• Safety and Health at Work
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• v.2 no.3
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• pp.210-217
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• 2011

Objectives: The purpose of this study was to measure the concentration of volatile organic compound (VOC)s originated from the chemicals used and/or derived from the original parental chemicals in the photolithography processes of semiconductor manufacturing factories. Methods: A total of four photolithography processes in 4 Fabs at three different semiconductor manufacturing factories in Korea were selected for this study. This study investigated the types of chemicals used and generated during the photolithography process of each Fab, and the concentration levels of VOCs for each Fab. Results: A variety of organic compounds such as ketone, alcohol, and acetate compounds as well as aromatic compounds were used as solvents and developing agents in the processes. Also, the generation of by-products, such as toluene and phenol, was identified through a thermal decomposition experiment performed on a photoresist. The VOC concentration levels in the processes were lower than 5% of the threshold limit value (TLV)s. However, the air contaminated with chemical substances generated during the processes was re-circulated through the ventilation system, thereby affecting the airborne VOC concentrations in the photolithography processes. Conclusion: Tens of organic compounds were being used in the photolithography processes, though the types of chemical used varied with the factory. Also, by-products, such as aromatic compounds, could be generated during photoresist patterning by exposure to light. Although the airborne VOC concentrations resulting from the processes were lower than 5% of the TLVs, employees still could be exposed directly or indirectly to various types of VOCs.

• Korean Journal of Materials Research
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• v.30 no.10
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• pp.509-514
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• 2020

The two key variables of an Si solar cell, i.e., emitter (n-type window layer) and base (p-type substrate) doping levels or concentrations, are studied using Medici, a 2-dimensional semiconductor device simulation tool. The substrate is p-type and 150 ㎛ thick, the pn junction is 2 ㎛ from the front surface, and the cell is lit on the front surface. The doping concentration ranges from 1 × 10¹⁰ cm^-3 to 1 × 10²⁰ cm^-3 for both emitter and base, resulting in a matrix of 11 by 11 or a total of 121 data points. With respect to increasing donor concentration (Nd) in the emitter, the open-circuit voltage (Voc) is little affected throughout, and the short-circuit current (Isc) is affected only at a very high levels of Nd, exceeding 1 × 10¹⁹ cm^-3, dropping abruptly by about 12%, i.e., from Isc = 6.05 × 10^-9 A·㎛^-1, at Nd = 1 × 10¹⁹ cm^-3 to Isc = 5.35 × 10^-9 A·㎛^-1 at Nd = 1 × 10²⁰ cm^-3, likely due to minority-carrier, or hole, recombination at the very high doping level. With respect to increasing acceptor concentration (Na) in the base, Isc is little affected throughout, but Voc increases steadily, i.e, from Voc = 0.29 V at Na = 1 × 10¹² cm^-3 to 0.69 V at Na = 1 × 10¹⁸ cm^-3. On average, with an order increase in Na, Voc increases by about 0.07 V, likely due to narrowing of the depletion layer and lowering of the carrier recombination at the pn junction. At the maximum output power (Pmax), a peak value of 3.25 × 10^-2 W·cm^-2 or 32.5 mW·cm^-2 is observed at the doping combination of Nd = 1 × 10¹⁹ cm^-3, a level at which Si is degenerate (being metal-like), and Na = 1 × 10¹⁷ cm^-3, and minimum values of near zero are observed at very low levels of Nd ≤ 1 × 10¹³ cm^-3. This wide variation in Pmax, even within a given kind of solar cell, indicates that selecting an optimal combination of donor and acceptor doping concentrations is likely most important in solar cell engineering.

• Journal of Biosystems Engineering
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• v.39 no.2
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• pp.76-86
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• 2014

