• 제목/요약/키워드: 65nm

검색결과 692건 처리시간 0.025초

유도 결합 플라즈마를 이용한 스퍼터-승화 증착 시스템의 공정 분석

  • 유영군;최지성;주정훈
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
    • /
    • pp.186-186
    • /
    • 2013
  • 종래의 흑연 위주 연료전지 분리판 개발되어 최근 고분자 전해질 막 연료전지가 높은 전력, 낮은 배기 가스 배출, 낮은 작동 온도로 자동차 산업에서 상당한 주목을 받고 있다. 요구사항은 높은 전기 전도도, 높은 내식성, 낮은 가스 투과성, 낮은 무게, 쉬운 가공, 낮은 제조비용이다. Thin film Cr 장비로 저항가열 furnace, sputter 등이 사용된다. 연료전지 분리판의 고전도도, 내부식성 보호막의 고속 증착을 위한 새로운 증착원으로 스퍼터 - 승화형 소스의 가능성을 유도 결합 플라즈마에 금속 봉을 직류 바이어스 함으로써 시도하였다. 유도 결합 플라즈마를 이용하여 승화증착 시스템을 사용하여 OES (SQ-2000)와 QMS (CPM-300)를 사용하여 $N_2$ flow에 따른 유도 결합 플라즈마를 이용한 스퍼터-승화증착 시스템을 사용 하여도 균일한 공정을 하는 것을 확인 하였다. 5 mTorr의 Ar 유도 결합 플라즈마를 2.4 MHz, 500 W로 유지하면서 직류 바이어스 전력을 30 W (900 V, 0.02 A) 인가하고, $N_2$의 유량을 0.5, 1.0, 1.5 SCCM로 변화를 주어 특성을 분석하였다. MID (Multiple Ion Detection) mode에서 유도결합 플라즈마를 이용한 스퍼터-승화 증착 장비를 사용하여 CrN thin flim 성장시켰고, deposition rate은 44.8 nm/min으로 얻을 수 있었다. 또한 $N_2$의 유량이 증가할 수록 bias voltage가 증가하는 것을 확인 할 수 있었다. OES time acquisition을 이용한 공정 분석에서는 $N_2$ 유량을 off 하였을 때 Ar, Cr의 중성 intensity peak이 상승하였고, 시간 경과에 따라 sublimation에 의한 영향이 없는 것을 확인 할 수가 있었다. XRD data에서는 질소 유량이 증가함에 따라 $Cr_2N$이 감소하고, CrN이 증가하는 것을 확인할 수가 있었다. 결정배향성과 Morphology는 다결정 재료의 경도에 영향을 주는 인자이다. CrN 결정 구조의 경우는 (200)면이 경도가 제일 높은데 (200)면에서 성장한 것을 확인 할 수 있었다. 잔류가스 분석 결과로는 일정한 Ar의 유량을 흘렸을 때 $N_2$의 변화량이 비례적인 경향이 보이는 것을 확인 할수 있었다. 또한 $N_2$가 흐르면서도 유도 결합 플라즈마를 이용한 스퍼터-승화 증착 시스템을 사용하면 일정한 공정을 하는 것을 확인 할 수 있었다. 질소의 분압이 유량에 따라서 $3.0{\times}10^{-10}$ Torr에서 $1.65{\times}10^{-9} $Torr까지 일정한 비율로 증가한다. 즉, 이 시스템으로 양산장비 설계를 하여도 가능 하다는 것을 말해준다.

  • PDF

Production and Characterization of Beta-lactoglobulin/Alginate Nanoemulsion Containing Coenzyme Q10: Impact of Heat Treatment and Alginate Concentrate

  • Lee, Mee-Ryung;Choi, Ha-Neul;Ha, Ho-Kyung;Lee, Won-Jae
    • 한국축산식품학회지
    • /
    • 제33권1호
    • /
    • pp.67-74
    • /
    • 2013
  • The aims of this research were to produce oil-in-water ${\beta}$-lactoglobulin/alginate (${\beta}$-lg/Al) nanoemulsions loaded with coenzyme $Q_{10}$ and to investigate the combined effects of heating temperature and alginate concentration on the physicochemical properties and encapsulation efficiency of ${\beta}$-lg/Al nanoemulsions. In ${\beta}$-lg/Al nanoemulsions production, various heating temperatures (60, 65, and $70^{\circ}C$) and alginate concentrations (0, 0.01, 0.03, and 0.05%) were used. A transmission electron microscopy was used to observe morphologies of ${\beta}$-lg/Al nanoemulsions. Droplet size and zeta-potential values of ${\beta}$-lg/Al nanoemulsions and encapsulation efficiency of coenzyme $Q_{10}$ were determined by electrophoretic light scattering spectrophotometer and HPLC, respectively. The spherically shaped ${\beta}$-lg/Al nanoemulsions with the size of 169 to 220 nm were successfully formed. The heat treatments from 60 to $70^{\circ}C$ resulted in a significant (p<0.05) increase in droplet size, polydispersity, zeta-potential value of ${\beta}$-lg/Al nanoemulsions, and encapsulation efficiency of coenzyme $Q_{10}$. As alginate concentration was increased from 0 to 0.05%, there was an increase in the polydispersity index of ${\beta}$-lg/Al nanoemulsions and encapsulation efficiency of coenzyme $Q_{10}$. This study demonstrates that heating temperature and alginate concentration had a major impact on the size, polydispersity, zeta-potential value and encapsulation efficiency of coenzyme $Q_{10}$ in ${\beta}$-lg/Al nanoemulsions.

