used to calculate the time delays between those signals. In the power-attenuation method, the powers of the received signals provide a measure of the distances of the source from the sensors. A new hybrid method has been developed for estimating the origin of the underground acoustic source by coupling both methods. The Nelder-Meade simplex search algorithm is then used to numerically estimate the position of the source in those methods. For each method the sound localization is carried out in three dimensions underground. The distance between the true and estimated origins of the source is in some cases less than 6m for a search area of radius 250m.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 1999년도 춘계학술대회 논문집
• /
• pp.317-320
• /
• 1999

In this study, the piezoelectric ceramics PZT powder was synthesized by Wet-Dry combination method. And the flexible 1-3-0 type composites were fabricated with piezoceramic PZT and Eccogel polymer matrix embedded 3rd phase. Dielectric constant of 1-3-0 type composites was lower than that of single phase PZT ceramics. Thickness mode coupling factor k/sub t/ which was comparable with single phase PZT ceramics and mechanical quality factor Qm were about 0.65 and 6, respectively. These composites are considered as a good candidates for broad-band type transducer applications. The acoustic impedance of 1-3-0 type composites was lower than that of single phase PZT ceramics. Therefore, these composites would be better used for hydrophone applications.

• 한국소음진동공학회:학술대회논문집
• /
• 한국소음진동공학회 2005년도 추계학술대회논문집
• /
• pp.247-250
• /
• 2005

Underwater acoustic transducers are widely used for SONAR application, whose important design parameters are shapes, materials, dimensions and supporting structures. Practical design method of transducers consists of manufacturing, experiments and modifications so that It requires much time and expenses. In this study, an analytical method was developed for the Tonpilz type transducers using the commercial finite element analysis code ATILA which can solve the electro-mechanical coupling Problems. A finite element model was established including the transducer elements such as ceramic stack, head mass, tall mass, tensile bolt, and molding layers. The proposed model was verified and modified by comparing the in-air and in-water test results of prototypes. The developed analysis method will be effectively used for the sensitivity analysis of design parameters in transducer design process.

• 전기학회논문지
• /
• 제56권8호
• /
• pp.1430-1435
• /
• 2007

We developed a 440MHz surface acoustic wave (SAW) microsensor integrated with pressure-temperature sensors and ID tag. Two piezoelectric substrates were bonded, in which ${\sim}150\;{\mu}m$ cavity was structured. Four sides were completely sealed by JSR photoresist (PR). Pressure sensor was placed on the top substrate, whereas ill tag and temperature sensor were placed on the bottom substrate. Using network analyzer, the developed microsensor was wirelessly tested. Sharp reflection peaks with high S/N ratio, small signal attenuation, and small spurious peaks were observed. All the reflection peaks were well matched with the coupling of mode (COM) simulation results. With a 10mW RF power from the network analyzer, a ${\sim}1$ meter readout distance was observed. Eight sharp ON reflection peaks were observed for ID tag. Temperature sensor was characterized from $20^{\circ}C$ to $200^{\circ}C$. A large phase shift per unit temperature change was observed. The evaluated sensitivity was ${\sim}10^{\circ}/^{\circ}C$.

• 한국전기전자재료학회논문지
• /
• 제27권11호
• /
• pp.696-701
• /
• 2014

In this study, in order to develop coupled vibration mode piezoelectric devices for Acoustic Emission (abbreviated as AE) sensor application with outstanding displacement and piezoelectric properties have been simulated by ATILA FEM program. And, From the results of ATILA simulation, the AE sensor specimen, obtained superior electromechanical coupling factor and displacement, when the size of specimen is $3.45mm{\Phi}{\times}3.45mm$ with ratio of diameter/thickness(${\Phi}/T$)= 1.0. Therefore, AE sensor was fabricated by (Na,K,Li)(Nb,Ta) $O_3$(abbreviated as NKL-NT) system piezoelectric ceramics using coupled vibration mode. The piezoelectric properties of NKL-NT ceramics was exhibited that piezoelectric constant($d_{33}$), piezoelectric voltage constant($g_{33}$) and electro mechanical coupling factor($k_p$) have the excellent values of 261[pC/N], 40.10[$10^{-3}Vm/N$], and 0.44, respectively. The manufactured piezoelectric device with ratio of ${\Phi}/T$= 1.0 indicated the optimum values of resonant frequency(fr)= 556.5[kHz], antiresonant frequency(fa)=631.1[kHz], and effective electromechanical coupling factor(keff)= 0.473. The maximum sensitivity of the coupled vibration mode AE sensor was 55[dB] at the resonant frequency of 75[kHz]. The results show that the coupled vibration mode piezoelectric device is a promising candidate for the application AE sensor piezoelectric device.

• 한국정보통신학회논문지
• /
• 제26권7호
• /
• pp.1032-1039
• /
• 2022

이동통신 중계기에 사용하는 SAW(Surface Acoustic Wave) 방식의 대역통과필터를 대체할 수 있는 5G 이동통신 중계기용 군 지연 특성이 개선된 크로스 커플링 등화기 구조를 결합한 캐비티 대역통과필터를 설계하고 이를 구현하였다. 3D EM 시뮬레이션 툴 (HFSS)을 이용하여 공진 주파수, 공진기 간 결합 계수와 공진기 사이 외부 품질 계수를 계산하였고, 이를 바탕으로 메탈 캐비티 구조로 주파수대역 3500MHz~3600MHz, 대역폭 97.85MHz로 대역 양쪽 가장자리 주파수(edge)단에서 20dB 이상의 감쇄 특성을 가지도록 12차 대역 통과 필터를 제작 하였다. 설계 제작한 대역통과필터는 5G 이동통신 표준에 요구하는 군 지연 시간 조건과 인-밴드, 아웃-밴드 주파수 응답을 만족하였다.

• 센서학회지
• /
• 제4권2호
• /
• pp.45-50
• /
• 1995

The excellent c-axis oriented zinc oxide thin films were prepared by the RF magnetron sputtering method on glass substrates. Optimum fabrication conditions of the ZnO films were such that RF power, substrate temperature, and gas pressure of mixture Ar(50%):$O_{2}$(50%) were 150 W, $200^{\circ}C$, and 5 mTorr, respectively. In these conditions, the deposition rate was $310\;{\AA}/min$, and the resistivity of the film was $1{\times}10^6\;{\Omega}{\cdot}cm$. The ZnO film also showed high c-axis orientation and crystalinity according to XRD pattern and SEM photograph. A fabricated interdigital transducer generated 1st mode surface acoustic wave at 46.6 MHz and 2nd mode surface acoustic wave at 52.5 MHz. At the 1st mode, the phase velocity of surface acoustic wave and the electromechanical coupling coefficient were 2795 m/sec and 0.031 %, respectivly. At the 2nd mode, they were 3149 m/sec and 0.019 %. respectivly.