• 한국전기전자재료학회논문지
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• 제16권9호
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• pp.759-764
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• 2003

Recently, CMP (chemical mechanical polishing) technology has been widely used for global planarization of multi-level interconnection for ULSI applications. However, COO (cost of ownership) and COC (cost of consumables) were relatively increased because of expensive slurry. In this paper, we have studied the possibility of recycle of roused silica slurry in order to reduce the costs of CMP slurry. The post-CMP thickness and within-wafer non-uniformity (WIWNU) wore measured as a function of different slurry composition. As an experimental result, the performance of reused slurry with annealed silica abrasive of 2 wt％ contents was showed high removal rate and low non-uniformity. Therefore, we propose two-step CMP process as follows , In tile first-step CMP, we can polish the thick and rough film surface using remaked slurry, and then, in the second-step CMP, we can polish the thin film and fine pattern using original slurry. In summary, we can expect the saying of high costs of slurry.

• 대한기계학회논문집A
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• 제38권9호
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• pp.1005-1012
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• 2014

기어의 구동은 여러 기계요소에서 동력전달을 가능하게 해주는 가장 중요한 요소이다. 이러한 기어 접촉면에서의 상태는 마모, 재료의 변형 그리고 윤활 상태에 따라 크게 좌우되며, 이러한 상태 변화는 기어의 수명에 큰 영향을 준다. 따라서, 이러한 상태 진단에 대한 해법은 원활한 구동을 위한 필수요소이다. 기어의 상태 변화는 연마 마모(Abrasive wear), 점식 (Pitting), 스커핑(Scuffing), 스폴링(Spalling) 등을 유발하며, 이러한 마모들은 기어로부터 발생하는 진동 레벨을 상승시킨다. 본 연구에서는 스퍼 기어를 장착한 기어 박스를 이용한 실험적 연구를 통해 기어의 표면 피로 마모를 평가하기 위해 진동 신호로부터 구해진 통계적 변수들과 Stribeck Curve 와의 상관관계를 검증하였다.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 제35회 춘계학술대회
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• pp.226-234
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• 2002

A systematic study of the role of transfer films on friction properties was performed with various temperatures in the brake system. An NAO friction material specimens containing 9 ingredients were tested using a pad-on-disk type friction tester A new method of measuring the transfer film thickness was developed by considering the electrical resistance of the transfer film using a 4-point probe technique. The properties of transfer film such as surface morphology and film distribution vaied according to the relative amount of graphite and magnesium oxide. By using SEM, it was possible to obtain information about the chemical composition of the transfer film. Results showed that there detected a threshold value of the relative amount of a two active materials to maintain a certiain thickness of a transfer film. Results also showed that formation of friction layer generated on the friction surface was strongly affected by chemical action of two ingredients during sliding due to chemical reaction of solid lubricants at different interface temperature. The results suggested that no apparent relationship between transfer film thickness and the average friction coefficient was founded and friction characteristics were affected more by the property of the solid lubricant and abrasive in the material.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.1068-1071
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• 2001

Recently, the minimum line width shows a tendancy to decrease and the multi-level to increase in semiconductor. Therefore, a planarization technique is needed, which chemical polishing(CMP) is considered as one of the most important process. CMP accomplishes a high polishing performance and a global planarization of high quality. But there are several defects in CMP such as microscratches, abrasive contaminations, and non-uniformity of polished wafer edges. Spin Etching can improve the defects of CMP. It uses abrasive-free chemical solution instead of slurry. Wafer rotates and chemical solution is simultaneously dispensed on a whole surface of the wafer. Thereby chemical reaction is occurred on the surface of wafer, material is removed. On this study, TEOS film is removed by CMP and Spin Etching, the results are estimated at a viewpoint of material removal rate(MRR) and within wafer non-uniformity(WIWNU).