980 MPa급 열연강의 권취온도와 탄화물 거동에 따른 신장플랜지성 (Effects of Coiling Temperature and Carbides Behavior on Stretch-flangeability for 980MPa Hot-rolled Steels)

  • 천은준;이주승;도형협;김성주;최윤석;박용호;강남현
    • 대한금속재료학회지
    • /
    • 제50권7호
    • /
    • pp.487-493
    • /
    • 2012
  • To analyze the factors on stretch-flangeability for 980 MPa-grade hot-rolled steels, two types of steels (Fe-Cr and Fe-Mo) were manufactured by hot-rolling. Manufactured steels at the low coiling temperature, such as 400 and $500^{\circ}C$, had poor stretch-flangeability due to un-uniformly distributed carbides and a large deviation of interphase hardness. However, when the coiling temperature was set at $650^{\circ}C$ with Fe-Cr steel, 998 MPa of ultimate tensile strength, 19% of total elongation and 65% of the hole expanding ratio were achieved by microstructural constituents of polygonal ferrite (PF) and granular ferrite (GF) dispersed with fine carbides (<50 nm). Therefore, the material to attain 980 MPa with superior formability was the Fe-Cr steel that was precipitation-hardened in polygonal ferrite and granular ferrite at the coiling temperature $650^{\circ}C$.

Fabrication and performance evaluation of ultraviolet photodetector based on organic /inorganic heterojunction

  • Abdel-Khalek, H.;El-Samahi, M.I.;Salam, Mohamed Abd-El;El-Mahalawy, Ahmed M.
    • Current Applied Physics
    • /
    • 제18권12호
    • /
    • pp.1496-1506
    • /
    • 2018
  • Organic/inorganic ultraviolet photodetector was fabricated using thermal evaporation technique. Organic/inorganic heterojunction based on thermally evaporated copper (II) acetylacetonate thin film of thickness 200 nm deposited on an n-type silicon substrate is introduced. I-V characteristics of the fabricated heterojunction were investigated under UV illumination of intensity $65mW/cm^2$. The diode parameters such as ideality factor, n, barrier height, ${\Phi}_B$, and reverse saturation current, $I_s$, were determined using thermionic emission theory. The series resistance of the fabricated diode was determined using modified Nord's method. The estimated values of series resistance and barrier height of the diode were about $0.33K{\Omega}$ and 0.72 eV, respectively. The fabricated photodetector exhibited a responsivity and specific detectivity about 9 mA/W and $4.6{\times}10^9$ Jones, respectively. The response behavior of the fabricated photodetector was analyzed through ON-OFF switching behavior. The estimated values of rise and fall time of the present architecture under UV illumination were about 199 ms and 154 ms, respectively. Finally, enhancing the photoresponsivity of the fabricated photodetector, post-deposition plasma treatment process was employed. A remarkable modification of the device performance was noticed as a result of plasma treatment. These modifications are representative in a decrease of series resistance and an increase of photoresponsivity and specific detectivity. The process of plasma treatment achieved an increment of external quantum efficiency from 5.53% to 8.34% at -3.5 V under UV illumination.

The superconductivity and pinning properties of Y2O3-doped GdBa2Cu3O7-δ films prepared by pulsed laser deposition

