• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.7 no.5
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• pp.134-139
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• 1998

There have been so manu study in the ultra-precision mirror finishing. Already Using system of experiments extract factors effecting surface roughness and find optimal machining conditions in 40${\mu}{\textrm}{m}$, 30${\mu}{\textrm}{m}$, 15${\mu}{\textrm}{m}$ abrasive film. So in this study, Using Abrasive film of 12~3${\mu}{\textrm}{m}$ extract factors effecting surface roughness and results are follows; Factor A(film feed) in 12${\mu}{\textrm}{m}$ and 5${\mu}{\textrm}{m}$ abrasive film, Factor A(film feed) and B(applied force) in 9${\mu}{\textrm}{m}$ abrasive film, Factor C(grinding speed) in 3${\mu}{\textrm}{m}$ abrasive film are main factor effecting surface roughness.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.53 no.11
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• pp.551-555
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• 2004

In this paper, in order to reduce the high COO (cost of ownership) and COC (cost of consumables), we have collected the silica abrasive powders by filtering method after subsequent CMP (chemical mechanical polishing) process for the purpose of abrasives recycling. And then, we have studied the possibility of recycle of reused silica abrasive through the analysis of particle size distribution and FE-SEM (field emission-scanning electron microscope) measurements of abrasive powders. It was annealed the collected abrasive powders to promote the mechanical strength of reduced abrasion force. Finally, we compared the CMP characteristics between self-developed KOH-based silica abrasive slurry and original slurry. As our experimental results, we obtained the comparable rate of removal and good planarity with commercial products. Consequently we can expect the saving of high cost slurry.

• Nuclear Engineering and Technology
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• v.43 no.5
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• pp.469-476
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• 2011

The inner surfaces of bundled inconel tubes from steam generators in South Korean nuclear power plants are contaminated with cobalt and abrasive blasting equipment has been developed to efficiently remove the cobalt. The principal parameters related to the efficient removal using this equipment are the type of abrasive, the distance from the nozzle, and the blasting time. Preliminary tests were performed using oxidized inconel samples which enabled the simulation of cobalt removal from the radioactive inconel samples. The oxygen in the oxidized samples and the cobalt in the radioactive inconel were removed more effectively using the blasting distance, blasting time, and a silicon carbide abrasive. Using the developed abrasive blasting equipment, the optimum decontamination conditions for radioactive inconel samples were blasting for more than 6 minutes using silicon carbides under 5 atmospheric pressures.

• Special Issue of the Society of Naval Architects of Korea
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• 2005.06a
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• pp.198-205
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• 2005

Reduction of labor hour for cleaning up of the used abrasives after blasting. is attempted by improving the efficiency of abrasive recovery process in the protective coating of ship's block, For this purpose, the theoretical background for pneumatic transport technology in the abrasive recovery system as well as experimental evaluation on the effect of design parameters such as flow pattern, saltation velocity and pressure drop on the efficiency of the abrasive recovery system are employed . By optimizing the operating parameters such as the length and diameter of the suction hose, specification of recovery device and recovery mouth, a new method which can dramatically increase the efficiency of abrasive recovery system, is proposed.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.7
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• pp.22-29
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• 2004

As a result of high integration of semiconductor device, the global planarization of multi-layer structures is necessary. So the chemical mechanical polishing(CMP) is widely applied to manufacturing the dielectric layer and metal line in the semiconductor device. CMP process is under influence of polisher, pad, slurry, and process itself, etc. In comparison with the general CMP which uses the slurry including abrasives, fixed abrasive pad takes advantage of planarity, resulting from decreasing pattern selectivity and defects such as dishing & erosion due to the reduction of abrasive concentration especially. This paper introduces the manufacturing technique of fixed abrasive pad using hydrophilic polymers with swelling characteristic in water and explains the self-conditioning phenomenon. And the tungsten CMP using fixed abrasive pad achieved the good conclusion in terms of the removal rate, non-uniformity, surface roughness, material selectivity, micro-scratch free contemporary with the pad life-time.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.1117-1120
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• 2001

Chemical mechanical planarization(CMP) has emerged as the planarization technique of choice in both front-end and back-end integrated circuit manufacturing. Conventional CMP process utilize a polyurethane polishing pad and liquid chemical slurry containing abrasive particles. There have been serious problems in CMP in terms of repeatability and defects in patterned wafers. Since IBM's official announcement on Copper Dual Damascene(Cu2D) technology, the semiconductor world has been engaged in a Cu2D race. Today, even after~3years of extensive R&D work, the End-of-Line(EOL) yields are still too low to allow the transition of technology to manufacturing. One of the reasons behind this is the myriad of defects associated with Cu technology. Especially, dishing and erosion defects increase the resistance because they decrease the interconnection section area, and ultimately reduce the lifetime of the semiconductor. Methods to reduce dishing & erosion have recently been interface hardness of the pad, optimization of the pattern structure as dummy patterns. Dishing & erosion are initially generated an uneven pressure distribution in the materials. These defects are accelerated by free abrasive and chemical etching. Therefore, it is known that dishing & erosion can be reduced by minimizing the abrasive concentration. Minimizing the abrasive concentration by using Ce$O_2$ is the best solution for reducing dishing & erosion and for removal rate. This paper introduce dishing & erosion generating mechanism and a method for developing a semi-rigid abrasive pad to minimize dishing & erosion during CMP.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2000.11a
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• pp.332-340
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• 2000

