• Journal of the Korean institute of surface engineering
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• v.41 no.6
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• pp.269-273
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• 2008

The etch of $(Na_{0.5}K_{0.5})NbO_3$ (NKN) thin film was performed in $BCl_3/Cl_2/Ar$ inductively coupled plasma. It was found that the 1sccm addition $BCl_3$ (5%) into $Cl_2/Ar$ plasma caused a non-monotonic behavior of the NKN etch rate. The maximum etch rate of NKN was 95.3 nm/min at $BCl_3$ (1 sccm)/$Cl_2$ (16 sccm)/Ar (4 sccm), 800 W ICP power, 1 Pa pressure and 400 W bias power. The NKN etch rate shows a monotonic behavior a s the bias power increases. The analysis of the narrow scan spectra of XPS for both a s-deposited and etched NKN films allowed one to assume ion assisted etch mechanism. The most probable reason for the maximum etch rate can be defined as a concurrence of chemical and physical etch pathways.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.52 no.3
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• pp.107-112
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• 2003

Amorphous carbon nitride thin films have been deposited on silicon (100) by reactive magnetron sputtering method. The basic depositon parameters varied were the r.f. power(up to 250 W), the deposition pressure in the reactor(up to 100 mtorr) and Ar:$N_2$ gas ratio. FT-IR and X-ray photoelectron spectra showed the presence of different carbon-nitrogen bonds in the films. The surface topography of the films was studied by scanning electron microscopy(SEM) and atomic force microscopy(AFM).

• Journal of the Korean Vacuum Society
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• v.4 no.S2
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• pp.115-130
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• 1995

In order to produce Cu nanocrystallite in silicon wafer, the implantation technique was used. The samples of silicon (100) wafers were implanted by $Cu^+$ ions at 100 keV and with varying the doses at room temperature. Post-annealing was performed at $800^{\circ}C$ with Ar environment. To investigate the formation of Cu nanocrystallite with ion doses and growth process by thermal annealing, SIMS and HRTEM(high resolution transmission electron microscopy)spectra were studied.

• Journal of the Korean Vacuum Society
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• v.6 no.2
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• pp.109-113
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• 1997

PR spectra of MBE grown AlGaAs/GaAs MQW have been measured at room temperature using the He-Ne laser and the Ar laser as the pump source. We have observed various subband transition peaks and PR spectra were fitted to standard analytic line shape. Above that results, obtained us transition energy from n=1 conduction band to heavy hole(C1-H1) and to light hole(C1-L1) subband. Photoluminescence(PL) at room temperature showed main peak with a shoulder. Good agreement between PL and PR measured n=1 intersubband transition energies was confirmed that PL main peak with a shoulder is associated with the C1-H1, C1-L1 transition. Additionally, we have calculated the C1-H1 and C1-L1 intersubband energy within envelope function approximation(EFA).

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.13 no.1
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• pp.9-14
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• 1999

One of the IIDSt difficult problems in a tri-band fluorescent lamp manufacture is to search a desired color by an adequate mixing of tri-color phosphors. When a light spectrum of a phosphor is slightly changw or distorted due to process variable or when another spectrum such as from Ar, Kr or a iDosphor of calcium halo-phosphate as a first layer exist, it is even rrnre difficult to search a desired color. In this work, a rapid awuaching rrethod to a desired light color was studied. 1bree single-color fluorescent lamps and three-color-mixed fluorescent lamps with different mixing ratios were prepared and the spectra of these lamps were measured, from which the rrercury and the argon spectra were eliminatffl to obtain the rrndifiw color coordinates. From this rrndifiw color coordinate, h.lIlHl ratios of green and blue to red were correlatffl with their weight ratios. This correlation was awliw to the industrial line for single and double layer coating and proven to be valuable as a desired color matching procWure in tri-color fluorescent lamp manufacture.acture.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.24 no.11
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• pp.1492-1499
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• 2020

A weather radar system generally shows the weather phenomena related with rainfall and wind velocity. These systems are usually very helpful to monitor the relatively high altitude weather situation for the wide and long range area. However, since the weather hazards due to the strong hail and heavy rainfall occurring locally are observed frequently in recent days, it is important to detect these wether phenomena. For this purpose, it is necessary to detect the fast varying low altitude weather conditions. In this environment, the effect of surface clutter is more evident and the antenna dwell time is much shorter. Therefore, the conventional Doppler spectrum estimation method may cause serious problems. In this paper, the AR(autoregressive) Doppler spectrum estimation methods were applied to solve these problems and the results were analyzed. Applied methods show that improved Doppler spectra can be obtained comparing with the conventional FFT(Fast Fourier Transform) method.

