• Journal of Sensor Science and Technology
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• v.24 no.1
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• pp.10-14
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• 2015

This paper reports the results of a study on the optimization of the etching profile, which is an important factor in deep-reactive-ion etching (DRIE), i.e., dry etching. Dry etching is the key processing step necessary for the development of the Internet of Things (IoT) and various microelectromechanical sensors (MEMS). Large-area etching (open area > 20%) under a high-frequency (HF) condition with nonoptimized processing parameters results in damage to the etched sidewall. Therefore, in this study, optimization was performed under a low-frequency (LF) condition. The HF method, which is typically used for through-silicon via (TSV) technology, applies a high etch rate and cannot be easily adapted to processes sensitive to sidewall damage. The optimal etching profile was determined by controlling various parameters for the DRIE of a large Si wafer area (open area > 20%). The optimal processing condition was derived after establishing the correlations of etch rate, uniformity, and sidewall damage on a 6-in Si wafer to the parameters of coil power, run pressure, platen power for passivation etching, and $SF_6$ gas flow rate. The processing-parameter-dependent results of the experiments performed for optimization of the etching profile in terms of etch rate, uniformity, and sidewall damage in the case of large Si area etching can be summarized as follows. When LF is applied, the platen power, coil power, and $SF_6$ should be low, whereas the run pressure has little effect on the etching performance. Under the optimal LF condition of 380 Hz, the platen power, coil power, and $SF_6$ were set at 115W, 3500W, and 700 sccm, respectively. In addition, the aforementioned standard recipe was applied as follows: run pressure of 4 Pa, $C_4F_8$ content of 400 sccm, and a gas exchange interval of $SF_6/C_4F_8=2s/3s$.

• Journal of Chest Surgery
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• v.25 no.10
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• pp.1041-1047
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• 1992

The consecutive 35 patients underwent isolated aortic valve replacement with the low-profile model of the Ionescu-Shiley pericardial xenograft valve from 1984 to 1991. Operative mortality was 2.9%, and early survivors were followed up for a total 136.1 patient-years[Mean$\pm$SD, 4.00$\pm$2.14 years]. The linearized late mortality was 2.204% /pt-yr. Three patients required rereplacement of the valve with overall valve failure rate of 2.204% /pt-yr: two for endocarditis and one for paravalvular leak. There was no case of primary tissue failure. The linearized annual rates of complication were: thromboembolism 0.735% /pt-yr, bleeding 0.735%pt-yr, and endocarditis 2.204% /pt-yr. The actuarial survival at 8 years of follow-up was 90.4$\pm$5.3%, and the probabilities of freedom from thromboembolism and from rereplacement were 95.6$\pm$4.4% and 88.2$\pm$6.7% at 8 years respectively. Although the low profile Ionescu-Shiley pericardial valve provided favorable clinical performance comparable with the standard model up to 8 years, it needs prolonged follow-up to assess the pattern of its durability.

• Restorative Dentistry and Endodontics
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• v.35 no.2
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• pp.88-95
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• 2010

The purpose of this study was to compare the root canal shaping ability of 4 rotary NiTi instruments in simulated root canals. For the preparation of thirty two curved root canals, Mtwo instruments using "single length"technique, and Profile, ProTaper Universal, and K3 using crown-down technique (N = 8) were used. All canal samples were prepared by reaching an apical canal size of #30. Pre- and post-instrumentation digital images were recorded and an assessment of canal shape was determined using a computer image analysis program SigmaScan Pro (Systat Software Inc., San Jose, CA, USA). The changes of the dimension of inner walls of canals, (2) the changes of the dimension of outer walls of canals, and (3) the centering ratio were measured at 7 measuring points, and then data were statistically analyzed using one-way ANOVA and Duncan's test. The results were as below; 1. The root canal shaping ability of Profile was significantly faster than that of other rotary NiTi instruments (p < 0.05). 2. The deformation and fracture of all instruments used for this study were not experienced. 3. In the degree of changes of the dimension of inner walls of canals, Profile demonstrated the lowest changes of the dimension of inner walls of canals except at the measuring points of the 1 and 2 mm (p < 0.05). However, the ProTaper Universal showed the highest changes of the dimension of inner walls of canals at all measuring points (p < 0.05). 4. In the degree of changes of the dimension of outer walls of canals, Mtwo demonstrated the lowest changse of the dimension of outer walls of canals except at the measuring point of the 1 mm (p < 0.05). However, Profile exhibited the highest changes of the dimension of outer walls of canals at the measuring points of 3 and 4 mm and ProTaper Universal and K3 showed the largest changes of the dimension of outer walls of canals at the measuring points of 1, 2, 6, and 7 mm (p < 0.05). 5. In degree of centering ratio, Profile demonstrated the least centering ratio comparing with the centering ratio shown by other NiTi instruments at the measuring points of 1, 4, 5, and 6 mm. Results suggest that in the coronal part of canal preparation, active cutting files such as ProTaper Universal may efficiently flare the canal orifice and form a better taper, and in the apical part of the canal, files which have a better centering ability such as Profile may maintain the original canal curvature and reduce the shaping time.

