• Proceedings of the Korean Vacuum Society Conference
• /
• 2010.02a
• /
• pp.437-437
• /
• 2010

DC Hollow cathode 방전은 약 100여 년 전, Paschen에 의해 실험된 이후로 광원, 스퍼터링 공정, 이온빔 소스 등 다양한 분야에 이용되어 왔다. 최근 태양전지용 마이크로 결정질 실리콘 증착 시, RF CCP의 전극에 복수의 홀 혹은 트렌치 구조를 두어 Hollow cathode 방전 효과를 이용하여 향상된 공정 속도로 공정을 진행한다. 그러나 RF-MHCD (Multi hole cathode discharge) 공정을 위한 최적 규격의 홀 기에 관한 연구는 그 중요성과 응용성에도 불구하고 깊게 이루어지지 못한 바 있다. 그러므로 저자는 Capacitively Coupled Plasma (전극 간격 : 4cm, 전극 직경 : 14cm) 장비에서 평면 전극과 10mm 깊이와 각각 3.5mm, 5mm, 7mm, 10mm 직경의 홀이 있는 4개의 전극을 이용하여 Argon RF-MHCD 방전을 관찰하여 조건 별 최적의 홀 전극 디자인을 도출하였다. 실험 조건은 64.5mTorr ~ 645mTorr압력 범위/ 1A~9A이며, 플라즈마는 전극 사이 중앙에 설치한 RF-compensated Langmuir Probe와, 전극과 전기적으로 접촉하는 1000:1 Probe 와 Voltage-Current Probe를 이용하여 측정되었다. 실험 결과 압력 조건 별로, 최적의 전자 밀도를 유도하는 전극 상 홀의 직경이 달라짐을 확인하였다.

• Journal of the Korean Geotechnical Society
• /
• v.21 no.5
• /
• pp.133-142
• /
• 2005

The research concentrates on improving the in-hole seismic probe, which has been developed in past five years, to be used in stiffness measurements of tunnel-face materials. The size of probe was reduced to be fit in 45-mm diameter holes (or BX) drilled by a jumbo-drill, which is used to drill holes to install explosives for tunneling. Also trigger system was improved by using a down-speeding motor for operating convenience and air packing system was replaced with a set of plate-springs to eliminate supply of compressed air. These modifications are to adjust the probe for the unfavourable environment inside of tunnels and to test without any further drilling cost. The probe and testing procedure were successfully adopted with horizontal holes drilled by a jumbo-drill at a tunnel-face to evaluate the stiffness of rock mass. The measured shear wave velocities can be used to estimate deformation properties of rock mass for tunnel analyses.

• Journal of Biomedical Engineering Research
• /
• v.20 no.1
• /
• pp.107-113
• /
• 1999

The purpose of this study was to develop a miniature imaging gamma probe with high performance that can detect small or residual tumors after surgery. Gamma probe detector system consists of NaI(Tl) scintillator, position sensitive photomultiplier tube (PSPMT), and collimator. PSPMT was optically coupled with 6.5 mm thick, 7.62 cm diameter of NaI(Tl) crystal and supplied with -1000V for high voltage. Parallel hexagonal hole collimator was manufactured for characteristics of 40-mm hole length, 1.3-mm hole diameter, and 0.22 mm septal thickness. Electronics consist of position and trigger signal readout systems. Position signals were obtained with summing, subtracting, and dividing circuit using preamplifer and amplifier. Trigger signals were obtained using summing amplifier, constant fraction discriminator, and gate and delay generator module with preamplifer. Data acquisition and processing were performed by Gamma-PF interface board inserted into pentium PC and PIP software. For imaging studies, flood and slit mask images were acquired using a point source. Two hole phantom images were also acquired with collimator. Intrinsic and system spatial resolutions were measured as 3.97 mm and 5.97 mm, respectively. In conclusion, Miniature gamma probe images based on the PSPMT showed good image quality, we conclude that the miniature imaging gamma probe was successfully developed and good image data were obtained. However, further studies will be required to optimize imaging characteristics.

