• 대한전기학회논문지
• /
• 제43권6호
• /
• pp.1036-1038
• /
• 1994

In this paper, a silicon piezoresistive accelerometer is designed and fabricated using a silicon direct bonded wafer. The accelerometer consists of a seismic mass and four cantilevers, and is fabricated mainly by the anisotropic etching method using EPW as an etchant. The measured sensitivity and the resonant frequency are 0.02 mV/V.g and 3.4 kHz, respectively. The nonlinearity is less than $\pm$0.3% of the full scale of the output.

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 1996년도 한국자동제어학술회의논문집(국내학술편); 포항공과대학교, 포항; 24-26 Oct. 1996
• /
• pp.56-60
• /
• 1996

This paper presents the initial results of development of a inertial navigation grade silicon pendulous accelerometer. This effort focused on developing a bulk-micromachined silicon pendulum and designing a PI-servo controller. Performance data presented in this paper includes threshold, bias short term stability and nonlinearity of scale factor. This accelerometer developed is demonstrated the feasibility of meeting one-nautical-mile-per-hour accuracy.

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 1989년도 한국자동제어학술회의논문집; Seoul, Korea; 27-28 Oct. 1989
• /
• pp.28-32
• /
• 1989

In this paper, a DTG(Dynamically Tuned Gyroscope) and a DTG-based accelerometer designed and fabricated in the Seoul National University are described. For the purpose of the design, the functions and properties of DTG and accelerometer are investigated. The performance of the DTG is tested with the help of a single - degree - of - freedom rate table and a computer. The test result shows that the standard deviation of the DTG's random drift is 9.2 deg/(20min). The error model of the accelerometer is shown also.

• 대한전자공학회:학술대회논문집
• /
• 대한전자공학회 2002년도 하계종합학술대회 논문집(3)
• /
• pp.43-46
• /
• 2002

This paper is about the Micro Accelerometer Sensor that collect the human's writing patterns so as to process its signals. Finally, we pursue the accuracy of digital data about the writing pattern and hope to discuss the possibility of the Micro Accelerometer Sensor Besides, we researched the compensation of signal distortion due to tiIt and analyzed the noise error in order to improve its accuracy.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1998년도 하계학술대회 논문집 G
• /
• pp.2504-2508
• /
• 1998

In this paper, we propose the new detecting method for three dimensional piezoresistive silicon accelerometer. Furthermore the accelerometer is formed to have endurance for high temperature by perfect isolation of the piezoresistors using Silicon On Insulator(SOI) wafer. Sensor size are optimized with analytical formulae and extended with FEM simulation for the more detailed results. The accelerometer was fabricated by bulk micromachining techonology. We measured the temperature characteristics and the output characteristics, and the both characteristics were compared with the simulated results

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1993년도 정기총회 및 추계학술대회 논문집 학회본부
• /
• pp.192-194
• /
• 1993

In this paper, a silicon piezoresistive accelerometer of which the cantilevers have uniform thickness is designed and fabricated with SOI wafer. The accelerometer consists of a seismic mass and four cantilevers, and is fabricated mainly by the anisotropic etching method using EPW etchant. The fabrication processes are that of the frontside processes including the etching of the cantilevers and the doubleside alignment holes, the diffusion of the piezoresisters and patterning of the contact windows, and the metal connection process, and that of the backside processes including the etching of the shallow cavity and the seismic mass. Because of the uniformity of thickness, the performance of the accelerometer fabricated with SOI wafer is expected to be better than that of accelerometer fabricated by the time-controlled etching method.

• Journal of Welding and Joining
• /
• 제29권1호
• /
• pp.115-122
• /
• 2011

This study is to propose an in-process monitoring system for micro resistance spot welding processes using minute accelerometer. A minute accelerometer is mounted on the upper moving electrode tip holder. With its high sensitivity and frequency response characteristics, accelerometer output signal has been successfully recorded and integrated twice to reflect electrode expansion during micro spot welding processes. The analysis of electrode expansion pattern was attempted to find its correlation with spot weld quality. Major previous findings1-6) regarding spot weld quality assessment with the electrode expansion signal in large scale resistance spot welding processes were proved to be true in this in-process monitoring system.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1996년도 하계학술대회 논문집 C
• /
• pp.1994-1996
• /
• 1996

This paper presents the fabrication and testing of a polysilicon piezoresistive accelerometer with p+ silicon diaphragm by simple process such as two step photolithography for the RIE process to form the cantilevers and a deep anisotropic etch process for the complete fabrication of the accelerometer. The fabricated accelerometer consists of a seismic mass and four cantilevers on which polysilicon piezoresistors are formed. The measurement of the output signal from the bridge circuit of the fabricated accelerometer is carried out with the HP 3582A spectrum analyzer. The analysis of the experimental result is showed in terms of the sensitivity and the resonant frequency. At atmospheric condition, the measurement values of the sensitivity and the resonant frequency are $11\;{\mu}V/Vg$ and 475 Hz, respectively.

• 한국소음진동공학회논문집
• /
• 제21권2호
• /
• pp.106-111
• /
• 2011

In this paper, assumed mode method on Euler beam theory is employed and signal distortion is considered to obtain the performances of a MEMS accelerometer which are a sensitivity and measurable frequency range(MFR). Not only the sensitivities and MFR but also the variations of dynamic responses and natural frequencies of the MEMS accelerometer are investigated for several sets of beam properties such as length, width, thickness and Young's modulus. It is stated that the variations of beam properties significantly influence the performances of the MEMS accelerometer and the relationship between sensitivities and MFR is inversely proportional to each other.

• 반도체디스플레이기술학회지
• /
• 제23권2호
• /
• pp.33-37
• /
• 2024

Recently, wearable virtual reality devices are widely used. These instruments include a 3-axis accelerometer. User's heart rate information in virtual reality contents can be useful for measuring user experience. In this paper, we propose a method to measure the heart rate through a 3-axis accelerometer based on the principle of ballistocardiography without additional sensors. The angular velocity was successively measured in a time series by the 3-axis accelerometer mounted to the head. The frequency of the maximum magnitude is determined as the heart rate through frequency transform and band pass filtering of the time series signal. For verification, the heart rate calculated from photoplethysmography sensors acquired at the same time was compared as ground-truth. In the virtual reality, the user's heart rate information can be extracted without additional heart rate sensor, and the emotional state and fatigue can be measured.