• Bulletin of the Korean Chemical Society
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• 제28권1호
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• pp.81-84
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• 2007

Ab initio periodic Hartree-Fock calculations with the full potential and minimum basis set are applied to interpretation of scanning tunneling microscope (STM) and atomic force microscope (AFM) images on 1TVTe2. Our results show that the simulated STM image shows asymmetry while the simulated AFM image shows the circular electron densities at the bright spots without asymmetry of electron density to agree with the experimental AFM image. The bright spots of both the STM and AFM images of VTe2 are associated with the surface Te atoms, while the patterns of bright spots of STM and AFM images are different.

• 반도체디스플레이기술학회지
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• 제17권4호
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• pp.1-5
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• 2018

Atomic force microscopy (AFM) simulation for Si (001) surface defects was conducted by using density functional theory (DFT). Three major defects on the Si (001) surface are difficult to analyze due to external noises that are always present in the images obtained by AFM. Noise-free surface defects obtained by simulation can help identify the real surface defects on AFM images. The surface defects were first optimized by using a DFT code. The AFM tip was designed by using five carbon atoms and positioned on the surface to calculate the system's energy. Forces between tip and surface were calculated from the energy data and converted into an AFM image. The simulated AFM images are noise-free and, therefore, can help evaluate the real surface defects present on the measured AFM images.

• Bulletin of the Korean Chemical Society
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• 제28권1호
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• pp.85-88
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• 2007

Ab initio periodic Hartree-Fock calculations with the full potential and minimum basis set are applied to interpretation of scanning tunneling microscope (STM) and atomic force microscope (AFM) images on 1TVTe2. Our results show that the simulated STM image shows asymmetry while the simulated AFM image shows the circular electron densities at the bright spots without asymmetry of electron density to agree with the experimental AFM image. The bright spots of both the STM and AFM images of VTe2 are associated with the surface Te atoms, while the patterns of bright spots of STM and AFM images are different.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2005년도 춘계학술발표대회 논문집
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• pp.265-268
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• 2005

A new method for measurement of the pore size in a nanohoneycomb structure using atomic force microscopy (AFM) was proposed. Porous type anodic aluminum oxide (AAO) was fabricated as a nanohoneycomb structure to measure the pore size. For measuring pore sizes from AFM images, a criterion was set in porous type AAO. The pore sizes from AFM images were compared with those from SEM images, and the results showed good agreement. The relationship between the pore size and widening time was found to be linear in the range of this study. It was understood as the synchronized effects of the impurity gradient in outer oxide of AAO, mechanical packing and mass transfer increase.

• 전자공학회논문지D
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• 제35D권9호
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• pp.20-25
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• 1998

대면적 평탄화 및 미세패턴형성기술로 각광받고 있는 CMP(chemical mechanical polishing) 공정을 이용하여 SiO₂ trench 패턴의 피치크기와 밀도에 따른 Cu의 평탄화 과정과 평탄화 이후의 표면 profile을 AFM(atomic forced microscopy)으로 측정하고 분석하였다. 실험결과, 평탄화 초기 연마율은 패턴밀도가 높고 피치크기가 작을수록 연마율이 증가하였으며, 초기 평탄화 이후 연마율이 급속히 감소함을 알 수 있었다. 말기 평탄화 이후, 전체 패턴의 평균 rms roughness는 120Å이었다. 그러나, 패턴피치 크기가 2㎛ 이하이고, 50% 패턴밀도를 갖는 패턴의 경우에는 Cu의 일부분이 120∼330Å 정도의 깊이로 떨어져 나가는 현상과 SiO₂와 Cu의 경계면에 oxide erosion 현상이 나타났으며, 패턴 피치 크기가 10㎛ 및 15㎛에서는 Cu와 SiO₂경계면 부분에 Cu가 260∼340Å 정도로 trench 되어 있는 것을 볼 수 있었다. 또한, SiO₂와 Cu의 패턴내부 및 접합면에서 생기는 수백 Å이하의 peeling 및 deeping 현상의 원인과 해결방안에 대해 논의하였다.