  • Oh, Won-Jae;Park, Insung;Yoo, Sang-Im
    • 한국초전도ㆍ저온공학회논문지
    • /
    • 제20권4호
    • /
    • pp.41-45
    • /
    • 2018
  • We have investigated the effect of $Y_2O_3$ nanoparticles on the pinning properties of $Y_2O_3$-doped $GdBa_2Cu_3O_{7-{\delta}}$ (GdBCO) films. Both undoped and $Y_2O_3$-doped GdBCO films were grown on $CeO_2$-buffered MgO (100) single crystal substrates by pulsed laser deposition (PLD) using KrF (${\lambda}=248nm$) laser. The $Y_2O_3$ doping contents were controlled up to ~ 2.5 area% by varying the internal angles of $Y_2O_3$ sectors put on the top surface of GdBCO target. Compared with the $Gd_2O_3$-doped GdBCO films previously reported by our group [1], the $Y_2O_3$-doped GdBCO films exhibited less severe critical temperature ($T_c$) drop and thus slightly enhanced critical current densities ($J_c$) and pinning force densities ($F_p$) at 65 K for the applied field parallel to the c-axis of the GdBCO matrix (B//c) with increasing the doping content. Below 40 K, the in-field $J_c$ and $F_p$ values of all $Y_2O_3$-doped GdBCO films exhibited higher than those of undoped GdBCO film, suggesting that $Y_2O_3$ inclusions might act as effective pinning centers.

Effects of Glass Texturing Structure on the Module Efficiency of Heterojunction Silicon Solar Cells

  • Park, Hyeongsik;Lee, Yoo Jeong;Shin, Myunghun;Lee, Youn-Jung;Lee, Jaesung;Park, Changkyun;Yi, Junsin
    • Current Photovoltaic Research
    • /
    • 제6권4호
    • /
    • pp.102-108
    • /
    • 2018
  • A glass-texturing technique was developed for photovoltaic (PV) module cover glass; periodic honeycomb textures were formed by using a conventional lithography technique and diluted hydrogen fluoride etching solutions. The etching conditions were optimized for three different types of textured structures. In contrast to a flat glass substrate, the textured glasses were structured with etched average surface angles of $31-57^{\circ}$, and large aspect ratios of 0.17-0.47; by using a finite difference time-domain simulation, we show that these textured surfaces increase the amount of scattered light and reduce reflectance on the glass surface. In addition, the optical transmittance of the textured glass was markedly improved by up to 95% for wavelengths ranging from 400 to 1100 nm. Furthermore, applying the textured structures to the cover glass of the PV module with heterojunction with intrinsic thin-layer crystalline silicon solar cells resulted in improvements in the short-circuit current density and module efficiency from 39 to $40.2mA/cm^2$ and from 21.65% to 22.41%, respectively. Considering these results, the proposed method has the potential to further strengthen the industrial and technical competitiveness of crystalline silicon solar cells.

AgNWs/Ga-doped ZnO 복합전극 적용 CdSe양자점 기반 투명발광소자 (CdSe Quantum Dot based Transparent Light-emitting Device using Silver Nanowire/Ga-doped ZnO Composite Electrode)

  • 박재홍;김효준;강현우;김종수;정용석
    • 반도체디스플레이기술학회지
    • /
    • 제19권4호
    • /
    • pp.6-10
    • /
    • 2020
  • The silver nanowires (AgNWs) were synthesized by the conventional polyol process, which revealed 25 ㎛ and 30 nm of average length and diameter, respectively. The synthesized AgNWs were applied to the CdSe/CdZnS quantum dot (QD) based transparent light-emitting device (LED). The device using a randomly networked AgNWs electrode had some problems such as the high threshold voltage (for operating the device) due to the random pores from the networked AgNWs. As a method of improvement, a composite electrode was formed by overlaying the ZnO:Ga on the AgNWs network. The device used the composite electrode revealed a low threshold voltage (4.4 Vth) and high current density compared to the AgNWs only electrode device. The brightness and current density of the device using composite electrode were 55.57 cd/㎡ and 41.54 mA/㎠ at the operating voltage of 12.8 V, respectively, while the brightness and current density of the device using (single) AgNWs only were 1.71 cd/㎡ and 2.05 mA/㎠ at the same operating voltage. The transmittance of the device revealed 65 % in a range of visible light. Besides the reliability of the devices was confirmed that the device using the composite electrode revealed 2 times longer lifetime than that of the AgNWs only electrode device.

Nanoemulsion application in meat product and its functionality: review

  • Tri Ujilestari;Andi Febrisiantosa;Mohammad Miftakhus Sholikin;Rina Wahyuningsih;Teguh Wahyono
    • Journal of Animal Science and Technology
    • /
    • 제65권2호
    • /
    • pp.275-292
    • /
    • 2023
  • Nanotechnology in the food industry can increase the effectiveness of food ingredients. Nanotechnology can increase the bioavailability and absorption of bioactive compounds, enhance their stability, and improve the sensory quality of the product. Processed meat products are easily damaged due to bacterial activity. Advanced nanoemulsions as a meat preservative are nanoemulsions that can be used as preservative agents in meat products, particularly essential oil nanoemulsions, due to their antimicrobial and antioxidant properties. Its application is still limited to foods made from meat products. Therefore, this literature review examines nanoemulsion and its application in meat products and functionality improvement. Also, in the future, nanoemulsions in meat products must be made safe, and the government and businesses must work together to build consumer trust. It can be concluded that essential oil-based nanoemulsion has the potential to be used as an additive in meat products because it can kill bacteria, fight free radicals, improve flavor, and keep food fresh. Nanoemulsion is challenging in the meat industry because it can be toxic due to its tiny droplets (under 200 nm).