• Tribology and Lubricants
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• 제20권1호
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• pp.1-6
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• 2004

In order to identify the effect of lubricant films on abrasive abilities of diamond films, wear rates of Ruby balls slid over as grown diamond films and polytetrafluoroethylene films coated diamond films were compared by using pin-on-disk tribometer. Wear scars of Ruby balls were measured by SEM. Results showed that wear rates of Ruby balls slid over polytetrafluoroethylene coated diamond films were about 4 times lager than as grown diamond films. Coefficients of friction decreased with sliding distance at diamond disks but were almost unchanged at polytetrafluoroethylene coated ones. These results came from behaviors of wear debris, which adhered more strongly in the tracks of as grown diamond films than polytetrafluoroethylene coated ones.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.493-494
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• 2006

SU-8 can be implemented as a mask for micro Abrasive Jet Machining (micro-AJM) process [1]. In this paper, we will evaluate the quality of micro grooving result on glass substrate by micro-AJM process which using SU-8 as a mask. It was evaluated on width and edge profile of the micro grooving. The result was having distortion compare with the master film used to pattern the SU-8 mask. The value of distortion with other properties which came along with it, such as depth and surface roughness, can be optimized in order to fabricate micro-channel for micro-fluidic application.

• Journal of Welding and Joining
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• 제19권1호
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• pp.95-103
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• 2001

The properties of the detonation sprayed cermet coating are investigated through the mechanical, corrosion and erosion test. The test results are also compared with the properties of the substrate materials, STS 329J1, dual phase stainless steel and the plasma sprayed cermet coatings. The two kinds of carbide cermet power, WC+NiCr, Cr$_3$C$_2$+NiCr were used in this experiment. The experimental results showed that the anti-corrosive and anti-erosive properties of the detonation sprayed cermet coatings are superior to the plasma sprayed cermet coatings. The WC+NiCr cermet coating appears to be more effective than Cr$_3$C$_2$+NiCr cermet coating in abrasive erosion environment, whereas the Cr$_3$C$_2$+NiCr cermet coatings are more effective in cavitation erosion environment.

• Tribology and Lubricants
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• 제25권1호
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• pp.49-55
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• 2009

The frictional properties of automotive brake pads with four different ceramic materials such as magnesia, hematite, alumina, and zircon were investigated. A Krauss type friction tester using gray iron disks was used to examine the friction coefficient, intensity of friction force oscillation, and the tribe-surfaces. Results showed that the friction coefficient increased as the hardness of abrasives increases. Friction oscillation was also increased with hardness of the abrasives. However, the friction materials containing less abrasive particles produced stable friction films on the sliding surface. The transition between two-body and three body abrasion during sliding also played a crucial role in destructing the friction film on the pad surface and in determining various frictional properties.

• 한국정밀공학회지
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• 제7권2호
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• pp.113-123
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• 1990

To study deleterious effects of contaminants contained in lubricating systems, the effects of fine alumina particle concentration and size on the critical failure load, friction and wear characteristic were examined on boundary lubrication condition using the four ball machine. The following conclusions are deduced: The abrasive is found to cause a transition from mild wear to severe wear at less severe conditions than with clean oil. In mild wear region the friction and wear increase with particle size and concentration, but in severe wear region do not exhibit any definite trend. In relation to film thinckness there is a threshold of particle size beyond which the failure load no longer decreases with particle size.

• 한국정밀공학회지
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• 제33권5호
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• pp.385-392
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• 2016

Recently in the display industry, demands for high-luminance and resolution of display devices have been steadily increasing. Generally, micro linear patterns are applied to an optical film in order to improve its properties of light. However, these patterns are easily viewed to eyes and moire phenomenon can be occurred. Micro random patterns are proposed as a method to solve these problems, increasing light-luminance and light-diffusion. However, conventional pattern manufacturing technologies have long processing times and high costs making it difficult to apply to large area molds. In order to combat this issue, micro-random patterns are formed by using a roll to plate indentation method along with abrasive paper tools composed of AlSiO2, SiC, and diamond grains. Also, forming properties, such as size and fill-factor of random patterns, are analyzed depending on type, mesh of abrasive paper tools, and indentation forces.