• Journal of Mechanical Science and Technology
• /
• v.17 no.6
• /
• pp.914-924
• /
• 2003

The interaction and breakdown of vortices over the Leading Edge Extension (LEX) - Delta wing configuration has been investigated through wing-surface pressure measurements, the off-surface flow visualization, and 5-hole probe measurements of the wing wake section. The description focused on analyzing the interaction and the breakdown of vortices depending on the angle of attack and the sideslip angle. The Effect of angle of attack and sideslip angle on the aerodynamic load characteristics of the model is also presented. The sideslip angle was found to be a very influential parameter of the vortex flow over the LEX-delta wing configuration. The introduction of LEX vortex stabilized the vortex flow, and delayed the vortex breakdown up to a higher angle of attack. The vortex interaction and breakdown was promoted on the windward side, whereas it was suppressed on the leeward side.

• Journal of Advanced Marine Engineering and Technology
• /
• v.26 no.3
• /
• pp.353-361
• /
• 2002

The tip leakage flow passing through the clearance between rotor blade tip and casing shroud has been known to occupy an important portion of the rotor overall loss. In this study, flow characteristics in axial flow rotors with different tip clearances is investigated by experimental and numerical methods. The experimental study was carried out to measure static pressure and velocity profiles at the real rotating test rig. The axial flow rotors used for the experiments have ten blades and three different rotor diameter. The tip clearance heights are 1mm, 3mm, and 4.5mm. Measurements were done using spherical type five-hole probe by non-nulling method. The numerical study was carried out to calculate pressure distributions and velocity vectors at the same condition as the experiments in the flow fields of axial flow rotors using Phoenics code.

• Journal of the korean Society of Automotive Engineers
• /
• v.10 no.3
• /
• pp.51-59
• /
• 1988

The wake structure behind a van type vehicle was studied experimentally with a 5-hole yawhead probe. Through an effective calibration method of the 5-hole yawhead probe, the flow properties such as velocity vector, total pressure and static pressure were obtained on two cross sections within the wake. These results combined with the surface flow visualization performed in the previous study, yielded some information about the wake structure. When the model was placed in a stream with zero yaw angle, two counter rotating vortices were observed behind the model which pull down the surface flow on each side of the model. With increasing the yaw angle, the surface flow on the windward side changed to divide the flow in two directions, one flows upward on the upper part and the other flows downward on the lower part of the windward side. Hence a new weak vortex was created on the upper windward side, which resulted 3 vortices within the wake. The size and the strength of the vortices increased with yaw angle.

• Journal of the Korean institute of surface engineering
• /
• v.45 no.5
• /
• pp.181-187
• /
• 2012

The Friction Stir Welding (FSW) has mainly been used for making butt joints in Al alloys. The development of Friction Stir Lap Welding (FSLW) would expand the number of applications. In this study, microstructures and mechanical properties of FSLW in A5052 alloy were investigated under varying rotating speed and probe length. Investigating the characteristics as FSLWed conditions were as below ; Failure Maximum load by shear fracture was increased proportional to the width of joint area, which was increased by input heat, stirring intensity in the case of 2.3 mm probe length. Tensile fracture occurred, and maximum load was determined due to side worm hole of joint area and softening of microstructure in the case of 3.0 mm probe length. In the case of 3.7 mm probe length, material hook and bottom worm hole were appeared at the end interface of joint area. The most sound FSLW condition with no defects was 3.0 mm probe length and 1500 rpm-100 mm/min. No defects were showed in 1500 rpm-100 mm/min and 1800 rpm-100 mm/min, but Vickers microhardness distribution in TMAZ/HAZ which was fracture zone was lower in 1800 rpm-100 mm/min than in 1500 rpm-100 mm/min. In this condition highest tensile strength, 215 MPa (allowable rate 78% of joint efficient) was obtained.