• 한국공작기계학회논문집
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• 제16권5호
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• pp.115-121
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• 2007

Phase contrast imaging in atomic force microscopy showed a promise as an effective tool for better understanding of micromechanical properties of surfaces at nano scale. A qualitative estimation model for phase contrast images obtained with a tapping mode AFM was developed. This investigation demonstrated the high efficiency of combined analysis of topography and phase contrast images for characterizing nanosurfaces. Phase contrast images allowed estimation of relative stiffness(elastic modulus) of the sample surface. The phase contrast images revealed a significant inhomogeneity of the nano scale worn surfaces. Phase contrast images are also capable of revealing the formation of tribofilms.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2000년도 하계학술대회 논문집 C
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• pp.1708-1710
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• 2000

The synthesis and characterization of polymers for organic Metal/Insulator/Metal(MIM) devices were investigated from LB films. The physicochemical properties of the LB films were examined by UV absorption spectrum and AFM. The AFM images showed for network structure of polyurethane monolayer that the film formed an unsymmetry mesh with intermolecular interaction within the large scale. The stable images are probably due to a strong interaction between the monolayer film and Si substrate. We are unable to obtain molecular resolution in images of the films but did see a marked contrast between images of the bare substrate and those with the network structure film deposited onto it.

• 한국응용과학기술학회지
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• 제26권1호
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• pp.102-108
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• 2009

Behaviors of saturated fatty acid halides (CI4, C16, C18) were measured by LB method when the molecules were stimulated by pressure. The saturated fatty acid halides were deposited on the indium tin oxide(lTO) glass by the LB method. The average organic ultra thin film size and the surface roughness of the fatty acid halides thin films were investigated using AFM. It was found that AFM images show small surface roughness ($2.5{\sim}5.0\;nm$) and the organic ultra thin film size of $2.5{\sim}12\;nm$. Both aggregations and pin-holes were also seen on the AFM images. However we found that the surface roughness. These effects seem to be reasonable to be related to the increase of the organic ultra thin film size of fatty acid halides.

• 한국생산제조학회지
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• 제24권5호
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• pp.475-480
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• 2015

Ultrasonic atomic force microscopy (Ultrasonic-AFM) has been used to investigate the elastic property of the ultra-thin coating layer in a thin-film system. The modified Hertzian theory was applied to predict the contact resonance frequency through accurate theoretical analysis of the dynamic characteristics of the cantilever. We coat 200 nm thick Aluminum and Titanium thin films on the substrate using the DC Magnetron sputtering method. The amplitude and phase of the contact resonance frequency of a vibrating cantilever varies in response to the local stiffness constant. Ultrasonic-AFM images were obtained using the variations in the elastic property of the materials. The morphology of the surface was clearly observed in the Ultrasonic-AFM images, but was barely visible in the topography. This research demonstrates that Ultrasonic-AFM is a promising technique for visualizing the distribution of local stiffness in the nano-scale thin coatings.

• Biotechnology and Bioprocess Engineering:BBE
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• 제4권1호
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• pp.72-77
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• 1999

An antibody containing a genetically engineered lipid group at the N-termunus and a hexahistidinyl tag at the C-terminus (Lpp-scF-His6) was immobilized in an oriented manner on the surface of liposome. Liposomes, consisting of antibody and phosphatidyl-choline, have been prepared and imaged by AFM. For AFM visualization, the resulting liposomes were bound on the surface of mica by two different mechanisms. The histidine tags present in the antibody molecules of the immonuliposome were anchored to the NiCl2 treated mica surface. Alternatively, the immunoliposomes were immunochemically bound on antigen-coated mica surface. Both approaches yielded liposomes which were clearly imaged without damage by AFM in ambient condition.