• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.267-267
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• 2012

최근 국내 반도체 장비 업체들에 의해서 차세대 반도체용 450 mm 웨이퍼 공정용 장비 개발이 진행 중에 있다. 반도체 산업은 계속해서 반도체 칩의 크기를 작게 하고, 웨이퍼 크기를 늘리면서 웨이퍼 당 칩수를 증가시켜 생산성을 향상해오고 있다. 현재 300 mm 웨이퍼에서 450 mm 웨이퍼를 도입하게 되면, 생산성 뿐만 아니라 30%의 비용절감과 50%의 cycle-time 단축이 기대되고 있다. 장비에 대한 이해와 공정에 대한 해석 능력을 위해 비용과 시간이 많이 들기 때문에 최근 컴퓨터를 활용한 수치 모델링이 진행되고 있다. 또한, 수치 모델링은 실험 결과와의 비교가 필수적이다. 본 연구에서는 450 mm 웨이퍼 공정용 장비의 전자밀도를 cut off probe를 통해 100 mTorr에 서 Ar 플라즈마를 파워에 따라 측정했다. 13.56 MHz 200 W, 500 W, 1,000 W로 입력 파워가 증가하면서 웨이퍼 중심에서 $6.0{\times}10^9#/cm^3$, $1.35{\times}10^{10}#/cm^3$, $2.4{\times}10^{10}#/cm^3$로 증가했다. 450 mm 웨이퍼 영역에서 전자 밀도의 불균일도는 각각 10.31%, 3.24%, 4.81% 였다. 또한, 이 450 mm 웨이퍼용 CCP 장비를 축대칭 2차원으로 형상화하고, 전극에 13.56 MHz를 직렬로 연결된 blocking capacitor ($1{\times}10^{-6}$ F/$m^2$)를 통해 인가할 수 있도록 상용 유체 모델 소프트웨어(CFD-ACE+, EXI corp)를 이용하여 계산하였다. 주요 전자-중성 충돌 반응으로 momentum transfer, ionization, excitation, two-step ionization을 고려했고, $Ar^+$와 $Ar^*$의 표면 재결합 반응은 sticking coefficient를 1로 가정했다. CFD-ACE+의 CCP 모델을 통해 Poisson 방정식을 풀어서 sheath와 wave effect를 고려하였다. Stochastic heating을 고려하지 않았을 때, 플라즈마 흡수 파워가 80 W, 160 W, 240 W에서 실험 투입 전력 200 W, 500 W, 1,000 W일 때와 유사한 반경 방향의 플라즈마 밀도 분포를 보였다. 200 W, 500 W, 1,000 W일 때의 전자밀도 분포는 수치 모델링과 전 범위에서 각각 10%, 3%, 2%의 오차를 보였다. 450 mm의 전극에 13.56 MHz의 전력을 인가할 때, 파워가 증가할수록 전자밀도의 최대값의 위치가 웨이퍼 edge에서 중심으로 이동하고 있음을 실험과 모델링을 통해 확인할 수 있었다.

• Korean Chemical Engineering Research
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• v.61 no.4
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• pp.591-597
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• 2023

Pakistan depends heavily on imports for its fuel requirements. In this experiment, catalytic pyrolysis of a blend of feedstock's consisting of date seed, wheat straw, and corn cob was conducted in a fixed bed reactor to produce oil that can be used as an alternative fuel. The main focus was to emphasize the outcome of important variables on the produced oil. The effects of operating conditions on the yield of bio-oil were studied by changing temperature (350-500 ℃), heating rate (10, 15, 20 ℃/min), and particle size (1, 2, 3 mm). Moreover, ZnO was used as a catalyst in the process. First, the thermal degradation of the feedstock was investigated by TGA and DTG analysis at 10 ℃/min of different particle sizes of 1, 2, and 3mm from a temperature range of 0 to 1000 ℃. The optimum temperature was found to be 450 ℃ for maximum degradation, and the oil yield was indicated to be around 37%. It was deduced from the experiment that the maximum production of bio-oil was 32.21% at a temperature of 450 ℃, a particle size of 1mm, and a heating rate of 15 ℃/min. When using the catalyst under the same operating conditions, the bio-oil production increased to 41.05%. The heating value of the produced oil was 22 MJ/kg compared to low-quality biodiesel oil, which could be used as a fuel.

• Korean Chemical Engineering Research
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• v.51 no.3
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• pp.407-410
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• 2013

The chlorination of a metallurgical-grade silicon was carried out in a fluidized bed reactor, 25 mm in diameter. The flow rate of the chlorine admitted into the reactor was 0.2 L/min and that of the carrier nitrogen was 0.8~1.0 L/min. The reactor temperature was maintained at $450^{\circ}C$ and the temperature of the coolant at the $SiCl_4$ condenser was at $-5^{\circ}C$. The $SiCl_4$ yield increased with increasing the mole fraction of chlorine in the feed gas, exhibiting 28% at the mole fraction of 0.2. Further increase of the chlorine mole fraction was not attempted in a worry that the reactor might be failed due to the high exothermicity of the reaction. The production of $SiCl_4$ from silicon by fluidized bed chlorination was demonstrated on a laboratory scale, which is a stepping stone for future studies under more severe conditions toward industrial application.

