• Title/Summary/Keyword: AR Coating

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Tribological Properties of Sputtered Boron Carbide Coating and the Effect of ${CH}_4$ Reactive Component of Processing Gas

  • Cuong, Pham-Duc;Ahn, Hyo-Sok;Kim, Jong-Hee;Shin, Kyung-Ho
    • KSTLE International Journal
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    • v.4 no.2
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    • pp.56-59
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    • 2003
  • Boron carbide thin coatings were deposited on silicon wafers by DC magnetron sputtering using a ${B}_4$C target with Ar as processing gas. Various amounts of methane gas (${CH}_4$) were added in the deposition process to better understand their influence on tribological properties of the coatings. Reciprocating wear tests employing an oscillating friction wear tester were performed to investigate the tribological behaviors of the coatings in ambient environment. The chemical characteristics of the coatings and worn surfaces were studied using X-ray Photoelectron Spectroscopy (XPS) and Auger Electron Spectroscopy (AES). It revealed that ${CH}_4$addition to Ar processing gas strongly affected the tribologcal properties of sputtered boron carbide coating. The coefficient of friction was reduced approximately from 0.4 to 0.1, and wear resistance was improved considerably by increasing the ratio of ${CH}_4$gas component from 0 to 1.2 vol %. By adding a sufficient amount of ${CH}_4$(1.2 %) in the deposition process, the boron carbide coating exhibited lowest friction and highest wear resistance.

Preparation and Characterization of $Ge_{20}As_{20}Se_{60}$ Amorphous Chalcogenide Thin Film by Spin Coating (Spin-coating에 의한 $Ge_{20}As_{20}Se_{60}$ 비정질 chalcogenide 박막의 제조 및 광특성 분석)

  • 이강구;최세영
    • Journal of the Korean Ceramic Society
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    • v.37 no.3
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    • pp.219-226
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    • 2000
  • Amorphous Ge20As20Se60 chalcogenide thin films were prepared by spin coating technique from mixed solutions of As40Se60 and Ge40Se60 dissolved in ethylenediamine. Films were prepared at a roating speed of 3500 rpm and spinning time was 10 second and heat-treateed at 27$0^{\circ}C$ for 1 hour. The resulting film thickness and RMS roughness were approximately 340 nm and 15$\AA$. Photostructure changes were investigated with 514.5nm Ar+ laser irradiation and heat-treatment. After Ar+ laser irradiation, transmittance and transmission efficiency decreased respectively up to 24.9% at 2.43 eV and 67.5% at 3.27 eV, and absorption edge shifted toward long wavelength. Optical bandgap changed from 2.03 to 1.83 eV, and absoprtion coefficient and absorption efficiency increased up to 0.33$\times$105cm-1 at 3.37eV and 88.3% at 1.31 eV, respectively. These photodarkening state were recovered reversibly by heat-treatment at 27$0^{\circ}C$ for 1 hour. Photodarkening and thermal bleaching effects by laser irradiation and heat-treatment revealed reversible amorphous-to-amorphous transition varying only coordination number.

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Thermal diffusivity measurement of two-layer ar-coating systems using photoacoustic effects (광음향 효과를 이용한 2층 무반사 코팅막의 열확산도 측정)

  • 권경업;최문호;김석원;한성홍;김종태
    • Korean Journal of Optics and Photonics
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    • v.9 no.6
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    • pp.380-384
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    • 1998
  • As the development of ultrahigh power laser system, the laser mirrors must require high-resistant and effectively cooled. So, the study for the optical multilayer systems having large thermal diffusivity become important. In this study, we designed and fabricated two-layer anti-reflection (AR) optical coating samples, in different evaporation conditions of coating speeds (10, 20 $\AA$/s) and substrate temperatures (50, 100, 150, 20$0^{\circ}C$), using two dielectric materials $MgF_2$ and ZnS which have different refractive indices and measured the through-plane thermal diffusivity by using photoacoustic effect. The optical thicknesses of $MgF_2$ and ZnS layer were fixed as 5/4λ (λ=514.5nm) and λ, respectively, and the thermal diffusivity of the samples fabricated in the different conditions was obtained from the measured amplitude of photoacoustic signals by changing chopping frequency of $Ar^+$ layer beam. The results told us that the thermal diffusivity of the sample fabricated in the condition of 10 $\AA$/s and 15$0^{\circ}C$ showed the largest value.

