• Transactions of the Society of Information Storage Systems
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• v.1 no.1
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• pp.73-77
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• 2005

In this paper, a new silicon nitride cantilever integrated with silicon heater and piezoelectric sensor has been firstly developed to improve the uniformity of the initial bending and the mechanical stability of the cantilever array for thermo-piezoelectric SPM(scanning probe microscopy) -based data storages. This nitride cantilever shows thickness uniformity less than $2\%$. Data bits of 40 nm in diameter were recorded on PMMA film. The sensitivity of the piezoelectric sensor was 0.615 fC/nm after poling the PZT layer. For high speed operation, 128${\times}$128 probe array was developed.

• Journal of the Korean Society for Nondestructive Testing
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• v.31 no.2
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• pp.174-180
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• 2011

Nondestructive surface imaging of elastic characteristic and mechanical property has been studied on nanoscale surface with ultrasonic AFM. Resonance frequency variation of cantilever is theoretically analyzed with respect to contact mechanics as well as experimentally measured. The contact resonance frequency is calculated theoretically using the spring-mass and Herzian model in accordance with the resonance frequency of UAFM cantilever measured experimentally. Consequently, the topography and amplitude images could be obtained successfully and the elastic characteristic at the nanoscale surface was evaluated qualitatively by amplitude signals.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.33 no.11
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• pp.1314-1319
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• 2009

The design methods of mechanical systems are largely classified into deterministic methods and stochastic methods. In deterministic methods, design parameters are assumed to have fixed values. On the other hand, in stochastic methods, design parameters are assumed to be statistically distributed. When a stochastic method is employed, statistical characteristics of the populations of design variables are assumed to be known. However, very often, it is almost impossible or very expensive to obtain the statistical characteristics of the populations. Therefore a sample survey method is usually employed for stochastic methods. This paper describes the procedure of estimating the statistical characteristics of populations by employing sample data sets. An example of AFM micro cantilever beam is employed to show the effectiveness of the procedure.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.05a
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• pp.379-382
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• 2007

The proper orthogonal decomposition(POD) is used to the modal analysis of microcantilever of dynamic mode atomic force microscopy(AFM). The proper orthogonal modes(POM) are extracted from vibrating signals of microcantilever when it resonates and taps the sample. The POMs resemble the linear normal modes(LNM) of cantilever vibrating at each resonance frequency. Some of POMs in tapping microcantilever show quite different shapes from the POMs of the resonating microcantilever. Also this POMs can be applied to model for the complex nonlinear behavior of the dynamic mode AFM microcantilevers.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.05a
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• pp.264-268
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• 2007

Proper orthogonal decomposition(POD) is a method for extracting bases for modal decomposition from the ensemble of signals. We verified the connection of the proper orthogonal modes(POMs) and the linear normal modes(LNMs) through MATLAB simulation for the simple cantilever and AFM microcantilever models. Using the POMs, we can analyze and model effectively the dynamic mode of AFM microcantievers.

• Proceedings of the Korean Vacuum Society Conference
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• 2004.02a
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• pp.110-110
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• 2004

• Proceedings of the Materials Research Society of Korea Conference
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• 2008.05a
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• pp.36.1-36.1
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• 2008

• Tribology and Lubricants
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• v.30 no.4
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• pp.218-223
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• 2014

This paper presents a method of controlling the stiffness of a tungsten probe for an atomic force microscope (AFM) in order to provide high-quality phase contrast images in accordance with sample characteristics. While inducing sufficient deformation on sample surfaces with commercial Si or $Si_3N_4$ probes is difficult because of their low stiffness, a tungsten probe fabricated by electrochemical etching with appropriately high stiffness can generate relatively large elastic deformation without damaging sample surfaces. The fabrication of the tungsten probe involves two separate procedures. The first procedure involves immersing a tungsten wire with both ends bent parallel to the surface of an electrolyte and controlling the stiffness of the tungsten cantilever by decreasing its diameter using electrochemical etching in the direction of the central axis. The second procedure involves immersing the end of the etched tungsten cantilever in the direction perpendicular to the surface of the electrolyte and fabricating a tungsten tip with a tip radius of 20-50 nm via the necking phenomenon. The latter etching process applies pulse waves every 0.25 seconds to the manufactured tip to improve its yield. Finite element analysis (FEA) of the stiffness of the tungsten probe as a function of its diameter showed that the stiffness of the tungsten probes greatly varies from 56 N/m to 3501 N/m according to the cantilever diameters from $30{\mu}m$ to $100{\mu}m$, respectively. Thus, the proposed etching method is effective for producing a tungsten probe having specific stiffness for optimal use with an AFM and certain samples.

• Korean Chemical Engineering Research
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• v.47 no.4
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• pp.395-402
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• 2009

The atomic force microscopy(AFM) has been used, as a powerful tool, to investigate physical properties of supported-lipid layers. Prior to the advent of the AFM, no observation was performed for the physical phenomena at the nanometer-scale. This microscope provides nanometer-scale morphology by scanning surfaces with the cantilever and presents force curve by monitoring the behavior of the cantilever that approaches to surface and retracts from the surface. From the morphology, the structures of the supported lipid layer and the effect of other molecules on the structures have been investigated. From the force curve, the surface properties-electrostatic and mechanical properties-of the supported lipid layers have been studied. In this article, characterization of the structure and surface properties of the supported lipid layer is explained. Future perspectives and direction are also discussed.

• Journal of the Korean Vacuum Society
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• v.12 no.2
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• pp.144-149
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• 2003

Carbon tips were grown on Si cantilevers by applying an electron beam to them directly with Scanning Electron Microscope. A carbon tip was fabricated by aligning the electron beam directly down the vertical axis of Si cantilever and then irradiating a single spot on the cantilever for a proper time in the dominant atmosphere of residual gases generated by the oil of the diffusion pump. A number of control parameters for SEM, including exposure time, acceleration voltage, emission current, and beam probe current, were allowed to make various aspect ratio feature. The growth of carbon tips was not affected by the surface morphology of substrates. We could acquired the tip whose effective length is 0.5 $\mu\textrm{m}$, bottom diameter is 90 nm and cone half angle $3.5^{\circ}$ The growth technique of the high aspect ratio carbon tips on the tip-free cantilevers is available to reduce the complexities of fabricating sub-micron scale tips on the PZT thin film actuator integrated AFM cantilevers.