• International Journal of Aeronautical and Space Sciences
• /
• v.4 no.1
• /
• pp.63-74
• /
• 2003

The vortical flow of a 65-deg flat plate delta wing with a leading edge extension(LEX) was examined through off-surface visualization, 5-hole probe and hot-film measurements. The off-surface flow visualization technique used micro water droplets generated by a home-style ultrasonic humidifier and a laser beam sheet. The angles of attack ranged from 10 to 30 degrees, and the sideslip angles ranged from 0 to -15 degrees. The Reynolds number was $1.82{\times}10^5$ for the flow visualization, and $1.76{\times}10^6$ for the 5-hole probe and hot-film measurements. The comparison of the visualization photos and the flow field measurement showed that the two results were in a good agreement for the relative position and the structure of the wing and LEX vortices, even though the flow Reynolds numbers of the two results were much different. The wing vortex and the LEX vortex coil each other while maintaining a comparable strength and identity at zero sideslip. Neither a looping of the wing vortex around the strake vortex, nor the lopsided coiling of the stronger strake and the weaker wing vortices was observed. At non-zero sideslip, the downward movement of the LEX vortex when going downstream was enhanced on the windward side, and the downward and inboard movement of the LEX vortex when going downstream was suppressed on the leeward side. The counterclockwise coiling of the wing and LEX vortices was decreased significantly on the leeward side.

• Journal of Mechanical Science and Technology
• /
• v.19 no.8
• /
• pp.1632-1648
• /
• 2005

The effects of Reynolds number on the non-nulling calibration of a typical cone-type five-hole probe have been investigated for the representative Reynolds numbers in turbomachinery. The pitch and yaw angles are changed from - 35 degrees to 35 degrees with an angle interval of 5 degrees at six probe Reynolds numbers in range between $6.60{\times}10^3\;and\;3.17{\times}10^4$. The result shows that not only each calibration coefficient itself but also its Reynolds number dependency is affected significantly by the pitch and yaw angles. The Reynolds-number effects on the pitch- and yaw-angle coefficients are noticeable when the absolute values of the pitch and yaw angles are smaller than 20 degrees. The static-pressure coefficient is sensitive to the Reynolds number nearly all over the pitch- and yaw-angle range. The Reynolds-number effect on the total-pressure coefficient is found remarkable when the absolute values of the pitch and yaw angles are larger than 20 degrees. Through a typical non-nulling reduction procedure, actual reduced values of the pitch and yaw angles, static and total pressures, and velocity magnitude at each Reynolds number are obtained by employing the calibration coefficients at the highest Reynolds number ($Re=3.17{\times}10^4$) as input reference calibration data. As a result, it is found that each reduced value has its own unique trend depending on the pitch and yaw angles. Its general tendency is related closely to the variation of the corresponding calibration coefficient with the Reynolds number. Among the reduced values, the reduced total pressure suffers the most considerable deviation from the measured one and its dependency upon the pitch and yaw angles is most noticeable. In this study, the root-mean-square data as well as the upper and lower bounds of the reduced values are reported as a function of the Reynolds number. These data would be very useful in the estimation of the Reynolds-number effects on the non-nulling calibration.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.22 no.9
• /
• pp.1255-1266
• /
• 1998

Effects of a length-to-diameter ratio, L/D, on the three-dimensional flow and aerodynamic loss within an injection hole, which is normally oriented to the mainflow, have been investigated by using a straight five-hole probe. The length-to-diameter ratio of the injection hole is varied to be 0.5 and 2.0 for blowing ratios of 0.5, 1.0 and 2.0. Regardless of the blowing ratio, flows within the hole and at the jet exit are strongly affected by the length-to-diameter ratio. In the case of L/D=0.5, the inside flow is considerably influenced by the mainflow, and the exit flow variation is found to be the greatest. The aerodynamic loss in this case is usually attributed to jet -mainflow interactions. In the case of L/D=2.0, the flow separation and reattachment in the inlet region are completely separated from the complicated exit flow, and the aerodynamic-loss production is mainly due to the inlet flow separation.