• Nuclear Engineering and Technology
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• v.54 no.5
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• pp.1560-1569
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• 2022

Liquid fueled molten salt reactors (MSRs) have seen renewed interest because of their inherent safety features, higher thermal efficiency and potential for efficient thorium utilisation for power generation. Thorium fluoride is one of the salts used in liquid fueled MSRs employing Th-U cycle. In the present study, ThF₄ was prepared by hydro-fluorination of ThO₂ using anhydrous HF gas. Process parameters viz. bed depth, hydrofluorination time and hydrofluorination temperature, were optimized for the preparation of ThF₄ in a static bed reactor setup. The products were characterized with X-Ray diffraction and experimental conditions for complete conversion to ThF₄ were established which also corroborated with the yield values. Hydrofluorination of ThO₂ at 450 ℃ for half an hour at a bed depth of 6 mm gave the best result, with a yield of about 99.36% ThF₄. No unconverted oxide or any other impurity was observed. Rietveld refinement was performed on the XRD data of this ThF₄, and Chi2 value of 3.54 indicated good agreement between observed and calculated profiles.

• Clean Technology
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• v.29 no.3
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• pp.200-216
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• 2023

Ginkgo leaves are considered waste biomass and can cause problems due to the strong insecticidal actions of ginkgolide A, B, C, and J and bilobalide. However, Ginkgo leaf biomass has high organic matter content that can be converted into fuels and chemicals if suitable technologies can be developed. In this study, the effect of pyrolysis temperature, minimum fluidized velocity, and Ginkgo leaf size on product yields and product properties were systematically analyzed. Fast pyrolysis was conducted in a bubbling fluidized bed reactor at 400 to 550℃ using silica sand as a bed material. The yield of pyrolysis liquids ranged from 33.66 to 40.01 wt%. The CO₂ and CO contents were relatively high compared to light hydrocarbon gases because of decarboxylation and decarbonylation during pyrolysis. The CO content increased with the pyrolysis temperature while the CO₂ content decreased. When the experiment was conducted at 450℃ with a 3.0×U_mf fluidized velocity and a 0.43 to 0.71 mm particle size, the yield was 40.01 wt% and there was a heating value of 30.17 MJ/kg, respectively. The production of various phenol compounds and benzene derivatives in the bio-oil, which contains the high value products, was identified using GC-MS. This study demonstrated that fast pyrolysis is very robust and can be used for converting Ginkgo leaves into fuels and thus has the potential of becoming a method for waste recycling.

• Journal of the Korea Organic Resources Recycling Association
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• v.24 no.4
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• pp.95-103
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• 2016

The objective of this study was to investigate feasibility of semi-dry anaerobic digestion using dairy cattle manure and to evaluate solidified fuel value of semi-dry anaerobic digestate. To evaluate semi-dry anaerobic digestion using dairy cattle manure, 950 mL bottle type anaerobic reactor was set in the constant temperature room maintained at $35^{\circ}C$. To produce anaerobic digestate for making solidified fuel, acrylic cylindrical anaerobic digester(1,000 mm width ${\times}$ 450 mm height) was set in the constant room temperature to carry out batch test of semi-dry anaerobic digestion using same dairy cattle manure. Moisture content of dairy cattle manure and inoculum solution for anaerobic digestion were 80.64% and 96.83%, respectively. The dairy cattle manure and the inoculum solution was mixed by 1:1 ratio(v/v) for anaerobic digestion. Water content and VS/TS(Volatile Solids/Total Solids) of mixture of substrate and inoculum were 89.74% and 83.35%, respectively. In case of non-inoculated anaerobic digester, the biogas was not produced. By the semi-dry anaerobic digestion, the calorific value of the digestate was reduced by 20% compare to fresh dairy cattle manure. In other hand, ash content increased from 15% to 18.4%. The contents of Cr, Pb, Cd and S of pellet produced from anaerobically digested dairy cattle manure were not against the standard regulation for livestock manure solidified fuel. Therefore, it can be used as fuel that anaerobic digestate produced after semi-dry anaerobic digestion using dairy cattle manure.

• Journal of Korean Society of Environmental Engineers
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• v.22 no.2
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• pp.331-340
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• 2000

The existing two-phase biological fluidized bed has some problems such as limit of oxygen transfer and blockade of fluidized distributor. In this study, three-phase swirl flow biological fluidized bed has designed to solve the problems and to investigate its running characteristics. TOC of influent synthetic wastewater was approximately $70mg/{\ell}$. HRT of reactor was 1.6 hours. Mean particle size of sand, as packing media, was 0.397mm and packing volume was varied from $200m{\ell}/{\ell}$ to $600m{\ell}/{\ell}$ by stages in the bed. The amount of biomass and effluent water quality was throughly investigated in the bed. Showing experiment results from the above conditions, it was possible to solve the problems of existing fluidized bed and to keep DO of $3mg/{\ell}$ or more. And it was also TOC removal rate of 91 to 94 %, MLVSS of 2,360 to $3,860mg/{\ell}$, MLVSS per g-media of 8.4 to 17.3 mg/g, F/M ratio of 0.59 to $1.04kg-TOC/kg-MLVSS{\cdot}day$, biofilm thickness of $35{\sim}71{\mu}m$ and sludge productivity of 1.03 to $2.35kg-SS/m^3{\cdot}day$. Optimal conditions in this experimental were as follows.; those were biofilm thickness of approximately $54{\mu}m$. MLVSS per g-media of 13 mg and media packing volume of 350 to $400m{\ell}/{\ell}$ when F/M ratio was low, treatment efficiency was high and sludge productivity was low. Showing the media with optics microscope in this optimal condition, attached microbes such as Epistylis sp. were observed. From SEM photographs, it showed that Coccus adhere to and grow on the media surface.