• Tribology and Lubricants
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• 제27권1호
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• pp.7-12
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• 2011

Interest in advanced machining process such as AJM(abrasive jet machining) and CMP(chemical-mechanical polishing) using micro/nano-sized abrasives has been on the increasing demand due to wide use of super alloys, composites, semiconductor and ceramics, which are difficult to or cannot be processed by traditional machining methods. In this paper, the effects of pressure, wafer moving velocity and fluid viscosity were investigated by 2-dimensional finite element analysis method considering slurry fluid flow. From the investigation, it could be found that the simulation results quite corresponded well to the Preston's equation that describes pressure/velocity dependency on material removal. The result also revealed that the stress and corresponding material removal induced by the collision of particle may decrease under relatively high wafer moving speed due to the slurry flow resistance. In addition, the increase in slurry fluid viscosity causes the reduction of material removal rate. It should be noted that the viscosity effect can vary with the shape of abrasive particle.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 추계학술대회 논문집
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• pp.503-504
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• 2006

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 춘계학술대회 논문집
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• pp.663-664
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• 2007

• 반도체디스플레이기술학회지
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• 제10권3호
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• pp.35-42
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• 2011

This paper describes the characteristics of high speed grinding and the influence of wheel surface speed V and a grindability of the grinding materials. The various fine ceramics pieces was ground by metal and vitrified bonded diamond wheel. The surface roughness of fine ceramics(Zirconia($ZrO_2$), Silicon Carbide(SiC), Silicon Nitride($Si_3N_4$), Alumina($Al_2O_3$)) decreases from $0.05{\mu}m(R_{max})$ to $0.025{\mu}m(R_{max})$ when the wheel speed at grinding point increases the wheel speed. Relation between the temperature at grinding point and surface roughness was linear. Abrasive jet machining(AJM), a specialized from of shot blasting, is considered one of the most helpful micro machining methods for hard and brittle materials such as glasses and ceramics by constant pressure grinding.

• 한국정밀공학회지
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• 제31권5호
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• pp.367-373
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• 2014

Surface texturing is a machining process on the surface to give engineering functions. The representative process of the surface texturing is lotus effect to give hydrophobic property by the lithography and chemical etching, which is the bio mimic from the nature. Surface texturing can be manufactured by a lot of processes, in particular using mechanical method such as a precise diamond turning, grinding, rolling, embossing, vibrorolling, and abrasive jet machining (AJM). Among them, the grinding process is notable in terms of the wide range of texturing area and fast processing time. The patterning by grinding is done by the grooved grinding wheel on the work piece. In this case, the pattern shape is determined by the grinding conditions as well as the wheel dressing conditions. In this paper, experimental study on the pattern shapes were done and provide the feasibility in use for the large area patterning.

• 대한기계학회논문집
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• 제16권9호
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• pp.1632-1642
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• 1992

본 연구에서는 방전가공(electric disharge machining, EDM) 또는 공기연마 분사기(air-abrasive jet machine, AJM) 가공에 의하여 인장 시험편 또는 외팔보 시험 편에 구멍깊이를 증가시켜 가면서 구멍을 뚫었다. 여기에서 방저가공(EDM)을 채택한 것은 구멍깊이를 직접 계측하는 것이 가능하여 구멍깊이 측정 오차에 기인하는 잔류응 력 측정오차를 최소화 할 수 있기 때문이며, 공기연마 분사기를 채택한 것은 구멍을 뚫는 동안 가공응력을 유발시키지 않기 때문이었다. 위 인장 시험편 또는 외팔보 시 험편을 이용하여 균일한 응력장과 두께 방향으로 변하는 선형적 구배응력장을 구현하 고, 이 때 각각 구멍깊이가 다른 원통형 막힘 구멍으로 부터 이완되는 스트레인을 계 측하였다. Schajer가 제안한 멱급수법과 최소장승법을 적용하여 균일응력장 또는 구 배 응력장에서 측정되는 스트레인을 잔류응력으로 환산하였으며, 환산된 잔류응력과 실제로 작용하는 응력을 비교하므로서 이론적으로 제시된 멱급수법과 최소자승법의 타 당성을 실험적으로 검토하는데 본 연구의 목적이 있다. 이 때 얕은 구멍깊이 (0.3∼ 1.2mm)에서 측정되는 스트레인을 이용하여 Schajer의 제안에 따라 잔류응력을 산정하 므로서, 잔류응력 계측 대상 구조물을 가급적 덜파괴시키며 잔류응력을 측정할 수 있 는지 여부를 실험적으로 검토하였다.