• JSTS:Journal of Semiconductor Technology and Science
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• v.13 no.4
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• pp.282-290
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• 2013

This paper describes a spread spectrum clock generator (SSCG) circuit for DisplayPort 1.2 standard. A Hershey-Kiss modulation profile is generated by dual sigma-delta modulators. The structure generates various modulation slopes to shape a non-linear modulation profile. The proposed SSCG for DisplayPort 1.2 generates clock signals with 5000 ppm down spreading with a Hershey-Kiss modulation profile at three different clock frequencies, 540 MHz, 270 MHz and 162 MHz. The measured peak power reduction is about 15.6 dB at 540 MHz with the chip fabricated using a $0.13{\mu}m$ CMOS technology.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.296-296
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• 2012

LCD panel 검사를 위한 Probe unit은 대형 TV 및 모바일용 스마트폰을 중심으로 각광을 받고 있는 소모성 부품으로 최근 pitch의 미세패턴화가 급속히 진행되고 있다. 본 연구에서는 Slit Wafer 제작 공정을 최적화하기 위해 25 um pitch의 마스크를 설계, 제작하였다. 단공과 장공을 staggered 형태로 배열하여 25 um/25 um line/space pitch로 설계하였다. 또한 단위실험을 위해 직접 25 um pitch로 설계하여, 동일한 실험조건을 적용하여 최적 조건을 찾고자 하였다. 반응변수는 Etch rate 및 profile angle로 결정하였으며, 약 200~400 um 에칭된 slit의 상단과 하단의 폭, 그리고 식각깊이를 SEM 측정사진을 통해 정한 후 etch rate 및 profile angle을 결정하였다. 인자는 식각속도 및 wall의 각도를 결정하는 식각 및 passivation 가스의 유량, chamber 압력(etching/passivation), 식각시간 등으로 정하였으며, 이들의 최대값과 최소값 2 수준으로 실험계획을 설계하였다. 식각 조건에 따라 8회의 실험을 수행하였다. 가스의 유량은 SF6 400 sccm, C4F8 400 sccm, 식각 싸이클 시간은 5.2~10.4 sec, passivation 싸이클시간 4 sec로 하였으며, 압력은 식각시 7.5 Pa, passivation 시 10 Pa로 할 경우가 가장 sharp하게 나타났다. Coil power 와 platen power는 각각 2.6 KW, 0.14 KW로 하였으며, 최적화를 위한 인자의 값들은 이 범위에서 조절하였다. 이러한 인자의 조건 조절을 통해 etch rate는 5.6 um/min~6.4 um/min, $88.9{\sim}89.1^{\circ}$의 profile angle을 얻을 수 있었다.

• The Journal of the Korean dental association
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• v.23 no.6 s.193
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• pp.527-538
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• 1985

The purpose of this study is to evaluate the chronologic changes of the soft tissue profile in 6 to 11 years children. The author analyzed 174 cephalometric roentgenograms of 13 boys and 16 girls taken from the ages of 6 to 11 to assess the growth changes of the soft tissue profile. The results were obtained as follow: 1. Means, standard deviation and coefficient of variation of children were obtained. 2. Items which showed difference between males and females in longitudinal study were prn. Sn. A', and Ls that were greater than females variation. 3. With age, thickness of the soft tissue were increased except Ls. 4. Nasolabial angle and facial convexity had no significant change with age and sex.

• The Journal of the Korean dental association
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• v.47 no.3
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• pp.156-161
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• 2009

The purpose of this study was to survey a preference to the esthetic profile between Korean women and Korean American women. The interviewee were consisted of 30 Korean women and 30 Korean American women respectively. The survey has been done by using questionnaire. Altered facial profile of each normal male and female was got by moving maxilla, mandible to the front and back to survey the preference among the various profile. Then results were analyzed by SPSS program. The results were as follows, 1. In Korean women, in choosing the men's profile, 9 people out of 30, picked the standard profile as a most preferred profile, and bimaxillary retrusion and bimaxillary protrusion profile were followed by 6 people and 5people respectively. 2. In Korean American women, in choosing the men's profile, the 18 people out of 30, pick the bimaxillary retruded profile as a most preferred profile, and the standard profile were followed. 3. In Korean women, in choosing the women's profile, 18 people out of 30, picked the bimaxillary retruded profile as a most beautiful profile, and standard profile were followed by having 10people's voting. 4. In Korean American women, in choosing the women's profile, the 14 people out of 30, chose the bimaxillary retruded profile as a best one and the standard profile were followed by 12 people's voting. The preference of men's profile was significantly different between two groups (p<0.05) but the both group picked the bimaxillary retruded profile as a most beautiful when they choose the women's profile and then there was no statistical difference between the groups.

