• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2003.07a
• /
• pp.50-53
• /
• 2003

CMP (chemical mechanical polishing) process remained to solve several problems in deep sub-micron integrated circuit manufacturing process. especially consumables (polishing pad, backing film, slurry, pad conditioner), one of the most important components in the CMP system is the slurry. Among the composition of slurries (buffer solution, bulk solution, abrasive particle, oxidizer, inhibitor, suspension, antifoaming agent, dispersion agent), the abrasive particles are important in determining polish rate and planarization ability of a CMP process. However, the cost of abrasives is still very high. So, in order to reduce the high COO (cost of ownership) and COC (cost of consumables) in this paper, we have collected the silica abrasive powders by filtering after subsequent CMP process for the purpose of abrasive particle recycling. And then, we have studied the possibility of recycle of reused silica abrasive through the analysis of particle size and hardness. Also, we annealed the collected abrasive powders to promote the mechanical strength of reduced abrasion force. Finally, we compared the CMP characteristics between self-developed KOH-based silica abrasive slurry and original slurry. As our experimental results, we obtained the comparable removal rate and good planarity with commercial products. Consequently, we can expect the saving of high cost slurry.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2012.05a
• /
• pp.139-140
• /
• 2012

• Journal of the Korean Society for Precision Engineering
• /
• v.22 no.9 s.174
• /
• pp.7-13
• /
• 2005

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2010.05a
• /
• pp.301-302
• /
• 2010

• Journal of Welding and Joining
• /
• v.15 no.4
• /
• pp.154-165
• /
• 1997

Abrasive wear characteristics of high Cr white cast iron-based hardfacing were investigated using the rubber wheel abrasion wear test method according with the ASTM G65-85. Mild steel was also tested for comparison with high Cr cast iron hardfacing. Wear experiments, where the applied force, wheel revolution rate and abrasive powder feed rate were selected as test valuables, were planned and analyzed by response surface method to evaluate wear statistically and quantitatively. Weight loss of high Cr cast iron hardfacing was mostly affected by the applied force and wheel revolution rate, and little by the powder feed rate. Weight loss of mild steel was greatly affected by the wheel revolution rate and powder feed rate, and slowly and steadily increased with the applied force. Abrasive wear mechanism of high Cr cast iron and mild steel was discussed in the light of the wear test results.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
• /
• 2002.04a
• /
• pp.585-590
• /
• 2002

Abrasive water-jet(AWJ) machining is a new cutting technology. The AWJ can cut various materials touch as metal, glass and stone. However, the AWJ machining makes troubles including kerf, rounding and side taper. In this study, we investigated the correlation between parameters of abrasive water-jet machining arid cutting characteristics. The machining parameter were the material thickness and the traverse speed. The experiment was conducted to cut the stainless steel(STS41) and the mild steel(SS41) specimens. The results of the experiment weirs presented as the relation between cutting conditions and trouble of a dimension error, a conner error, an uncut width and a kerf.

• Transactions of the Korean Society of Mechanical Engineers
• /
• v.18 no.8
• /
• pp.2073-2080
• /
• 1994

In this paper, a model of material removal in abrasive water jet machining of brittle material is developed, and experimentally evaluated. Abrasive water jet machining proved to yield better material removal rate than other machining techniques for hard and brittle material (alumina ceramics). It was also found that large scale fracture may develop at the exit of the jet from the material. The fracture size was predicted as a function of water jet pressure and size of the hole. Finally, the feasibility of using acoustic emission signals for in-process monitoring of the abrasive water jet machining process is investigated.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2002.05a
• /
• pp.984-987
• /
• 2002

Abrasive water-jet(AWJ) machining is a new cutting technology. The AWJ can cut various materials such as metal, glass and stone. However, the AWJ machining makes troubles including kerf, rounding and side taper. In this study, we investigated the correlation between parameters of abrasive water-jet machining and cutting characteristics. The machining parameters were the material thickness and the traverse speed. The experiment was conducted to cut the stainless steel(STS41) and the mild steel(SS41) specimens. The results of the experiment were presented as the relation between cutting conditions and troubles of a dimension error, a conner error, an uncut width and a kerf.

• Tribology and Lubricants
• /
• v.26 no.4
• /
• pp.219-223
• /
• 2010

Despite the increasing need of nanometer-scale accuracy in abrasive machining using ultrasmall particles such as abrasive jet and chemical mechanical polishing(CMP), the process mechanism is still unknown. Based on the background, research on the effects of various process parameters on the machined surface at abrasive machining was motivated and performed by using finite element analysis where the effect of slurry fluid flow involved. The effect of particle shape on the machined surface during particle-surface collision was discussed in this paper. The results from FEA simulation revealed that any damage or defect generation on machined surface by the impact may occur only if the particle has enough impact energy. Therefore, it could be concluded that generation of the defects and damage on the wafer surface after CMP process was mainly due to direct contact of the 3 bodies, i.e., pad-particle-wafer.

• Journal of Welding and Joining
• /
• v.23 no.1
• /
• pp.86-93
• /
• 2005

Abrasive waterjet (AWJ) can provide a more effective means for precision of difficult -to-machining materials such as ceramics and titanium alloys. The present study is focused on the surface roughness of abrasive waterjet cut surfaces. This paper investigated theoretical and experimental surface characteristics associated with abrasive waterjet cutting of titanium alloy Gr2. It is shown that the proper variations of several cutting parameters such as waterjet cutting pressure, cutting speed and cutting depth improve the roughness and characteristics on specimen surfaces produced by AWJ cutting. From the experimental results by AWJ cutting of titanium alloy Gr2, the optimal cutting conditions to improve the surface roughness and precision were proposed and discussed.