Purpose: The objective of this study was to measure emissions of gases (ammonia ($NH_3$), hydrogen sulfide ($H_2S$) and carbon dioxide ($CO_2$)), volatile organic compounds (VOC) and odor from two shallow pit pig nursery rooms. Gas and odor reduction practices for swine operations based on the literature were also discussed. Methods: This study was conducted for 60 days at a commercial swine nursery facility which consisted of four identical rooms with mechanical ventilations. Two rooms (room 1 (R1) and room 2 (R2)) with different pig numbers and ventilation rates were used in this study. The pig manure from both the R1 and R2 were characterized. Indoor/outdoor temperatures, ventilation rates/duration, $NH_3$, $H_2S$, $CO_2$, and VOC concentrations of the ventilation air were measured periodically (3-5 times/week). Odor concentrations of the ventilations were measured two times on two days. Three different types of gas and odor reduction practices (diet control, chemical method, and biological method) were discussed in this study. Results: The volatile solids to total solids ratio (VS/TS) and crude protein (CP) value of pig manure indicated the pig manure had high potential for gas and odor emissions. The $NH_3$, $H_2S$, $CO_2$ and VOC concentrations were measured in the ranges of 1.0-13.3, 0.1-5.7, 1600-3000 and 0.0-1.83 ppm, respectively. The $NH_3$ concentrations were found significantly higher than $H_2S$ concentrations for both rooms. The odor concentrations were measured in the range of $2853-4432OU_E/m^3$. There was significant difference in odor concentrations between the two rooms which was due to difference in pig numbers and ventilation duration. The literature studies showed that simultaneous use of dietary control and biofiltration practices will be more effective and environmentally friendly for gas and odor reductions from pig barns. Conclusions: The gas and odor concentrations measured in the ventilation air from the pig rooms indicate an acute need for using gas and odor mitigation technologies. Adopting diet control and biofiltration practices simultaneously could be the best option for mitigating gas and odor emissions from pig barns.

• Membrane and Water Treatment
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• v.9 no.5
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• pp.293-300
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• 2018

The removal of volatile organic compounds (VOCs) from water using KOH-activated pine tree needle leaves biochar is considered a cost effective and efficient process. In this study, pine tree needle leaves were mixed with 0, 50, 100 and 200% (KOH weight/feedstock weight) of KOH, respectively. Then, the mixture was pyrolyzed at $500^{\circ}C$ for 6 hrs. The adsorption characteristics of 10 VOCs to the biochar were tested. The results indicated that the removal efficiency of the KOH activated biochar was highest in 100% KOH-biochar. The VOC removal efficiencies of 50% and 200% KOH activated biochar were similar and the 0% KOH activated biochar showed the lowest VOC removal. The FTIR results showed that increasing the amount of KOH seemed to enhance the formation of various functional groups, such as -OH, -C=C, -O. The adsorption strength of 10 VOCs to the KOH activated biochar seemed to be increasing by the increase of the solubility of VOCs. This may suggest that the adsorption is taking place in hydrophilic sites of the biochar surface. The KOH activated pine tree needle leaves biochar can be an effective sorbent for VOCs removal in water and 100% KOH mixing seemed to provide better sorption capacity.

• Journal of Sensor Science and Technology
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• v.21 no.6
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• pp.446-450
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• 2012

The important factors in sensors are sensitivity, selectivity, and response time. Oxide semiconductors are high sensitivity, fast response and the advantage of miniaturization. Zn-doped $SnO_2$ materials have been synthesized in order to improve the selectivity of the sensor. ZnO/$SnO_2$ crystals were prepared by a simple hydrothermal process and ultrasound pretreated hydrothermal process. ZnO/$SnO_2$ urchins were fabricated in the precursor solution with [$Zn^{2+}$]:[$Sn^{4+}$] ratio of 1:5 and rod structures were fabricated ratio of 1:1 and 1:3. Surface area ratio was increased by increasing the ratio of [$Sn^{4+}$]. The sensitivity of sensors were highest at the [$Zn^{2+}$]:[$Sn^{4+}$] ratio of 1:5 in ethanol, acetaldehyde, toluene, and nitric oxide.

• Asian Journal of Atmospheric Environment
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• v.5 no.2
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• pp.113-120
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• 2011

Adsorbent combination studies have been carried out to remove nitrogen dioxide ($NO_2$) and volatile organic compounds (VOCs: BTEX) out of a subway environment characterized by high flow and low concentration. Optimal conditions for the high removal efficiency of the concerned target compounds were obtained through testing a series of control factors such as adsorbent sorts, thicknesses, and superficial velocity. It was found that the efficiencies increased as the specific surface area of activated carbon and its thickness increased, and external void fraction decreased. Furthermore, mixed activated carbon with granular and constructed contents was extensively tested to reduce pressure drop through the carbon bed. It was found that the performance of higher contents of granular activated carbon was better than that of higher contents of the constructed carbon. When the mixed carbon was applied to the subway ventilation system in order to eliminate $NO_2$ and VOC simultaneously, the removal efficiencies were found to be 75% and 85%, respectively.

