• 한국재료학회:학술대회논문집
• /
• 한국재료학회 2003년도 추계학술발표강연 및 논문개요집
• /
• pp.64-64
• /
• 2003

고집적화된 시스템 LSI 반도체 소자 제조 공정에서 소자의 고속화 및 고성능화에 따른 배선층수의 증가와 배선 패턴 미세화에 대한 요구가 갈수록 높아져, 광역평탄화가 가능한 STI CMP(Shallow Trench Isolation Chemical-Mechanical-Polishing)공정의 중요성이 더해가고 있다. 이러한 STI CMP 공정에서 세리아 슬러리에 첨가되는 계면활성제의 농도에 따라 산화막과 질화막 사이의 연마 선택비를 제어하는 것이 필수적 과제로 등장하고 있다. 일반적인 CMP 공정에서 압력 증가에 따른 연마 제거량이 Prestonian 거동을 나타내는 반면, 연마 입자의 크기를 변화시켜 계면활성제의 농도를 달리 하였을 경우, 압력 변화에 따라 Non-Prestonian 거동이 나타나는 것을 고찰할 수 있었다. 따라서 본 연구에서는 세리아 슬러리 내에 첨가되는 계면활성 제의 농도와 연마입자의 크기를 달리한 후, 압력을 변화시킴으로 나타나는 non-Prestonian 거동에 미치는 영향에 대하여 연구하였다.

• 한국세라믹학회지
• /
• 제48권2호
• /
• pp.189-194
• /
• 2011

Metallurgical grade silicon was recovered from slurry waste for ingot sawing process by acid leaching and thermal treatment. SiC abrasive was removed by gravity concentration and centrifugation. Metal impurities were removed by the acid leaching using HF/HCl. The remaining SiC was separated by the thermal treatment at $1600^{\circ}C$ in an inert atmosphere by the difference in melting points. The purity of the obtained silicon was found to be around 99.7%.

• 한국물환경학회지
• /
• 제23권2호
• /
• pp.216-221
• /
• 2007

The adsorption characteristics of malachite green on waste garnet have been investigated for its treatment from aqueous solution by employing waste garnet which is generated from the abrasive production process as an adsorbent. The influential factors examined were the initial concentration of malachite green in solution, reaction temperature, and the amount of adsorbent. Also, the effect of the modification of the surface of adsorbent on adsorption was examined. As the initial malachite green was increased with reaction temperature and the color removal of malachite green-containing solution was promoted with the amount of adsorbent. Finaly, increased adsorption of malachite green could be attained when the surface of glass was modified by hexamethyldisilazane.

• Biotechnology and Bioprocess Engineering:BBE
• /
• 제10권3호
• /
• pp.284-288
• /
• 2005

Baker's yeast was disrupted in a 1.4-L stainless steel horizontal bead mill under a continuous recycle mode using 0.3 mm diameter zirconia beads as abrasive. A single pass in continuous mode bead mill operation liberates half of the maximally released protein. The maximum total protein release can only be achieved after passaging the cells 5 times through the disruption chamber. The degree of cell disruption was increased with the increase in feeding rate, but the total protein release was highest at the middle range of feeding rate (45 L/h). The total protein release was increased with an increase in biomass concentration from 10 to $50\%$(w/v). However, higher heat dissipation as a result of high viscosity of concentrated biomass led to the denaturation of labile protein such as glucose 6-phosphate dehydrogenase (G6PDH). As a result the highest specific activity of G6PDH was achieved at biomass concentration of $20\%$(ww/v). Generally, the degree of cell disruption and total protein released were increased with an increase in impeller tip speed, but the specific activity of G6PDH was decreased substantially at higher impeller tip speed (14 m/s). Both the degree of cell disruption and total protein release increased, as the bead loading increased from 75 to $85\% (v/v)$. Hence, in order to obtain a higher yield of labile protein such as G6PDH, the yeast cell should not be disrupted at biomass concentration and impeller tip speed higher than $20\%(w/v)$ and 10 m/s, respectively.

• Tribology and Lubricants
• /
• 제13권1호
• /
• pp.34-41
• /
• 1997

Frictional behavior of three automotive friction materials (brake pads) containing different amounts of antimony trisulfide ($Sb_2S_3$) and zirconium silicate ($ZRSiO_4$) were investigated using a front brake system. The friction materials were tested on a brake dynamometer (dyno) with gray cast iron rotors. The dynamometer(dyno) test simulated the dragging of a ehicle maintaining 70 km/h and vehicle stops from 100 km/h using 20 different combinations of initial brake temperature (IBT) and input pressure (IP). The results showed a strong influence of the relative amount of $Sb_2S_3$ and $ZrSiO_4$ in friction materials on friction characteristics. Friction stability was improved with the higher concentration of $Sb_2S_3$ in the friction material. Torque variation during drag cycle was increased with an increase of the $ZrSiO_4$ concentration in the friction material. Average friction coefficient and the wear rate of the friction material increased by using more aggressive friction materials containing more $ZrSiO_4$ and less $Sb_2S_3$. Generation of the disk thickness variation (DTV) increased when friction materials with higher concentration of $ZrSiO_4$ were used Careful examination of DTV change showed that aggressiveness of the friction material played an important role in determining torque variation.

