Tribology and Lubricants

Korean Tribology Society (한국트라이볼로지학회)
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A Closer Look at the Effect of Particle Shape on Machined Surface at Abrasive Machining

입자연마가공에서의 입자 형상의 영향에 대한 고찰

  • Kim, Dong-Geun (Graduate School of Hannam University, Dept. of Mechanical Engineering) ;
  • Sung, In-Ha (Dept. of Mechanical Engineering, Hannam University)
  • 김동균 (한남대학교 대학원 기계공학과) ;
  • 성인하 (한남대학교 기계공학과)
  • Received : 2010.04.02
  • Accepted : 2010.06.05
  • Published : 2010.08.31
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Abstract

Despite the increasing need of nanometer-scale accuracy in abrasive machining using ultrasmall particles such as abrasive jet and chemical mechanical polishing(CMP), the process mechanism is still unknown. Based on the background, research on the effects of various process parameters on the machined surface at abrasive machining was motivated and performed by using finite element analysis where the effect of slurry fluid flow involved. The effect of particle shape on the machined surface during particle-surface collision was discussed in this paper. The results from FEA simulation revealed that any damage or defect generation on machined surface by the impact may occur only if the particle has enough impact energy. Therefore, it could be concluded that generation of the defects and damage on the wafer surface after CMP process was mainly due to direct contact of the 3 bodies, i.e., pad-particle-wafer.

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References

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