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Effects of Process Parameters on Formation of TiN Coating Layer in Small Holes by PACVD (PACVD 방법으로 TiN 코팅시 공정변수가 작은 동공 내부의 코팅층 형성에 미치는 영향)

  • Kim, Deok-Jae;Jo, Yeong-Rae;Baek, Jong-Mun;Gwak, Jong-Gu
    • Korean Journal of Materials Research
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    • v.11 no.6
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    • pp.441-447
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    • 2001
  • A study on the TiN coating layer in small holes on the Purpose of die-casting dies application has been performed with a PACVD process. For the hole having diameter of 4 mm. the uniform TiN coating layer in the hole to the depth of 20 mm was achieved using DC pulsed power source. To understand the forming mechanism of TiN coating layer, plasma diagnosis on Ti, $N_{2}^{+}$ and A $r^{+}$ emissions was carried out during plasma coaling process by optical emirssion spectroscopy. When the duty ratio was equal or over 50%, the Peaks of Ti,$ N_{2}^{+}$ and A $r^{+}$ emission were obviously observed. While duty ratio was equal or under 28.6%, no peaks for Ti, $N_{2}^{+}$ and A $r^$ were observed and the formation of TiN coating layer was rarely observed. For the coating in 4 mm hole diameter, the coating layer with bipolar process was two times deeper than that with unipolar process.

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Characterization of Coating Layer formed on the Metal Surface by Calorizing (Calorizing(Aluminizing) 코팅 층의 표면특성 고찰)

  • 하진욱
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.1 no.1
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    • pp.49-54
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    • 2000
  • The effect of Particle size of coating Powder and coating temperature on the Properties of coating layer was studied by calorizing(or aluminizing). The surface properties of coating layer were fully characterized, using SEM and EDXS. Coating powders were separated according to the particle size by 3 steps and the coating temperature was varied from $950^{\circ}C$ to $980^{\circ}C$. Calorizing with pack cementation method carried under Ar atmosphere for 5 hrs. Results show that the thickness and Al content of coating layer increased as the size of coating powder decreased and coating temperature increased. And pores formed on the coating layer reduced and homogeneity of coating layer increased with smaller particle size of coating powder.

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The Effect of Particle Size of Coating Powder and Coating Temperature on the Thickness of Coating Layer Formed on Metal Surface (Calorizing 처리에서 코팅분말의 입자크기 및 코팅온도가 금속표면에 형성된 코팅층의 두께에 미치는 영향)

  • Ha, Jin-Wook;Park, Hai-Woong
    • Applied Chemistry for Engineering
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    • v.10 no.7
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    • pp.1061-1065
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    • 1999
  • The effect of particle size of coating powder and coating temperature on the thickness of coating layer formed on metal surface was studied by using XRD, SEM and EDXS. Coating powder was separated according to particle size by 3 steps and coating temperatures were varied from $950^{\circ}C$ to $980^{\circ}C$. Calorizing carried out at air and Ar conditions for 5 hrs, respectively. XRD result show that $Al_2O_3$ and AlN were formed during calorizing at air condition. The thickness and Al content of coating layer increased as the particle size of coating powder decreased and coating temperature increased.