Antifungal Activity of Green and Chemically Synthesized ZnO Nanoparticles against Alternaria citri, the Causal Agent Citrus Black Rot

  • Hazem S. Elshafie;Ali Osman;Mahmoud M El-Saber;Ippolito Camele ;Entsar Abbas
    • The Plant Pathology Journal
    • /
    • 제39권3호
    • /
    • pp.265-274
    • /
    • 2023
  • Citrus black rot is a serious disease of citrus plants caused by Alternaria citri. The current study aimed to synthesize zinc oxide nanoparticles (ZnO-NPs) by chemically or green method and investigate their antifungal activity against A. citri. The sizes of synthesized as measured by transmission electron microscope of ZnO-NPs were 88 and 65 nm for chemical and green methods, respectively. The studied prepared ZnO-NPs were applied, in vitro and in situ, at different concentrations (500, 1,000, and 2,000 ㎍/ml) in post-harvest treatment on navel orange fruits to verify the possible control effect against A. citri. Results of in vitro assay demonstrated that, at concentration 2,000 ㎍/ml, the green ZnO-NPs was able to inhibit about 61% of the fungal growth followed by 52% of chemical ZnO-NPs. In addition, scanning electron microscopy of A. citri treated in vitro with green ZnO-NPs showed swelling and deformation of conidia. Results showed also that, using a chemically and green ZnO-NPs at 2,000 ㎍/ml in situ in post-harvest treatment of orange, artificially-infected with A. citri, has reduced the disease severity to 6.92% and 9.23%, respectively, compared to 23.84% of positive control (non-treated fruits) after 20 days of storage. The out findings of this study may contribute to the development of a natural, effective, and eco-friendly strategy for eradicating harmful phytopathogenic fungi.

Enhanced antibacterial activity of tilmicosin against Staphylococcus aureus small colony variants by chitosan oligosaccharide-sodium carboxymethyl cellulose composite nanogels

  • Luo, Wanhe;Liu, Jinhuan;Zhang, Shanling;Song, Wei;Algharib, Samah Attia;Chen, Wei
    • Journal of Veterinary Science
    • /
    • 제23권1호
    • /
    • pp.1.1-1.11
    • /
    • 2022
  • Background: The poor bioadhesion capacity of tilmicosin resulting in treatment failure for Staphylococcus aureus small colony variants (SASCVs) mastitis. Objectives: This study aimed to increase the bioadhesion capacity of tilmicosin for the SASCVs strain and improve the antibacterial effect of tilmicosin against cow mastitis caused by the SASCVs strain. Methods: Tilmicosin-loaded chitosan oligosaccharide (COS)-sodium carboxymethyl cellulose (CMC) composite nanogels were formulated by an electrostatic interaction between COS (positive charge) and CMC (negative charge) using sodium tripolyphosphate (TPP) (ionic crosslinkers). The formation mechanism, structural characteristics, bioadhesion, and antibacterial activity of tilmicosin composite nanogels were studied systematically. Results: The optimized formulation was comprised of 50 mg/mL (COS), 32 mg/mL (CMC), and 0.25 mg/mL (TPP). The size, encapsulation efficiency, loading capacity, polydispersity index, and zeta potential of the optimized tilmicosin composite nanogels were 357.4 ± 2.6 nm, 65.4 ± 0.4%, 21.9 ± 0.4%, 0.11 ± 0.01, and -37.1 ± 0.4 mV, respectively; the sedimentation rate was one. Scanning electron microscopy showed that tilmicosin might be incorporated in nano-sized crosslinked polymeric networks. Moreover, adhesive studies suggested that tilmicosin composite nanogels could enhance the bioadhesion capacity of tilmicosin for the SASCVs strain. The inhibition zone of native tilmicosin, tilmicosin standard, and tilmicosin composite nanogels were 2.13 ± 0.07, 3.35 ± 0.11, and 1.46 ± 0.04 cm, respectively. The minimum inhibitory concentration of native tilmicosin, tilmicosin standard, and tilmicosin composite nanogels against the SASCVs strain were 2, 1, and 1 ㎍/mL, respectively. The in vitro time-killing curves showed that the tilmicosin composite nanogels increased the antibacterial activity against the SASCVs strain. Conclusions: This study provides a potential strategy for developing tilmicosin composite nanogels to treat cow mastitis caused by the SASCVs strain.