• Journal of Korean Society for Atmospheric Environment
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• v.19 no.5
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• pp.491-502
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• 2003

In the present work, the distribution characteristics of ambient volatile organic compounds (VOCs) were investigated at high temporal resolution from a monitoring station located in a mid-eastern area of Seoul. A total number of 587 samples were collected during December 2002 to January 2003. The measurements of VOC were conducted by a combination of on-line air sampling and thermal desorption unit (TDU) coupled with capillary GC/FID analysis. A total of five aromatic compounds (BTEX: benzene, toluene, ethylbenzene, m, p-xylene, and o-xylene) were measured routinely at hourly intervals during the whole study period. The mean concentrations of BTEX measured in our study period were found in the order: toluene (8.99 $\pm$5.38 ppb) > benzene (0.92$\pm$0.52 ppb) > m, p-xylene (0.51$\pm$0.34 ppb) > 0- xylene (0.48$\pm$0.35 ppb) > ethyl benzene (0.43$\pm$ 0.32 ppb). The BTEX concentrations were generally higher during the daytime than the nighttime, exhibiting certain patterns on a weekly basis. Results of our analysis indicate that the unusually high concentrations of toluene, while showing good correlations with other VOCs, can be a good indicator of air pollution in the study area.

• Journal of Korean Society for Atmospheric Environment
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• v.27 no.5
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• pp.504-522
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• 2011

Simulations of CMAQ with the High-order Decoupled Direct Method (HDDM) for a 2010 June episode are applied to estimate the influence of local and neighborhood emissions on ozone concentrations in the Kwang-Yang Bay (KYB) area. In order to examine ozone response to reductions in $NO_x$ and VOC emissions from KYB and Gyeongsang, ozone isopleths are generated with the first and second-order sensitivity coefficients from HDDM simulations at three sites; Taein, Samil, and Gwangmoo. Simulations show that reduction in KYB $NO_x$ may increase ozone over the sites. On the contrary, $NO_x$ reduction from Gyeongsang may decrease ozone at the sites when transport of ozone and its precursors from upwind Gyeongsang is potentially high. However, VOC reductions from KYB and Gyeongsang are favorable to lower ozone over KYB. The study implies that emission reductions for both local and neighboring areas are likely more effective to bring KYB to ozone attainment.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.1 no.2
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• pp.33-40
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• 2000

The present invention relates to a absorption rotor for removed VOC(volatile organic compound) and humidity in semiconductor clean room system. A absorption rotor medium is made by NaX zeolite and TS-1 zeolite formed on a honeycomb matrix of ceramic papers. The crystallization of NaX zeolite was hydrothermal reaction, and NaX zeolite crystals of a uniform particle size of 5$\mu$m were synthesized that NaX zeolite seed crystals (2~3$\mu$m) added in a batch composition at levels of 3~15 wt$\%$. The seeding resulted in an increase in the fraction of large crystals compared with unseeded batches and successfully led to a uniform NaX zeolite crystal. The microporous zeolite-type titanosilicate(TS-1) was synthesized by different of the reactant solution pH. The pH range of reactant solution has been changed from 10.0 to 11.5 TS-1 zeolite (ETS-10), having a large pore(8~10 $\AA$), was synthesized at 10.4 of pH, since TS-1 zeolite (ETS-4), having a small pore(3~5$\AA$), was synthesized at 11.5 of pH.

• Applied Chemistry for Engineering
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• v.29 no.3
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• pp.356-361
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• 2018

It is common to analyze volatile organic compound (VOC) or semi-VOC (SVOC) in a sample composed of a complex matrix consisting of multiple components such as bloods through a separation process. Adsorption is a physical phenomenon in which certain components accumulate on the surface of other phases. In order to overcome difficulties in the pretreatment process, an adsorption is frequently used. Solid phase microextraction (SPME) equipment with porous carbon carboxen (CAR) is an example of adsorption application. In this study, the adsorption of 4-octylphenol to carboxen was examined. To do so, the extraction efficiency for such solvents as dichloromethane ($CH_2Cl_2$, DCM), ethylacetate ($CH_3COOC_2H_5$, EA) and diethylether ($C_2H_5OC_2H_5$, $Et_2O$) was studied and also the derivatization reaction for 4-octylphenol with reagents of bistrimethylsilyltrifluoroacetamide (BSTFA), methylchloroformate (MCF) and pentafluorobenzylbromide (PFBBr) was compared. The combination of DCM and BSTFA showed good performance thus they were adopted for this study. Thermodynamic adsorption experiments showed that the adsorption process was endothermic and Freundlich isotherm equation was more suitable than Langmuir isotherm. It was also found that the adsorption followed a pseudo-$2^{nd}$ order kinetic model.