• Advances in materials Research
• /
• 제1권2호
• /
• pp.129-146
• /
• 2012

Polycrystalline diamond is an ideal material for parts with micro-holes and has been widely used as dies and cutting tools in automotive, aerospace and woodworking industries due to its superior wear and corrosion resistance. In this research paper, the modeling and simultaneous optimization of multiple performance characteristics such as material removal rate and surface roughness of polycrystalline diamond (PCD) with ultrasonic machining process has been presented. The fuzzy logic and taguchi's quality loss function has been used. In recent years, fuzzy logic has been used in manufacturing engineering for modeling and monitoring. Also the effect of controllable machining parameters like type of abrasive slurry, their size and concentration, nature of tool material and the power rating of the machine has been determined by applying the single objective and multi-objective optimization techniques. The analysis of results has been done using the MATLAB 7.5 software and results obtained are validated by conducting the confirmation experiments. The results show the considerable improvement in S/N ratio as compared to initial cutting conditions. The surface roughness of machined surface has been measured by using the Perthometer (M4Pi, Mahr Germany).

• 한국재료학회:학술대회논문집
• /
• 한국재료학회 2011년도 추계학술발표대회
• /
• pp.24.2-24.2
• /
• 2011

Ru is used as a bottom electrode capacitor in dynamic random access memories (DRAMs) and ferroelectric random access memories (FRAMs). The surface of the Ru needs to be planarized which is usually done by chemical mechanical polishing (CMP). Ru CMP process requires chemical slurry consisting of abrasive particles and oxidizer. A slurry containing NaIO4 and alumina particles is already proposed for Ru CMP process. However, the stability of the slurry is critical in the CMP process since if the particles in the slurry get agglomerated it would leave scratches on the surface being planarized. Thus, in the present work, the stability behavior of the slurry using a suitable anionic polyelectrolyte is investigated. The parameters such as slurry pH, polyelectrolyte concentration, adsorption time and the sequence of addition of chemicals are optimized. The results show that the slurry is stable for longer time at an optimized condition. The polishing behavior of the Ru using the optimized slurry is also investigated.

• 대한치과기공학회지
• /
• 제31권4호
• /
• pp.31-36
• /
• 2009

This study evaluated the grindability of series of Ti-Cu alloys in order to develop a Ti alloy with better grindability than commercially pure titanium(CP Ti). Experimental Ti-Xwt%Cu alloys(X=2, 5, 10) were made in an argon-arc melting furnace. Slabs of experimental alloys were ground using a SiC abrasive wheel on an electric handpiece at circumferential speed(15000, 30000rpm) by applying a force(250, 300gr). Grindability was evaluated by measuring the amount of metal volume removed after grinding for 2 minutes. Data were compared to those for CP Ti and Ti-6wt%Al-4wt%V alloy. From results, It was observed that the grindability of Ti-Cu alloys increased with an increase in the Cu concentration compared to CP Ti, particularly the 10wt%Cu alloy exhibited the highest grindability at all speeds. By alloying with Cu, the Ti exhibited better grindability at high speed. The continuous precipitation of $Ti_2Cu$ among the ${\alpha}$-matrix grains made this material less ductile and facilitated more effective grinding because small segments more readily formed. The Ti-10wt%Cu alloy has a great potential for use as a dental machining alloy.

• 대한기계학회논문집A
• /
• 제27권12호
• /
• pp.2085-2091
• /
• 2003

An ultrasonic machining process has been known as efficient and economical means fer precision machining of glass or ceramic materials. However, because of its complexity, the mechanism of the machining process is still not well understood. Therefore, it is hard to optimize the process parameters effectively. The conventional ultrasonic machining which uses the abrasive slurry only, furthermore, is time-consuming and gives the relatively rough surface. In order to increase the material removal rate and improve the integrity of the machined surface, we have introduced the novel ultrasonic machining technique, Chemical-assisted UltraSonic Machining(CUSM). The desktop-style micro ultrasonic machine has been developed and the z-axis feed is controlled by the constant load control algorithm. To obtain the chemical effects, the low concentration HF(hydrofluoric acid) solution, which erodes glass, added to alumina slurry. Through various experiments and comparison with conventional results, the superiority of CUSM is verified. MRR increases over 200%, the surface roughness is improved and the machining load decreases dramatically.

• 상하수도학회지
• /
• 제27권3호
• /
• pp.383-394
• /
• 2013

A sedimentation basin is used to remove suspended sediments which can cause abrasive and erosive wear on hydraulic turbines of hydropower plants. This sediment erosion not only decreases efficiency of the turbine but also increases maintenance costs. In this study, the three-dimensional numerical simulations were carried out on the overseas hydropower project. The simulations of flow and suspended sediment concentration were obtained using FLOW-3D computational fluid dynamics code. The simulations provide removal efficiency of a sedimentation basin based on particle sizes. The influence of baffles on the flow field and the removal efficiency of suspended sediments in the sedimentation basin has been investigated. This paper also provides the numerical simulations for sediment-induced density currents that may occur in the sedimentation basin. The simulation results indicate that the formation of density currents decreases the removal efficiency. When a baffle is installed in the sedimentation basin, the baffle provides intensive settling zones resulting in increasing the sediments settling. Thus the enhanced removal efficiency can be achieved by installing the baffle inside the sedimentation basin.