Surface Reaction of Na0.5K0.5NbO3 Thin Films in Inductively Coupled BCl3/Cl2/Ar Plasma |
Kim, Dong-Pyo
(School of Electrical and Electronics Engineering, Chung-Ang University)
Um, Doo-Seung (School of Electrical and Electronics Engineering, Chung-Ang University) Kim, Gwan-Ha (School of Electrical and Electronics Engineering, Chung-Ang University) Woo, Jong-Chang (School of Electrical and Electronics Engineering, Chung-Ang University) Kim, Chang-Il (School of Electrical and Electronics Engineering, Chung-Ang University) |
1 | C.-R. Cho, J.-H. Koh, A. Grishin, S. Abadei, S. Gevorgian, Appl. Phys. Lett., 76 (2000) 1761 DOI ScienceOn |
2 | E. Meeks, P. Ho, A. Ting, R. J. Buss, J. Vac. Sci. Technol. A, 16 (1998) 2227 DOI ScienceOn |
3 | J. Chastain, "Handbook of X-ray Photoelectron Spectroscopy", Perkin Elmer, 1992 |
4 | C. R Cho, I. Katardjiev, M. Grishin, A. Grishin, Appl. Phy. Lett., 80 (2002) 3171 DOI ScienceOn |
5 | X. Wang, U. Helmersson, S. Olafsson, S. Rudner, L. Wernlund, S. Gevorgian, Appl. Phys. Lett. 73 (1998) 927 DOI ScienceOn |
6 | D. R. Lide, "Handbook of Chemistry and Physics", 79 CRC Press, 4-74, 1998 |
7 | A. Shibuya, J. H Koh, A. Grishin, V. Kugler, D. Music, U. Helmersson, M. Okuyama, Mat. Res. Soc. Symp. Proc., 688 (2002) C7.7 |
8 | M. S. Kim, N. K. Min, S. J. Yun, H. W. Lee, A. Efremov, K. H. Kwon, Microele. Eng., 84 (2008) 348 |
9 | C. M. Kang, G. H. Kim, K. T. Kim, C. I. Kim, Ferroelectrics, 357 (2007) 179 DOI ScienceOn |
10 | H. S. Kim, G. Y. Yeom, J. W. Lee, T. I. Kim, J. Vac. Sci. Technol. A, 17 (1999) 2214 DOI |
11 | S. J. Yun, A. Efremov, M. S. Kim, D. W. Kim, J. W. Lim, Y. H. Kim, C. H. Chung, D. J. Park, K. H. Kwon, 82 (2008) 1198 |