• Proceedings of the KSME Conference
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• 2001.06c
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• pp.134-139
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• 2001

Laser scanners are widely used for reverse engineering and inspection of freeform parts in industry such as motors, electronic products, dies and molds. Due to the lack of measuring software and positioning device, the laser scanning processes have been erroneous and inconsistent. In order to automate measuring processes, an automated scan plan generation software and a proprietary hardware are developed. In this paper, an automated laser scanning system using a 3-axis motorized stage is proposed. In the scan planning step, scan directions, paths, and the number of scans are generated considering optical and mechanical parameters. In the scanning step, the generated scan plan is downloaded into the laser scanner and the motorized stage and the points on the surface are captured automatically. Finally, the point data set is analyzed to evaluate the performance of the system.

• Journal of the korean academy of Pediatric Dentistry
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• v.36 no.3
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• pp.325-336
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• 2009

The purpose of this study was to investigate the eruption pattern of the mandibular first molar in sagittal, frontal and horizontal views using the cone beam CT scanning. CT images were obtained from healthy 83 children (42 boys, 41 girls) between 3 to 10 years of age with a normal dentition according to Nolla stage. 1. In the frontal and horizontal view, the intermolar width decreased continuously with stage and slightly increased at the last stage. 2. In the sagittal and frontal view, eruption distances from occlusal plane were observed the largest change between stage 5 and 7. 3. In the horizontal and sagittal view, mandibular first molar from distal surface of primary second molar moved distally between stage 4 and 6. 4. In the sagittal view, angle from occlusal plane to mesio-distal axis increased between stage 4 and 8. 5. In the frontal view, angle from occlusal plane to bucco-lingual axis increased continuously during all stage. 6. In the horizontal view, angle from midsagittal plane to long axis increased between stage 5 and 8.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.468-472
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• 2005

In this paper, the static and dynamic stiffness of the air bearing stage for micro-micro machine tool are examined experimentally. For stiffness and precision concerns, air bearing stages are adapted for 3-axis micro-milling machine which is size of $200x200\;mm^2$. The air bearings in the stage are preloaded by permanent magnets to achieve desired bearing clearance and stiffness for vertical direction. As the stiffness of the air bearing is primary interests, static stiffness test were performed on XY stage in Z direction and Z column in Y direction. Dynamic test were performed on XY stage and Z column, respectively. Both static and dynamic tests were performed in different air pressure conditions. The vertical stiffness of XY stage is about 9 N/ pm where Y stiffness of Z column is much smaller as $1\;N/{\mu}m$ because of the large moment generated by Y force on the column.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.304-307
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• 2004

As optical fiber communication grows, the fiber alignment become the focus of industrial attention. This greatly influence the overall production rates for the opto-electric products. We proposed multi-axis nano positioning stage for optical fiber alignment. This device has 3 DOF translation and sub nanometer resolution. This nano stage consist of 3 PZT-driven flexure stages which are stacked parallel. The displacement of it is measured with capacitance gauge and is controlled by computer-embedded main controller. The design process of flexure stage using FEM is proposed and the performance evaluation of this system is verified with experiments.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.10a
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• pp.213-218
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• 2004

As optical fiber communication grows, the fiber alignment become the focus of industrial attention. This greatly influence the overall production rates for the opto-electric products. We proposed multi-axis nano positioning stage for optical fiber alignment. This device has 3 DOF translation and sub nanometer resolution. This nano stage consist of 3 PZT-driven flexure stages which are stacked parallel. The displacement of it is measured with capacitance gauge and is controlled by computer-embedded main controller. The design process of flexure stage using FEM is proposed and the performance evaluation of this system is verified with experiments.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.5 s.170
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• pp.103-112
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• 2005