Friction properties of automotive brake pads containing different types of abrasivess were investigated. Five different abrasives, including o-quartz, magnesia, magnetite, alumina, zircon, were employed in this investigation and size effects of the abrasives on friction characteristics were also studied using 1, 50, 140$\mu\textrm{m}$ size zircon. Experimental results showed that the hardness and size of these abrasive particles were strongly related to friction behaviors and wear mechanisms. Harder and smaller abrasives showed higher friction coefficient and more wear. The surfaces of friction materials with different sizes of abrasives showed that two different modes of abrasion (two-body and three-body abrasion) appeared during sliding. Considering the above results, abrasive materials were thought to destroy transfer film and the extent of the destruction depends on the types and sizes of abrasive particles. A mechanism of the wear mode transition (two-body to three body abrasive motion) was suggested considering the binding energy and friction energy in terms of abrasive particle size.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.649-652
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• 2005

Abrasive jet machining is a well-known process for patterning window glass and mirrors. The technics is now being developed for the production structure with high precision. This paper describes erosion profile modeling of micro abrasive jet machining and compares with other researcher's model.

• Journal of Biosystems Engineering
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• v.8 no.1
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• pp.17-29
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• 1983

The milling process is considered as causing one of the greatest grain losses among all the processes in rice post-production. Major source of grain losses in the rice milling is considered as the whitening process. This study was attempted to develop an abrasive-type whitener, the whitening chamber of which being supplied by jet-air evenly and continuously. To investigate the milling performance by the new whitener, three kind of emery-stone grit(#36, #41, and #46), and three levels of rotational speed of emery stone roller (950, 1070, and 1200 rpm) were tested. The jet-air abrasive-type whitener was also compared with the conventional abrasive-type having no jet-air blower in terms of their milling performance. In addition, the effect of different combinations of sequential uses of the abrasive- and friction-type whiteners on the milling performance was also experimentally evaluated. The results of this study are summarized as follows; 1. In general, the whitening system combined with the abrasive type whitener with jet-air supply, which was newly designed, and the existing jet-air friction type whiteners produces more milled- and head-rice by about 0.3% points and 2.8% points, respectively than the system combined with the existing abrasive type without the jet-air supply under the same operational conditions. The former also consumed less electricity by 0.024 KwH per 100kg of milled rice production and gave more milling capacity by about 35 kg/hr. As compared with the conventional whitening system consisting of jet-air friction type whiteners only, the former yielded more milled- and head-rice by 1.5% points and 4.4% points, respectively. 2. The abrasive roller having 46 grit emery was better than the roller having 36 grit in aspects of milling performance and machine efficiency, in general. 3. With regard to the effect of combination method of abrasive type and friction type whiteners, one pass in abrasive type plus three passes in friction type gave better milling performance and energy efficiency than the two passes in abrasive type plus two passes in friction type regardless of the designs of the emery stone rollers. 4. The increase in rotational speed of the emery stone roller from 950 rpm to 1200 rpm presented negative effects on milled and head-rice yields and machine efficiency, but slightly positive effect on milling capacity.

• Nuclear Engineering and Technology
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• v.55 no.11
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• pp.3940-3955
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• 2023

A new method of numerical simulating prediction and decontamination effect evaluation for abrasive jet decontamination to radioactively contaminated metal is proposed. Based on the Computational Fluid Dynamics and Discrete Element Model (CFD-DEM) coupled simulation model, the motion patterns and distribution of abrasives can be predicted, and the decontamination effect can be evaluated by image processing and recognition technology. The impact of three key parameters (impact distance, inlet pressure, abrasive mass flow rate) on the decontamination effect is revealed. Moreover, here are experiments of reliability verification to decontamination effect and numerical simulation methods that has been conducted. The results show that: ⁶⁰Co and other homogeneous solid solution radioactive pollutants can be removed by abrasive jet, and the average removal rate of Co exceeds 80%. It is reliable for the proposed numerical simulation and evaluation method because of the well goodness of fit between predicted value and actual values: The predicted values and actual values of the abrasive distribution diameter are Ф57 and Ф55; the total coverage rate is 26.42% and 23.50%; the average impact velocity is 81.73 m/s and 78.00 m/s. Further analysis shows that the impact distance has a significant impact on the distribution of abrasive particles on the target surface, the coverage rate of the core area increases at first, and then decreases with the increase of the impact distance of the nozzle, which reach a maximum of 14.44% at 300 mm. It is recommended to set the impact distance around 300 mm, because at this time the core area coverage of the abrasive is the largest and the impact velocity is stable at the highest speed of 81.94 m/s. The impact of the nozzle inlet pressure on the decontamination effect mainly affects the impact kinetic energy of the abrasive and has little impact on the distribution. The greater the inlet pressure, the greater the impact kinetic energy, and the stronger the decontamination ability of the abrasive. But in return, the energy consumption is higher, too. For the decontamination of radioactively contaminated metals, it is recommended to set the inlet pressure of the nozzle at around 0.6 MPa. Because most of the Co elements can be removed under this pressure. Increasing the mass and flow of abrasives appropriately can enhance the decontamination effectiveness. The total mass of abrasives per unit decontamination area is suggested to be 50 g because the core area coverage rate of the abrasive is relatively large under this condition; and the nozzle wear extent is acceptable.