• The Journal of Korean Physical Therapy
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• v.27 no.2
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• pp.124-127
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• 2015

Purpose: The emphasis on gait rehabilitation after stroke depends on training support through the lower limbs, balance of body mass over the changing base of support. However, muscle weakness, lack of control of lower limb, and poor balance can interfere with training after stroke. For this case study report, a wearable robot orthosis was applied to stroke patients in order to verify its actual applicability on balance and gait ability in the clinical field. Methods: Two stroke patients participated in the training using the wearable robot orthosis. Wearable robot orthosis provides patient-initiated active assistance contraction during training. Training includes weight shift training, standing up and sitting down, ground walking, and stair up and down Training was applied a total of 20 times, five times a week for 4 weeks, for 30 minutes a day. Gait ability was determined by Stance phase symmetry profile, Swing phase symmetry profile, and velocity using the GAITRite system. Balance ability was measured using the Biodex balance system. Results: Subjects 1, 2 showed improved gait and balance ability with mean individual improvement of 72.4% for velocity, 19.4% for stance phase symmetry profile, 9.6% for swing phase symmetry profile, and 13.6% for balance ability. Conclusion: Training utilizing a wearable robot orthosis can be useful for improvement of the gait and balance ability of stroke patients.

• Journal of Korean Society of Industrial and Systems Engineering
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• v.39 no.4
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• pp.1-6
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• 2016

As manufacturing industries become globalized, product design affects every area of organization. The design sets the goals for a number of different departments, so if it fails to effectively communicate these goals, the entire organization is less efficient. In addition, To communicate clearly, the design must represent a product that meets its technical specification. GD&T (Geometric Dimensioning and Tolerancing) is one of the most important factors, which has an effect on efficiency of manufacture system, in designing products. However, most of designers in different industries are prone to ignore the importance of GD&T. To analyse the importance of GD&T compliance with international standards for design drawing, a comparison analysis of the difference between two methods, composite profile control and multiple single segment profile control, is performed on three different cases and suggests how it used to be more suitable. Composite profile tolerance is specified by a dual feature control frame that has one profile symbol specified with two lines of tolerance information. Whereas a multiple single segment profile control is when two or more single segment profile callouts are used to define the location and/or orientation and/or size and/or form of a part feature. In this study, the following results will be provided : a clear definition and an obvious difference of the tolerance zone, datums and datums sequence and minimization of tolerances. On this study, composite profile tolerance and multiple single segment profile tolerance were discussed. Next steps of research will consist on reaching more accurate results for profile control. Further research will be focused on dealing with the remaining 14 symbols of GD&T.

• Journal of radiological science and technology
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• v.45 no.5
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• pp.449-455
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• 2022

This study is to present a Geant4 code for the simulation of the absorbed dose distribution given by a medical linac for 6 MV photon beam. The dose distribution was verified by comparison with calculated beam data and beam data measured in water phantom. They were performed for percentage depth dose(PDD) and beam profile of cross-plane for two field sizes of 10 × 10 and 15 × 15 cm². Deviations of a percentage and distance were obtained. In energy spectrum, the mean energy was 1.69 MeV. Results were in agreement with PDD and beam profile of the phantom with a tolerance limit. The differences in the central beam axis data 𝜹₁ for PDD had been less than 2% and in the build up region, these differences increased up to 4.40% for 10 cm square field. The maximum differences of 𝜹₂ for beam profile were calculated with a result of 4.35% and 5.32% for 10 cm, 15 cm square fields, respectively. It can be observed that the difference was below 4% in 𝜹₃ and 𝜹₄. For two field sizes of 𝜹_50-90 and RW₅₀, the results agreed to within 2 mm. The results of the t-test showed that no statistically significant differences were found between the data for PDD of 𝜹₁, p>0.05. A significant difference on PDD was observed for field sizes of 10 × 10 cm², p=0.041. No significant differences were found in the beam profile of 𝜹₃, 𝜹₄, RW₅₀, and 𝜹_50-90. Significant differences on beam profile of 𝜹₂ were observed for field sizes of 10 × 10 cm², p=0.025 and for 15 × 15 cm², p=0.037. This work described the development and reproducibility of Geant4 code for verification of dose distribution.