This paper presents one-axis high precision scanning system and illustrates the design of modified $X-Y-{\theta}$ stage as a tracker using VCM and commercialized air bearings for it. The scanning system for 100nm resolution is composed of the 3-axis stage and one axis long stroke linear motor stage as a follower. In this study a previous proposed and presented structure of VCM for the fine stage is modified. The tracker has 3 DOF($X-Y-{\theta}$ motions by four VCM actuators which are located on the same plane. So 4 actuating forces are suggested and designed to create least pitch and roll motions. This article will show about the design especially about optimal design. The design focus of this fine stage is to have high acceleration to accomplish high throughput. The optimal design of maximizing acceleration is performed in restrained size. The most sensitive constraint of this optimal design is heat dissipation of coil. There are 5 design variables. Because the relationship between design variables and system parameters are quite complicated, it is very difficult to set design variables manually. Due to it, computer based optimal design procedure using MATLAB is used. Then, this paper also describes the procedures of selecting design variables for the optimal design and a mathematical formulation of the optimization problem. Based on the solution of the optimization problem, the final design of the stage is also presented. The results can be verified by MAXWELL. The designed stage has the acceleration of about 5 $m/s^{2}$ with 40kg total mass including wafer chuck and interferometer mirror. And the temperature of coil is increased $50^{\circ}C$. In addition, the tracker is controlled by high precision controller system with HP interferometer for it and linear scaler for the follower. At that time, the scanning system has high precision resolution about 5nm and scanning resolution about 40nm in 25mm/s constant speed

• KOREAN JOURNAL OF CROP SCIENCE
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• v.33 no.1
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• pp.23-30
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• 1988

This experiment was carried out to obtain the basic information for the improving of leaf quality by topping time and depth in flue-cured tobacco. Development of palisade parenchyma and spongy parenchyma were in order of button stage＆gt;early flower stage＆gt;late flower stage by topping time, and were in order of 4th leaf topping from floral axis＆gt;2nd leaf topping from floral axis＆gt;floral axis by topping depth. When 2nd leaf from floral axis were topped at late flower stage in A grade field and at early flower stage in B grade field, total sugar to nicotine ratio ralating to organoleptic characteristics were desirable as 9.0 and 9.7, and petroleum ether extract contents relating flavor of flue-cured tobacco were high as 9.9% and 8.4%, respectively. In ecological tissue, percentage of direct effect on quality were 43.2% in palisade parenchyma. 26.5% in spongy parechyma. 17.7% in tissue ratio, 6.7% in leaf thickness, 3.1% in intercellular space, 2.8% in leaf type and in chemical components, were 40.6% in nicotine. 35.7% in T-sugar/nicotine, 10.0% in total sugar, 7.0% in T-nitrogen/nicotine, 4.6% in total nitrogen, 2.1% in petroleum ether extract. The optimum topping depth were desirable at topping under second leaf from floral axis at late flower stage in A grade field and at early flower stage in B grade field for good leaf quality.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.05a
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• pp.555-558
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• 2005

The precision positioning system requires robust design to obtain enough bandwidth. Therefore, The sub-resonance occurred by the disaccord of force center and mass center should be oppressed. And it is necessary to move the flexible mode to a higher frequency. In this paper, the 3-axis nano stage was proposed and dynamic characteristics was improved by design of experiments (DOE).

• Journal of the Korean Society for Precision Engineering
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• v.32 no.7
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• pp.643-651
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• 2015

Multi-axis magnetic and accelerometer sensor are widely used in consumer product such as smart phones. The vector output of multi-axis sensors have errors on each axis such as offset error, scale error, non-orthogonality. These errors cause many problems on the performance of the applications. In this paper, we designed the effective inline compensation algorithm for calibrating of 3 axis sensors using ellipsoid for mass production of multi-axis sensors. The outputs with those kinds of errors can be modeled by ellipsoid, and the proposed algorithm makes sequential mappings of the virtual ellipsoid to perfect sphere which is calibrated function of the sensor on three-dimensional space. The proposed calibrating process composed of four main stages and is very straightforward and effective. In addition, another imperfection of the sensor such as the drift from temperature can be easily inserted in each mapping stage. Numerical simulation and experimental results shows great performance of the proposed compensation algorithm.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2003.12a
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• pp.177-181
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• 2003

This paper presents a 3-axis fine positioning stage. All the procedure concerning the design and fabrication of the stage are described. The stage considered here is composed of flexure hinges, piezoelectric actuators and their peripherals. A special flexure hinge is adopted to be able to actuate the single stage in three axes at the same time. A ball contact mechanism is introduced into the piezoelectric actuator to avoid the cross talk among the axes. The final design is obtained with the theoretical analysis on the stage. An actual fine stage is developed and the design specifications are verified through an experiment.