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A Study on the Tribological Characteristics of Thermally Evaporated Silver Films Assisted by Atomic Mixing (원자혼합법으로 증착된 은 박막의 트라이볼로지적 특성에 관한연구)

  • 양승호;공호성;윤희성
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2001.11a
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    • pp.27-34
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    • 2001
  • A new functionally gradient metal coating method using an atomic mixing technique was developed. In this work the effect of silver atomic mixing on the tribological characteristics of silver$.$ films. has been investigated experimentally. Atomic mixing was implemented by using the, bombardment .of accelerated Ar ions during the thermal evaporation coating process of silver films. Experiments were performed in dry conditions using a ball-on-disk test rig at a load range of 19.6 mN - 17.64 N and a sliding velocity of 20 mm/sec. Results showed that the life of functionally gradient silver coating was enhanced about 100 times more than that of thermally evaporated silver coating and 2 times more than that of IBAD silver coating. The functionally gradient. film also showed low friction and wear compared to those of the evaporated silver and

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The Study on the Improvement of Antireflection Coating Efficiency According to the Angle of Incidence (입사각에 따른 반사방지막 성능 개선에 관한 연구)

  • Kim, Chang-Bong
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.16 no.6
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    • pp.4131-4136
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    • 2015
  • This paper compares and calculates more precisely the averaged reflectance of antireflection coating with different structure of single and 6 layer assuming the incident angle of light changing from $8^{\circ}$ to $60^{\circ}$ not like normal incidence as usual case. The reflectivity of AR coating of 6 layers with 180 nm thickness having index profile suggested as linear and quintic function and single layer with same thickness having even index are calculated and compared, when the wavelength of incident light ranges from 400 nm to 1200 nm. As the results the AR coating with 6 layers having quintic(linear) function index profile shows the lower reflectance about 11.6 %(14.6 %) than other index profiles, which is approximately 8 % lower reflectance compared with single layer case(about 19.6 %). This results could be applied for the better antireflection coating design applying to optical devices and filters.

Design and Fabrication of Broad Gain Laser Diodes (광대역 이득 레이저 다이오드 설계 및 제작)

  • 권오기;김강호;김현수;김종회;심은덕;오광룡
    • Korean Journal of Optics and Photonics
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    • v.14 no.3
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    • pp.286-291
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    • 2003
  • Asymmetric multiple quantum well ridge waveguide laser diodes (AMQW RWG LDs) with a wide and flat gain spectrum were designed and fabricated. The operating parameters and gain spectra were measured and analyzed for uncoated and anti-reflection (AR) coated LDs. For AR coated 500 mm-long RWG LOs, the extremely flat gain spectrum over a spectral range of 90 nm was obtained at the current 75 ㎃.

Computer Simulation Study for Higher Solar Absorptance and Lower Emittance Multilayer Coating Design (고 흡수율과 고방사율 다중 코팅 설계를 위한 전산모사 연구)

  • Hashimi, Masaood;Farooq, Muhamad;Qazi, Ishtiaq Ahmed;Kang, Eun-Chul;Kim, Ki-Se;Lee, Euy-Joon
    • Journal of the Korean Solar Energy Society
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    • v.23 no.3
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    • pp.81-91
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    • 2003
  • 본 연구에서는 복층으로 구성된 $WSio_2Al$ 금속절연체의 상세를 보여주고 있는데, 금속과 절연체의 합성물질은 태양 흡수율의 설계와 열적인 현상을 보여주기 위해 종종 사용된다. 금속의 접착기면 위에 얇은 복층 코팅으로 구성되는 디자인은 태양 스펙트럼의 파장권역에서 선택적 흡수를 위함이다. 본 연구는 태양 복사의 열성능 평가를 위해 금속과 절연체 필름의 방사율, 태양흡수율, 코팅순서, 미 반사층(AR)의 두께, 코팅 두께와 코팅 면수, 전체 코팅 두께 등에 대해 시뮬레이션 하였다. 그 결과 네 겹의 코팅설계에서 $Sio_2AR$ 75 nm 두께와 각각의 층에서 $0.5\sim0.7$의 가변 금속부분 구성이 가장 우수한 성능을 갖는 것으로 나타났다. 또한 시뮬레이션으로 금속과 절연체 합성물의 최적의 구성과 각각의 코팅 두께에 대한 예측이 가능했으며, 최대 태양흡수율은 0.94, 방사율은 0.115의 금속과 절연체의 합성물을 구성할 수 있었다.