• Journal of the Optical Society of Korea
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• v.12 no.4
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• pp.281-287
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• 2008

An acousto-optic tunable filter based 3-D micro surface profile measurement using an equally spaced 5 spectral phase shifting is described. The 5-bucket spectral phase shifting method is compared with a Fourier-transform method in the spectral domain. It can provide a fast measurement capability while maintaining high accuracy since it needs only 5 pieces of spectrally phase shifted imaging data and a simple calculation in comparison with the Fourier transform method that requires full wavelength scanning data and relatively complicated computation. The 3-D profile data of micro objects can be obtained in a few seconds with an accuracy of ${\sim}10nm$. The 3-D profile method also has an inherent benefit in terms of being speckle-free in measuring diffuse micro objects by employing an incoherent light source. Those simplicity and practical applicability is expected to have diverse applications in 3-D micro profilometry such as semiconductors and micro-biology.

• Journal of the Optical Society of Korea
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• v.13 no.4
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• pp.464-467
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• 2009

The grating projection method with phase-shifting technique is very useful in measuring the 3-dimensional (3D) shape with high accuracy and speed. In this work, we have developed an ultra high-speed digital laser grating projection system using a high-power laser diode and a highsensitivity CMOS camera. With our system, the optical measurement required to find out the profile of a 3D object could be carried out within 2.6 ms, which is a significant ($\sim$10 times) improvement compared with those of the previous studies.

• Korean Journal of Optics and Photonics
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• v.5 no.2
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• pp.191-197
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• 1994

We investigated the properties of various methods of 3 dimensional profilometry to choose the phase shifting technique for the reconstruction of the shape of a given specimen. The pattern was generated by a Twyman-Green interferometer and a PZT was used to shift the fringes on the target surface. The shape was calculated with Hariharan algorithm within the uncertainty of a scaling factor. The optical noise inherent in the laser source was observed to influence the final outcome to a great extent and the need for an exact calibration was noted. noted.

• Proceedings of the Optical Society of Korea Conference
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• 2003.07a
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• pp.154-155
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• 2003

PMP(Phase Measuring Profilometry)측정법은 투영계와 기록계의 기하학적 구성과 광학계의 정렬적인 문제에 의해서 기본적으로 오차를 가지고 측정된다. 일반적으로 PMP 형상 측정에서 측정면과 광학계의 높이가 피 측정면에 비해서 상당히 큰 경우, CCD 카메라에서 높이 방향으로 측정영역이 작아지게됨으로써 측정위상이 기준면에서의 위치와 높이 방향에 따라서 다르게 나타나고 프로젝터가 측정면에 투영되는 간섭무의의 피치가 다르게 적용된다. (중략)

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.15-16
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• 2008

• Journal of Institute of Control, Robotics and Systems
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• v.14 no.6
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• pp.519-522
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• 2008

As industry of a semiconductor and LCD industry have been rapidly growing, precision technologies of machining such as etching and 3D measurement are required. Stylus has been important measuring method in traditional manufacturing process. However, its disadvantages are low measuring speed and damage possibility at contacting point. To overcome mentioned disadvantage, non-contacting measurement method is needed such as PMP(Phase Measuring Profilometry), WSI(white scanning interferometer) and Confocal Profilometry. Among above 3 well-known methods, WSI started to be applied to FPD(flat panel display) manufacturing process. Even though it overcomes 21t ambiguity of PMP method and can measure objects which has specular surface, the measuring speed and vibration coming from manufacturing machine are one of main issue to apply full automatic total inspection. In this study, We develop high speed WSI system and algorithm to reduce unknown noise. The developing WSI and algorithm are implemented to measure 3D surface of wafer. Experimental results revealed that the proposed system and algorithm are able to measure 3D surface profile of wafer with a good precision and high speed.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.10
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• pp.12-21
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• 2003

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2016.10a
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• pp.389-392
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• 2016

As technologies evolve, 3D measurement techniques using cameras have been developed continuously. In 3D measurement, high accuracy, fast speed, and easy implementation are very important factors. Recently, 3D measurement using multi-frequency fringes has been widely used. This method is generally a method of measuring the height of a image obtained by projecting a sine wave through the projector. The sine wave is produced by software. However, this sine wave is not a perfect sine wave by gamma of projector. This is given a bad influence on the height measurement, and can not measure the correct height. In this paper, we propose a method for correcting the phase of the sine wave to avoid being affected gamma. Through this method it will be able to make more accurate height measurement.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1999.10a
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• pp.170-175
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• 1999

Noncontact measuring methodology of 3-dimensional profile using CCD camera are very attractive because of it's high measuring speed and its's high sensitivity. Especially, when projecting a grid pattern over the object the captured image have 3 dimensional information of the object. Projection moire extract 3-D information with another grid pattern in front of CCD camera. However phase measuring profilometry(PMP) obtain similar results without additional grid pattern. In this paper, new method for grid pattern generation system by polygonal mirror and Laser Diode. This system is applied the projection moire and the PMP.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.7 no.3
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• pp.81-86
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• 2008

I present a 3-D profiler specially devised for the profile measurement of specular surfaces that requires precision shape accuracy up to a few nanometer. A profile is reconstructed from the curvature of a test part of the surface at several locations along a line. The local curvature data are acquired with White-light Scanning Interferometry. Test measurement proves that the proposed profiler is well suited for the specular surface inspection like precision mirror.