• Transactions on Electrical and Electronic Materials
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• v.12 no.2
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• pp.51-55
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• 2011

We investigated the etching characteristics of zinc oxide (ZnO) thin films deposited by the atomic layer deposition method. The gases of the inductively coupled plasma chemistry consisted of $Cl_2$, Ar, and $O_2$. The maximum etch rate was 40.3 nm/min at a gas flow ratio of $Cl_2$/Ar=15:5 sccm, radio-frequency power of 600 W, bias power of 200 W, and process pressure of 2 Pa. We also investigated the plasma induced damage in the etched ZnO thin films using X-ray diffraction (XRD), atomic force microscopy and photoluminescence (PL). A highly oriented (100) peak was present in the XRD spectroscopy of the ZnO samples. The full width at half maximum value of the ZnO sample etched using the $O_2/Cl_2$/Ar chemistry was higher than that of the as-deposited sample. The roughness of the ZnO thin films increased from 1.91 nm to 2.45 nm after etching in the $O_2/Cl_2$/Ar plasma chemistry. Also, we obtained a strong band edge emission at 380 nm. The intensities of the peaks in the PL spectra from the samples etched in all of the chemistries were increased. However, there was no deep level emission.

• Journal of The Korean Astronomical Society
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• v.38 no.4
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• pp.463-470
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• 2005

In this paper, we have made the component-based development of observational software for KASI solar imaging spectrograph (KSIS) that is able to obtain three-dimensional imaging spectrograms by using a scanning mirror in front of the spectrograph slit. Since 2002, the KASI solar spectrograph has been successfully operated to observe solar spectra for a given slit region as well as to inspect the response functions of narrow band filters. To improve its capability, we have developed the KSIS that can perform sequential observations of solar spectra by simultaneously controlling the scanning mirror and the CCD camera via Visual C++. Main task of this paper is to introduce the development of the component-based software for KSIS. Each component of the software is reusable on the level of executable file instead of source code because the software was developed by using CBD (component-based development) methodology. The main advantage of such a component-based software is that key components such as image processing component and display component can be applied to other similar observational software without any modifications. Using this software, we have successfully obtained solar imaging spectra of an active region (AR 10708) including a small sunspot. Finally, we present solar $H{\alpha}$ spectra ($6562.81{\AA}$) that were obtained at an active region and a quiet region in order to confirm the validity of the developed KSIS and its software.

• Bulletin of the Korean Chemical Society
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• v.32 no.8
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• pp.2531-2536
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• 2011

Ethanol is a prototype molecule used in probing catalytic reactivity of oxide catalysts such as $TiO_2$. In the present study, we adsorbed ethanol on $TiO_2$(001) at room temperature (RT) and the corresponding bonding state of ethanol was systematically studied by x-ray photoemission spectroscopy (XPS) using synchrotron radiation. Especially, we compared $TiO_2$(001) surfaces prepared in ultra-high vacuum (UHV) with different surface treatments such as $Ar^+$-sputtering and oxidation with molecular $O_2$, respectively. We find that the saturation coverage of ethanol at RT varies depending on the amount of reduced surface defects (e.g., $Ti^{3+}$) which are introduced by $Ar^+$-sputtering. We also find that the oxidized $TiO_2$(001) surface has other type of surface defects (not related to Ti 3d state) which can dissociate ethanol for further reaction above 600 K. Our C 1s core level spectra indicate clearly resolved features for the two chemically distinct carbon atoms from ethanol adsorbed on $TiO_2$(001), showing the adsorption of ethanol proceeds without C-C bond dissociation. No other C 1s feature for a possible oxidized intermediate was observed up to the substrate temperature of 650 K.

• Electrical & Electronic Materials
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• v.10 no.3
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• pp.262-267
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• 1997

In order to improve the brightness and chromaticity of green emitting low voltage phosphor for FED, we examine PL, PLE and CL emission characteristics of ZnGa$_{2}$O$_{4}$:Mn,O prepared in Ar and vacuum. ZnGa$_{2}$O$_{4}$:Mn,O sintered in vacuum shows about 16 times as bright as the one fabricated in Ar and excellent chromaticity. In PL emission spectra of ZnGa$_{2}$O$_{4}$:Mn,O at low temperature of 9 K, two peaks are observed at 504 nm and 513 nm. At room temperature, the two peaks are superimposed due to the lattice thermal vibrational energy, and only one peak is observed at 509 nm. From PLE measurements, it is believed that the energy levels of the host lattice and Mn ions are coexisted. The energy transfer from the host lattice to the emission center of Mn$^{2+}$ ions occurs.s.